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Class 204/297.03 - Vacuum support


Subclass of Class 204 - Chemistry: electrical and wave energy
Definition: Apparatus having vacuum (i.e., to create suction) support
No. of patents: 26
Last issue date: 11/09/2010


NumberTitleIssue Date
7828944Electroplating apparatus
An electroplating apparatus includes: a wafer holder that is detachable from an engaging hole of a cathode holder and capable of moving in a up and down direction; a spring contact type cathode electrode that is fixed to an electrode housing recess on a top surface ...
11/09/2010
RE40218Electro-chemical deposition system and method of electroplating on substrates
The invention provides an apparatus and a method for achieving reliable, consistent metal electroplating or electrochemical deposition onto semiconductor substrates. More particularly, the invention provides uniform and void-free deposition of metal onto metal seede...
04/08/2008
7323778Semiconductor device with improved design freedom of external terminal
A semiconductor device comprises: a semiconductor chip; an extension portion formed in contact with the side surfaces so as to surround the semiconductor chip; an insulating film formed on a surface of the extension portion and the semiconductor chip; each of a plur...
01/29/2008
7270735System and method for holding and releasing a workpiece for electrochemical machining
A system and method are described for holding and releasing a workpiece for electrochemical machining. In one embodiment, a workpiece holder has a workpiece surface that couples to the workpiece when negative pressure is applied to provide a seal between the workpie...
09/18/2007
7211145Substrate processing apparatus and substrate processing method
A substrate processing apparatus include a spin chuck capable of holding a semiconductor wafer in a horizontal position, a drive motor for driving the spin chuck for rotation, and a processing vessel accommodating the spin chuck and the drive motor 50 therein...
05/01/2007
7063604Independent edge control for CMP carriers
A wafer carrier for controlling the edge effect during chemical mechanical planarization. A first bladder is disposed within the retaining ring to control the height of the retaining ring relative to the bottom surface of the wafer carrier. A second bladder is dispo...
06/20/2006
6994776Method and apparatus for low temperature annealing of metallization micro-structure in the production of a microelectronic device
A method for filling recessed microstructures at a surface of a microelectronic workpiece, such as a semiconductor wafer, with metallization is set forth. In accordance with the method, a metal layer is deposited into the microstructures with a process, such as an e...
02/07/2006
6802947Apparatus and method for electro chemical plating using backside electrical contacts
An apparatus and method for securing and electrically contacting a substrate on a non-production surface of the substrate. The apparatus includes a substrate holder assembly having a substrate engaging surface formed thereon, the substrate engaging surface being con...
10/12/2004
6635157Electro-chemical deposition system
The present invention provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs and gap fill requirements and provides satisfactory throughput to meet the demands of other...
10/21/2003
6514393Adjustable flange for plating and electropolishing thickness profile control
An electrochemical reactor is used to electrofill damascene architecture for integrated circuits or for electropolishing magnetic disks. An inflatable bladder is used to screen the applied field during electroplating operations to compensate for potential...
02/04/2003
6478937Substrate holder system with substrate extension apparatus and associated method
An apparatus and associated method that removes electrolyte solution from a substrate, the apparatus comprises a thrust plate and a substrate extension unit. The thrust plate at least partially defines a spin recess. The substrate extension unit can be di...
11/12/2002
6416647Electro-chemical deposition cell for face-up processing of single semiconductor substrates
The invention provides an electro-chemical deposition cell for face-up processing of semiconductor substrates comprising a substrate support member, a cathode connected to the substrate plating surface, an anode disposed above the substrate support member...
07/09/2002
6267853Electro-chemical deposition system
The present invention provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs and gap fill requirements and provides satisfactory throughput to meet the demands of other...
07/31/2001
6261433Electro-chemical deposition system and method of electroplating on substrates
The invention provides an apparatus and a method for achieving reliable, consistent metal electroplating or electrochemical deposition onto semiconductor substrates. More particularly, the invention provides uniform and void-free deposition of metal onto ...
07/17/2001
5951833Anodizing apparatus
A holder (102) made from an HF-resistant material includes annular suction pads (105, 108). The suction pad (105) is used to hold a small silicon substrate by suction, and the suction pad (108) is used to hold a large silicon substrate by suction. This ma...
09/14/1999
5660699Electroplating apparatus
An electroplating apparatus has a cathode base for supporting a substrate, and a clamper for clamping a peripheral edge portion of the substrate against the cathode base. A plating solution is supplied onto the substrate so that the surface of the substra...
08/26/1997
5447615Plating device for wafer
Disclosed is a plating device for plating a wafer, in which the resist film formed on a wafer need not preliminarily be removed, and plurality of needle-like electrodes can stably and reliably be contacted with the wafer to secure electrical continuity th...
09/05/1995
5429733Plating device for wafer
A plating device for a wafer employs an air bag 6, 20 as a holding means for downwardly depressing the wafer 8 upon performing plating on the wafer 8. The air bag 6, 20 constrain only the upper surface 13 of the circumferential edge of the wafer at an exp...
07/04/1995
5342495Structure for holding integrated circuit dies to be electroplated
A method of forming conductive bumps on the bond pads of one or more ICs is described wherein a barrier metal layer such as TiW is first formed over the bond pads in order to passivate the surface of the one or more ICs, an electroplatable base comprising...
08/30/1994
5228966Gilding apparatus for semiconductor substrate
According to this invention, a cathode electrode is brought into reliable contact with a semiconductor substrate. A cup-like tank is arranged independently of an outer tank, and adjusting mechanisms are arranged on the cup-like tank for supporting the sem...
07/20/1993
4745253Device and process designed to automatically hold up and fix in position the parts cut out of a workpiece during electroerosion machining to rough dimensions and application involving the automatic removal of the cutout parts
An EDM device includes two support bars bearing on the same reference surfaces as the workpiece. Gibs are provided which engage into driving units able to displace them axially while holding them at a small distance under one support bar. The other suppor...
05/17/1988
4605483Electrode for electro-plating non-continuously conductive surfaces
Apparatus for use as an electrode, which is particularly suited for use in electro-plating non-continuous conductive objects, particularly double-sided circuit boards, is described. Specifically, this electrode comprises: a housing having a plurality of s...
08/12/1986
4428815Vacuum-type article holder and methods of supportively retaining articles
A vacuum-type holder (10) for retaining fragile articles such as semiconductor wafers (16) during a manufacturing operation, such as an electrolytic treatment includes a vacuum-operated support (36) at each of the seats (23) which exerts a supporting forc...
01/31/1984
4192729Apparatus for forming an aluminum interconnect structure on an integrated circuit chip
An apparatus for forming an interconnect structure on an integrated circuit chip by employing a single chamber for both the required etching and anodization. It has been discovered that an etchant-electrolyte such as phosphoric acid solution in the ratios...
03/11/1980
4043894Electrochemical anodization fixture for semiconductor wafers
A fixture for holding a semiconductor wafer during anodization. The fixture has a major surface with a plurality of concentric ridges on the surface for supporting a semiconductor wafer, with adjacent ridges defining concentric channels therebetween. The ...
08/23/1977
3994784Metal replication of Glass dies by electroforming
In a process for metal replication of Glass dies, the cleaned die is secured in a cavity of a fixture, and a thin masking diaphragm is placed over the die and fixture to expose only the die surface to be replicated. A vacuum is applied through passages in...
11/30/1976
 
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