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"That the automobile has practically reached the limit of its development is suggested by the fact that during the past year no improvements of a radical nature have been introduced."
Scientific American ; Jan. 2 edition, 1909
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| Number | Title | Issue Date |
| 7481910 | Method and apparatus for stabilizing plating film impurities A method of stabilizing plating film impurities in an electrochemical plating bath solution is disclosed. The method includes providing an electrochemical plating machine in which an electrochemical plating process is carried out. A by-product bath solution is forme... | 01/27/2009 |
| 7205153 | Analytical reagent for acid copper sulfate solutions Embodiments of the invention provide an analytical method and analytical reagent solutions for determining the concentration of electrolyte components, such as copper, acid and chloride constituents in an acid or basic metal plating bath using a chemical analyzer. C... | 04/17/2007 |
| 7192494 | Method and apparatus for annealing copper films A method and apparatus for annealing copper. The method comprises forming a copper layer by electroplating on a substrate in an integrated processing system and annealing the copper layer in a chamber inside the integrated processing system. ... | 03/20/2007 |
| 7179359 | Cup-shaped plating apparatus Provided is a cup-shaped plating apparatus which can plate the whole area of a plating target surface with a uniform film thickness. In a cup-shaped plating apparatus including a placement portion of an object to be plated which is provided at an opening end of a pl... | 02/20/2007 |
| 7138039 | Liquid isolation of contact rings Embodiments of the invention may further provide a contact ring for an electrochemical plating system. The contact generally includes a substrate receiving member having a substrate support surface formed thereon, a plurality of electrical contact pins extending fro... | 11/21/2006 |
| 7087143 | Plating system for semiconductor materials A workpiece processing station is disclosed. The workpiece processing station has particular applicability in an electroplating process for semiconductor wafers. The apparatus includes a work processing bowl having an outer bowl and an inner cup positioned at a loca... | 08/08/2006 |
| 7087144 | Contact ring with embedded flexible contacts A contact assembly for supporting a substrate in an electrochemical plating system, wherein that contact assembly includes a contact ring and a thrust plate assembly. The contact ring includes an annular ring member having an upper surface and a lower surface, an an... | 08/08/2006 |
| RE39123 | Plating apparatus The plating apparatus has a plating section in which a plating process is performed and a control section for regulating the plating solution. The plating section includes a plating bath containing plating solution, an anode provided in the plating solution, and a p... | 06/13/2006 |
| 7025861 | Contact plating apparatus Embodiments of the invention generally provide a substrate processing system and method. The substrate processing system generally includes a fluid basin configured to contain a plating solution therein, an anode assembly positioned in a lower portion of the fluid b... | 04/11/2006 |
| 6929723 | Electroplating apparatus using a non-dissolvable anode and ultrasonic energy An apparatus for electroplating a rotogravure cylinder out of a plating solution is disclosed. The apparatus includes a plating tank adapted to support the cylinder and to contain a plating solution so that the cylinder is at least partially disposed into the platin... | 08/16/2005 |
| 6929722 | Substrate plating apparatus A substrate plating apparatus forms an interconnection layer on an interconnection region composed of a fine groove and/or a fine hole defined in a substrate. The substrate plating apparatus includes a plating unit for forming a plated layer on a surface of the subs... | 08/16/2005 |
| 6911128 | Device for decontamination of water The invention relates to a device for the decontamination of water, particularly of heavy metals and/or arsenic and/or their compounds, by means of electrolysis, wherein the water to be purified is fed through a receptacle and passes by electrodes of different polar... | 06/28/2005 |
| 6875322 | Electrochemical assisted CMP A method for material removal and planarization of a substrate includes formation of a weak passivating film on overburden to be removed in the presence of an electrolyte bath and an applied electric potential. An engineered polishing substrate is brought into compl... | 04/05/2005 |
| 6855233 | Apparatus for production of strong alkali and acid electrolytic solution There is provided an apparatus for producing strong alkaline reductive electrolyzed water and acidic water that enables efficient production of electrolyzed water that has excellent washing and sterilizing effects. There is provided an apparatus for producing strong... | 02/15/2005 |
| 6835295 | Electrowinning cell incorporating metal ion filtration apparatus An apparatus and method for electrowinning metal from ionic solutions is provided wherein ionic solution is subject to nanofiltration. An electrowinning cell (10) includes a reservoir (12) adapted to receive an ionic solution (14). During operat... | 12/28/2004 |
| 6821407 | Anode and anode chamber for copper electroplating An electroplating system includes (a) a phosphorized anode having an average grain size of at least about 50 micrometers and (b) plating apparatus that separates the anode from the cathode and prevents most particles generated at the anode from passing to the cathod... | 11/23/2004 |
| 6752855 | Solution treatment system and solution treatment method A plating system comprises: a plating unit which plates a water; a plating solution storage tank which stores a plating solution; and a plating solution supply system which supplies the plating solution in the plating solution storage tank to the plating unit. A dis... | 06/22/2004 |
| 6733653 | Electrowinning cell incorporating metal ion filtration apparatus The present invention relates to an electrowinning cell adapted to recover metal ions from a solution as their corresponding elementary metals. The electrowinning cell includes a reservoir and a filter in fluid communication with the reservoir. The filter is operati... | 05/11/2004 |
| 6689260 | Nuclear fuel electrorefiner The present invention relates to a nuclear fuel electrorefiner having a vessel containing a molten electrolyte pool floating on top of a cadmium pool. An anodic fuel dissolution basket and a high-efficiency cathode are suspended in the molten electrolyte ... | 02/10/2004 |
| 6652725 | Electrodeposition apparatus for producing electrodeposited copper foil and electrodeposited copper foil produced by the apparatus An object of the invention is to provide a method for continuously producing electrodeposited copper foil while thiourea-decomposed products remaining in copper electrolyte are removed through activated carbon treatment. Another object is to provide high-... | 11/25/2003 |
| 6638409 | Stable plating performance in copper electrochemical plating A real-time and in-line process control system maintains stable plating performance in copper electrochemical plating IC devices by using a real time, on-line programmable controller. Two or more valves to direct the flow of the electrolyte from the elect... | 10/28/2003 |
| 6627073 | Water treatment device The present invention is directed to a new water treatment device comprising an electrolytic tank to put water in, an electrode provided in the electrolytic tank, a water treating path for pouring, from a pool storing water, the water into the electrolyti... | 09/30/2003 |
| 6599415 | Apparatus and method for electropolishing surfaces A method and apparatus for electropolishing a workpiece without immersing the workpiece in a bath of electrolytic solution. The workpiece is held in an atmospheric environment, while electrolytic solution is discharged from a reservoir in the form of a pl... | 07/29/2003 |
| 6576110 | Coated anode apparatus and associated method An anode is configured to be used within a metal film plating apparatus. The anode has a substantially planar electric field generating portion and an electrolyte solution chemical reaction portion. The planar electric field generating portion is coated w... | 06/10/2003 |
| 6569299 | Membrane partition system for plating of wafers An anode includes an anode cup, a membrane and ion source material, the anode cup and membrane forming an enclosure in which the ion source material is located. The anode cup includes a base section having a central aperture and the membrane also has a ce... | 05/27/2003 |
| 6547936 | Electroplating apparatus having a non-dissolvable anode An apparatus for electroplating and deplating an object out of a plating solution is disclosed. The apparatus includes a plating tank adapted to support the object and to contain a plating solution so that the object is at least partially disposed into th... | 04/15/2003 |
| 6416650 | Apparatus and method of electrochemical polishing by ring-form electrode An apparatus and method of electrochemical polishing a workpiece with ring-form electrode is provided. A mechanism with a tool electrode, a DC power supply and electrolysis-supply tank of the present invention can be installed on the traditional productio... | 07/09/2002 |
| 6406608 | Apparatus to monitor and add plating solution to plating baths and controlling quality of deposited metal An apparatus for monitoring and adding solution to a plating bath and controlling the quality of deposited metal. At least one monitor monitors at least one condition within a plating bath and produces at least one signal corresponding to the at least one... | 06/18/2002 |
| 6379520 | Plating apparatus The plating apparatus has a plating section in which a plating process is performed and a control section for regulating the plating solution. The plating section includes a plating bath containing plating solution, an anode provided in the plating soluti... | 04/30/2002 |
| 6267853 | Electro-chemical deposition system The present invention provides an electro-chemical deposition system that is designed with a flexible architecture that is expandable to accommodate future designs and gap fill requirements and provides satisfactory throughput to meet the demands of other... | 07/31/2001 |
| 6264806 | Plating fluid replenishment system and method A plating chemical replenishment system is described having a tank for supporting a chemical solution used in a plating fluid, a container having a pre-determined volume, a first valve for selectively coupling the chemical solution from the tank to the co... | 07/24/2001 |
| 6200436 | Recycling consistent plating system for electroplating A small plating solution reservoir is used to provide plating of one wafer at a time with a precisely controlled, repeatable, plating solution. The reservoir is connected to basic plating solution and additives which are provided in desired concentrations... | 03/13/2001 |
| 6080288 | System for forming nickel stampers utilized in optical disc production A system and method for electro-forming a metal layer on a substrate. The system has a rotary jet planarizer in an electro-forming or galvanic cell. The cell includes a toroidally-shaped manifold with two inlets and an outlet. Each of the inlets is couple... | 06/27/2000 |
| 5951833 | Anodizing apparatus A holder (102) made from an HF-resistant material includes annular suction pads (105, 108). The suction pad (105) is used to hold a small silicon substrate by suction, and the suction pad (108) is used to hold a large silicon substrate by suction. This ma... | 09/14/1999 |
| 5928490 | Laundry wash process and waste water treatment system An improved laundry treatment system comprises a washer which is connected to discharge used water to a tank for filtration and recirculation to the washer, and a tank containing water for making up losses in the wash cycle, and an electrolytic cell there... | 07/27/1999 |
| 5865964 | Apparatus for stripping ions from concrete and soil A method and an apparatus for stripping ionic species from a porous material, such as concrete or soil, are presented. The ionic species include metals and complexes, and may include radioactive species. The contaminated medium can be in bulk or in partic... | 02/02/1999 |
| 5833828 | Method and apparatus for thermal process control in the electroforming of stampers for production of CD/LD data carriers A method and an apparatus for thermal process control in electroforming stampers for the production of CD/LD data carriers or the like. The temperature of an electrolytic solution in an electroforming cell is maintained at a value nearest a specific maxim... | 11/10/1998 |
| 5766428 | Chromium plating solution, solution waste from chromium plating and closed recycling system for chromic acid cleaning water in chromium plating Closed recycle system for chromium plating solution, solution wastes from chromium plating and chromic acid cleaning water in chromium plating composed of a chromium plating chamber including a chromic acid mist recovery device in communication with a rec... | 06/16/1998 |
| 5716509 | Process and device for the electrolytic surface coating of workpieces A process and apparatus for electrolytically surface-coating special metal workpieces in which the electrolyte is conveyed in a controlled circuit in and around the electrolysis region in that most of it is conveyed at a high flow rate, at a higher inlet ... | 02/10/1998 |
| 5698081 | Coating particles in a centrifugal bed An apparatus and method are provided for coating particles in a rotating container. A cathode forms an electrically conductive inner surface of a side wall of the container. An anode is positioned relative to the cathode so as to permit both the cathode a... | 12/16/1997 |
