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| Number | Title | Issue Date |
| 7942967 | Method and system of coating polymer solution on a substrate in a solvent saturated chamber A method and apparatus of coating a polymer solution on a substrate such as a semiconductor wafer. The apparatus includes a coating chamber having a rotatable chuck to support a substrate to be coated with a polymer solution. A dispenser to dispense the polymer solu... | 05/17/2011 |
| 7390364 | System and method for reclaiming and reuse of vehicle A system and method of coating articles with the method comprising directing a plurality of articles into an enclosure; applying a vehicle carrying a first agent onto the plurality of articles; converted the vehicle into a gaseous state to leave the first agent on e... | 06/24/2008 |
| 7361225 | Liquid tank The present invention provides a liquid tank which has a compact construction comprising a process bath, an agitation service bath, an agitation room, a liquid supply tunnel, and a liquid supply outlet. ... | 04/22/2008 |
| 7342087 | Method for prevention of increase in particles in copolymer for semiconductor resist A method for prevention of increase in particles in copolymer for semiconductor resist, which comprises passing, through a filter containing a resin having an amino group and/or an amide bond a copolymer solution for semiconductor resist which contains a copolymer f... | 03/11/2008 |
| 7289878 | Apparatus and method for modifying operation of an electric gun driver A method and apparatus for providing adjustment of current-related dispensing parameters in an electric dispensing gun. A control circuit receives user-selected inputs corresponding to dispensing parameters of the gun and converts those inputs into digital signals. ... | 10/30/2007 |
| 7223307 | Disc coater A coater for separating primary particles that are coated with a sticky or tacky resin, and covering the surface of the primary particles with a secondary particle of smaller size is disclosed. The coater includes a disc having a periphery, a motor engaging the disc... | 05/29/2007 |
| 7211151 | Coating liquid application apparatus, image printing apparatus and coating liquid application method A coating liquid application apparatus is provided which can apply a coating liquid, such as a coating agent for improving a weatherability of a printed surface, to the printed surface of a print medium automatically and at high speed. For this purpose, this inventi... | 05/01/2007 |
| 7144442 | Liquid degassing system and liquid degassing method A degassing device capable of regulating an amount of air dissolved in a liquid. A device for measuring amounts of dissolved oxygen measures the amount of oxygen dissolved in one of a coating liquid which has yet to be degassed, and is to be fed to a film degassing ... | 12/05/2006 |
| 7138014 | Electroless deposition apparatus An apparatus and a method of depositing a catalytic layer comprising at least one metal selected from the group consisting of noble metals, semi-noble metals, alloys thereof, and combinations thereof in sub-micron features formed on a substrate. Examples of noble me... | 11/21/2006 |
| 7108750 | Thinning agent supplying systems Thinning agent supplying systems for use with spin-coating machines are disclosed. An example supplying system enables the stable supply of thinning agent for cleaning a wafer. The example system includes an input terminal; first and second tanks for receiving the t... | 09/19/2006 |
| 7078355 | Method and system of coating polymer solution on surface of a substrate A method and system of coating a polymer solution on a substrate such as a semiconductor wafer. The method includes providing a substrate. Dispensing a polymer solution onto the surface of the substrate using a pump. The pump is connected in-line with a buffer tank ... | 07/18/2006 |
| 7025755 | Medical suctioning apparatus and methods of use A medical fluid suctioning device for selectively applying varied levels of suction pressure at a device-tissue interface includes a direct “trumpet”-type control mechanism in conjunction with a “venturi”-type control. A valve manifold is adapted to couple a... | 04/11/2006 |
| 6997134 | Drum breader and coating redistribution system A drum breader and coating recirculation system that includes a spreader positioned at an end of the drum, the spreader having a plurality of angled surfaces to distribute coatings evenly; a screening platform positioned downstream of the spreader having a drive dev... | 02/14/2006 |
| 6932868 | Coating film forming apparatus A substrate is horizontally held by a substrate holding portion freely movable in the Y-direction, and a nozzle portion is provided above and opposing the substrate, and movable in X-direction corresponding to the coating liquid feeding region of the substrate. A di... | 08/23/2005 |
| 6923865 | Classification of coating particle size Techniques for precisely controlling the size of particles in a coating solution delivered to a coating apparatus involve continuous classification of coating particle size using a tangential flow filter assembly. The techniques may be particularly useful in the pre... | 08/02/2005 |
| 6884281 | Method and apparatus for preparation and deaeration of coating liquid First, the overall quantity of bubbles in a coating liquid is reduced in advance by vacuum deaeration performed in conjunction with preparation of the coating liquid in a stirring tank in a first step, then bubbles of relatively large sizes, of bubbles that have not... | 04/26/2005 |
| 6821550 | Apparatus and method for applying process solution A process solution applying apparatus comprising a substrate holding mechanism for holding a substrate, a process solution supplying system for applying process solution in a prescribed amount to the substrate held by the substrate holding mechanism, the process sol... | 11/23/2004 |
| 6797342 | Deflocculation apparatus and methods thereof A method including: sonicating a stream containing a dispersion comprised of agglomerated primary particles; and filtering the resulting sonicated stream containing a dispersion comprised of de-agglomerated primary particles. An apparatus including: an ultrasonic ad... | 09/28/2004 |
| 6783803 | Leaf coater and method for producing leaf type coated substrates A leaf coater, in which a constant quantity of a coating solution is supplied intermittently from a coating solution supply source through a predetermined coating solution quantity intermittent supply means and a coating solution applying means to a blank substrate,... | 08/31/2004 |
| 6695962 | Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs An anode assembly by which a solution can be supplied to a surface of a semiconductor substrate includes a housing defining an internal housing volume into which the solution can flow. A closure is provided for the internal housing volume, and the solutio... | 02/24/2004 |
| 6694914 | Air unit for the removal of particulate material An air unit for the removal of excess particulate coating material that is present on products which are in a coating machine comprises, for blowing surplus particulate material off the products, at least one suction member for drawing off air, with parti... | 02/24/2004 |
| 6641670 | Leaf coater for producing leaf type coated substrates A leaf coater, in which a constant quantity of a coating solution is supplied intermittently from a coating solution supply source through a predetermined coating solution quantity intermittent supply and a coating solution applier to a blank substrate, f... | 11/04/2003 |
| 6579370 | Apparatus and method for coating treatment An apparatus for the coating treatment comprises a coating section for coating a substrate with a process solution, a heating section for heating the substrate coated with the process solution, and a recovery section for recovering at least a part of the ... | 06/17/2003 |
| 6357386 | Assembly for controlling the gas flow in a plasma spraying apparatus A plasma spraying assembly comprising a treatment chamber and a plasma spraying device located in the interior thereof is disclosed that further comprises an assembly for controlling the gas flow in the interior of the treatment chamber. In order to preve... | 03/19/2002 |
| 6264757 | Separating contaminants from continuous from surface cleansing solution during continuous strip steel processing Cold-reduced flat-rolled low carbon steel strip is surface cleansed of iron fines, iron oxide particulate and associated debris which result from cold-reduction operations. Such ferromagnetic contaminants are permanently separated from the strip steel pro... | 07/24/2001 |
| 6248398 | Coater having a controllable pressurized process chamber for semiconductor processing A coater having a controllable pressurized process chamber for applying photoresist to a wafer is provided. The controllable pressurized process chamber reduces the evaporation of solvent in the photoresist during a spin-on process step. Reducing prematur... | 06/19/2001 |
| 6217657 | Resist processing system having process solution deaeration mechanism A resist processing system includes a sensor connected for detecting the surface level of the processing solution contained in an intermediate tank, and a controller connected for controlling the fluid pressure on the basis of the surface level detected b... | 04/17/2001 |
| 6187099 | Installation for the treatment of objects in a defined gas atmosphere, whose O2 content is smaller that that of air and with which environmentally damaging treatment gases are produced An installation for the treatment of objects in a defined gas atmosphere whose oxygen content is smaller than that of air and with which environmentally damaging treatment gases are produced with a housing with an entry opening and with an exit opening for the... | 02/13/2001 |
| 6162294 | Spin coating bowl exhaust system An apparatus for exhausting coating materials used in the process of spin coating a top surface of a wafer, the wafer having an edge and a bottom surface that is supported and rotated by a rotatable chuck attached by a shaft to a spin motor. The apparatus... | 12/19/2000 |
| 6162285 | Ozone enhancement unit An apparatus for increasing the ozone concentration in the output of an ozone-generating system is disclosed. The invention reduces the concentration of O.sup.+ ions, which would otherwise react with ozone to form diatomic oxygen, by means of an ionic fi... | 12/19/2000 |
| 6132509 | Transportable wash and paint facility A self-contained, trailer-mounted, portable wash and paint facility particularly useful to retrieve a grease disposal container having a removable lid, wash dirt and grease from the container, repaint the container, and return it to service. The facility ... | 10/17/2000 |
| 6074700 | Removing foreign material from coating mix in a circulation system for coating A method and apparatus for separating foreign material from coating mix flow circulating in the machine circulation of a coating station (7) in coaters used for coating a web of paper or board. Coating mix is conveyed from a tank (1) to a coating station,... | 06/13/2000 |
| 6071345 | Seal strip coating apparatus An apparatus for coating a strip of liquid material such as a polymer adhesive onto the surface of a traveling web at adjustable cross-directional locations which includes a transfer roll secured to a drive shaft coupled hub by an asymmetric rim plate. A ... | 06/06/2000 |
| 6056998 | Coating apparatus and coating method A coating apparatus of the present invention comprises coating solution supply sources for supplying a coating solution, a mounting table for holding a substrate to allow a surface to be coated to face upward, nozzles for pouring the coating solution towa... | 05/02/2000 |
| 5951765 | Device for moving transverse beams for transporting work pieces to be galvanized along support rails A device for moving transverse beams and workpieces suspended therefrom along a support rail in the longitudinal direction of the support rail. Each one of the transverse beams is connected by lifting devices, for lowering and lifting the workpieces conne... | 09/14/1999 |
| 5944897 | Paste application and recovery system for IPC termination unit An improved chip termination or application wheel for applying a layer of silver paste to the edge or end of a chip including a wheel that is defined by a broad circumferential surface, for contact with the chip, the surface containing an increased surfac... | 08/31/1999 |
| 5908657 | Coating apparatus and method of controlling the same In the present invention, a waste solution and a exhaust gas are guided together from a drain cup DC into a storing means through common discharge means. Naturally, the gas-liquid separation is performed within the storing means in place of performing the... | 06/01/1999 |
| 5888302 | Suction system for use in a method of lining the internal surface of a pipe There is provided a suction system for use in a method of lining the internal surface of a pipe, said suction system comprises a pig receiving device to be attached to an open end of the pipe, a liquid receiving tank connected with the pig receiving devic... | 03/30/1999 |
| 5882522 | Paint recovering method and collecting material The present invention offers a method for recovering the paints suitable to an object that, in a booth for a spray coating used for coating a material, the oversprayed paints can be easily recovered and recycled as they are or after a simple adjustment as... | 03/16/1999 |
| 5858466 | Photoresist supply system with air venting A system for pumping resist to a wafer coating machine includes a line that returns a selected proportion of the resist entering the resist pump to the resist supply tank. The return line to the tank is connected to the pump outlet at a higher point than ... | 01/12/1999 |
