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| Number | Title | Issue Date |
| 8166999 | Gas block device and gas block method A use condition of gas equipment is monitored. An abnormality determination unit 26 determines whether or not a use flow volume obtained by detecting a flow velocity obtained by measuring a signal transfer time in a medium using a flow velocity detection unit... | 05/01/2012 |
| 8162000 | Adjustable pneumatic system for a surgical machine A pneumatic system for a surgical machine includes a reservoir, first and second proportional valves, and a controller. The reservoir holds pressurized gas. The first proportional valve is located on an input side of the reservoir and allows a variable amount of pre... | 04/24/2012 |
| RE43288 | High purity fluid delivery system A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable ... | 04/03/2012 |
| 8082946 | Liquid flow controller and precision dispense apparatus and system Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having... | 12/27/2011 |
| 8079383 | Controller gain scheduling for mass flow controllers A mass flow controller having a feedback controller gain, comprises: a sensor configured so as to sense the flow of fluid through controller; a valve arranged so as to adjust the flow of fluid through the controller; and a processor configured so as to control the v... | 12/20/2011 |
| 8074677 | Method and apparatus for controlling gas flow to a processing chamber A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports.... | 12/13/2011 |
| 8056579 | Mass flow controller A mass flow controller has: a flow rate sensor section that measures the flow rate of a fluid and outputs a flow rate measurement signal indicating the measurement value; a flow rate control valve disposed upstream or downstream of the flow rate sensor section; a ca... | 11/15/2011 |
| 8037896 | Pressure regulation in remote zones A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each encl... | 10/18/2011 |
| 8015995 | System and method for flow monitoring and control One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coup... | 09/13/2011 |
| 7971604 | Flow controller delivery of a specified-quantity of a fluid A system and method for delivering a specified-quantity of a fluid using a flow controller based on a fluid delivery profile is described. One embodiment includes a fluid delivery profile that includes a delivery time window with a plurality of set points that each ... | 07/05/2011 |
| 7954508 | Electronically controlled valve actuator in a plumbed water line within a water conditioning management system An electronically controlled actuator in a plumbed water line within a water conditioning management system, having an at least one valve with a valve stem in a plumbed water line within the water conditioning management system, an at least one actuator, an at least... | 06/07/2011 |
| 7950413 | Electromagnetic pressure regulating valve device having an integrated pressure sensor An electromagnetic pressure regulating valve device for regulating a hydraulic pressure including at least one pressure regulating valve which includes a solenoid part having at least one bobbin holding an electric coil, a coil core and a movably guided armature; a ... | 05/31/2011 |
| 7866337 | Chemically inert flow controller with non-contaminating body A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowi... | 01/11/2011 |
| 7861740 | Digital flow control A digital flow control assembly for controlling the volumetric flow rate of fluids includes a fluid flow conduit, a plurality of serially-arranged flow nodes positioned along a length of the fluid flow conduit, and a device for generating a signal. The device for ge... | 01/04/2011 |
| 7828008 | Online partial stroke testing system using a modified 2004 architecture A system and a method for partial stroke testing of a critical valve using a bypass valve includes flowing two streams of gas simultaneously through a bypass valve, opening the critical valve with the gas from the bypass valve, and determining a calibration time int... | 11/09/2010 |
| 7798168 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source ves... | 09/21/2010 |
| 7775236 | Method and apparatus for controlling gas flow to a processing chamber A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports.... | 08/17/2010 |
| 7661439 | Safety override circuit for pneumatic positioner and method of use thereof Systems and processes may provide improved performance for a pneumatic positioner during a safety override. In certain implementations, a system and process may include the ability to receive an input control signal, power control circuitry of the pneumatic position... | 02/16/2010 |
| 7650903 | Fluid controller A fluid controller that allows facilitated installment, piping and wiring connection to semiconductor manufacturing equipment and does not corrode even when a corrosive fluid is used, includes a flowmeter sensor section having a first ultrasonic transducer which tra... | 01/26/2010 |
| 7621293 | Versatile emergency shutdown device controller implementing a pneumatic test for a system instrument device A multi-functional or versatile emergency shutdown valve controller may be used in various different emergency shutdown configurations to enable the testing of different types and configurations of emergency shutdown devices and the supporting equipment associated t... | 11/24/2009 |
| 7614421 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source ves... | 11/10/2009 |
| 7594517 | Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed The present invention prevents substantial reduction of flow rate control accuracy in a small flow quantity range, achieves accurate flow rate control over the entire range of flow rate control, and also allows control of a wide pressure range of a chamber with accu... | 09/29/2009 |
| 7549439 | Flow control device A flow control device having a power saving effect in addition to a water saving effect. Further, another object is to provide a flow control device easy to install, maintain and manage. The flow control device of the invention comprises a flush valve device having ... | 06/23/2009 |
| 7533690 | Multi-functional regulator A multifunctional regulator provides a housing having an inlet passage joined with an outlet passage through a poppet valve. The housing has a control diaphragm separating the control chamber into a first volume and a second volume and depending on the differential ... | 05/19/2009 |
| 7527069 | Electromagnetic split flapper pressure relief valve A pressure relief check valve system includes a valve body, a flapper, a magnet, an electromagnet, and a pressure sensor circuit. The flapper is rotationally mounted on the valve body and is movable between a closed position and an open position. The magnet is coupl... | 05/05/2009 |
| 7503340 | System and method for controlling fluid flow A system for controlling fluid flow comprises a first fluid conduit having a length, an inner diameter, an input pressure and an output pressure, and a second fluid conduit having a length, an inner diameter, an input pressure and an output pressure where the output... | 03/17/2009 |
| 7431045 | Flow restrictor A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow... | 10/07/2008 |
| 7431046 | Pneumatic device for continuously varying the pressure of compressed air A pneumatic device for continuously varying the pressure of compressed air for feeding pneumatic actuators, comprising a pressure regulation device, which is adapted to receive in input an unregulated pressure line and to provide in output a regulated pressure; an e... | 10/07/2008 |
| 7428913 | Valve assembly having articulating rigid seating surface A valve assembly including a valve body having an orifice, and a valve member received in the valve body and movable along an axis with respect to the orifice. The valve member includes a cup in an end of the valve member and the cup has an end wall facing the orifi... | 09/30/2008 |
| 7424894 | Method and apparatus for providing a determined ratio of process fluids A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first pre... | 09/16/2008 |
| 7424895 | Method and system for flow measurement and validation of a mass flow controller Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements tak... | 09/16/2008 |
| 7412986 | Method and system for flow measurement and validation of a mass flow controller Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within ... | 08/19/2008 |
| 7401624 | Method for monitoring a pipeline and position regulator for a control valve The invention relates to a method for monitoring a pipeline in order to detect the slow reduction of the free inner cross-section by means of the position of a control valve in the pipeline. When the flow rate is essentially constant, a first position is determined ... | 07/22/2008 |
| 7403839 | Water shut-off system A moisture monitoring and control system comprising: 1) a plurality of moisture sensors; 2) one or more local or remote control stations capable of monitoring and controlling each of the individual elements of the moisture monitoring and control system; 3) at least ... | 07/22/2008 |
| 7398795 | Excess flow valve An excess flow valve includes: a valve that opens and closes a flow path; a solenoid that keeps the valve in an opened state; a pressure detector detecting the primary-side pressure of the valve; and a controller controlling current flow to the solenoid based on pre... | 07/15/2008 |
| 7389787 | Closed loop additive injection and monitoring system for oilfield operations A system is provided that monitors at the wellsite injection of additives into formation fluids recovered through wellbores and controls the supply of such additives from remote locations. The selected additive is supplied from a source at the wellsite into the well... | 06/24/2008 |
| 7387135 | Valve assembly having rigid seating surfaces A valve assembly including a valve body having a bore and a port extending to the bore, an orifice member received in the bore and having an end wall and a side wall, and wherein the end wall defines an orifice providing fluid communication with the port of the body... | 06/17/2008 |
| 7383851 | Closed loop pressure control system and electrically operated pressure control valve with integral pressure sensor and method of making same A solenoid operated valve has a pressure transducer sensing valve outlet pressure integrally formed in the valve body, such as by overmolding. Upon connection of the transducer and solenoid to an electronic controller, the controller generates a valve energization s... | 06/10/2008 |
| 7380564 | System and method for a mass flow controller A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions... | 06/03/2008 |
| 7380568 | Water flow controller An apparatus for controlling water flow is provided. The apparatus is a novel electronic water controller capable of operation using a battery-type power source, and providing for achievement of long battery life. The apparatus generally comprises an electronic cont... | 06/03/2008 |
