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Patent No. 5719655

System for magnetically attaching templeless eyewear to a person

A system of eyewear that eliminates the need for hinges on the frames of the eyewear.

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Class 118/730 - Rotary


Subclass of Class 118 - Coating apparatus
Definition: Apparatus wherein the base holding means is capable of circular
No. of patents: 859
Last issue date: 04/10/2012


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NumberTitleIssue Date
8152927CVD coating device
The invention relates to a method for depositing especially crystalline layers on one or more, especially crystalline substrates in a process chamber by means of reaction gases that are introduced into the process chamber and that undergo especially pyrolitic reacti...
04/10/2012
8137471Plasma processing apparatus and method
An apparatus includes an upper electrode and a lower electrode for supporting a wafer disposed opposite each other within a process chamber. A first RF power supply configured to apply a first RF power having a relatively higher frequency is connected to the upper e...
03/20/2012
8088225Substrate support system for reduced autodoping and backside deposition
A substrate support system comprises a substrate holder having a plurality of passages extending between top and bottom surfaces thereof. The substrate holder supports a peripheral portion of the substrate backside so that a thin gap is formed between the substrate ...
01/03/2012
8057602Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
Embodiments of the invention contemplate a method, apparatus and system that are used to support, position, and rotate a substrate during processing. Embodiments of the invention may also include a method of controlling the transfer of heat between a substrate and s...
11/15/2011
8057601Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
An apparatus and method for supporting, positioning and rotating a substrate are provided. In one embodiment, a support assembly for supporting a substrate includes an upper base plate and a lower base plate. The substrate is floated on a thin layer of air over the ...
11/15/2011
8021487Wafer carrier with hub
A wafer carrier for a rotating disc CVD reactor includes a unitary plate of a ceramic such as silicon carbide defining wafer-holding features such as pockets on its upstream surface and also includes a hub removably mounted to the plate in a central region of the pl...
09/20/2011
7988787Workpiece support system and method
A workpiece support system for a vacuum coating machine includes a base table having a rotating spindle rod that extends in a vertical direction away from the base table and is capable of powered rotation. A stop post is connected to the table and extends in a verti...
08/02/2011
7985296Sample fixing device of evaporation machine
A sample fixing device of an evaporation machine includes a first transmission mechanism having a first rotation axis driven by a driving device and a first rotation wheel; a fixing plate and a support frame; a pair of second transmission mechanisms at opposite side...
07/26/2011
7967912Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device
A manufacturing apparatus for a semiconductor device, includes: a reaction chamber to which a wafer w is loaded; a gas supply port for supplying first process gas including source gas from an upper portion of the reaction chamber; a first rectifying plate for supply...
06/28/2011
7648579Substrate support system for reduced autodoping and backside deposition
A substrate support system comprises a substrate holder having a plurality of passages extending between top and bottom surfaces thereof. The substrate holder supports a peripheral portion of the substrate backside so that a thin gap is formed between the substrate ...
01/19/2010
7422637Processing chamber configured for uniform gas flow
An apparatus and method for performing uniform gas flow in a processing chamber is provided. In one embodiment, an apparatus is an edge ring that includes an annular body having an annular seal projecting therefrom is provided. The seal is coupled to a side of the a...
09/09/2008
7419551Plasma reactor with apparatus for dynamically adjusting the plasma source power applicator and the workpiece relative to one another
A plasma reactor for processing a workpiece includes a process chamber comprising an enclosure including a ceiling and having a vertical axis of symmetry generally perpendicular to said ceiling, a workpiece support pedestal inside the chamber and generally facing th...
09/02/2008
7413628Substrate treatment method and substrate treatment apparatus
A substrate treatment method for treating a substrate by supplying a treatment liquid to the substrate while rotating the substrate. The method comprises the steps of: performing a first substrate rotation process for rotating the substrate while clamping the substr...
08/19/2008
7393417Semiconductor-manufacturing apparatus
On a wafer holding area 50 on the upper surface of a susceptor 22, a wafer W is supported by a wafer support 54 such that a gap with a predetermined distance is formed between the wafer W and a wafer heating surface 52. A projection 58...
07/01/2008
7393433Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof
A wiring member which becomes substantially symmetrical on the plane of an electrostatic chuck unit is connected to the tip end of an RF introduction rod between the RF introduction rod and the electrostatic chuck unit in order to make uniform generation of an elect...
07/01/2008
7393418Susceptor
A susceptor at least a surface thereof being coated with SiC, includes a recess where an wafer is mounted, the recess having an round portion disposed on a lower portion of an outer circumferential portion of the recess, a ring-shaped SiC crystal growth surface port...
07/01/2008
7387687Support system for a treatment apparatus
A system for an apparatus of the type adapted to treat substrates and/or wafers is described and comprises a stationary base element and a movable support for at least one substrate or at least one wafer, the support being rotatable above the element about a station...
06/17/2008
7368018Chemical vapor deposition apparatus
A chemical vapor deposition apparatus is provided. The chemical vapor deposition apparatus includes a susceptor support base and a susceptor, and configured to rotate the susceptor with a rotary shaft, a gap as wide as about 1 mm or more is provided along the bounda...
05/06/2008
7357115Wafer clamping apparatus and method for operating the same
A wafer clamping apparatus is provided to secure a wafer within a chamber during wafer processing. The wafer clamping apparatus creates a pressure differential between a top surface and a bottom surface of the wafer. The pressure differential serves to pull the wafe...
04/15/2008
7351293Method and device for rotating a wafer
Method and device for rotating a wafer which is arranged floating in a reactor. The wafer is treated in a reactor of this nature, and it is important for this treatment to be carried out as uniformly as possible. For this purpose, it is proposed to rotate the wafer ...
04/01/2008
7351936Method and apparatus for preventing baking chamber exhaust line clog
A method and apparatus involve providing a supply of nitrogen gas, heating the supply of nitrogen gas to a temperature, and ejecting the heated nitrogen gas through the exhaust line of the baking chamber on a periodic basis. The temperature is between a temperature ...
04/01/2008
7351986Method and apparatus for reducing cross contamination of species during ion implantation
A wafer support for an ion implanter includes a wafer holder and a support arm for the holder in the implant chamber. A portion of the support arm adjacent the wafer holder is at least intermittently exposed to the ion beam during implantation, as a result of the re...
04/01/2008
7331307Thermally sprayed member, electrode and plasma processing apparatus using the electrode
A thermally sprayed member or an electrode includes a basic material, a thermally sprayed film formed on the surface of the basic material, the thermally sprayed film being made of an insulating ceramic and a metallic intermediate layer provided between the basic ma...
02/19/2008
7332055Substrate processing apparatus
A substrate processing apparatus is provided. The apparatus includes a plurality of fluid suppliers 61, 61, 63 for supplying different processing fluids. In processing a wafer W, the substrate processing apparatus moves the fluid suppliers 61, 62, 63 a...
02/19/2008
7332038Device for depositing in particular crystalline layers on one or more, in particular likewise crystalline substrates
A device for depositing crystalline layers onto one or more substrates in a process chamber, including: a reverse-heatable support plate which forms a wall of the process chamber and which is heated with a high frequency and is formed of inertly coated graphite; a g...
02/19/2008
7331512Monitoring and controlling of laser operation
A laser monitoring and controlling apparatus is disclosed that includes a laser, a data server and a laser Graphical User Interface (GUI). In an embodiment, the apparatus further includes, an imaging means and means for displaying images from the imaging means on th...
02/19/2008
7314526Reaction chamber for an epitaxial reactor
Reaction chamer (10) for an epitaxial reactor comprising a belljar (14) made of insulating, transparent and chemically resistant material, a susceptor (24) provided with disk-shaped cavities (34a-n) for receiving wafers (...
01/01/2008
7311939Vacuum coating unit and a method for the differentiated coating of spectacle lenses
Substrates, such as spectacle lenses for example, may be provided with a coating which is not uniform by way of screens. The screens are aperture rings, arranged concentric to a symmetry axis of the vaporising crucible in a vacuum coating unit, by way of a screen ho...
12/25/2007
7311783Multiple axis tumbler coating apparatus
The present invention relates to an apparatus for coating one or more workpieces such as components to be used in jet engines or industrial turbines. The apparatus comprises a device for simultaneously manipulating a workpiece about multiple axes while holding a cen...
12/25/2007
7284760Holding device for disk-shaped objects
Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible...
10/23/2007
7282096Arrangement comprising a support body and a substrate holder which is driven in rotation and gas-supported thereon
The invention relates to an arrangement comprising a support body with a substrate holder, mounted thereon on a gas bearing with rotating drive. The gas bearing and the rotating drive are formed by gas flowing in through nozzles arranged in the separating gaps betwe...
10/16/2007
7279732Enhanced atomic layer deposition
A method of enhanced atomic layer deposition is described. In an embodiment, the enhancement is the use of plasma. Plasma begins prior to flowing a second precursor into the chamber. The second precursor reacts with a prior precursor to deposit a layer on the substr...
10/09/2007
7279049Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
In one embodiment, the invention is a guard ring for reducing particle entrapment along a moveable shaft of a substrate support. In one embodiment, the guard ring comprises a substantially annular guard ring positioned within a step formed in a sleeve that circumscr...
10/09/2007
7276123Semiconductor-processing apparatus provided with susceptor and placing block
A semiconductor-processing apparatus comprises a susceptor and removable placing blocks detachably placed at a periphery of the susceptor for transferring a substrate. Retractable supporting members are provided for detaching/attaching the placing blocks from/to the...
10/02/2007
7276125Barrel type susceptor
The barrel type susceptor for use in the semiconductor epitaxial growth is characterized in that a face plate 5 of a susceptor main body 2 having the shape of a truncated cone is partitioned into two or more in a longitudinal direction thereof, each pa...
10/02/2007
7275553Liquid processing apparatus and liquid processing method
A cleaning processing apparatus comprises a spin chuck for holding a wafer W, an under plate being positioned to face the back surface of the wafer W with a prescribed gap provided therebetween, a support member for supporting the under plate, and a nozzle hole form...
10/02/2007
7267129Device and process for liquid treatment of wafer-shaped articles
A device for liquid treatment of a defined area of a wafer-shaped article, especially of a wafer, near the edge, in which the liquid is applied to a first surface, flows essentially radially to the outside to the peripheral-side edge of the wafer-shaped article and ...
09/11/2007
7264699Workpiece holder for processing apparatus, and processing apparatus using the same
An inexpensive workpiece holder having high reliability and a processing apparatus equipped with the workpiece holder are provided, in which damage caused by oxygen in the air is prevented. The holder comprises: a ceramic body which has an electrode and a heater cir...
09/04/2007
7264768Single substrate annealing of magnetoresistive structure
A device for magnetically annealing magnetoresistive elements formed on wafers includes a heated chuck and a delivery mechanism for individually placing the wafers individually on the chuck one at a time. A coil is adjacent to the chuck and generates a magnetic fiel...
09/04/2007
7262116Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation
A method of preparing a clean substrate surface for blanket or selective epitaxial deposition of silicon-containing and/or germanium-containing films. In addition, a method of growing the silicon-containing and/or germanium-containing films, where both the substrate...
08/28/2007
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