Quotables
"It is my heart-warmed and world-embracing Christmas hope and aspiration that all of us, the high, the low, the rich, the poor, the admired, the despised, the loved, the hated, the civilized, the savage (every man and brother of us all throughout the whole earth), may eventually be gathered together in a heaven of everlasting rest and peace and bliss, except the inventor of the telephone. "
Mark Twain ; Christmas greetings, 1890
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| Number | Title | Issue Date |
| 8123862 | Deposition apparatus and manufacturing apparatus An object of the present invention is to carry out stable film deposition for a long stretch of time without an evaporation material being stuck in a manufacturing apparatus that carries out evaporation. A driving portion that can move a crucible up and down is prov... | 02/28/2012 |
| 8025735 | Multiple vacuum evaporation coating device and method for controlling the same A multiple vacuum evaporation coating device and a method for controlling the same. The vacuum evaporation coating device includes a plurality of evaporation sources, a rotating part adapted to rotate the plurality of evaporation sources and a coating block plate ad... | 09/27/2011 |
| 7819975 | Deposition method and apparatus A deposition method and apparatus provide a uniform deposition rate and good reproducibility in a process used to deposit a material onto a substrate. The deposition method includes preparing a substrate on which a thin film is deposited, preparing a line source tha... | 10/26/2010 |
| 7347900 | Chemical vapor deposition apparatus and method A chemical vapor deposition (CVD) apparatus includes a process chamber where a deposition process is performed on a wafer. A gas supply assembly is mounted in the process chamber for supplying a process gas to the process chamber, and a vacuum pump is mounted in the... | 03/25/2008 |
| 7339139 | Multi-layered radiant thermal evaporator and method of use The present invention provides a system and method for uniform coating of a substrate at high deposition rates by evaporating a coating material in a vacuum chamber. The system includes an evaporator having a heating crucible for containing a coating material to be ... | 03/04/2008 |
| 7331512 | Monitoring and controlling of laser operation A laser monitoring and controlling apparatus is disclosed that includes a laser, a data server and a laser Graphical User Interface (GUI). In an embodiment, the apparatus further includes, an imaging means and means for displaying images from the imaging means on th... | 02/19/2008 |
| 7309269 | Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device In this embodiment, an interval distance between a desposition source holder 17 and an object on which deposition is performed (substrate 13) is reduced to 30 cm or less, preferably 20 cm or less, more preferably 5 to 15 cm, and a deposition source hol... | 12/18/2007 |
| 7270714 | Surface treating apparatus A surface treating process according to the present invention, a vapor deposited film is formed from an easily oxidizable vapor-depositing material on the surface of a work by evaporating the vapor-depositing material in a state in which the vapor deposition control... | 09/18/2007 |
| 7211454 | Manufacturing method of a light emitting device including moving the source of the vapor deposition parallel to the substrate The present invention provides an active matrix substrate which can be fabricated at a lower cost and a light emitting device having a large display area fabricated by a vapor deposition system which makes a film with uniform thickness for a large substrate. Accordi... | 05/01/2007 |
| 7186439 | Method of manufacturing organic electroluminescent display A method of manufacturing an organic EL display in which organic EL devices are prevented from being promoted in degradation by interfaces that occur between the hole transporting layer and the luminescent layer and between the luminescent layer and the electron tra... | 03/06/2007 |
| 7118783 | Methods and apparatus for vapor processing of micro-device workpieces CVD, ALD, and other vapor processes used in processing semiconductor workpieces often require volatilizing a liquid or solid precursor. Certain embodiments of the invention provide improved and/or more consistent volatilization rates by moving a reaction vessel. In ... | 10/10/2006 |
| 7025832 | Source for thermal physical vapor deposition of organic electroluminescent layers A deposition source is provided which is installed in a chamber, heated by applied electric power to transfer heat to a vapor deposition material received therein and applying a vaporized deposition material generated therein to a substrate to form deposition organi... | 04/11/2006 |
| 6997011 | Sliding rail for a wire-tube evaporator, evaporator assembly, and refrigeration unit with the evaporator assembly A sliding rail for a wire-tube evaporator has an elongated rail body to be mounted on the evaporator and to protect the latter against abrasion caused by a frozen product container that slides above or on the evaporator. The sliding rail includes at least a tubular ... | 02/14/2006 |
| 6905582 | Configurable vacuum system and method An exemplary configurable vacuum system is provided for use in coating or plating that provides the capability and versatility to handle substrates of significantly different shapes and sizes. The configurable vacuum system includes a vacuum table assembly, a mechan... | 06/14/2005 |
| 6902625 | Multiple pocket electron beam source An improved crucible cover for multiple pocket electron beam sources has been invented. The invention provides selection between one of the multiple pockets for evaporative heating and a noncontacting, line-of-sight blocking baffle between heated and unheated pocket... | 06/07/2005 |
| 6861321 | Method of loading a wafer onto a wafer holder to reduce thermal shock One or more of three different measures are taken to preheat a wafer before it is loaded into direct contact with a wafer holder, in order to provide optimal throughput while reducing the risk of thermal shock to the wafer. The first measure is to move the wafer hol... | 03/01/2005 |
| 6699375 | Method of extending process kit consumable recycling life One embodiment relates to an apparatus for sputtering material onto a workpiece, the apparatus including a vacuum chamber and a target disposed in the vacuum chamber, the target comprising a material to be deposited onto said workpiece. The apparatus also... | 03/02/2004 |
| 6669811 | Linear drive system for use in a plasma processing system A plasma processing system for processing a substrate is disclosed. The system includes a process component capable of effecting a plasma inside a process chamber. The system also includes a gear drive assembly for moving the process component in a linear... | 12/30/2003 |
| 6660343 | Fabrication of conductive/non-conductive nanocomposites by laser evaporation A composite layer of a sorbent, chemoselective, non-electrically-conducting polymer and nano-particles of an electrically conducting material dispersed throughout the polymer is formed on a substrate by pulsed laser deposition, matrix assisted pulsed lase... | 12/09/2003 |
| 6641674 | Movable evaporation device A movable evaporation device, arranged in an evaporation system. The evaporation system has an evaporation chamber and a vacuum system. The vacuum system is connected to the evaporation chamber externally. The evaporation chamber has a rotatable wafer tab... | 11/04/2003 |
| 6495216 | Apparatus and method for electron beam evaporation Disclosed is an electron beam evaporator for installation in a vacuum apparatus which provides for variable positioning during or between applications of a coating. The apparatus has a carrier plate which is a flat hollow body, the top cover plate of whic... | 12/17/2002 |
| 6467427 | Evaporation source material supplier A supplier of evaporation source material. The evaporation system that uses the source material supplier includes an evaporation chamber and a vacuum extraction system. The vacuum extraction system is connected to the evaporation chamber. The source mater... | 10/22/2002 |
| 6350317 | Linear drive system for use in a plasma processing system A linear drive assembly for moving a body associated with processing a substrate is disclosed. The linear drive assembly includes a first gear and a second gear, which is operatively engaged with the first gear. The linear drive assembly further includes ... | 02/26/2002 |
| 6342103 | Multiple pocket electron beam source An improved crucible cover for multiple pocket electron beam sources has been invented. The invention provides selection between one of the multiple pockets for evaporative heating and a noncontacting, line-of-sight blocking baffle between heated and unhe... | 01/29/2002 |
| 6340501 | Device and method for manufacturing an optical recording medium A manufacturing device of an optical recording medium having a plurality of recording layers formed on a substrate is provided. The manufacturing device includes a vacuum pre-treatment chamber(52), a plurality of recording layer forming chambers (54, 56) ... | 01/22/2002 |
| 6338778 | Vacuum coating system with a coating chamber and at least one source chamber The invention relates to a device, in particular for a laser-induced vacuum are discharge evaporator for depositing of multiple layers with a high level of purity and high deposition rates on large-area components. According to the invention, the material... | 01/15/2002 |
| 6264747 | Apparatus for forming multicolor interference coating Several techniques may be used for forming a colored interference filter coating on a substrate such as polyester film. The interference filter has two metal reflective films, at least one of which is semi-transparent. A layer of transparent acrylate poly... | 07/24/2001 |
| 6244212 | Electron beam evaporation assembly for high uniform thin film An apparatus and method for improving the performance of a vacuum coating system includes a vacuum chamber enclosing a track. The track is substantially rectangular having a top surface and a bottom surface. A pair of legs are attached to the bottom surfa... | 06/12/2001 |
| 6218212 | Apparatus for growing mixed compound semiconductor and growth method using the same An apparatus for growing a mixed compound semiconductor layer utilizing three or more source gases. The apparatus includes a horizontal type reactor chamber. The reactor chamber includes a partition plate separating an upstream region of the reactor chamb... | 04/17/2001 |
| 5804089 | Plasma processing apparatus and method A plasma processing apparatus includes a vacuum container accommodating a to-be-processed substrate. A vacuum discharge device discharges gas from the container, and a gas feed device feeds a gas in the container. A pair of electrodes includes one which h... | 09/08/1998 |
| 5534314 | Directed vapor deposition of electron beam evaporant A process for vapor depositing an evaporant onto a substrate is provided which involves: presenting the substrate to a deposition chamber, wherein the deposition chamber has an operating pressure of from 0.001 Torr to atmospheric pressure and has coupled ... | 07/09/1996 |
| 5534071 | Integrated laser ablation deposition system A laser ablation deposition system includes a movable platform for supporting ferroelectric target material and a support structure for supporting a thermally sensitive semiconductor substrate within a chamber mounted on a moveable cabinet, and a laser fo... | 07/09/1996 |
| 5445973 | Method for manufacturing solar cells A method for manufacturing solar cells, more specifically thin-film solar cells, particularly thin-film solar cells on which CuInSe2 is deposited. A substrate is provided on which a multi-layer structure is formed by depositing thereon a layer ... | 08/29/1995 |
| 5370739 | Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD A semiconductor wafer processing apparatus or module for a cluster tool is provided with a single wafer rotating susceptor that thins the gas boundary layer to facilitate the transfer of material to or from the wafer, in, for example, CVD for blanket or s... | 12/06/1994 |
| 5288328 | Apparatus for controlling a material flow emitted by a heated evaporation source and application to a vacuum evaporation coating machine Source evaporation machine for covering samples optionally by a mixture produced by several sources (3). Mobile covers (6) are placed between the sources (3) and the sample. The covers (6) are designed so as to ensure that the solid parts (23,24) and the ... | 02/22/1994 |
| 5262194 | Methods and apparatus for controlling film deposition Apparatus and method for increasing the time that a quartz crystal can sense the rate at which evaporated material is broadcast onto a substrate wherein a chopper employing a disk with a slot is disposed between the source of the evaporated material and t... | 11/16/1993 |
| 5230923 | Process and apparatus for the substantially continuous manufacture of a silicon oxide deposition film on a flexible plastic film A process and apparatus for the substantially continuous manufacture of a silicon oxide deposition film on a traveling flexible plastic film. The process comprises evaporating a deposition material composed mainly of silicon and silicon oxide or silicon o... | 07/27/1993 |
| 5207884 | Superconductor deposition system To deposit a plurality of substances on a substrate while the substrate remains in a low pressure oxygen environment, several target carriers are mounted around the edge of a disc and the disc is rotated to position the targets at the focal point of a fix... | 05/04/1993 |
| 5190590 | Vacuum coating apparatus A vacuum coating apparatus for coating films on the surfaces of objects to be deposited under vacuum is provided with a vacuum deposition chamber, a carrier accommodated in the vacuum deposition chamber for carrying the objects, a rotary mechanism extendi... | 03/02/1993 |
| 5136609 | Method of producing finely divided particles or powder, vapor or fine droplets, and apparatus therefor A method of producing finely divided particles or powder, vapor or fine droplets comprises the steps of heating and melting the starting raw material in a vessel having opposed reflecting surfaces, and ejecting the melted raw material from the vessel as h... | 08/04/1992 |
