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| Number | Title | Issue Date |
| 7140233 | Immersion lithography proximity sensor having a nozzle shroud with flow curtain The present invention is directed to an immersion lithography proximity sensor having a nozzle shroud with a flow curtain. The immersion lithography proximity sensor includes a shroud that affixes to the nozzle. A plenum is located inside the shroud that holds a shr... | 11/28/2006 |
| 6053207 | Valve cover and its related system The invention relates to a valve cover system in which the valve cover has a distinctive shape of a regular octagon and indicia identifying its function and relationship to the system it controls. In addition, the invention relates to a valve cover system... | 04/25/2000 |
| 5861685 | Pump and master valve circuit isolator apparatus A circuit isolator apparatus for use with pump or master valve circuits having a plurality of controllers connected thereto. One isolator apparatus is used in association with each controller. The isolator apparatus includes a pair of relays which allow o... | 01/19/1999 |
| 4955547 | Fluidic oscillating nozzle A fluidic oscillating nozzle that oscillates a fluid jet at high frequency by the use of fluidic amplification technology with no moving parts. The jet that issues from the nozzle is a zero-degree jet of fluid that maintains a very high energy density; ho... | 09/11/1990 |
| 4905909 | Fluidic oscillating nozzle A fluidic oscillating nozzle that oscillates a fluid jet at high frequency by the use of fluidic amplification technology with no moving parts. The jet that issues from the nozzle is a zero-degree jet of fluid that maintains a very high energy density; ho... | 03/06/1990 |
| 4874016 | Method for improving signal-to-noise ratios in fluidic circuits and apparatus adapted for use therewith A fluidic circuit (10) having two oscillators (22,24) which separately vent to a common volume (78) and receive pressurized fluid inputs along separate flow paths (54,56) is provided with filters (80) positioned both upstream and downstream from each osci... | 10/17/1989 |
| 4852613 | Fluidic pump control systems A control system for a single acting or double acting fluidic pump comprising a detector stage (1), a power amplifiction stage (2) and a primary element stage (3). The detector stage comprises bistable fluidic amplifiers for detecting pressure changes in ... | 08/01/1989 |
| 4833880 | Fluidic set point amplifier apparatus and method, and uses thereof A fluidic set point amplifier provides an output signal which is strongly linear with respect to pressure of fluid supply, free of hysteresis, and has a zero crossing (set point) at a determined value of supply pressure. Uses of the set point amplifier in... | 05/30/1989 |
| 4644781 | Fluid property measuring device Presented is a fluid property measuring device which can be used to measure he viscosity, the density, the volumetric flow rate, and the mass flow rate, of a fluid without using moving parts. The fluid property measuring device comprises a linear fluid res... | 02/24/1987 |
| 4276895 | Apparatus and method for temperature compensation of fluidic circuits A temperature compensation device for a fluidic circuit is disclosed. The vice comprises a high gain fluid amplifier having input and feedback resistors. The resistance to fluid flow through the input resistor is dependent upon fluid density, while the re... | 07/07/1981 |
| 4265162 | Servovalve having fluidic actuator A fluidic driver amplifier for a servovalve has its controllably directed fluid jet differentially divided by a divider element which moves with a main valve piston in a manner to equalize the differential pressure received from the jet when the piston re... | 05/05/1981 |
| 4265116 | Fluidic temperature sensor A fluidic analog temperature sensor which compensates for variations in the supply pressure to the temperature sensor.... | 05/05/1981 |
| 4260106 | Fluidic oscillator with resonant inertance and dynamic compliance circuit The fluidic oscillator consists of a resonant fluid circuit having a fluid inertance and a dynamic fluid compliance. The inertance is a conduit interconnecting two locations of a chamber on each side of a working fluid jet issuing into one end of the cham... | 04/07/1981 |
