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| Number | Title | Issue Date |
| 7323058 | Apparatus for electroless deposition of metals onto semiconductor substrates An electroless deposition system is provided. The system includes a processing mainframe, at least one substrate cleaning station positioned on the mainframe, and an electroless deposition station positioned on the mainframe. The electroless deposition station inclu... | 01/29/2008 |
| 7186322 | Methods of producing and polishing semiconductor device and polishing apparatus A method of production and a method of polishing a semiconductor device and a polishing apparatus, capable of easily flattening an initial unevenness of a metal film, excellent in efficiency of removal of an excess metal film, and capable of suppressing damage to an... | 03/06/2007 |
| 7135098 | Copper interconnect seed layer treatment methods and apparatuses for treating the same A method for making semiconductor interconnect features in a dielectric layer is provided. The method includes depositing a copper seed layer over a barrier layer that is formed over the dielectric layer and into etched features of the dielectric layer. The copper s... | 11/14/2006 |
| 7101465 | Electrolytic processing device and substrate processing apparatus There is provided an electrolytic processing device including: a processing electrode to be brought into contact with or close to a workpiece; a feeding electrode for supplying electricity to the workpiece; an ion exchanger disposed in at least one of spaces between... | 09/05/2006 |
| 7033465 | Clamshell apparatus with crystal shielding and in-situ rinse-dry Certain mechanisms of a plating apparatus address problems associated with interaction between plating solutions or other processing solutions and the components of the plating apparatus (such as the electrical contacts). For example, a circumferential spray skirt a... | 04/25/2006 |
| 6939447 | Method of providing conductive tracks on a printed circuit and apparatus for use in carrying out the method A method of electro-plating comprises providing an anode current for a target, applying an electron beam to the surface of a target and passing electrolyte between said target and anode, thereby to deposit material on said target. An electron beam gun directs an ele... | 09/06/2005 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces Processing tools, components of tools, and methods of making and using such devices for electrochemical processing of microelectronic workpieces. One aspect of the invention is directed toward reaction vessels for electrochemical processing of microelectronic workpi... | 07/26/2005 |
| 6884332 | Method and apparatus for treating an aqueous electroplating bath solution A method and apparatus for treating an aqueous electroplating bath solution. The method comprises continuously agitating the solution; adjusting the pH of the solution, adjusting the temperature of the solution while adding an amount of hydrogen peroxide sufficient ... | 04/26/2005 |
| 6841056 | Apparatus and method for treating a substrate electrochemically while reducing metal corrosion A process tool for electrochemically treating a substrate is configured to reduce the oxygen concentration and/or the sulfur dioxide concentration in the vicinity of the substrate so that corrosion of copper may be reduced. In one embodiment, a substantially inert a... | 01/11/2005 |
| 6837978 | Deposition uniformity control for electroplating apparatus, and associated method A method and associated apparatus for electro-chemically depositing a metal film on a substrate having a metal seed layer. The apparatus comprises a substrate holder that holds the substrate. The electrolyte cell receives the substrate in a processing position. The ... | 01/04/2005 |
| 6797133 | Mobile zinc cathode stripping system A mobile zinc stripping device for stripping zinc from cathodes comprising a moveable base frame, a cathode support frame to support the cathodes during stripping, a stripping assembly for stripping the zinc sheets from the cathodes and at least one power source for... | 09/28/2004 |
| 6770184 | Integrated de-ionized water pressure monitoring system for solder plating machines The present invention provides a solder plating system with automatic monitoring of wash fluid pressure. The system automatically activates an alarm and/or initiates shutdown of a solder plating machine when the pressure reading indicates a failure of the wash fluid... | 08/03/2004 |
| 6716332 | Plating method and apparatus The present invention provides a plating method and apparatus, which is capable of introducing plating solution into the fine channels and holes formed in a substrate without needing to add a surface active agent to the plating solution, and capable of forming a hig... | 04/06/2004 |
| 6638411 | Method and apparatus for plating substrate with copper The present invention relates to a method and apparatus for separating out metal copper according to an electroplating of copper using, for example, a solution of copper sulfate to produce copper interconnections on a surface of a substrate. The substrate... | 10/28/2003 |
| 6632333 | Device for separating metal deposit from a cathode The invention relates to a device for separating metal deposit from a mother plate used as a cathode in an electrolytic process, as metal electrorefining or metal electrowinning, in which device there is a supporting member for supporting the cathode to b... | 10/14/2003 |
| 6632334 | Distributed power supplies for microelectronic workpiece processing tools An apparatus and method for processing microelectronic workpieces. The apparatus can include a housing at least partially enclosing a process environment, with a first processing chamber and a second processing chamber positioned within the housing. The f... | 10/14/2003 |
| 6613201 | Apparatus for treating water by means of an electric field The invention relates to an apparatus for treating water by means of an electric field. An Anode and a cathode are arranged in a treatment chamber. The cathode has a plurality of parallel pins. Seed crystals are deposited on these pins. There are means fo... | 09/02/2003 |
| 6558518 | Method and apparatus for plating substrate and plating facility A substrate such as a semiconductor wafer is plated to fill a metal such as copper (Cu) or the like in interconnection grooves defined in the substrate. An apparatus for plating such a substrate has a plating chamber for holding a plating solution, the pl... | 05/06/2003 |
| 6503385 | Method and apparatus for growth removal in an electrowinning process An electrolytic cell (10) comprises a plurality of cathodes (12) interspersed among a plurality of anodes (16). The plurality of cathodes and plurality of anodes form a plurality of electrodes spaced and suspended in parallel fashion in an electrolyte sol... | 01/07/2003 |
| 6451195 | System and method for electrolytic plating using a magnetic field An electrolytic plating system includes a coil for generating a magnetic field in the direction perpendicular to the subject surface of a wafer on which a Cu film is to be formed. The current components perpendicular to the magnetic field stirs the electr... | 09/17/2002 |
| 6428683 | Feedback controlled airfoil stripping system with integrated water management and acid recycling system The present invention relates to a feedback controlled stripping system with integrated water management and acid recycling system. The system comprises a stripping tank containing an electrolyte bath stripping solution for removing a coating from at leas... | 08/06/2002 |
| 6395163 | Process for the electrolytic processing especially of flat items and arrangement for implementing the process A process for electrolytically processing a flat perforated item, comprising the steps of: moving the item in a transport direction to a treatment station where the item is contacted with an electrolyte, continuously mechanically wiping, in the presence o... | 05/28/2002 |
| 6391165 | Reclaiming metallic material from an article comprising a non-metallic friable substrate A system for reclaiming cadmium and tellurium from cadmium telluride solar cell. The system comprises a crushing apparatus for crushing cells into pieces, a first conveyor for transporting solar cells to the crushing apparatus, a barrel for receiving etch... | 05/21/2002 |
| 6391179 | Plating apparatus and method of preventing substitute deposition The present invention provides a plating apparatus comprising: a plating bath filled with a plating solution; at least an anode in the plating solution; at least a plating object which serves as a cathode in the plating solution, so that the at least plat... | 05/21/2002 |
| 6365019 | Universal fuel basket for use with an improved oxide reduction vessel and electrorefiner vessel A basket, for use in the reduction of UO2 to uranium metal and in the electrorefining of uranium metal, having a continuous annulus between inner and outer perforated cylindrical walls, with a screen adjacent to each wall. A substantially solid... | 04/02/2002 |
| 6361677 | Plant and process for the electrolytic dissolution by oxidation of a metal The plant comprises: an electrolysis cell (1") having a soluble anode (2"1) and an insoluble cathode (3") without an interposed membrane, means for introducing the bath into the cell and for removing the bath from the cell, means for maintaining an appropriate... | 03/26/2002 |
| 6322673 | Apparatus for electrochemical treatment of a continuous web Apparatus for use in a continuous electrochemical treating line and a method for electrochemically treating at least one surface of a continuous web moving through an electrolyte solution contained within a tank. The apparatus includes at least one electr... | 11/27/2001 |
| 6245209 | Electro-refining system and method An electro-refining system in which the deposited metal is harvested without the need to remove the cathode from the slurry bath. The cathode has a hollow cavity permitting steam or hot water to be introduced to heat the cathode. During the deposition pro... | 06/12/2001 |
| 6214179 | Electrowinning cell This invention relates to a method of electrowinning metal from an eluate containing the metal in solution and includes the steps of feeding the eluate into a closed tank which includes a suitably electrified anode and cathode, electrolytically depositing... | 04/10/2001 |
| 6190515 | Silver refining installation The invention concerns a silver refining installation operating according to the Moebius method and designed for treating particulate raw silver. The anodes contain a section for receiving the raw silver, an underlying section for receiving anodic slime a... | 02/20/2001 |
| 6187166 | Integrated solution electroplating system and process A method and system for electroplating a metal coating onto a continuous part, such as the leadframe stock used in packaging integrated circuits, whereby the method comprises plating metal from a series of plating baths having the same or compatible chemi... | 02/13/2001 |
| 6179983 | Method and apparatus for treating surface including virtual anode An apparatus for depositing an electrical conductive layer on the surface of a wafer includes a virtual anode located between the actual anode and the wafer. The virtual anode modifies the electric current flux and plating solution flow between the actual... | 01/30/2001 |
| 6174418 | Continuous plating apparatus A continuous plating apparatus in which a planar article, to be plated, laid vertically on a rail is delivered while being clamped on both sides by vertical rotational rollers including a drive roller, and continuously fed through a slit provided liquid-t... | 01/16/2001 |
| 6139592 | Process and apparatus for producing organic solid electrolyte capacitor The object of the invention is to provide a process for producing an organic solid electrolyte capacitor which is diminished in leakage current, and an apparatus for use in practicing the process. The process includes the steps of completing a capacitor e... | 10/31/2000 |
| 6079093 | Method and device for releasing cathode plates A method and a device for releasing electrolytically deposited cathode plates from each side of a mother plate. At least one roller is pressed against the surface of the deposited cathode plate, and the roller is moved along the surface of the deposited c... | 06/27/2000 |
| 5679224 | Treated carbon or carbon-based cathodic components of aluminum production cells Carbon or carbon-based cathodes and cell bottoms of electrolytic cells for the production of aluminium in particular by the electrolysis of alumina in a molten halide electrolyte such as cryolite, are treated to better resist intercalation of sodium in th... | 10/21/1997 |
| 5650053 | Electrorefining cell with parallel electrode/concentric cylinder cathode A cathode-anode arrangement for use in an electrolytic cell is adapted for electrochemically refining spent nuclear fuel from a nuclear reactor and recovering purified uranium for further treatment and possible recycling as a fresh blanket or core fuel in... | 07/22/1997 |
| 5628892 | Electroplating method and apparatus for the preparation of metal foil and split insoluble electrode used therein A length of electroplated metal foil, typically copper foil is prepared by placing a stationary arcuate anode concentrically with a rotating cathode drum to define a channel therebetween, passing a plating solution through the channel, conducting electric... | 05/13/1997 |
| 5587064 | Waste water purification process and apparatus For the purification of heavy metal-containing wastewater, a process according to the invention deposits heavy metal deposits on a cathode or cathodes which are mechanically removed. For this purpose the invention provides an apparatus having a device for... | 12/24/1996 |
| 5567285 | Facility for removing electro-deposited layers from cathodes A facility for removing electro-deposited layers from cathodes, including a cathode reception area, a cathode treatment area with a cathode washing apparatus and an extraction apparatus, and a storage area to store cathodes which have had electro-deposite... | 10/22/1996 |