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| Number | Title | Issue Date |
| 8171878 | Coating instrument The coating instrument is provided with a coating head which has a plurality of head members, and in which a groove-like slot is formed, an adjustment unit accommodated in a recessed groove installed on a leading end face continuing to an outer face opposite to an i... | 05/08/2012 |
| 8136477 | Apparatus for and method of dispensing chemical solution in spin-coating equipment A chemical solution is uniformly dispensed from a nozzle by N2 in spin-coating equipment. The dispensing apparatus includes a canister configured to receive a bottle containing the chemical solution, gas supply piping connecting a source of N2 ... | 03/20/2012 |
| 8033244 | Substrate processing system Leakage of an atmosphere of a solvent vapor used by a smoothing process for smoothing the surface of a resist pattern outside from a smoothing unit is prevented to facilitate incorporating the smoothing unit into a coating and developing system. A substrate processi... | 10/11/2011 |
| 7921801 | Droplet jetting applicator and method for manufacturing coated body A droplet jetting applicator includes a coating unit jetting and coating droplets to a to-be-coated object; a storage space storing the to-be-coated object coated with the droplets; an exhaust section exhausting gas in the storage space; an adjustment unit adjusting... | 04/12/2011 |
| 7775178 | Stent coating apparatus and method An apparatus and method for coating abluminal surface of a stent is described. The apparatus includes a stent support, a coating device, and an imaging system. The coating device includes a solution reservoir and transducer assembly. The transducer assembly includes... | 08/17/2010 |
| 7638001 | Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices A film forming apparatus which forms a film on a substrate by utilizing a chemical solution, including: a correlation data creating unit which creates a correlation data that is related to the quality of a chemical solution, from data that is related to the properti... | 12/29/2009 |
| 7594969 | Device for controlling dispensing error in photo spinner equipment A chemical solution dispensing device adapted for use with photo spinner equipment is disclosed. The device includes a nozzle adapted to spray chemical solution onto a wafer, a pressure sensor associated with the nozzle and adapted to sense a spraying pressure and g... | 09/29/2009 |
| 7429299 | Controlled dispensing of material The system includes a nozzle, a drive, a metering pump, a supply of material and a controller. The nozzle dispenses material into contact with one or more surfaces of a window sash. The drive relatively moves the nozzle with respect to the window sash along a path o... | 09/30/2008 |
| 7407552 | Method and apparatus for protecting innerliner splice of a green tire A method of creating an air barrier on both sides of an innerliner splice on the inside surface of a green tire when a bladder release lubricant is being applied thereto to prevent contamination of the splice. High pressure air is directed through air nozzles on bot... | 08/05/2008 |
| 7387681 | Liquid dispensing method and apparatus A method of dispensing a liquid, which handles a minimum amount of liquid without wasting it and to dispense and spray an exact amount of the liquid without precipitating solid particles. The method including the steps of regulating a flow rate of liquid in a flow p... | 06/17/2008 |
| 7381271 | Colorant dispensing system for adding colorant to pre-comminuted material and method of coloring same The present invention is a system for adding colorant to pre-comminuted material. The colorant dispensing system includes a supply hopper to selectively retain and discharge dry colorant. The colorant dispensing system further includes a colorant dispensing assembly... | 06/03/2008 |
| 7347909 | Method for forming an insulating glazing unit A method of applying a spacer to a glass sheet while forming an insulating glazing unit includes the step of integrating the application of the sealant to the spacer body with the automated manufacturing process. The sealant is applied to the spacer body on line so ... | 03/25/2008 |
| 7335396 | Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers Methods, apparatuses, and systems for controlling mass flow rates and pressures in passageways coupled to reaction chambers are disclosed herein. In one embodiment, a method includes controlling a mass flow rate in a passageway in response to a first condition by mo... | 02/26/2008 |
| 7332037 | Numerical jet machine for the application of a coating onto a substrate The invention concerns a contactless numerical printing machine for products of average fluidity, such as varnish, glue, and conducting or scratchable ink, onto a substrate of variable thickness and dimensions. The machine includes a special device for printing with... | 02/19/2008 |
| 7265982 | Semiconductor device A semiconductor device according to an embodiment of the present invention comprises a packaging substrate mounted with semiconductor chips; a heat dissipation metal plate having three or more sides and mounted with the packaging substrates; a frame provided along a... | 09/04/2007 |
| 7238238 | Gasification monitor, method for detecting mist, film forming method and film forming apparatus A deposition apparatus supplies a reactive gas obtained by vaporizing a liquid material at a vaporizer 30 into a chamber 10 via a processing-gas pipe 40 and forms a thin film on a semiconductor wafer W due to a thermal decomposition of the react... | 07/03/2007 |
| 7217336 | Directed gas injection apparatus for semiconductor processing A method and system (1) for utilizing shaped orifices (e.g., sonic and simple orifices, and divergent nozzles) in the gas inject system (20) as part of a plasma process system. By utilizing the shaped orifices, directionality of gas flow (25) ca... | 05/15/2007 |
| 7208046 | Spray coating apparatus and fixtures A system for applying a sprayed coating includes a spray mechanism operative to spray a liquefied coating material; a target system including a rotatable spray target wheel; and one or more device-holding fixtures configured to be mounted onto the spray target wheel... | 04/24/2007 |
| 7204902 | Low-temperature press process for making insulating glass assemblies A process for making an insulating glass assembly is disclosed, the process including applying a sealant composition to a surface of a spacer; contacting the sealant composition with a glass pane, and applying pressure on the glass pane to bond the glass pane to the... | 04/17/2007 |
| 7192486 | Clog-resistant gas delivery system Processing gases reactive with each other are provided in parallel to a processing chamber through separate delivery lines including mass flow controllers devoted to each line. The parallel delivery lines meet in a mixing manifold located proximate to the processing... | 03/20/2007 |
| 7141119 | Pressure-controlling dispersion delivery system A pressure-controlling dispersion delivery system for delivering a sheared dispersion comprising a plurality of ingredients to a coating device selected from a direct feed delivery system and a coating device flow-through delivery system, wherein a coating formed fr... | 11/28/2006 |
| 7137400 | Bypass loop gas flow calibration Described herein are apparatuses, methods and systems to monitor the performance of one or more mass flow controllers that supply gases to deposition, etching, and other manufacturing processes. A bypass loop is provided in fluid connection from either the process l... | 11/21/2006 |
| 7101439 | Fluid application device A fluid application device stores seam paste in a reservoir tank 18 and feeds the seam paste to a pressure tank 20 through a feed pump 22. Inside of the pressure tank 20 is maintained under a given air pressure by a pneumatic unit 26, | 09/05/2006 |
| 7087118 | Coating film forming apparatus and coating unit A coating film forming apparatus for forming a film by applying a coating solution to a substrate, which is provided with a cassette section, coating unit, developing unit, pre-treatment/post-treatment units and a main arm for transferring the substrate between the ... | 08/08/2006 |
| 7087119 | Atomic layer deposition with point of use generated reactive gas species An apparatus for atomic layer deposition preventing mixing of a precursor gas and an input gas. From the apparatus a flow of the input gas is provided over a surface of the workpiece wherein a beam of the electromagnetic radiation is directed into the input gas in c... | 08/08/2006 |
| 7052576 | Pressure control apparatus and method of establishing a desired level of pressure within at least one processing chamber A desired level of pressure is established in at least one chamber that forms part of a closed atmosphere, such as in a semiconductor device processing facility. A pressure control system includes at least one space increase/decrease device that has a partition whic... | 05/30/2006 |
| 7022190 | Substrate coating unit and substrate coating method The present invention is a coating unit for coating a substrate with a coating solution, comprising a coating solution discharge member for discharging the coating solution to the substrate which is positioned in a downward part. A lower surface of the coating solut... | 04/04/2006 |
| 6995321 | Etched hole-fill stand-off An assembly is disclosed that includes an etched hole-fill standoff; a tooling plate contacting the etched hole-fill stand-off, the stand-off and tooling plate being aligned to each other; a device having holes to be filled removably contacting the stand-off, the st... | 02/07/2006 |
| 6977012 | Painting facility management system A coating equipment managing system for controlling and monitoring a coating equipment of an automobile manufacturing line, comprising local installations which are provided in the manufacturing lines at a plurality of localities, and a central installation for rece... | 12/20/2005 |
| 6955721 | System and method of coating print media in an inkjet printer A coating apparatus for applying a coating liquid to a printing substrate. The coating apparatus has a rotatable first roll and a rotatable second roll, each having a surface energy. The second roll is positioned adjacent to the first roll and defines with the first... | 10/18/2005 |
| 6942736 | Automatically controlled flow applicator A system allows for accurate manual application of a fluid material in a linear pattern to a surface from a container holding the fluid. The system may comprise a container holding a fluid, the container having an application end from which fluid is applied to the s... | 09/13/2005 |
| 6921505 | Hole filling using an etched hole-fill stand-off An assembly is disclosed that includes an etched hole-fill standoff; a tooling plate contacting the etched hole-fill stand-off, the stand-off and tooling plate being aligned to each other; a device having holes to be filled removably contacting the stand-off, the st... | 07/26/2005 |
| 6875283 | Film forming apparatus and film forming method Coating an insulating film on a substrate, heating the substrate at a pressure higher than an atmospheric pressure in a chamber, followed by the curing process performed at a pressure lower than the atmospheric pressure in a separate chamber. With this process, the ... | 04/05/2005 |
| 6872256 | Film forming unit The present invention is a film forming unit for discharging a coating solution from a coating solution discharge nozzle toward a substrate to form a layer on a surface of the substrate, which has a supply flow path for supplying a cleaning fluid to a discharge flow... | 03/29/2005 |
| 6868869 | Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases A delivery system and method for vaporizing and delivery of vaporized solid and liquid precursor materials at sub-atmospheric pressures between a heatable vaporization vessel and a processing tool. The system includes a pressure regulator internally positioned withi... | 03/22/2005 |
| 6808566 | Reduced-pressure drying unit and coating film forming method The invention includes a hermetic container provided with a substrate mount; a vacuum exhauster connected to the hermetic container; a current member; and a current member raising and lowering mechanism. When the current member is raised and lowered as a function of... | 10/26/2004 |
| 6743341 | Apparatus for applying thin layers to a substrate A process gas source (16) is connected to the vacuum chamber (5), and a metering valve (12) actuated by an automatic controller is installed between the vacuum chamber (5) and the process gas source (16). A potentiometric measureme... | 06/01/2004 |
| 6715506 | Method and device for injecting a fixed quantity of liquid The present invention is a method and apparatus for ejecting a very small amount of liquid at high speed and precisely independent of the viscosity of the liquid. This apparatus and method begins by applying pressure to the liquid prior to starting ejection of the l... | 04/06/2004 |
| 6652910 | Apparatus and method for controlling coating solution level within substrate An apparatus, to be used when an open end of a hollow substrate contacts a coating solution to define a solution free interior portion of the substrate, for controlling the level of the coating solution relative to the substrate interior, the apparatus in... | 11/25/2003 |
| 6635113 | Coating apparatus and coating method A substrate is held on a spin chuck, and resist solution is supplied to the surface of the substrate at a plurality of positions spaced at predetermined intervals from a plurality of resist nozzles provided the bottom surface of a resist pipe provided ove... | 10/21/2003 |
