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Class 118/707 - INTERCONTROL OR SAFETY INTERLOCK


Subclass of Class 118 - Coating apparatus
Definition: Apparatus in which means is provided for interrelating the
No. of patents: 39
Last issue date: 08/07/2007


NumberTitleIssue Date
7252715System for dispensing liquids
The present invention provides a system to dispense a liquid, contained in a cartridge, onto a substrate employing a dispensing system under control of a processor in data communication with a memory. ...
08/07/2007
7154730High voltage generator for electrostatic painting equipment
A generator is provided inside equipment, such as a sprayer, having a high voltage cascade including a voltage-gain transformer and a voltage multiplier arranged at the output of the transformer. The transformer is a double or multiple transformer, including at leas...
12/26/2006
7109131System and method for hydrogen-rich selective oxidation
The present invention relates generally to semiconductor fabrication. More particularly, the present invention relates to system and method of selectively oxidizing one material with respect to another material formed on a semiconductor substrate. A hydrogen-rich ox...
09/19/2006
6993758Method and apparatus for renewing software in a software-operated machine
A method and apparatus for renewing software in a software-controlled machine is provided wherein a sensor 16 detects external command information to shift an operation control circuit 50 from an operating mode to a renewal mode, and then detects exter...
01/31/2006
6845731Adding interlock for pause after polyimide coating
A polyimide processing tool for coating polyimide on a semiconductor wafer is provided with a pause time monitoring means for monitoring the duration of the polyimide processing tool's wafer-transfer robot's pause time. The wafer-transfer robot transfers wafers from...
01/25/2005
6833030Liquid delivery system having safe unit and operating method thereof
A liquid delivery system having safe unit includes: an injection valve connected to a chamber; a mass flow controller connected to the injection valve; an auxiliary valve connected between the injection valve and the mass flow controller; an auxiliary pump connected...
12/21/2004
6790285Electrostatic coater with power transmission frequency adjuster
The present invention provides an electrostatic painting device with a transmission frequency adjustment device for automatically adjusting a transmission frequency in such a manner that the consumed current flowing in a high voltage booster circuit does not exceed ...
09/14/2004
6740195Detection of nontransient processing anomalies in vacuum manufacturing process
A sensor, such as a mass spectrometer, capable of detecting the presence of materials in a sampled gas is interconnected with a processing chamber of a vacuum manufacturing tool. The sensor includes a timing circuit which is activated only if certain levels of speci...
05/25/2004
6673155Apparatus for forming coating film and apparatus for curing the coating film
An apparatus for forming a coating film comprising, a coating unit for forming a coating film by applying a coating solution onto a substrate, and a curing unit for curing the coating film by applying a heating and a cooling to the substrate, in which, th...
01/06/2004
6579371Exhaust flow control system
A method of applying a layer of material to a substrate. The substrate is received with a chuck, and the material is dispensed. The substrate is spun on the chuck, spreading the material and conveying a surplus of the material away. The surplus of the mat...
06/17/2003
6500263Semiconductor substrate processing chamber having interchangeable lids actuating plural gas interlock levels
Multiple levels of interlocks are provided relative to gas flow for a chemical vapor deposition chamber. When a chamber lid used for normal processing is in place, no interlock is in effect. When a lid used during maintenance operations is in place, flow ...
12/31/2002
6355105Protecting photoresist coating system by photochopper sensor
The invention disclosed herein is related to a photoresist coating system that significantly prevents performance of the system being degraded by any bubble in, liquid photoresist. The proposed system comprises a pump, a series of pipelines, a reactor, a ...
03/12/2002
6224676Gas supply apparatus and film forming apparatus
According to the present invention, a signal transmission system is arranged in a region surrounded by a gas control means and a plurality of blocks whereby a region between elements constituting a gas supply flow path can be utilized for the region of th...
05/01/2001
6192291Method of controlling semiconductor fabricating equipment to process wafers of a single lot individually
A module of a host computer of a semiconductor fabrication management system receives from an operator a plurality of IDs assigned by the operator to each of the wafers, respectively, received in the slots of a wafer cassette. The module searches a databa...
02/20/2001
6183562Thermal protection system for a chemical vapor deposition machine
A thermal protection system for a chemical vapor deposition machine (CVD). The system of the present invention includes a thermal sensor for providing a temperature signal corresponding to a CVD chamber temperature, a heating component for heating the CVD...
02/06/2001
6045617Method for CVD surface coating and CVD reactor system
Disclosed herein is a method and a reactor system for CVD surface coating. In this method, the reaction gas is supplied to the reactor chamber with any frequency and at any time intervals in succession, rising and falling in the form of a pulsed gas strea...
04/04/2000
5932011Electrostatic spraying devices with hazardous condition warning system
The present invention provides an electrostatic spraying device which includes a primary charge return path between the device and the target to be sprayed and circuitry for warning the operator of potentially hazardous spraying conditions. More particula...
08/03/1999
5885355Semiconductor fabrication apparatus with a handler
A semiconductor fabrication apparatus having a process chamber and a handler which is provided for loading wafers into the process chamber or unloading wafers therefrom, comprising a plurality of switches for detecting positions of the handler and for gen...
03/23/1999
5597609Process and apparatus for the continuous or semi-continuous coating of eyeglass lenses
Lenses are brought individually or in pairs on a transport device (12) to a continuous vacuum apparatus (1) equipped with a rotating substrate carrier (3). The eyeglass lenses (13) are introduced through a system of locks (15) into the continuous vacuum a...
01/28/1997
5454256Powder coating system with dew-point detection
A powder spray coating system has a controller configurable to a variety of different system configurations. Configuration data is keyed by an operator from menu prompts and stored for use by a microprocessor based operating program to operate the supply ...
10/03/1995
5275664Apparatus for application of a material to an external surface of items of manufacture
An apparatus for application of material to the external diameters of cylindrical items of manufacture. The apparatus includes a frame, a transport system having work stations supporting the items, an application system, and a curing system for curing the...
01/04/1994
5201973Non-contact gluing apparatus
Apparatus for applying a predetermined glue pattern to a predetermined surface of a workpiece, which workpiece is moved in a stepwise, indexed fashion, such that this predetermined surface thereof follows a given path. The predetermined pattern includes f...
04/13/1993
5174827Double chamber vacuum apparatus for thin layer deposition
An apparatus for thin layer vapor deposition has two horizontally spaced apart vacuum deposition chambers. Rearwardly and inwardly angled horizontal vacuum ducts are connected to the chambers, and a vacuum pumping device is connected to a further horizont...
12/29/1992
5104696Process and device for intermittenly spraying a pasty composition
In a process for intermittently spraying a setting pasty composition mixed with a tempering liquid, in particular for building up refractory linings of metallurgical vessels, the composition is conveyed from a preparing station (6) at which it is prepared...
04/14/1992
5078089Oil spray coating booth
A spray coating booth for enclosing individual articles to be coated with a liquid spray while the articles are supported in closely spaced relation on an article conveyor for movement through the booth includes a rigid frame with fixed sidewalls and mova...
01/07/1992
4860399Method of and apparatus for conditioning a traveling textile fabric substrate
Applying non-treating liquid to a traveling textile fabric substrate during temporary change-over discontinuance of treating liquor application in a textile treating and drying range with the non-treating liquid being applied in an amount sufficient to ap...
08/29/1989
4834287Pressure relief before or upon electric shut off of pump
A valve control mechanism for a paint spraying system provides for pressure relief prior to turn-off of the compressor. A pair of interlocking knobs, a pressure control knob and an off-prime-spray knob, are mechanically interlocked so that the compressor ...
05/30/1989
4810538Method for automatic coating of workpieces
In the case of sequentially coating workpieces, such as motor vehicle bodies, with a program controlled painter-robot, it has hitherto been difficult or impossible to finish painting a partly coated workpiece in the event of an unscheduled breakdown. This...
03/07/1989
4790259Tool for robotic application of liquid to a work surface
The tool of the present invention includes a compliance guide having a cylindrical vertical bore extending therethrough. Slidably mounted within the bore is a tool holder which is free to slide vertically, but which is held against lateral movement within...
12/13/1988
4674441Developing apparatus
A developing apparatus is provided with a developing roll for carrying a toner thereon and an elastic blade pressed against the surface of the developing roll to apply the toner thereto. The toner is thus applied to the surface of the developing roll by t...
06/23/1987
4475479Machine for the continuous coating of a body of revolution
The present invention relates to a machine for the continuous treatment of a body of revolution. Treatment stations are provided on the periphery of a rotatable drum. The machine comprises at the location of the zone of treatment a continuous guiding belt...
10/09/1984
4441450Apparatus for melting and applying a meltable adhesive
An apparatus for melting and applying meltable adhesive, especially in combination with edge gluing machines for continuously advancing work pieces, includes a melting chamber (4) for the meltable granular adhesive material. The melting chamber is equippe...
04/10/1984
4391220Apparatus for applying fluid to articles
An apparatus is provided for applying lubricant to articles such as connectors. The connectors 10 with projecting terminals 12 are loaded into a holder 19 enclosed within a housing 16 having an entry door 23. The door is shut and lubricant is pumped into ...
07/05/1983
4283806Shoe machine air blast mechanism and air blast safety device
A device for cement applying mechanisms in shoe lasting machines, wherein a safety valve is caused to prevent air from entering an air feed line in the cement feed when there is no shoe in the shoe machine and the shoe machine has been actuated, thereby p...
08/18/1981
4248174Control system for a slide centrifuge
A control system for a slide centrifuge includes a ratio checking circuit which produces a signal when the ratio between the light passing through the slide and the rate of change of this light passes through a predetermined critical value. When this rati...
02/03/1981
4151428Coating objects by electrostatic spraying
Safety device for an electrostatic painting plant using liquid coating products which are very electrically conductive, such as hydrosoluble paints or liquid enamel. An electrically insulating enclosure surrounds the container for the liquid coating mater...
04/24/1979
4063527Machine for stiffening portions of sheet material
An improved machine and method for stiffening a selected portion of a sheet-like member generally flattens that portion, next deposits on a chill plate matrix an adhesive hot melt deposit of mostly uniform thickness except for a margin of added thickness ...
12/20/1977
4048950Devices for applying adhesives to a moving web
A device for applying adhesive to a moving web, comprises a nozzle against which the web is arranged to run and from which adhesive is delivered, and a closure member which is movable between a position in which it allows the web to run against the nozzle...
09/20/1977
4016828Apparatus for blood film preparation
Sample preparation apparatus for forming a thin layer of diluted blood specimen on a substrate by centrifugal force includes a sample probe having coaxial blood and diluent conduits coupled to respective reversibly-drivable peristaltic pumps having forwar...
04/12/1977
 
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