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Class 139/258 - Attached to magazine


Subclass of Class 139 - Textiles: weaving
Definition: The end being attached to the magazine.
No. of patents: 1
Last issue date: 08/16/1988


NumberTitleIssue Date
4763602Thin film deposition apparatus including a vacuum transport mechanism
An apparatus for depositing thin films on a substrate includes at least one deposition module, a load lock module, a gate valve and a transportation mechanism for moving a substrate between the load lock and the at least one deposition module, the transpo... 		08/16/1988
 
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