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| Number | Title | Issue Date |
| 7950348 | Substrate processing apparatus and semiconductor device producing method A substrate processing apparatus is provided with a reaction chamber (201), a substrate rotating mechanism (267) for rotating a wafer (200), and a gas supplying part for supplying the wafer (200) with gas. At least two types of gases A an... | 05/31/2011 |
| 7361384 | Corrosion protection system for transport pipe An apparatus and method for coating pipelines with a hot melt adhesive coating and a tape. The coating may comprise a copolymer of an alkyl substituted hydrocarbon polymer in combination with a diene polymer and the tape to overly the coating may comprise a polymeri... | 04/22/2008 |
| 7332055 | Substrate processing apparatus A substrate processing apparatus is provided. The apparatus includes a plurality of fluid suppliers 61, 61, 63 for supplying different processing fluids. In processing a wafer W, the substrate processing apparatus moves the fluid suppliers 61, 62, 63 a... | 02/19/2008 |
| 7294205 | Method for reducing the intrinsic stress of high density plasma films A layer of reduced stress is formed on a substrate using an HDP-CVD system by delaying or interrupting the application of capacitively coupled RF energy. The layer is formed by introducing a process gas into the HDP system chamber and forming a plasma from the proce... | 11/13/2007 |
| 7235136 | Device for reading the rotational speed of a paint sprayer provided with a rotating bowl The invention device measures the instantaneous rotation speed of a turbine (6) which is housed inside the body (3) of the paint sprayer (2) and which rotationally drives the rotating bowl (5) when the paint sprayer is mounted on the end ... | 06/26/2007 |
| 7204001 | Zipper pull tab The surfaces of a metal pull tab which is hingedly secured to a metal bracket on a zipper slider and/or the surface of the bracket which engages the pull tab is covered by a non-metallic relatively soft coating which prevents wear caused by metal-to-metal contact be... | 04/17/2007 |
| 7198699 | Sputter coating apparatus including ion beam source(s), and corresponding method A coating apparatus deposits a first coating (single or multi-layered) onto a first side of a substrate (e.g., glass substrate) passing through the apparatus, and a second coating (single or multi-layered) onto the other or second side of the substrate. In certain e... | 04/03/2007 |
| 7094440 | Substrate treatment method and substrate treatment apparatus The present invention is a substrate treatment method in which a treatment by supplying a treatment solution from a nozzle to a substrate is successively performed for a plurality of substrates, which comprises the step of, during the performance of the successive t... | 08/22/2006 |
| 7067010 | Indexing spray machine The machine is an index spraying machine. The machine has five different stations. The first station is the load/unload station. At this station, work pieces are unloaded after they have been sprayed and new work pieces to be sprayed are loaded on. New pieces then m... | 06/27/2006 |
| 6955724 | Spray-coating device for a coating liquid A spraycoating device includes at least one coating liquid spray gun (2) which contains a measuring valve device (40) opening or closing a compressed gas measuring valve flow path (42) depending on the positions of a liquid feed valve (4)... | 10/18/2005 |
| 6770320 | Apparatus and method for applying fluid An apparatus and a method for applying a fluid, which enable an application amount of the fluid to be stabilized even at the start of fluid discharge and at the end of the fluid discharge. The apparatus includes an application head and a control unit, whereby operat... | 08/03/2004 |
| 6758908 | Solvent prewet and method and apparatus to dispense the solvent prewet A method and apparatus is provided for more efficient application of photoresist to a wafer surface. One aspect of the method comprises applying solvent to the wafer and spinning it to coat the entire wafer surface prior to the application of photoresist. This reduc... | 07/06/2004 |
| 6706118 | Apparatus and method of using motion control to improve coatweight uniformity in intermittent coaters in an inkjet printer A coating apparatus for applying a coating liquid to a printing substrate. The apparatus includes a rotatable first roll, and a rotatable second roll positioned adjacent to the first roll and defining with the first roll a first nip through which the printing substr... | 03/16/2004 |
| 6692573 | Automated pitch button dispensing station and method The present invention provides a work station and method for applying a blocking material such as pitch or the like to a selected location on a workpiece or workpieces, wherein the work station includes an automated blocking material dispenser, an X-Y sta... | 02/17/2004 |
| 6648969 | Fluidized bed granulation coating device, and fluidized bed granulation coating method An upper processing section 10 is provided by evenly spacing out functional stations 13 having respective functions of steps constituting a fluidized bed granulation coating process, on circumferential points. An intermediate storing section 20 is provide... | 11/18/2003 |
| 6533864 | Solution processing apparatus and method An upper side of a cup provided around a wafer is formed in a rectangular shape and a lower side thereof is formed in a cylindrical shape. The cup is formed such that, when seen from above, the portion forming the cylindrical shape is positioned within th... | 03/18/2003 |
| 6530992 | Method of forming a film in a chamber and positioning a substitute in a chamber Methods and apparatuses of forming a film on a substrate including introducing a pretreatment material into a processing chamber sufficient to form a film as a portion of an inner surface of the processing chamber to inhibit outgassing from that portion o... | 03/11/2003 |
| 6440218 | Coating solution applying method and apparatus An apparatus for applying a coating solution to a surface of a substrate to form a coating film of desired thickness thereon. The apparatus includes a rotary supporting device for supporting and spinning the substrate in horizontal posture, a solvent spra... | 08/27/2002 |
| 6348099 | Methods and apparatus for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions The present invention provides systems, methods and apparatus for high temperature (at least about 500-800° C.) processing of semiconductor wafers. The systems, methods and apparatus of the present invention allow multiple process steps to be performed i... | 02/19/2002 |
| 6327974 | Spray dampening device having high effective spray frequency and method of using A spray dampening device for a printing apparatus, the spray dampening device comprising a plurality of spray nozzles. The spray nozzles are each cycled at a predetermined frequency and at an individual nozzle phase shift with the individual phase shifts ... | 12/11/2001 |
| 6319324 | Method and apparatus for elimination of TEOS/ozone silicon oxide surface sensitivity A method and apparatus for reducing surface sensitivity of a TEOS/O3 SACVD silicon oxide layer, formed over a substrate, that deposits a ramp layer while ramping pressure to a target deposition pressure and deposits an SACVD layer over the ramp... | 11/20/2001 |
| 6302962 | Diffusion system having air curtain formation function for manufacturing semiconductor devices and method of controlling the same A diffusion system for manufacturing semiconductor devices has an air curtain formed across a furnace opening for preventing the loss of heat energy from inside the furnace. The diffusion system includes the furnace having an opening through which a wafer... | 10/16/2001 |
| 6296709 | Temperature ramp for vertical diffusion furnace An improved vertical diffusion furnace for semiconductor manufacturing processes is provided. Temperature and flow rate management enables more uniform temperature distribution across the wafer during ramp up and ramp down, thereby preventing wafer warp.... | 10/02/2001 |
| 6120604 | Powder coating painting apparatus with universal modular line control A conveyor system for transporting parts through a plurality of processing areas. The conveyor system comprises a plurality of conveyors, each of the conveyors for transporting parts through an associated one of the processing areas. Each of the conveyors... | 09/19/2000 |
| 6099646 | Dispensing system of a coater A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control unit of the sucking-back valve, and a speed control unit of th... | 08/08/2000 |
| 5810929 | Pyrogenic wet thermal oxidation of semiconductor wafers An oxidizing gas containing water vapor generated by hydrogen combustion is introduced from an external gas burner via gas supply pipes into the upper space of a process tube surrounded by a heater, and exhausted from the lower part of the process tube. U... | 09/22/1998 |
| 5702531 | Apparatus for forming a thin film A plurality of wafers are placed on a boat, and the boat is inserted into a reactor. The reactor is heated by a heater, thereby heating the inserted wafers. Then, air is supplied between the reactor and the heater through the fan nozzles of a fan unit, th... | 12/30/1997 |
| 5672207 | Apparatus for application of a color coat to a workpiece An apparatus for color coating and further manipulating workpieces of wood, plastic material or metal includes a color coating station and further product-manipulation stations for finishing the workpiece. Through provision of a conveyor, the workpiece sh... | 09/30/1997 |
| 5456755 | Full automatic coating system for coating various types of products produced in small quantities A full automatic coating system includes an endless metal tape driven to run in one direction along an endless traveling path, a product supplying station for automatically selecting products of a desired type and supplying them to the endless metal tape ... | 10/10/1995 |
| 5411588 | Device for processing disc-shaped registration carriers The invention relates to a device for processing disc-shaped registration carriers, provided with a number of processing stations in which the disc-shaped registration carriers are supported, and with a transport assembly by which said disc-shaped registr... | 05/02/1995 |
| 5370745 | Apparatus for performing related operations on workpieces Related operations are performed on workpieces, e.g., coating and curing circuit boards, of different types in random order in assembly line fashion on a rotary table of an apparatus under programmed control. The table is rotated stepwise to move successi... | 12/06/1994 |
| 5332462 | Apparatus for assembling fiberglass grating from pultruded fiberglass grating bars An apparatus for assembling a fiberglass reinforced grating from preformed bearing bars and cross bars includes an elongated open frame table having a plurality of rollers in side-by-side fashion with their axes transverse to the longitudinal axis of the ... | 07/26/1994 |
| 5326403 | Equipment for discharging treated articles from a barrel in a surface treatment system An equipment for discharging treated articles from a barrel in a surface treatment system includes: a carriage movable between a discharging position and a charging position; a water tank supported at the discharging position for vertical movements; and a... | 07/05/1994 |
| 5322565 | Method and apparatus for through hole substrate printing A method and apparatus are disclosed for enabling automated printing of through holes extending between top and bottom surfaces of a ceramic substrate or the like. The perimeter of the substrate is placed on a support that locates the bottom surface of th... | 06/21/1994 |
| 5318631 | Pressure control device for a pressure roller A pressure control device for controlling the application of pressure provided by a pressure roller to a pressing object, which includes a support member for pivotally supporting the pressure roller, a locking member coupled with the support member, an ec... | 06/07/1994 |
| 5279668 | Apparatus for spraying glass containers An apparatus for spraying the surfaces of glass containers which are being moved in longitudinally spaced transverse rows by a conveyor wherein a rodless air cylinder is mounted transversely of the conveyor and the spraying apparatus is connected to the p... | 01/18/1994 |
| 5271953 | System for performing work on workpieces Work is performed on workpieces, e.g., coating circuit boards, of different types in random order in assembly line fashion on a rotary table of an apparatus under programmed control. The table is rotated stepwise to move successive sections thereof from a... | 12/21/1993 |
| 5246499 | Apparatus for applying scratch-resistant coatings to plastic ophthalmic lenses Plastic ophthalmic lenses are coated with a scratch-resistant coating using a spin coating process. The lenses are separated from lens mold pieces, and the lenses are routed through a coating system where the lens coating in applied. A conveyor moves the ... | 09/21/1993 |
| 5244500 | Process control system of semiconductor vapor phase growth apparatus In a semiconductor vapor phase growing apparatus of the type disclosed in U.S. Pat. No. 4,430,959 dated Feb. 14, 1984, the thickness and resistivity of the semiconductor grown on a substrate by vapor phase growing technique are controlled by a sequence pr... | 09/14/1993 |
| 5224994 | Apparatus and method for liquid treatment of article surfaces An apparatus and method is provided for liquid treating, particularly with coating materials such as paint, of an article, especially an article having a plurality of internal passages. The article is simultaneously rotated on an axis of rotation of the a... | 07/06/1993 |
