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| Number | Title | Issue Date |
| 7962990 | Brush box cleaner module with force control Embodiments of the present invention relates to an apparatus and method for cleaning a substrate using scrubber brushes. One embodiment of the present invention provides a substrate cleaner comprises two scrubber brush assemblies movably disposed in a processing vol... | 06/21/2011 |
| 7725976 | Apparatus and method for the automated cleaning of articles An apparatus, formulation and method for cleaning soils, such as paint drips or splashes, from the outside surface of filled aerosol paint cans and other articles is provided. The apparatus comprises a plurality of reservoirs containing liquids for cleaning and rins... | 06/01/2010 |
| 7441299 | Apparatuses and methods for cleaning a substrate An apparatus for use in processing a substrate includes a brush enclosure extending over a length. The brush enclosure is configured to be disposed over a surface of the substrate and has an open region that is configured to be disposed in proximity to the substrate... | 10/28/2008 |
| 7435302 | Surface treatment apparatus and method for manufacturing liquid crystal display device A cleaning apparatus according to the present invention is provided with a brush drive mechanism which brings a brush being rotating closer to a substrate, measures electrical potentials generated on a plurality of conductor patterns formed on the substrate, by a co... | 10/14/2008 |
| 7395573 | Dust remover and dust removal method A dust remover includes: a rotary brush for removing dust from a workpiece; a workpiece carrying unit for carrying the workpiece in a first direction; a brush rotation unit for rotating the rotary brush around its axis in synchronization with the movement of the wor... | 07/08/2008 |
| 7383601 | Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same In one embodiment, a substrate preparation system is provided. The system includes a brush, a front head, and a back head. The brush is configured to brush scrub a back surface of a substrate using a brush scrubbing chemistry. The front head is defined in close prox... | 06/10/2008 |
| 7377002 | Scrubber box A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the sc... | 05/27/2008 |
| 7353560 | Proximity brush unit apparatus and method An apparatus is provided for producing a wet region and corresponding dry region on a wafer. A proximity brush unit delivers fluids with a rotatable brush to produce the wet region on the wafer. As the proximity brush unit moves in a selected scan method across the ... | 04/08/2008 |
| 7346954 | Arrangement for cleaning surfaces with cleaning equipment having a cleaning belt An arrangement (1) for cleaning surfaces (2), particularly curved or arched or wavy surfaces and/or surfaces (2) with varying direction of curvature, for example on vehicle chassis, metal strip or unflat plates. The arrangement has a cleaning de... | 03/25/2008 |
| 7325268 | Wheel cleaner apparatus An automatic wheel cleaner apparatus providing cleaning of the inner side of a motor vehicle wheel having an inflated tire mounted thereto (a mounted wheel) prior to attachment of adhesively attached balancing weights. The apparatus includes: a main frame, a rollers... | 02/05/2008 |
| 7316236 | Cleaning device for the shaving head of a dry shaving apparatus A shaving head cleaning device includes a housing, a receptacle configured to receive the dry shaving apparatus, a receiving region configured to receive the shaving head of the dry shaving apparatus, a reservoir for containing cleaning fluid, a supply conduit conne... | 01/08/2008 |
| 7302727 | Pressed powder pan cleaning machine An apparatus is provided for cleaning residual powder and other contaminants from external surfaces of pressed powder cosmetic pans before the pans are adhered into the compact. A feed chute feeds pans into a feed path in the apparatus one after another in an uprigh... | 12/04/2007 |
| 7300522 | Mobile cleaning and washing plant for shopping trolleys A mobile cleaning plant for cleaning shopping trolleys and similar transport systems includes a container configured to receive the shopping trolleys in hoxizontally stacked rows. The shopping trolleys are fed into an inlet on the container via a device, automatical... | 11/27/2007 |
| 7294222 | External pipe cleaner Disclosed is a pipe cleaner apparatus that is attached to a pipe fusion machine. The pipe cleaner removes dirt, snow, mud, and other debris from the outer surface of pipe sections prior to the butt fusion process. The pipe cleaner may be a wiper through which the pi... | 11/13/2007 |
| 7258125 | Shopping cart sanitizing system The present invention comprises a system and method for removing contaminates from the surface of a shopping cart such as a grocery cart. The system includes subjecting the cart to multiple stages of disinfection, including washing, sanitizing, and drying stages. A ... | 08/21/2007 |
| 7234186 | Rim cleaning apparatus Apparatus for cleaning the rim of a wheel. The apparatus comprises a housing journaling a driveshaft, driven by an electric motor and mounting a pair of wire brushes configured to contact the wheel rim. Guides on the housing cause the axis of the drive shaft to be p... | 06/26/2007 |
| 7231682 | Method and apparatus for simultaneously cleaning the front side and back side of a wafer A method for cleaning a semiconductor substrate is provided. The method initiates with transferring the semiconductor substrate into a chamber. Then, a first side of the semiconductor substrate is cleaned according to a first cleaning technique. A second side of the... | 06/19/2007 |
| 7232493 | Glass washing machine with conveyor and brush speed control A glass sheet washing machine comprising a conveyor for moving a glass sheet along a path of travel at a controlled linear speed and a brush rotatable at a controlled rotational speed positioned along said path of travel such that said brush contacts the glass sheet... | 06/19/2007 |
| 7229504 | Methods and apparatus for determining scrubber brush pressure In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The position of the brush relative to the wafer may be adjusted based on th... | 06/12/2007 |
| 7185384 | Wafer cleaning brush A semiconductor wafer scrubber has a brush with a nubless outer surface for cleaning the surfaces of a semiconductor wafer. The nubless brush has a body and rotates around a central axis as it contacts the wafer surface. The brush has a central section with an outer... | 03/06/2007 |
| 7176676 | Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to the rotating microfeature workpiece are disclosed herein. The characte... | 02/13/2007 |
| 7162765 | Seal system for irrigated scrubber mandrel assembly An improved cleaning fluid supply housing assembly for a cascade-type substrate scrubber having a sliding piston configured with a flange with recesses so that the piston is out of contact with the rotating part of the brush core mandrel bearing assembly. Rather, th... | 01/16/2007 |
| 7160172 | Multi-station disk finishing apparatus and method Multi-disk processing system and method of continuous finishing of memory media disks for digital data storage systems in preparation for magnetic memory coating, comprising four main sub-systems: 1) multiple driven spindles mounted on a chassis, at 3, 6, 9 and 12 o... | 01/09/2007 |
| 7137164 | Glass washing machine with broken glass removal system A glass sheet washing machine with a broken glass removal system includes a support, a liquid container or reservoir, a pump, a liquid applicator, and a liquid permeable member. The support supports a glass sheet being washed. The liquid reservoir is positioned belo... | 11/21/2006 |
| 7121919 | Chemical mechanical polishing system and process Chemical mechanical polishing (CMP) systems and methods are provided herein. One aspect of the present subject matter is a polishing system. One polishing system embodiment includes a platen adapted to receive a wafer, and a polishing pad drum that has a cylindrical... | 10/17/2006 |
| 7111631 | Portable flushing apparatus for motor vehicles The present invention 10 discloses a portable spraying apparatus for motor vehicles comprised of a source of water 16, a pump 18 for pressurizing the water, and conduit 20 having a plurality of water outlet apertures 50 therein pos... | 09/26/2006 |
| 7087121 | Device and method for cleaning a surface of a member for storing and transporting goods A method and device for removing sawdust from a deck surface (24) of a wooden pallet (10) is provided. The device comprises a rotary brush (124) having a working length (WL) defined by a plurality of bristles (130). The working length (WL... | 08/08/2006 |
| 7062815 | Back scrubber A back scrubber includes a substantially U-shaped bracket including an elongated vertical base plate with an upper arm and a lower arm perpendicularly extending therefrom. Removably positioned between the upper and lower arms is a tubular brush member that is automa... | 06/20/2006 |
| 7063749 | Scrubber with sonic nozzle An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a substrate supported by the plurality of rollers, and a sonic nozzle posi... | 06/20/2006 |
| 7030603 | Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to the rotating microfeature workpiece are disclosed herein. The characte... | 04/18/2006 |
| 7007333 | System and method for a combined contact and non-contact wafer cleaning module A system and a method for cleaning and rinsing a wafer includes at least three rollers that are capable of supporting a wafer by an edge of the wafer. At least one of the rollers is driven and thereby capable of rotating the wafer. At least one of the rollers is a m... | 03/07/2006 |
| 7003843 | Garbage can cleaning system A garbage can cleaning system for cleaning a garbage can after garbage has been removed from the garbage can. The garbage can cleaning system includes a platform assembly being designed for being positioned on a vehicle, such as a flatbed trailer. The platform assem... | 02/28/2006 |
| 6996861 | Shower mounted back cleansing and massaging apparatus A selectable shower scrubber massager is an apparatus to aid in the scrubbing and cleaning of one's back while in the shower. The apparatus is suspended from the shower head from an adjustable hanger that permits vertical adjustment of the body of the apparatus. The... | 02/14/2006 |
| 6986185 | Methods and apparatus for determining scrubber brush pressure In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The position of the brush relative to the wafer may be adjusted based on th... | 01/17/2006 |
| 6976903 | Apparatus for controlling retaining ring and wafer head tilt for chemical mechanical polishing A CMP system accurately measures eccentric forces applied to carriers for wafer or polishing pad conditioning pucks. An initial coaxial relationship between wafer axis of rotation and a carrier axis is maintained during application of the eccentric force, such that ... | 12/20/2005 |
| 6966823 | Buffing head and method for reconditioning an optical disc A buffing head (34) includes a rotary element (36) for retaining an optical disc (20) and causing the disc (20) to rotate at a first speed. A buffing element (38) contacts a work surface (30) of the optical disc (20),... | 11/22/2005 |
| 6942737 | Substrate cleaning apparatus and method A substrate is supported at a plurality of edge positions thereof, to be in horizontal posture, by support pins erected on a spin chuck. A two-fluid nozzle is fixed to a position spaced from and directly over edges of the substrate to clean the edges. Substantially ... | 09/13/2005 |
| 6907637 | Edge wheel assembly in a substrate processing brush box An edge wheel assembly for use in a semiconductor wafer fabrication brush box is provided. The edge wheel assembly is configured to support and to rotate a semiconductor wafer in a vertical orientation and includes an edge wheel assembly block having at least two pa... | 06/21/2005 |
| 6865764 | Fixture for assembling a post-CMP cleaning brush A fixture for assembling a post-CMP cleaning brush. The post-CMP cleaning brush is provided with a brush core and an outer brush, and the outer brush is provided with a hollow portion. The fixture comprises a base, a plurality of posts and a guiding member. The base... | 03/15/2005 |
| 6851151 | Brush drive assembly in a substrate processing brush box A modular brush drive assembly used in a brush box for processing a substrate is provided. The modular brush drive assembly includes a pair of brush drives. Each of the pair of brush drives has a mandrel capable of receiving a brush for processing a substrate, a man... | 02/08/2005 |
