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| Number | Title | Issue Date |
| 7306002 | System and method for wet cleaning a semiconductor wafer A system and method for cleaning a substrate, such as a semiconductor wafer, utilizes a rotatable wafer supporting assembly with a cylindrical body to provide stability for the substrate being cleaned, even at high rotational speeds. The rotatable wafer supporting a... | 12/11/2007 |
| 6729339 | Method and apparatus for cooling a resonator of a megasonic transducer A method for cleaning a semiconductor substrate is provided. The method initiates with introducing a liquid onto the top surface of the semiconductor substrate. Then, a bottom surface of a resonator is coupled to a top surface of a semiconductor substrate through th... | 05/04/2004 |
| 5560230 | Chaos washing machine and a method of washing thereof This invention relates to a chaos washing machine for improving washing power and preventing the twist of clothes comprising a first washing tank having a plurality of induce holes for inducing the water current in which a detergent dissolved into the spa... | 10/01/1996 |
| 5509431 | Precision cleaning vessel A method for precision cleaning of a workpiece with a cleaning fluid comprising liquid and/or supercritical fluid carbon dioxide and a primary solvent which is liquid at ambient temperatures and pressures comprises first placing the workpiece in a pressur... | 04/23/1996 |
| 5226969 | Method for cleaning solid surface with a mixture of pure water and calcium carbonate particles A method for cleaning a solid surface which is effective for a substance to be cleaned having a complicated structure and which uses no solvent such as CFC or the like which is harmful to the environment of the earth. A cleaning liquid is obtained by mixi... | 07/13/1993 |
| 4658842 | Rinsing apparatus for flat objects An apparatus for generally cleaning large and substantially flat objects such as serigraphic printing frames is disclosed. The apparatus comprises a substantially flat vat covered by a lid and adapted to receive a cleaning liquid up to a predetermined lev... | 04/21/1987 |
| 4460005 | Washing apparatus for tubular members A new and improved apparatus for washing soiled tubular members in a cleaning fluid wherein the apparatus includes a cleaning fluid tank for containing the cleaning fluid therein, support members with the cleaning fluid tank for supporting the tubular mem... | 07/17/1984 |
| 4106518 | Apparatus for washing grossly soiled products of plastic material for subsequent re-use An apparatus for continuously cleaning grossly soiled products of plastic material, such as sheets, bands, sacks or the like and for preparing the material for subsequent re-use, comprising an elongated container having at least one downwardly extended fu... | 08/15/1978 |
| 4078942 | Method and apparatus for cleaning strip in a molten salt bath Strip is cleaned by passing it through a molten salt bath in a rectangular tank having U-shaped heating tubes arranged horizontally along each longitudinal side of the tank. Agitators positioned within L-shaped ducts at diagonally opposite corners of the ... | 03/14/1978 |
| 4004600 | Dishwasher with special low washing liquid usage cycle A dishwasher having a washing chamber with upper and lower dishracks disposed therein and having associated therewith upper and lower spray devices supplied with washing liquid respectively by first and second pumping devices. The first and second pumping... | 01/25/1977 |
| 3952756 | Semi automatic parts cleaning machine Equipment for cleaning metal or plastic parts by immersion in a tank-contained agitated liquid cleaning solution in which the parts are loaded into open side cages mounted on a powered carrier wheel immersed in the solution and having interrupted rotation... | 04/27/1976 |
