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| Number | Title | Issue Date |
| 8177048 | Vacuum processing apparatus A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power supply mechanism including a primary side mechanism disposed outside th... | 05/15/2012 |
| 8118156 | Acoustic wave device An acoustic wave device applicable to a wider scope and field and used for transporting a substance of any of wide variety of types to be transported with an improved efficiency without needing to clean a piezoelectric substrate and simultaneously transporting two o... | 02/21/2012 |
| 7918329 | Conveying device using electrostatic adsorbing plate Provided is a low-cost electrostatic attraction transfer apparatus which can perform high-speed transfer, stabilizes a contact status of an electrostatic attraction board with a film and the like and does not generate fine defects on an object to be transferred.... | 04/05/2011 |
| RE41760 | Bi-directional magnetic sample rack conveying system A magnetic sample rack adapted to support liquid containers is urged along a surface by means of a magnetic conveyor system located beneath the surface. The magnetic conveyor system comprises a plurality of magnetic housings driven by a belt, the magnetic housings i... | 09/28/2010 |
| 7770714 | Transfer apparatus A transfer apparatus includes a first magnetic member placed in a carrier, and a second magnetic member placed in a carrier supporting unit to oppose the first magnetic member from a position below the first magnetic member in the vertical direction, and having the ... | 08/10/2010 |
| 7743910 | Systems for processing workpieces and mechanical arrangements for moving workpieces and/or workpiece remnants A mechanical arrangement for moving workpieces and/or processing remnants from processing of a workpiece comprises a load carrier and a load carrier drive. Part of the load carrier drive is formed by a rigid chain which is acted upon by a chain driving wheel support... | 06/29/2010 |
| 7597186 | Substrate transport device A substrate transport device includes a chamber, a rotary wheel, a first magnet, a carrier, and a second magnet. The rotary wheel is disposed outside the chamber. The first magnet is disposed on the rotary wheel. The carrier is disposed in the chamber. The second ma... | 10/06/2009 |
| 7597187 | Conveyor system A conveyor system has an elongated guide defining a closed transport path extending through a plurality of treatment stations and a plurality of carriers movable on the guide along the path and each capable of holding a respective workpiece. At least one magnet is p... | 10/06/2009 |
| 7472786 | Non-contact conveying device using superconducting magnetic levitation A non-contact conveying device (10) using superconducting magnetic levitation capable of stably conveying an object (11), including: a conveying table (12) having a bottom with permanent magnets (16-19) to convey the object (11 | 01/06/2009 |
| 7356980 | Automated method for packaging food An automated food processing system and method is provided that allows food to be dispensed, fried and packaged in a suitable container, which may be an individual portion-sized container. In one embodiment, the system includes separate automated modules for dispens... | 04/15/2008 |
| 7357085 | Machine guideway employing electromagnetic suspension A machine guideway for used in machine processing includes a base (10, 40), a slide block (20, 50) slideably received in a sliding groove of the base, and an electromagnetic suspension system. The electromagnetic suspension system provides a repulsion ... | 04/15/2008 |
| 7351292 | Assembly for processing substrates An assembly for processing substrates, which processing comprises a vacuum deposition process, such as, for instance, sputtering, CVD or PECVD, which vacuum deposition process is carried out in at least one process chamber, the assembly being provided with a conveyi... | 04/01/2008 |
| 7318517 | Process system and device for transporting substrates A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with actuators embodied in the form of electromagnets and a bearing rotor with a f... | 01/15/2008 |
| 7293950 | Universal modular wafer transport system The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport e... | 11/13/2007 |
| 7287638 | Apparatus, method of manufacturing and method of using a linear actuator A linear actuator, method manufacturing and method of using the linear actuator are provided. The invention includes a linear actuator having a plurality of annular magnets surrounded by a bobbin assembly having a coil system. The plurality of annular magnets can be... | 10/30/2007 |
| 7265470 | Magnetic spring and actuators with multiple equilibrium positions Arrays of magnets configured to create linear or rotary magnetic springs with multiple equilibrium points. Some of the equilibrium points are stable, while others are unstable. No mechanical contact is required between moving and stationary elements of the magnetic ... | 09/04/2007 |
| 7265471 | Apparatus and process for generating energy Energy is generated by an apparatus and process which utilize magnetic forces to move a rotor in a circular direction to turn a rotor shaft. This apparatus and process convert magnetic energy into mechanical force or electrical energy. ... | 09/04/2007 |
| 7264111 | Magnetic specimen-transport system for automated clinical instrument A magnetic specimen-transport system for transporting racks of specimen-containers to or within an automated clinical instrument for analysis and/or processing. The magnetic specimen-transport system that is adapted to transport magnetically-attractable racks of spe... | 09/04/2007 |
| 7249668 | Positive displacement sorter shoe A positive displacement sorter apparatus and method includes providing a plurality of interconnected slats defining an endless web, an upper run of the web defining a conveying surface. A plurality of pusher shoes are provided, each moving along at least one of the ... | 07/31/2007 |
| 7204192 | Apparatus, systems and methods for levitating and moving objects Apparatus, systems and methods for levitating and moving objects such as vehicles, doors and windows are shown and described herein. The embodiments incorporate a track with lower rails having lower permanent magnets and the object with upper rails having upper perm... | 04/17/2007 |
| 7183674 | Hermetically sealed elements of an actuator An actuator for positioning of an optical element, such as a mirror, in an optic system that operates under vacuum conditions is provided and includes a first actuator body including a first actuator element that is hermetically sealed in the first actuator body and... | 02/27/2007 |
| 7169356 | Random access reagent delivery system for use in an automatic clinical analyzer A random access reagent container handling system using a reagent container shuttle to move reagent containers between a loading tray and at least one linear reagent container tray and at least one circular reagent carousel. The reagent container tray is positioned ... | 01/30/2007 |
| 7156224 | Circulating mechanism, and method of operating such a circulating mechanism A circulating mechanism includes a moving member, e.g. a chain or a belt, which travels along a circulating path and is looped about at least one deflecting member for reversing a travel direction of the moving member. Disposed in a section of the circulating path i... | 01/02/2007 |
| 7157873 | Systems and methods for reducing torque disturbance in devices having an endless belt A system for reducing torque disturbance includes a motor mechanically coupled to an endless belt. The motor is operable to drive the belt, and the belt has a seam that causes a torque disturbance to the system. The system includes a data structure having a set of v... | 01/02/2007 |
| 7121400 | Systems and methods for guiding conveyance elements Systems and methods for controlling the planarity of a conveyance element with respect to a guide while the conveyance element is in motion. This control is achieved by coupling a guide to a conveyance element where the conveyance element is held in a level position... | 10/17/2006 |
| 7117988 | Positive displacement sorter A positive displacement sorter includes a plurality of interconnected slats defining an endless web, an upper run of the web defining a conveying surface conveying articles in a longitudinal direction. A plurality of pusher shoes move along the slats to laterally di... | 10/10/2006 |
| 7100759 | Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit A vertical rapid thermal processing system includes a processing chamber and an elevator structure providing for vertical movement of a workpiece within the processing chamber. The elevator structure includes a workpiece support for supporting the workpiece and an e... | 09/05/2006 |
| 7097024 | Conveying device for conveying articles and use of such a conveying device A conveying device for conveying articles, in particular vehicle bodies, in a known manner comprises at least one skid, which comprises two parallel skid runners and a supporting structure, which connects the skid runners to one another, for the article to be convey... | 08/29/2006 |
| 7086519 | Positive displacement shoe and slat sorter apparatus and method A positive displacement sorter apparatus and method includes providing a plurality of slats being interconnected in an endless web, an upper run of the web defining a conveying surface, and a plurality of pusher shoes gliding along at least some of the slats to late... | 08/08/2006 |
| 7077261 | Apparatus for transferring flowable material The invention related to apparatus for transferring flowable particulate material such as dry tablets, for example pharmaceutical tablets, from one station to another. The apparatus comprises a carrier for the tablets, and means externally of the carrier for moving ... | 07/18/2006 |
| 7051863 | Transferring apparatus, carrying apparatus, and transferring method A transferring apparatus is provided between a plurality of carrying apparatuses, each carrying apparatus comprising support means for supporting carried products Wf, guide means for controlling the moving direction of the support means, the guide means being provid... | 05/30/2006 |
| 7040481 | Apparatus, method of manufacturing and method of using a linear actuator A linear actuator, method of manufacturing and method of using the linear actuator are provided. The invention includes a linear actuator having a plurality of annular magnets surrounded by a bobbin assembly having a coil system. The plurality of annular magnets can... | 05/09/2006 |
| 7028831 | Magnetic specimen-transport system for automated clinical instrument A magnetic specimen-transport system for transporting racks of specimen-containers to or within an automated clinical instrument for analysis and/or processing. The magnetic specimen-transport system that is adapted to transport magnetically-attractable racks of spe... | 04/18/2006 |
| 7026732 | Path arrangement for a multi-track linear motor system and method to control same A path for a linear motor system includes routing system between a trunk of the path and two or more branches. The routing system is operative to couple the trunk with a selected branch to enable a stage to travel between the trunk and the selected branch. The routi... | 04/11/2006 |
| 6971832 | Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The ... | 12/06/2005 |
| 6971507 | Magnetic conveyor support Apparatuses designed to provide support to a conveyor belt in a new manner. In a first illustrative embodiment, a conveyor belt is supported by a number of magnets. A first set of magnets are disposed on the edges of the conveyor belt, and a second set of magnets ar... | 12/06/2005 |
| 6957734 | Work fixing device A work fixing device in which the load of the conveyor is not increased even when using a fixed magnet. The work fixing device comprises: plurality of plates, on each plate of the plurality of plates a work with a ferromagnetic portion being mounted; a transporter f... | 10/25/2005 |
| 6954019 | Apparatus and process for generating energy Energy is generated by an apparatus and process which utilize magnetic forces to move a rotor in a circular direction to turn a rotor shaft. This apparatus and process convert magnetic energy into mechanical force or electrical energy. ... | 10/11/2005 |
| 6954041 | Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus Compatibility of a small spring constant and large supporting load is realized, so that a stable operation is assured even if a fine-movement linear motor fails. A supporting unit, having a plurality of magnets whose same poles are arranged facing each other, is ada... | 10/11/2005 |
| 6949143 | Dual substrate loadlock process equipment One embodiment relates to a loadlock having a first support structure therein to support one unprocessed substrate and a second support structure therein to support one processed substrate. The first support structure is located above the second support structure. T... | 09/27/2005 |