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Class 204/192.11 - Ion beam sputter deposition


Subclass of Class 204 - Chemistry: electrical and wave energy
Definition: Processes for the deposition of target material onto a surface
No. of patents: 404
Last issue date: 02/01/2011


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NumberTitleIssue Date
7879201Method and apparatus for surface processing of a substrate
Method and apparatus for processing a substrate with a beam of energetic particles. The beam is directed from a source through a rectangular aperture in a shield positioned between the source and substrate to a treatment zone in a plane of substrate movement. Featur...
02/01/2011
7803254Processes for forming electronic devices and electronic devices formed by such processes
A process for forming an electronic device includes forming a first layer over a substrate, wherein the first layer includes an organic layer, and depositing a second layer over the substrate after forming the first layer, wherein depositing the second layer is perf...
09/28/2010
7421973System and method for performing SIMOX implants using an ion shower
An ion shower comprises a plasma source operable to generate source gas ions within a chamber, and an extraction assembly associated with a top portion of the chamber. The extraction assembly is operable to extract ions from the top portion of the chamber. The ion s...
09/09/2008
7374642Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith
A continuous, uninterrupted two-step treatment process capable of forming nanometer scale physical structures on the surface of articles fabricated from metallic, ceramic, glass, or plastic materials, and then depositing a thin conformal coating on the nanostructure...
05/20/2008
7370416Method of manufacturing an injector plate
A method of manufacturing an injector plate is provided where a wafer is provided and a release layer is disposed on the wafer. Then a photo resist is formed over the release layer. After photolithography processing, a plurality of plugs are formed from the photo re...
05/13/2008
7365408Structure for photolithographic applications using a multi-layer anti-reflection coating
A bi-layer anti-reflective coating for use in photolithographic applications, and specifically, for use in ultraviolet photolithographic processes. The bi-layered anti-reflective coating is used to minimize pattern distortion due to reflections from neighboring feat...
04/29/2008
7362547Magnetic head having PtMn layer formed by ion beam deposition
A magnetic head having an improved PtMn layer formed by ion beam deposition, an antiparallel (AP) pinned layer structure formed above the PtMn layer, and a free layer formed above the AP pinned layer structure. The spin valve structure provides improved soft magneti...
04/22/2008
7354505Epitaxial ferromagnetic NiFeN
An epitaxial Ni3FeN film with unique magnetic properties such as single magnetic domain (even in a large scale 0.5″×0.5″), which rotates coherently in response to the desired switching field with a very sharp transition is described. The magnetic hys...
04/08/2008
7352542Enhanced spin-valve sensor with engineered overlayer formed on a free layer
A GMR sensor is disclosed for sensing magnetically recorded information on a data storage medium. The sensor includes a ferromagnetic free layer and a ferromagnetic pinned layer sandwiching an electrically conductive spacer layer. An engineered overlayer is formed o...
04/01/2008
7341648Method for coating piston rings for internal combustion engine
The invention relates to a method for coating piston rings (10) for internal combustion engines, wherein at least the bearing surface of the piston ring is provided with an anti-abrasion and anti-corrosion coating (12) by means of a PVD or electroplati...
03/11/2008
7335426High strength vacuum deposited nitinol alloy films and method of making same
A vacuum deposition method for fabricating high-strength nitinol films by sputter depositing nickel and titanium from a heated sputtering target, and controlling the sputter deposition process parameters in order to create high-strength nitinol films that exhibit sh...
02/26/2008
H2209Large area metallization pretreatment and surface activation system
A large area metallization pretreatment and surface activation system that uses an electron beam-produced plasma capable of delivering substantial ion and radical fluxes at low temperatures over large areas of an organic plastic or polymer material. The ion and radi...
02/05/2008
7320815Method for forming oriented film, oriented film, substrate for electronic device, liquid crystal panel, and electronic device
A method for forming an oriented film is provided for forming an oriented film on a base material by irradiating the surface of the base material where the oriented film will be formed with an ion beam comprising nitrogen ions from a direction inclined at a prescrib...
01/22/2008
7317606Particle trap for electrostatic chuck
Wafer supporting apparatus, including an electrostatic chuck for supporting the wafer. The apparatus further includes an electrostatic shield which is positioned in proximity to the chuck and the wafer, and a voltage source which is coupled to apply an electric fiel...
01/08/2008
7314688Method of producing a reflection mask blank, method of producing a reflection mask, and method of producing a semiconductor device
A reflection mask blank and a method of producing a reflection mask blank by forming, on a substrate, at least a multilayer reflection film for reflecting exposure light and an absorber layer formed on the multilayer reflection film for absorbing the exposure light....
01/01/2008
7312958Method for manufacturing magnetic disk apparatus
A method for manufacturing a magnetic disk apparatus having a highly sensitive reproducing head. A spin-valve-type multilayer film composed of an antiferromagnetic layer, a ferromagnetic layer, a nonmagnetic layer and a free magnetic layer is used as a magnetoresist...
12/25/2007
7309405Method of forming ITO film
Disclosed is a method of forming an ITO film by optimized sequential sputter deposition of seed and bulk layers having different sputter process conditions, which is applicable to various display devices, and more particularly, to an organic light-emitting device ne...
12/18/2007
7309549Method for quartz bump defect repair with less substrate damage
A method for minimizing damage to a substrate while repairing a defect in a phase shifting mask for an integrated circuit comprising locating a bump defect in a phase shifting mask, depositing a first layer of protective coating to an upper surface of the bump defec...
12/18/2007
7300556Method for depositing a thin film adhesion layer
A method of physical vapor deposition (PVD) is disclosed in which xenon is used as the operating gas in the vacuum chamber in the deposition of an adhesion layer, preferably silicon, which allows the adhesion layer to be ultra-thin with improved durability over prio...
11/27/2007
7300457Self-supporting metallic implantable grafts, compliant implantable medical devices and methods of making same
Implantable medical grafts fabricated of metallic or pseudometallic films of biocompatible materials having a plurality of microperforations passing through the film in a pattern that imparts fabric-like qualities to the graft or permits the geometric deformation of...
11/27/2007
7294209Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
A battery-operated device provided on a thin-film battery and a method for making. Some embodiments provide a system that includes a vacuum chamber, a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that suppli...
11/13/2007
7294367Biological laser printing via indirect photon-biomaterial interactions
A method of laser forward transfer is disclosed. Photon energy is directed through a photon-transparent support and absorbed by an interlayer coated thereon. The energized interlayer causes the transfer of a biological material coated thereon across a gap and onto a...
11/13/2007
7294404Graded photocatalytic coatings
The invention provides graded photocatalytic coatings. In one aspect, the invention provides a substrate carrying a photocatalytic coating that includes a first graded film region and a second graded film region. The first graded film region has a substantially cont...
11/13/2007
7286326Magnetic head with air bearing surface protection film
Embodiments of the invention provide an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in the state of an extremely thin film. In one embodiment, an air bearing surface protection f...
10/23/2007
7282112Method and apparatus for an improved baffle plate in a plasma processing system
The present invention presents an improved baffle plate for a plasma processing system, wherein the design and fabrication of the baffle plate advantageously provides for a uniform processing plasma in the process space with substantially minimal erosion of the baff...
10/16/2007
7270854Method for forming a head having improved spin valve properties
A method for forming a magnetic head having an improved PtMn layer, including forming a PtMn layer by ion beam deposition, forming an antiparallel (AP) pinned layer structure above the PtMn layer, and forming a free layer above the AP pinned layer structure. The met...
09/18/2007
7264741Coater having substrate cleaning device and coating deposition methods employing such coater
A coater having a substrate cleaning device is disclosed. Also disclosed are methods of processing substrates in a coater equipped with a substrate cleaning device. The substrate cleaning device comprises an ion gun (i.e., an ion source) that is positioned beneath a...
09/04/2007
7261914Method and apparatus for forming a nitride layer on a biomedical device
This invention is a method of forming a nitride layer on at least one metal or metal alloy biomedical device, comprising: providing a vacuum chamber with at least one biomedical device positioned thereon on a worktable within the vacuum chamber; reducing the pressur...
08/28/2007
7259373Apparatus and method for controlled particle beam manufacturing
A chamber for exposing a workpiece to charged particles includes a charged particle source for generating a stream of charged particles, a collimator configured to collimate and direct the stream of charged particles from the charged particle source along an axis, a...
08/21/2007
7253109Method of depositing a tantalum nitride/tantalum diffusion barrier layer system
We have discovered a method of providing a thin, approximately from about 2 Å to about 100 Å thick TaN seed layer, which can be used to induce the formation of alpha tantalum when tantalum is deposited over the TaN seed layer. Further, the ...
08/07/2007
7244341Method to achieve low and stable ferromagnetic coupling field
A method for making a spin valve includes providing a substrate; depositing a first ferromagnetic layer having a first surface on the substrate; depositing a spacer layer having a second surface; depositing a second ferromagnetic layer, wherein the spacer layer is d...
07/17/2007
7238294Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
The invention refers to a procedure for etching of materials at the surface by focussed electron beam induced chemical reactions at said surface. The invention is characterized in that in a vacuum atmosphere the material which is to be etched is irradiated with at l...
07/03/2007
7235350Alumina insulation for coating implantable components and other microminiature devices
A protective, biocompatible coating or encapsulation material protects and insulates a component or device intended to be implanted in living tissue. The coating or encapsulation material comprises a thin layer or layers of alumina, zirconia or other ceramic, less t...
06/26/2007
7229532Sputtering apparatus
A sputtering apparatus for forming a film by a physical gas-phase growth on a substrate having a irregular or flat shape is provided including three or more axes for independently varying a relative positional relationship between a substrate and a cathode in the co...
06/12/2007
7220604Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those
The invention relates to a method for enabling repair of a defect in a substrate, particularly the invention provides a method and apparatus for enabling repair of a pattern shape in a semiconductor device, which has not been able to be practiced because of lack of ...
05/22/2007
7216544Ultrasonic inspection reference standard for composite Materials
An ultrasonic inspection reference standard for composite materials includes a prism that is manufactured from a polymer resin. The ultrasonic inspection reference standard may be a rectangular prism and may be a polymer resin step-wedge reference standard that has ...
05/15/2007
7204921Vacuum apparatus and vacuum processing method
A vacuum apparatus which can easily regenerate plasma is provided. A matching box used in the vacuum apparatus can vary the impedance thereof by varying the magnitudes of the inductance of variable inductance elements. Controlling the magnitude of direct current mak...
04/17/2007
7204013Method of manufacturing a magnetoresistive sensor
In a method of forming a magnetoresistive sensor, first and second magnetic leads are formed. Next, a junction of magnetic and electrically conductive material is formed between the first and second magnetic leads. Finally, the magnetic and electrical conductivity o...
04/17/2007
7198699Sputter coating apparatus including ion beam source(s), and corresponding method
A coating apparatus deposits a first coating (single or multi-layered) onto a first side of a substrate (e.g., glass substrate) passing through the apparatus, and a second coating (single or multi-layered) onto the other or second side of the substrate. In certain e...
04/03/2007
7194801Thin-film battery having ultra-thin electrolyte and associated method
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is suppl...
03/27/2007
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