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| Number | Title | Issue Date |
| 8133362 | Physical vapor deposition with multi-point clamp A physical vapor deposition apparatus includes a vacuum chamber having side walls, a cathode inside the vacuum chamber, wherein the cathode is configured to include a sputtering target, a radio frequency power supply configured to apply power to the cathode, an anod... | 03/13/2012 |
| 7393600 | Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein A sintered article is fabricated which contains one or more of indium oxide, zinc oxide, and tin oxide as a component thereof and contains any one or more types of metal out of hafnium oxide, tantalum oxide, lanthanide oxide, and bismuth oxide. A backing plate is at... | 07/01/2008 |
| 7364276 | Continuous ink jet apparatus with integrated drop action devices and control circuitry A continuous liquid drop emission apparatus is provided. The liquid drop emission apparatus is comprised of a liquid chamber containing a positively pressurized liquid in flow communication with at least one nozzle for emitting a continuous stream of liquid and a je... | 04/29/2008 |
| 7332061 | Integration of multiple frequency band FBAR filters A method and system for forming FBAR filters for different frequency bands with film stacks of different thicknesses, where at least some layers of different thicknesses are formed substantially at the same time, during a process operation are described herein. ... | 02/19/2008 |
| 7331092 | Method and manufacturing surface acoustic wave device A method of manufacturing a surface acoustic device that has a surface acoustic wave filter including comb-like electrodes, electrode pads, and wiring patterns formed on a joined substrate produced by joining a piezoelectric substrate and a supporting substrate to e... | 02/19/2008 |
| 7233094 | Piezoelectric device comprising ultrahighly-oriented aluminum nitride thin film and its manufacturing method The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W la... | 06/19/2007 |
| 7227292 | Methods of depositing piezoelectric films This invention relates to methods of depositing piezoelectric films such as in part of a stack including depositing a piezoelectric layer, measuring the thickness of the layer and depositing a further film or films such that the combined thickness is substantially e... | 06/05/2007 |
| 7182816 | Particulate reduction using temperature-controlled chamber shield Particle flaking is reduced in a semiconductor wafer processing apparatus by installing a chamber shield assembly in the chamber of the apparatus. The shield assembly includes a plurality of nested shields that are supported out of contact with each other and suspen... | 02/27/2007 |
| 7179392 | Method for forming a tunable piezoelectric microresonator A process for manufacturing a resonator including the steps of: forming on an insulating substrate a first portion of a conductive material and a second portion of another material on the first portion; forming an insulating layer having its upper surface flush with... | 02/20/2007 |
| 7161173 | P-type group II-VI semiconductor compounds A persistent p-type group II-VI semiconductor material is disclosed. The group II-VI semiconductor includes atoms of group II elements, atoms of group VI elements, and one or more p-type dopants. The p-type dopant concentration is sufficient to render the group II-V... | 01/09/2007 |
| 7157738 | Capacitor element and its manufacturing method The present invention relates to a capacitor element and its manufacturing method. The invention presents a capacitor element comprising a lower electrode, a dielectric film, and an upper electrode, and its manufacturing method, in which the surface of at least one ... | 01/02/2007 |
| 7137179 | Method of forming a piezoelectric layer in forming a piezoelectric element including a lower electrode on one surface of a substrate A method of forming a piezoelectric layer includes: a drying step for forming at least one ferroelectric precursor film on a lower electrode of a substrate and drying the ferroelectric precursor film; a degreasing step for carrying the substrate into a region facing... | 11/21/2006 |
| 7109642 | Composite piezoelectric apparatus and method The present invention relates to composite piezoelectric apparatus, transducers and methods of manufacture. In an embodiment, a composite piezoelectric apparatus has a sacrificial base and pillar array. Different volume percents of piezoelectric material are used in... | 09/19/2006 |
| 7067965 | Piezoelectric porcelain composition, piezoelectric device, and methods of making thereof A piezoelectric porcelain composition containing a complex oxide having a perovskite structure mainly composed of Pb, Zr, and Ti; and the following component (a) and/or (b), or component (A) and/or (B): (a) Ag and/or an Ag compound... | 06/27/2006 |
| 7059753 | Lamp with plastic base having a radiation protective coating The invention relates to a lamp, in particular a motor-vehicle headlight lamp, with a plastic part of which the surface is provided with a coating which contains at least one compound of a metal with oxygen or nitrogen. The coating has the effect of preventing gas e... | 06/13/2006 |
| 7053531 | Composite piezoelectric vibrator The present invention provides a composite piezoelectric transducer having a piezoelectric ceramic, an organic polymer, and an electrode group formed only on surfaces of the piezoelectric ceramic. The groove is formed, having a depth 50% to 90% of the thickness of t... | 05/30/2006 |
| 7043129 | Wide bandgap semiconductor waveguide structures A waveguide structure for transmitting broad spectrum light, includes a wide bandgap semiconductor thin film arranged on a substrate and ablated to form a waveguide channel to transmit the broad spectrum light. ... | 05/09/2006 |
| 7037595 | Thin hafnium oxide film and method for depositing same A thin layer of hafnium oxide or stacking of thin layers comprising hafnium oxide layers for producing surface treatments of optical components, or optical components, in which at least one layer of hafnium oxide is in amorphous form and has a density less than 8 gm... | 05/02/2006 |
| 7008669 | Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element A method of manufacturing a ceramic includes forming a film which includes a complex oxide material having an oxygen octahedral structure and a paraelectric material having a catalytic effect for the complex oxide material in a mixed state, and performing a heat tre... | 03/07/2006 |
| 7005695 | Integrated circuitry including a capacitor with an amorphous and a crystalline high K capacitor dielectric region The invention comprises integrated circuitry and to methods of forming capacitors. In one implementation, integrated circuitry includes a capacitor having a first capacitor electrode, a second capacitor electrode and a high K capacitor dielectric region received the... | 02/28/2006 |
| 6998940 | Component operating with bulk acoustic waves and a method for producing the component A component operating with bulk acoustic waves has a carrier substrate, a thin-film resonator and an acoustic mirror arranged between the resonator and carrier substrate. The acoustic mirror is formed by at least one high acoustic impedance layer, which is covered b... | 02/14/2006 |
| 6979938 | Electronic device formed from a thin film with vertically oriented columns with an insulating filler material A thin film device comprises: a substrate and a thin film having a thickness formed on the substrate, wherein the thickness of the thin film is at least 1 micrometer, a crystal structure having crystals with a grain size formed within the thin film, wherein the grai... | 12/27/2005 |
| 6960911 | Strain sensor A strain sensor includes a sensor section having a magnetic material provided on one surface of a conductor, the magnetic material being formed integrally with the conductor and having a magnetic strain constant with an absolute value larger than 1×10−7 | 11/01/2005 |
| 6931701 | Method for manufacturing a thin film A method for manufacturing a thin film is performed such that the internal stress is controlled while the preferred orientation property is maintained at a high value. An AlN piezoelectric thin film is formed on a substrate by a sputtering method using a mixed gas i... | 08/23/2005 |
| 6904666 | Method of manufacturing microwave filter components and microwave filter components formed thereby A simplified method for forming passive microwave components, such as a filter, and passive microwave components formed by the method. The method includes forming a ceramic insert having a plurality of resonator regions and then die casting an outer casing of a cond... | 06/14/2005 |
| 6887354 | Method for applying a coating to a lamp and coated lamp A method for applying a coating (23) to a part of a surface of a lamp (20). The aim is to provide a simple manner of applying exact coatings to parts of surfaces with complicated designs. To this end, the lamp is vacuum-coated. The parts of the surface... | 05/03/2005 |
| 6878416 | Piezoelectric coating A color shifting composition and method useful as a coating on a surface. The composition comprises a layer of piezoelectric material disposed on the surface and a layer of electrically conductive disposed on the layer of piezoelectric material. A mechanism is inclu... | 04/12/2005 |
| 6849166 | Ferroelectric thin film element and its manufacturing method, thin film capacitor and piezoelectric actuator using same In a manufacturing method for a piezoelectric actuator a first electrode layer is formed on substrate, a ferroelectric thin film is formed on the first electrode layer, and an inorganic protective layer 4 is formed on the ferroelectric thin film. Then, the in... | 02/01/2005 |
| 6746577 | Method and apparatus for thickness control and reproducibility of dielectric film deposition The invention embodies a method and apparatus for controlling the thickness of a dielectric film formed by physical vapor deposition (PVD). The method compensates for the continuously varying electrical load conditions inherent in dielectric deposition via PVD. The ... | 06/08/2004 |
| 6716363 | Electrode patterning for a differential PZT activator A process for fabricating piezoelectric elements each having a wrap-around electrode to be used in a differential actuator design where electrical connection is made to the bottom electrode of the element from the top surface of the element. The wrap-around electrod... | 04/06/2004 |
| 6589398 | Pasting method for eliminating flaking during nitride sputtering The present invention pertains to methods for preventing metal or metal-derived material from flaking during sputter processing of substrates. Methods of the invention are particularly useful for non-planar sputter targets. The magnetic field configuratio... | 07/08/2003 |
| 6521100 | Method of producing a piezoelectric thin film and bulk acoustic wave resonator fabricated according to the method A method of use in fabricating a device comprising a thin film of material, the fabrication using magnetron sputtering to deposit the thin film on a surface of some other material, the method including the step of: performing successive sputtering cycles,... | 02/18/2003 |
| 6456173 | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters A method and system for tuning a bulk acoustic wave device at the wafer level by adjusting the device thickness. In particular, the device thickness has a non-uniformity profile across the device surface. A mask with an aperture is placed over the device ... | 09/24/2002 |
| 6387225 | Thin piezoelectric film element, process for the preparation thereof and ink jet recording head using thin piezoelectric film element The present invention provides a thin piezoelectric film having a high piezoelectric strain constant and a good adhesion with a lower electrode which can be produced without being cracked. The present invention also provides an ink jet recording head comp... | 05/14/2002 |
| 6342134 | Method for producing piezoelectric films with rotating magnetron sputtering system A quality-assurance method is described that is useful in the fabrication of piezoelectric films of electronic devices, particularly resonators for use in RF filters. For example, the method comprises determining the surface roughness of an insulating lay... | 01/29/2002 |
| 6333066 | Method for forming PZT thin film using seed layer A method for forming a PZT (lead zirconate titanate: Pb(Zrx Ti1-x)O3) thin film using a seed layer is provided. In the method for forming a PZT thin film, PZT is grown on a PbO seed layer or a PZT seed layer of a perovskit... | 12/25/2001 |
| 6312568 | Two-step AIN-PVD for improved film properties The present invention provides a method of forming an aluminum nitride layer on a substrate in a processing chamber comprising depositing a first aluminum nitride layer at a first chamber pressure on a substrate, and then depositing a second aluminum nitr... | 11/06/2001 |
| 6287637 | Multi-layer approach for optimizing ferroelectric film performance A multi-layer ferroelectric thin film includes a nucleation layer, a bulk layer, and an optional cap layer. A thin nucleation layer of a specific composition is implemented on a bottom electrode to optimize ferroelectric crystal orientation and is markedl... | 09/11/2001 |
| 6146906 | DC magnetron sputtering method for manufacturing electrode of ferroelectric capacitor In a method for manufacturing a capacitor including a lower electrode, a ferroelectric layer formed on the lower electrode, and an upper electrode formed on the ferroelectric layer, at least one of the lower and upper electrodes is made of laminated metal... | 11/14/2000 |
| 6132568 | Manufacturing method of samarium sulfide thin films The present invention provides a method for producing a samarium monosulfide piezochromic thin film, and the present invention relates to a process for producing a thin film material at a high film formation rate by forming a samarium monosulfide thin fil... | 10/17/2000 |
