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| Number | Title | Issue Date |
| 7866341 | Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an ... | 01/11/2011 |
| 7793685 | Controlling gas partial pressures for process optimization Apparatus for establishing and controlling a low pressure gas mixture in a vacuum enclosure (8) comprises at least one secondary pump (9) of the molecular, turbomolecular, or hybrid type, followed by at least one primary pump (10), with first co... | 09/14/2010 |
| 7392825 | Arrangement for tool equipment An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair. ... | 07/01/2008 |
| 7350544 | Station for controlling and purging a mini-environment A SMIF type mini-environment (1) can be connected onto a purge station (2). The purge station comprises a leaktight purge compartment (2b) whose top face includes a closable transfer passage (2c) facing the bottom face (1... | 04/01/2008 |
| 7219692 | Apparatus for conditioning the atmosphere in a chamber In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream f... | 05/22/2007 |
| 7163380 | Control of fluid flow in the processing of an object with a fluid An apparatus for and methods of control of a fluid flow. In a system for supercritical processing of an object, the apparatus includes a measuring device for measuring a pump performance parameter and a controller for adjusting a fluid flow in response to the perfor... | 01/16/2007 |
| 7140389 | Vacuum producing device A vacuum producing device (1) possessing a principal suction nozzle unit (2) with a shut off valve (27) on the upstream side thereof and an additional suction nozzle unit (3) connected in parallel to the principal suction nozzle unit (... | 11/28/2006 |
| 7101155 | Vacuum pumping system and method of controlling the same A vacuum pump system (10; 36; 46) for pumping gas from an enclosure (12) comprises: a vacuum pump unit (14) having a pump inlet (16) connectable with an outlet (18) of such an enclosure and a pump outlet (20) for exhausting ... | 09/05/2006 |
| 7086271 | Vacuum generating method and device A test device and method for drawing a vacuum relative to an ambient environment. The device includes a member defining a passage, a valve, and a fluid communication conduit. The passage extends between a first end and a second end, and includes a constriction defin... | 08/08/2006 |
| 7077159 | Processing apparatus having integrated pumping system An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock ch... | 07/18/2006 |
| 7051759 | Processing apparatus having integrated pumping system An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock ch... | 05/30/2006 |
| 7037411 | Apparatus and method for handling easily polymerizable substance, apparatus for extracting liquid from apparatus under reduced pressure, and process for producing easily polymerizable substance In an apparatus capable of distilling and refining an easily polymerizable substance, piping is performed so that when a strainer in action is switched to a backup strainer, the strainer can be switched after removing air in the backup strainer to replace air in the... | 05/02/2006 |
| 7013916 | Sub-atmospheric gas delivery method and apparatus An apparatus for containing and delivering hazardous gases at sub-atmospheric pressure from a pressurized container is provided which includes a valve body in sealed communication with an outlet orifice of the pressurized container. The outlet orifice of the pressur... | 03/21/2006 |
| 7004453 | Pendulum valve with a full range of position control Embodiments of the present invention provide a pendulum valve with a full range of normal position control. The pendulum valve can include a valve housing having a flow channel, and a valve body that is movable within the valve housing between a fully open position ... | 02/28/2006 |
| 7006888 | Semiconductor wafer preheating Embodiments of the present invention provide a method, article of manufacture, and apparatus for processing semiconductor wafers. The method includes preheating a semiconductor wafer in two types of chambers. In one embodiment, a first preheating chamber is a load l... | 02/28/2006 |
| 6983757 | Pressure differential distribution system An pressure differential distribution system which offers an pressure differential reaction element (1) made of a comfortable, flexible pressure differential interface (2) that is attached to a support element (3), which in conjunction with a di... | 01/10/2006 |
| 6968851 | Double block valve with proving system A double block valve and a valve proving system are disclosed. The double block valve is actuated by a single actuator and includes a valve body housing a cavity. The cavity defines an upstream portion with a fluid inlet and a downstream portion with a fluid outlet.... | 11/29/2005 |
| 6964187 | Vacuum sensor An apparatus and method for measuring the vapor or gas content of a vacuum chamber (1) by a vapor sensor (21) located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sen... | 11/15/2005 |
| 6938638 | Gas circulating-processing apparatus A gas-circulating processing apparatus which comprises a processing chamber, a gas feeding piping, a gas supply piping, a first exhaust mechanism discharging a gas from the processing chamber, a second exhaust mechanism discharging a portion of a gas discharged from... | 09/06/2005 |
| 6938456 | Vacuum generating method and device including a charge valve and electronic control A vacuum generating device and method include a member that defines a passage, a first valve, a second valve, a fluid communication conduit, a transducer, and a processor. The passage extends between a first end and a second end, and includes a constriction that def... | 09/06/2005 |
| 6926029 | Wafer container A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, a... | 08/09/2005 |
| 6916397 | Methods and apparatus for maintaining a pressure within an environmentally controlled chamber In a first aspect, a system includes (1) a chamber; (2) a variable speed vacuum pump coupled to the chamber; and (3) a pressure controller coupled to the chamber. The pressure controller compares a set point pressure with a pressure measurement for the chamber and a... | 07/12/2005 |
| 6910497 | Semiconductor component manufacturing plant with ventilated false floor According to the invention, a semiconductor component manufacturing plant is constructed in a building having an upper storey and a lower storey separated from one another by a support slab and a false floor. The support slab has passageway openings, whilst the fals... | 06/28/2005 |
| 6883539 | Wafer container A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, a... | 04/26/2005 |
| 6857859 | Gasket for jet pump assembly of a fuel supply unit A fuel supply unit 10 includes a fuel reservoir 22 for holding fuel, a fuel pump 18 within the reservoir for pumping fuel from the reservoir, a jet pump assembly 16 within the reservoir for drawing fuel from a fuel tank into the reservoir... | 02/22/2005 |
| 6834664 | Device making use of heated fluid to reduce dust products in waste gas pipeline A device making use of heated fluid to reduce dust products in a waste gas pipeline comprises a chamber, a heating pipe placed in the chamber, a gas injection pipe for injecting gas into the chamber, an exhaust pipe for exhausting gas carrying away heat of the heati... | 12/28/2004 |
| 6830068 | Vacuum generating method and device including a charge valve A vacuum generating device and method include a member defining a passage, a first valve, a second valve, and a fluid communication conduit. The passage extends between a first end and a second end, and includes a constriction defining an orifice. The first valve co... | 12/14/2004 |
| 6827101 | Vacuum generating method and device A test device and method for drawing a vacuum relative to an ambient environment. The device includes a member defining a passage, a valve, and a fluid communication conduit. The passage extends between a first end and a second end, and includes a constriction defin... | 12/07/2004 |
| 6817377 | Processing apparatus having integrated pumping system An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock ch... | 11/16/2004 |
| 6786228 | Air circuit with air economizing and memory The invention is summarized as a method and apparatus for providing a memory function for an air economizing fluid pressure circuit. A latchable or detented valve is used to control an air circuit that defaults to permit the generation of vacuum pressure, but is als... | 09/07/2004 |
| 6782907 | Gas recirculation flow control method and apparatus for use in vacuum system A gas recirculation flow control method and apparatus for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting the gas from the vacuum chamber and reducing the pressure in the vacuum chamber to a desi... | 08/31/2004 |
| 6779555 | Vacuum generating method and device including a charge valve and electronic control A vacuum generating device and method include a member that defines a passage, a first valve, a second valve, a fluid communication conduit, a transducer, and a processor. The passage extends between a first end and a second end, and includes a constriction that def... | 08/24/2004 |
| 6691726 | System and method for using bent pipes in high-purity fluid handling systems A novel method for bending tubes suitable for use in high-purity fluid handling systems includes selecting a tube made from a material having a grain-size number of at least 5, and forming a bend in the tube with a bend radius of greater than 1.5 times th... | 02/17/2004 |
| 6681801 | Pumping station with efficiency increasing and backflow preventing structure A pump station including a structure that includes at least one inlet chamber and at least one discharge chamber arranged on a different level. A separating wall is arranged within the structure between the two chambers, and at least one pump delivers a l... | 01/27/2004 |
| 6609536 | Depression cap for a bottle A depression cap comprises a first end and a second end, the second end having a compartment defined therein for engaging with a nose of a bottle. An air pump is provided for drawing air out of the bottle. A pressure-activated switch is provided for contr... | 08/26/2003 |
| 6598615 | Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber A method and apparatus for use in conjunction with a plasma reaction chamber provide both throttling functionality and independent vacuum isolation for a turbomolecular pump. A throttle valve provides for precise reaction chamber pressure regulation, and ... | 07/29/2003 |
| 6520203 | Evacuation and inert gas introduction apparatus The evacuation and inert gas introduction apparatus capable of quickly switching over between the evacuation state and the inert gas introduction state, is provided for a synthesizing device for molecular asymmetrical catalysts. The evacuation line is con... | 02/18/2003 |
| 6513540 | System and method for using bent pipes in high-purity fluid handling systems A novel method for bending tubes suitable for use in high-purity fluid handling systems includes selecting a tube made from a material having a grain-size number of at least 5, and forming a bend in the tube with a bend radius of greater than 1.5 times th... | 02/04/2003 |
| 6453481 | Vacuum waste system having a vacuum control valve A vacuum waste system is disclosed having a receptacle for receiving waste, the receptacle having an outlet, and a collection tank in fluid communication with the receptacle outlet. A vacuum source is in fluid communication with the collection tank to pro... | 09/24/2002 |
| 6446651 | Multi-chamber vacuum system and a method of operating the same A vacuum system including first and second vacuum chambers, a high-vacuum pump having its inlet connected with the first vacuum chamber, a dischargeable into atmosphere, vacuum pump for evacuating both first and second vacuum chambers; a first valve for c... | 09/10/2002 |
