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Class 134/102.2 - With pressurized air or gas supplying means for fluid movement


Subclass of Class 134 - Cleaning and liquid contact with solids
Definition: Apparatus combined with a source of air or gas, under pressure,
No. of patents: 211
Last issue date: 08/04/2009


1            
NumberTitleIssue Date
7568490Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids
An apparatus and method are disclosed in which a semiconductor substrate having a surface containing contaminants is cleaned or otherwise subjected to chemical treatment using a foam. The semiconductor wafer is supported either on a stiff support (or a layer of foam...
08/04/2009
7422641Substrate cleaning apparatus and substrate cleaning method
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During clea...
09/09/2008
7386944Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer
A method an apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer are provided. In the apparatus for cleaning and drying a wafer, the wafer is dipped into a cleaning solution in a cleaning tank. The wafer is then dried using a drying gas in ...
06/17/2008
7373941Wet cleaning cavitation system and method to remove particulate wafer contamination
A cavitation cleaning system and method for using the same to remove particulate contamination from a substrate including providing at least one substrate immersed in a cleaning solution said cleaning solution contained in a cleaning solution container. The containe...
05/20/2008
7370644EGR control apparatus and method for operating the same
An ECU calculates a foreign-matter accumulation index base on a total flow rate of EGR gas integrated since the previous execution of a last foreign-matter removal operation until the present execution of the foreign-matter removal operation. The ECU controls an act...
05/13/2008
7367346Method for cleaning hollow tubing and fibers
Hollow porous fibers containing adhered contaminants are cleaned to remove the contaminants by backflushing a liquid to fill the pores, and adding a flow of gas so as to form a two-phase mixture of gas and bubbles of liquid that can scrub the fibers, loosening the c...
05/06/2008
7343922Wafer drying apparatus
A wafer drying method includes submerging a wafer in a cleaning solution in a dry chamber. An organic liquid vapor from an organic liquid is supplied into the dry chamber at a first volumetric supply rate to form an organic liquid layer on a surface of the cleaning ...
03/18/2008
7328712Cleaning bench for removing contaminants from semiconductor process equipment
Described are cleaning benches and methods for removing contaminant layers from semiconductor process components using small volumes of hazardous liquids and minimizing cross-contamination between components from different deposition chambers. Components to be clean...
02/12/2008
7326305System and method for decapsulating an encapsulated object
A system and method for the selective etching or removal of encapsulating material from an encapsulated object, such as a semiconductor, includes depositing an encapsulant-removal agent, such as a solvent or acid, onto the surface of the object. A flow of heated gas...
02/05/2008
7316236Cleaning device for the shaving head of a dry shaving apparatus
A shaving head cleaning device includes a housing, a receptacle configured to receive the dry shaving apparatus, a receiving region configured to receive the shaving head of the dry shaving apparatus, a reservoir for containing cleaning fluid, a supply conduit conne...
01/08/2008
7314529Substrate cleaning apparatus and substrate cleaning method
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During clea...
01/01/2008
7288156Methods for cleaning a substrate
The invention provides a water supplying apparatus and method thereof which has a high capacity of peeling and removing a disused material such as a resist film and the like, and can efficiently use water vapor. A water supplying apparatus for executing a washing pr...
10/30/2007
7275553Liquid processing apparatus and liquid processing method
A cleaning processing apparatus comprises a spin chuck for holding a wafer W, an under plate being positioned to face the back surface of the wafer W with a prescribed gap provided therebetween, a support member for supporting the under plate, and a nozzle hole form...
10/02/2007
7267130Substrate processing apparatus
The substrate processing apparatus is provided with a gas-liquid mixing nozzle for generating a process liquid mist by mixing a liquid and a pressurized gas, to discharge the process liquid mist to a substrate at high speeds. The liquid may be remover liquid, interm...
09/11/2007
7264009Cleaning system and method of use
A cleaning apparatus is provided for cleaning an inner surface of a container. A spray head is arranged for operable fluid communication with a fluid pump and has a nozzle configured to disperse liquid in a mist. A mount carries the spray head and is removably suppo...
09/04/2007
7258124Apparatus and method for treating surfaces of semiconductor wafers using ozone
An apparatus and method for treating surfaces of semiconductor wafers with a reactive gas, such as ozone, utilizes streams of gaseous material ejected from a gas nozzle structure to create depressions on or holes through a boundary layer of processing fluid formed o...
08/21/2007
7255115Apparatus for cleaning semiconductor wafers
An apparatus for cleaning semiconductor wafers includes a chamber, a bubbler having a vapor generating part for generating alcohol vapor and a spray pipe for spraying the alcohol vapor into the chamber, a gas supply nozzle for spraying gas into the chamber to dry th...
08/14/2007
7252095Mobile flushing unit and process
In one embodiment of the invention, a method of cleaning a workpiece is disclosed. The method comprises providing a mobile flushing unit and servicing the workpiece as follows: a) connecting a flexible hose of the mobile flushing unit to one end of the workpiece and...
08/07/2007
7225817Cleaning device for the shaving head of a dry shaving apparatus
A cleaning device for the shaving head of a dry shaving apparatus includes a receptacle having a reservoir adapted to receive the a shaving head and a pump to transfer a cleaning fluid from the reservoir and into the receptacle. A controllable drain disposed between...
06/05/2007
7216813Pressure gauge
A retrofittable pressure gauge for a spray gun includes a pressure sensor, located in a pressure chamber, a power source and a display unit, all enclosed within a case, a passageway providing fluid communication between the pressure chamber and a pressurised interio...
05/15/2007
7198052Mobile flushing unit and process
In one embodiment of the invention, a method of cleaning a workpiece is disclosed. The method comprises providing a mobile flushing unit and servicing the workpiece as follows: a) connecting a flexible hose of the mobile flushing unit to one end of the workpiece and...
04/03/2007
7179390Method of filtering a fluid and remote filtering station
Filtering of an operating fluid of a mechanical device is performed utilizing a pumping device of the mechanical device which routinely circulated the operating fluid within the mechanical device. A remote filtering station of the present invention has a first condu...
02/20/2007
7172383Wafer transfer equipment and semiconductor device manufacturing apparatus using wafer transfer equipment
A semiconductor wafer transfer equipment transfers a plurality of semiconductor wafers, held in grooves of carriers in an erected state, to a boat using first and second wafer elevators equipped with a comb-teeth portion and a wafer grip and transfer unit. The first...
02/06/2007
7156112Method and apparatus for cleaning paint supply systems
A solvent flush cleaning system for a paint supply system. The cleaning system includes an air injection system that injects air directly into the pumping chambers of the solvent pump to entrain air within the solvent. The cleaning system preferably includes a dedic...
01/02/2007
7152613Cleaning apparatus having fluid mixing nozzle for manufacturing flat-panel display
Provided is a cleaning apparatus having a fluid mixing nozzle, the cleaning apparatus having a fluid mixing nozzle, the cleaning apparatus for cleaning a glass plate used in the manufacture of a flat-panel display and which mixes a cleaning fluid with a gas and spra...
12/26/2006
7128539Method for improved cleaning of a pumping system
Improved method for cleaning a pump, fluid hose, and spray gun is provided by, for example, repeatedly changing the flow rate of the cleaning fluid pumped through the system to generate turbulence or increased turbulence and increased frictional resistance for enhan...
10/31/2006
7124466Particle capture system
A particle capture system includes a container sized to receive a structural disc drive component. A fixture is able to maintain the disc drive component within a spray zone in the container, and a first nozzle in the container is connected to a fluid source and is ...
10/24/2006
7125438Method and an apparatus for continuously deaerating a liquid
The invention relates to a method for continuously deaerating a liquid. The method comprises the step that the liquid is led into a closed container (1) so that a liquid surface (7) is formed within the container (1). The space above the liquid ...
10/24/2006
7124766Apparatus and use thereof in cleaning a respiratory device
A cleaning apparatus includes a tank housing and a partition disposed in the tank housing so as to divide the interior thereof into pumping and cleaning chambers as the only chambers within the tank housing adapted to contain cleaning liquid. A submersible pump moun...
10/24/2006
7118533Disinfecting and storage apparatus for a trans-esophageal probe
An apparatus adapted for use with a trans-esophageal probe. The apparatus comprises a disinfecting unit and a storage unit, each of which includes a tubular housing having an interior, upper and lower ends, and an opening at the upper end for access to the interior....
10/10/2006
7104268Megasonic cleaning system with buffered cavitation method
A wafer cleaning method and system including a combined high frequency signal, a low frequency signal, and in one embodiment a biased voltage signal, allows cleaning particles and impurities off of fine-structured wafers, through application of an acoustic field to ...
09/12/2006
7097717Method and device for collecting particulate contaminants during COblasting decontamination
Disclosed is a method and device for collecting particulate contaminants removed using a CO2 decontamination medium from an early step of a decontamination process. The device removes particulate contaminants from a contaminated subject by a decontaminati...
08/29/2006
7097713Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum from ceramic substrates
A method for removing a metallic layer from the surface of a ceramic substrate, the method including the steps of immersing the metallic coated ceramic substrate in a solution of up to 31% hydrochloric acid for a sufficient time to at least substantially dissolve or...
08/29/2006
7077486Enclosure for handling hazardous material
An enclosure for handling hazardous material includes a sealable housing which is configured with a first air inlet connected to a bubble gauge and a second air inlet disposed inside the housing for air evacuation from the housing is connected to a pump for maintain...
07/18/2006
7067018Automated system for handling and processing wafers within a carrier
A workpiece handling and processing system has a interface section for loading wafers from cassettes into carriers. The wafers are lifted out of cassettes by a buffer elevator and moved into a position over an open carrier by a buffer robot. A comb elevator lifts co...
06/27/2006
7059336Cleaning device for a shaving head of a dry shaving apparatus
A cleaning device for a shaving head of a dry shaving apparatus includes a reservoir to store a cleaning fluid, a receptacle adapted to receive the shaving head and the cleaning fluid, the receptacle being configured to direct the cleaning fluid toward the shaving h...
06/13/2006
7056442Method and apparatus for flushing contaminants from a container of fluids
A contaminant-flushing machine for removing contaminants from a container, such as an engine transmission, air-conditioner coil, or transmission cooler, which includes hoses for coupling to the transmission cooler and a pump for circulating fluid through the hoses a...
06/06/2006
7051743Apparatus and method for cleaning surfaces of semiconductor wafers using ozone
An apparatus and method for cleaning surfaces of semiconductor wafers utilizes streams of gaseous material ejected from a gas nozzle structure to create depressions on or holes through a boundary layer of cleaning fluid formed on a semiconductor wafer surface to inc...
05/30/2006
7047988Automatic cleaning mechanism for a paint sprayer
A cleaning device which washes each of the components of a paint sprayer from the correct angle to ensure that all residue is properly removed. The invention provides a mechanism for aligning cleaning nozzles with the components of the paint sprayer. Holding devices...
05/23/2006
7017593Pipe washing method and pipe washing apparatus
A micro device in which a functional element can be moved between an operating position and a waiting position by the displacement of support means coupled to a substrate. The micro device has a cantilever structure in which one end of support means is made a fixed ...
03/28/2006
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