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Class 204/192.38 - Vacuum arc discharge coating


Subclass of Class 204 - Chemistry: electrical and wave energy
Definition: Processes for the deposition of a coating onto a substrate
No. of patents: 270
Last issue date: 03/13/2012


1              
NumberTitleIssue Date
8133365Method of arc ion plating and target for use therein
In an arc ion plating method, the target is divided into a central portion and longitudinal end portions at both longitudinal ends of the central portion. A constituent material of the target is evaporated and ionized by vacuum arc discharge using the target as a ca...
03/13/2012
8088260Puck for cathodic arc coating with continuous groove to control arc
A puck for providing a coating material in a cathodic arc coating system has a generally uniform depression formed at the outer periphery. The depression ensures that an arc from the coating apparatus will move uniformly about the outer periphery of the puck, such t...
01/03/2012
8066854Antimicrobial coating methods
The invention is directed to efficient methods for depositing highly adherent anti-microbial materials onto a wide range of surfaces. A controlled cathodic arc process is described, which results in enhanced adhesion of silver oxide to polymers and other surfaces, s...
11/29/2011
7943017Method for operating a pulsed arc evaporation source and vacuum process system comprising said pulsed arc evaporation source
A vacuum process system for surface-treating work pieces uses an arc evaporation source. The system has a first electrode connected to a DC power source and a second electrode, disposed separately from the arc evaporation source. The two electrodes are operated whil...
05/17/2011
7879203Method and apparatus for cathodic arc ion plasma deposition
A method and apparatus for depositing a coating material on a surface of a substrate by an ion plasma deposition process using a hollow cathode is disclosed. The cathode may be a substantially cylindrical hollow cathode. A plasma arc is formed on the outer circumfer...
02/01/2011
7867366Coaxial plasma arc vapor deposition apparatus and method
An apparatus for the deposition of a variable thickness coating onto the inside of a cylindrical tube comprises a variable pressure gas, an cathode coaxially positioned within the cylinder, and a voltage source applied between the cathode and cylindrical tube, which...
01/11/2011
7857948Method for manufacturing poorly conductive layers
Method for producing poorly conductive and in particular nonconductive layers on at least one work piece by means of a vacuum-coating process in which an electric arc discharge is activated between at least one anode and the cathode of an arc source in a reactive-ga...
12/28/2010
7803255Device for plasma-activated vapor coating of large surfaces
The invention relates to a device for the plasma activated vapor coating of large-surface moved substrates, comprising at least one vacuum recipient, one pump system, one evaporator, one device for holding and transporting the substrates to be coated and at least on...
09/28/2010
7504008Refurbishment of sputtering targets
In a method of refurbishing a deposition target, a surface of the target is provided in a process zone. An electrical arc is generated in the process zone, and a consumable metal wire is inserted into the process zone to form liquefied metal. A pressurized gas is in...
03/17/2009
7381311Filtered cathodic-arc plasma source
A filtered cathodic-arc plasma source of lower plasma losses and higher output plasma current to input current efficiency is disclosed. Plasma filtering is accomplished in a right angle bend magnetic filter arranged to include the effects of at least three added mag...
06/03/2008
7364772Method for coating an organic layer onto a substrate in a vacuum chamber
A vapor deposition source for use in vacuum chamber for coating an organic layer on a substrate of an OLED device, includes a manifold including side and bottom walls defining a chamber for receiving organic material, and an aperture plate disposed between the side ...
04/29/2008
7361256Electrolytic reactor
An electrolytic reactor including a conical recess of removable slices through which the electrolyte circulates towards a part to be coated under the action of a pump setting up forced circulation. The part is polarized to act as a cathode, facing a coaxial anode in...
04/22/2008
7358658Amorphous diamond materials and associated methods for the use and manufacture thereof
An electroluminescence device having improved luminescence per volt input is provided. The device can include a first electrode, a second electrode, a diamond-like carbon layer electrically coupled to at least one of the first electrode or the second electrode, and ...
04/15/2008
7347148Shipping pallet equipped with a non-structural member carrying a readable device
A shipping pallet comprised of at least one layer of substantially parallel, structural deck boards attached to a plurality of stringers is disclosed. The layer of deck boards defines a three-dimensional, substantially rectilinear deck zone that is defined by a top ...
03/25/2008
7311976Glazing coated with at least one layer having thermochromic properties
A glazing coated with at least one layer having thermochromic properties comprising vanadium oxide, and also with at least one other layer having thermal properties, such as an infrared reflecting layer, and/or at least one other layer having optical properties, suc...
12/25/2007
7309269Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
In this embodiment, an interval distance between a desposition source holder 17 and an object on which deposition is performed (substrate 13) is reduced to 30 cm or less, preferably 20 cm or less, more preferably 5 to 15 cm, and a deposition source hol...
12/18/2007
7309526Diamond like carbon coating on nanofillers
In one embodiment the present invention provides for a diamond like coating on small particles. This comprises small particles 10 in the size range of approximately 1-1000 nm and a diamond like coating on the small particles. The diamond like coating is distr...
12/18/2007
7305311Arc detection and handling in radio frequency power applications
A radio frequency power delivery system comprises an RF power generator, arc detection circuitry, and control logic responsive to the arc detection circuitry. A dynamic boundary is computed about the measured value of a parameter representative of or related to the ...
12/04/2007
7300559Filtered cathodic arc deposition method and apparatus
An apparatus for the application of coatings in a vacuum comprising a plasma duct surrounded by a magnetic deflecting system communicating with a first plasma source and a coating chamber in which a substrate holder is arranged off of an optical axis of the plasma s...
11/27/2007
7300556Method for depositing a thin film adhesion layer
A method of physical vapor deposition (PVD) is disclosed in which xenon is used as the operating gas in the vacuum chamber in the deposition of an adhesion layer, preferably silicon, which allows the adhesion layer to be ultra-thin with improved durability over prio...
11/27/2007
7300684Method and system for coating internal surfaces of prefabricated process piping in the field
The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage such that the workpiece functions as a cathode and by connecting an anode at each opening of the workpiece. A source gas is introduced at an entrance opening, while a vacuum sou...
11/27/2007
7279078Thin-film coating for wheel rims
A process for coating a non-uniform, thin-film, dichroic pattern to a wheel rim or motorcycle part. The thin-film coating adds a colored or iridescent pattern to the wheel rim or motorcycle part, while maintaining other characteristics, such as brilliance, shine, du...
10/09/2007
7276847Cathode assembly for indirectly heated cathode ion source
A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the ...
10/02/2007
7264883Hard coating film excellent in adhesion and manufacturing method thereof
A hard coating film of the present invention is formed on a substrate, and is a multilayer including at least the following layers (1) to (3). (1) A first layer on the substrate side comprising one or more metals selected from the group consisting of elements in Gro...
09/04/2007
7258933Coated cutting tool member
A coated cutting tool member exhibiting not only a superior wear resistance during a high speed cutting operation in which a significant amount of heat is generated, but also exhibit a superior shipping resistance even when such a cutting operation is performed unde...
08/21/2007
7252745Filtered cathodic arc deposition method and apparatus
An apparatus for the application of coatings in a vacuum comprising a plasma duct surrounded by a magnetic deflecting system communicating with a first plasma source and a coating chamber in which a substrate holder is arranged off of an optical axis of the plasma s...
08/07/2007
7250196System and method for plasma plating
An exemplary system and method for plasma plating are provided to generate a deposition layer on a substrate. The method for plasma plating includes positioning a substrate within a vacuum chamber, positioning a depositant in a filament within the vacuum chamber, re...
07/31/2007
7229675Protective coating method for pieces made of heat resistant alloys
The invention relates to metallurgy and mechanical engineering, in particular to the development of methods for providing metallic pieces with protective coatings with a view to improving the performance characteristics thereof. In accordance with the inventive meth...
06/12/2007
7226670Work piece with a hard film of AlCr-containing material, and process for its production
A work piece or structural component is coated with a system of film layers at least one of which is composed of (AlyCr1-y) X, where X=N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO or CBNO and 0.2≦y
06/05/2007
7211144Pulsed nucleation deposition of tungsten layers
A method of forming a tungsten nucleation layer using a sequential deposition process. The tungsten nucleation layer is formed by reacting pulses of a tungsten-containing precursor and a reducing gas in a process chamber to deposit tungsten on the substrate. Thereaf...
05/01/2007
7201803Valve control system for atomic layer deposition chamber
A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication wi...
04/10/2007
7193369Method for generating gas plasma
A method for generating a plasma. A gas flows along a flow path having the displacement identical to the lines of magnetic force of the main magnetic field, and high frequency alternating current is applied to the gas, thereby generating a gas plasma. For example, a...
03/20/2007
7179335In situ adaptive masks
A variable adaptive mask is provided that can be dynamically modified in situ in a physical vapor deposition process. The mask comprises a fixed mask portion, a plurality of channels extending through the fixed mask portion, a control mechanism for controlling throu...
02/20/2007
7169440Method for removing photoresist and etch residues
A method is provided for plasma ashing to remove photoresist remnants and etch residues that are formed during preceding plasma etching of dielectric layers. The ashing method uses a two-step plasma process involving an oxygen-containing gas, where low or zero bias ...
01/30/2007
7165506Method and device for plasma-treating the surface of substrates by ion bombardment
In an ion etching method for reducing a substrate thickness, an electric arc is generated in a vacuum chamber such that the electric arc is locally separated from the substrate and circulates about the substrate. A plasma of a supplied etching gas is produced by the...
01/23/2007
7160616DLC layer system and method for producing said layer system
The invention describes a device and a process that render possible the production of a layer system for wear protection, corrosion protection and improvement of the slipping properties and the like with an adhesion layer to be arranged on a substrate, a transition ...
01/09/2007
7150925Surface coated cemented carbide cutting tool having hard coating layer exhibiting excellent wear resistance in high speed machining
The invention provides a coated cutting tool made of cemented carbide in which a hard coating layer has excellent wear resistance in high-speed cutting operation, wherein (a) a crystal orientation hysteresis layer which consists of a carbonitride compound layer and ...
12/19/2006
7144639Surface-coated cutting tool member having hard coating layer and method for forming the hard coating layer on surface of cutting tool
A surface-coated cutting tool member exhibiting a superior tool life due to a hard coating layer thereof is provided. The surface-coated cutting tool member includes a tungsten carbide based cemented carbide substrate, a titanium carbonitride based cermet substrate,...
12/05/2006
7130498Multi-layer optical circuit and method for making
A multi-layer optical circuit has a plurality of optical circuit layers. Each optical circuit layer is positioned on a corresponding one of a plurality of substrates. An optical fiber extends between at least two of the optical circuit layers and forms a portion of ...
10/31/2006
7126807Ionized air flow discharge type non-dusting ionizer
The ionizer of the present invention comprises a chamber which has an ionization part that ionizes a portion of an ion carrier gas that is supplied to the interior of this chamber, and a blowing part which feeds the ion carrier gas toward a charged body. The ionizat...
10/24/2006
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