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| Number | Title | Issue Date |
| 8109288 | Flow rate control system and shower plate used for partial pressure control system A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 i... | 02/07/2012 |
| 8087427 | Vapor phase epitaxy apparatus and irregular gas mixture avoidance method for use therewith A vapor phase epitaxy apparatus having a processing chamber with a target workpiece such as a wafer being received therein is disclosed. This apparatus includes a first flow path which supplies the chamber with a gas needed for vapor phase epitaxial film formation o... | 01/03/2012 |
| 7699070 | Shutoff valve apparatus and mass flow control device with built-in valve Shutoff valve apparatus comprising: a valve block having a valve chest on which gas collects temporarily, an inlet flow path which makes gas flow into a valve chest, an outlet flow path into which gas is made to flow out of a valve chest, a valve seat located in the... | 04/20/2010 |
| 7658204 | Semiconductor manufacturing apparatus enabling inspection of mass flow controller maintaining connection thereto An opening/closing of a plurality of valves are controlled so that a plurality of gases flow into a chamber in an operation of a semiconductor manufacturing apparatus, and the opening/closing of the plurality of valves are controlled so that a gas A flows into mass ... | 02/09/2010 |
| 7481240 | Partial pressure control system, flow rate control system and shower plate used for partial pressure control system A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 i... | 01/27/2009 |
| 7424895 | Method and system for flow measurement and validation of a mass flow controller Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements tak... | 09/16/2008 |
| 7424894 | Method and apparatus for providing a determined ratio of process fluids A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first pre... | 09/16/2008 |
| 7422028 | Apparatus for controlling and metering fluid flow A device for metering and controlling fluid flow includes a variable orifice and is configured to use a pressure sensor. The device includes a fluid flow conduit having at least one planar inner wall that extends along a portion of the fluid flow conduit length, and... | 09/09/2008 |
| 7412986 | Method and system for flow measurement and validation of a mass flow controller Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within ... | 08/19/2008 |
| 7412336 | Attitude insensitive flow device system and method Disclosed herein are systems and methods for attitude insensitive flow devices. The system can include a flow device having a processor and a computer readable medium accessible by the processor that stores a set of computer instructions executable by the processor.... | 08/12/2008 |
| 7389787 | Closed loop additive injection and monitoring system for oilfield operations A system is provided that monitors at the wellsite injection of additives into formation fluids recovered through wellbores and controls the supply of such additives from remote locations. The selected additive is supplied from a source at the wellsite into the well... | 06/24/2008 |
| 7387135 | Valve assembly having rigid seating surfaces A valve assembly including a valve body having a bore and a port extending to the bore, an orifice member received in the bore and having an end wall and a side wall, and wherein the end wall defines an orifice providing fluid communication with the port of the body... | 06/17/2008 |
| 7380564 | System and method for a mass flow controller A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions... | 06/03/2008 |
| 7369230 | Apparatus and method for measuring particulate flow rate An apparatus for measuring the rate of flow of a volume of particulate material comprising a transparent tube of known cross-sectional area, means for supplying a flow of particulate material through the transparent tube, and an optical signal sensor for receiving a... | 05/06/2008 |
| 7367350 | Processing device and method of maintaining the device A film processing device using vaporized liquid source capable of confirming the flow control accuracy of flow control equipment such as a mass flow controller (15) controlling the flow of the liquid source without separating the flow control equipment from p... | 05/06/2008 |
| 7360551 | Method and apparatus for providing a determined ratio of process fluids A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first pre... | 04/22/2008 |
| 7360545 | Dishwasher A dishwasher having an improved valve assembly is disclosed. The dishwasher includes a housing, a tub provided in the housing, an injector assembly for injecting water onto tableware positioned in the tub, and an inlet valve assembly. The inlet valve assembly includ... | 04/22/2008 |
| 7357151 | Fluid control devices Improved fluid control devices are provided for metering pressure effectively in environments that may contain solid particles and in which the ambient pressure is subject to change. Such a valve comprises a valve body containing a plunger assembly contacting a firs... | 04/15/2008 |
| 7337805 | Valve with adjustable stop An adjustable mechanism for a valve or actuator is provided. The adjustable mechanism cooperates with one or more pistons, which in turn cooperates with a valve element to limit the axial displacement of the valve element relative to the valve seat. The adjustable m... | 03/04/2008 |
| 7334602 | Apparatus for controlling flow rate of gases used in semiconductor device by differential pressure Provided is apparatus for controlling flow rate of gases used in semiconductor device by differential pressure by generating differential pressure in a fluid path. A differential pressure generation element generates pressure difference in the fluid path of gases us... | 02/26/2008 |
| 7327045 | Fuel delivery system and method providing regulated electrical output In a mobile fuel delivery vehicle, providing bulk aircraft fuel from a pressurized fuel reservoir to an aircraft, a method of regulating electrical output of an electrical power source, includes the steps of: (a) receiving, in a fluid path, the bulk aircraft fuel fr... | 02/05/2008 |
| 7321846 | Two-wire process control loop diagnostics A diagnostic device for coupling to a process control loop includes digital communication circuitry configured to receive a digital communication signal from the process control loop. The digital communication signal is a digitally modulated analog signal on the pro... | 01/22/2008 |
| 7314046 | Apparatus and method for respiratory tract therapy An apparatus is provided for delivering heated and humidified air to the respiratory tract of a human patient for respiratory tract therapy and treatment. The apparatus includes a supply unit (11) and a delivery tube (28) that can be releasably connect... | 01/01/2008 |
| 7309056 | Dual pedestal shut-off valve Integrated micro-valve is formed to control fluid flow and pressure. The valve converts supplied energy to mechanical energy through a means for energy conversion resident above a flexible wall or membrane. In one embodiment a sealed cavity contains a fluid that exp... | 12/18/2007 |
| 7299818 | Integrated microvalve and method for manufacturing a microvalve An integrated microvalve has a substrate, a first function layer applied to the substrate, and a second function layer applied to the first function layer, the first function layer being designed as a diaphragm in at least one valve area, the second function layer b... | 11/27/2007 |
| 7290450 | Process diagnostics A diagnostic device for use in a industrial process includes monitoring electronics or diagnostic circuitry configured to diagnose or identify a condition or other occurrence in the industrial process. The system can be implemented in a process device such as a flow... | 11/06/2007 |
| 7287541 | Method, apparatus and system for controlling fluid flow A system, apparatus and method of controlling the flow of a fluid are provided. In accordance with one embodiment of the present invention, a flow control device includes a valve having a flow path defined therethrough and a valve seat in communication with the flow... | 10/30/2007 |
| 7284564 | Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate A gas supply system arranged for dispensing of gas at a predetermined flow rate. The system employs a gas dispensing flow circuitry arranged for dispensing gas at selectively variable gas flow conductance conditions, to maintain the flow rate of the dispensed gas at... | 10/23/2007 |
| 7283913 | Method of executing a leak control system, and a leak control system for performing the method The invention relates to a leak control system (1) in two-stringed pipe installations and a method of executing a leak control system comprising one stop valve (2) with an associated flow meter (3) arranged in the supply pipe (4) of the p... | 10/16/2007 |
| 7280048 | Process control loop current verification A process device is configured for coupling to a two wire process control loop. Loop current output circuitry is configured to apply an output current to the two wire process control loop. Loop current verification circuitry is coupled to the two wire process contro... | 10/09/2007 |
| 7273063 | Methods and apparatus for pressure compensation in a mass flow controller Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabi... | 09/25/2007 |
| 7254518 | Pressure transmitter with diagnostics In one embodiment, a pressure transmitter is provided which diagnoses the condition of a primary element and/or an impulse line which connects to a pressure sensor. A difference circuit coupled to the pressure sensor has a difference output which represents the sens... | 08/07/2007 |
| 7243035 | System and method for mass flow detection device calibration Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a method includes providing device-specific calibration data; sensing a fl... | 07/10/2007 |
| 7231931 | System and method for a mass flow controller A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions... | 06/19/2007 |
| 7225085 | Precision gas flow meter A precision gas flow meter that is capable of measuring small flow rates of gasses precisely in the range of 0.01 to 10 L per minute. The meter is designed to measure the gas flow in small volume increments of predetermined value, and therefore can be used to measur... | 05/29/2007 |
| 7222636 | Electronically actuated valve The present invention relates to a method and apparatus for delivery of reactants to a substrate processing chamber. An electronically controlled valve assembly is provided for rapid delivery of pulses of reactants to the chamber. The valve assembly comprises a valv... | 05/29/2007 |
| 7225056 | Method for checking valves in a program-controlled water-carrying household appliance In household appliances with a safety hose, the stop valve and the control valve are hydraulically connected in series. It is thus impossible, or very difficult, for the user to detect when one of the valves is operating erroneously and not closing completely. The f... | 05/29/2007 |
| 7216558 | Wheel sensor assembly for rail base mounting A rail-mounted, wheel-sensing system is shown having a wheel sensor and a rail mounting platform. The system includes a rugged steel rail clamp including two blocks mounted on the base of the rail by a pair of bolt extending under the rail. One block is connected to... | 05/15/2007 |
| 7204270 | Automated water shut-off valve A device includes a housing that has a plurality of monolithically formed walls, wherein selected walls are provided with inlet and outlet ports respectively. The housing includes a coupling in fluid communication with the inlet and outlet ports, a mechanism for det... | 04/17/2007 |
| 7204266 | Pilot-operated pressure shut-off valve A pilot-operated pressure shut-off valve having a main control piston which, when an upper system limit pressure in the hydraulic system is reached, connects an inlet, via which pressure medium can be fed to a hydraulic system, to an outlet by taking up a first swit... | 04/17/2007 |
