Class 118/53 - Plural axes of rotation of work

Subclass of Class 118 - Coating apparatus
Definition: Coating apparatus wherein the base is rotated around more
No. of patents: 28
Last issue date: 06/17/2008

Number	Title	Issue Date
7387131	Processing apparatus and substrate processing method A substrate processing apparatus for processing a substrate With a processing fluid is provided. The apparatus includes holding members 60 for holding the substrate W, a chuck member 61 for supporting the holding members 60 and a top-face member...	06/17/2008
7030039	Method of uniformly coating a substrate A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing throu...	04/18/2006
7018943	Method of uniformly coating a substrate A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing throu...	03/28/2006
6977098	Method of uniformly coating a substrate A method of and an apparatus for coating a substrate with a polymer solution to produce a film of uniform thickness, includes mounting the substrate inside an enclosed housing and passing a control gas, which may be a solvent vapor-bearing gas into the housing throu...	12/20/2005
6858189	Rotating surface of revolution reactor with feed and collection mechanisms A reactor including a rotatable disc (3) having a trough (13) in an upper surface (5) thereof. Reactant (15) is supplied to the trough (13) by way or a feed (4), the disc (3) is rotated at high speed, and the reactant...	02/22/2005
6592420	Manufacturing method for a glass substrate having a phosphor layer used as a color cathode ray tube front panel and a color cathode ray tube manufacturing method A glass substrate manufacturing method and a color cathode ray tube manufacturing method manufactures a front substrate on which a phosphor layer is formed. In an application process a phosphor slurry of one color is applied onto an inner surface of a gla...	07/15/2003
6399518	Resist coating and developing processing apparatus A resist coating and developing processing apparatus comprises an airflow forming mechanism for forming airflows from the tops of a cassette station, a processing station, and an interface section toward the bottoms and a controller for controlling the ai...	06/04/2002
5997947	Rotisserie fixture for coating airfoils The present invention relates to a modular, rotisserie type coating fixture for use in electronic beam physical vapor deposition (EB-PVD) coating processes. The fixture includes a support structure which rotates about a first axis during coating and a plu...	12/07/1999
5874128	Method and apparatus for uniformly spin-coating a photoresist material A method and apparatus for uniformly spin-coating photoresist material on wafers before the wafers are subjected to a photoetching process. The spin-coating apparatus comprises a first rotating device for rotating a rotating connector about a first axis a...	02/23/1999
5820673	Apparatus for applying coatings to lenses and curing the coatings An apparatus for coating a lens and curing the coating on the lens including a lens carrier for griping and holding the lens, a housing having a first set of walls defining a coating chamber with an opening in one of the first walls, the housing also havi...	10/13/1998
5259877	Apparatus with changeover grooves for forming phosphor layer in cathode-ray tube An apparatus for forming phosphor layers in cathode-ray tubes includes a table having a plurality of operating positions for processing panels for cathode-ray tubes to coat phosphor layers thereon. A plurality of angularly spaced clamp heads for holding t...	11/09/1993
5224994	Apparatus and method for liquid treatment of article surfaces An apparatus and method is provided for liquid treating, particularly with coating materials such as paint, of an article, especially an article having a plurality of internal passages. The article is simultaneously rotated on an axis of rotation of the a...	07/06/1993
5205867	Spin coating apparatus having a horizontally linearly movable wafer holder A semiconductor wafer 11 is mounted on an elongated member 18, one end of which is rotatable about a transverse axis (14), thereby to distribute a liquid on the upper surface of the wafer more evenly. In order to stabilize the rotation of the elongated me...	04/27/1993
5095848	Spin coating apparatus using a tilting chuck A spin coating method includes the steps of applying a coating material on the surface of a substrate, rotating the substrate about a first axis, and revolving the substrate about a second axis while tilting the substrate towards the second axis. The rota...	03/17/1992
5094183	Rotating apparatus for coated work A coated work rotating apparatus is disclosed which dries paint on a coated work while rotating the coated work after completion of coating. The coated work rotating apparatus comprises a carrier frame transported in one direction by a transport mechanism...	03/10/1992
4851263	Method and apparatus for application of wax on wafers A method and an apparatus for applying molten wax to one face of a wafer is disclosed. A container having an upwardly facing opening contains the molten wax. The wafer is held substantially horizontally above the opening of the container, with one face of...	07/25/1989
4655162	Semiconductor device manufacturing apparatus The present invention provides a semiconductor device manufacturing apparatus which, in processing wafers with processing liquid, prevents dust contamination of a wafer surface to be processed, enables fine control of processing liquid temperature, enable...	04/07/1987
4640846	Semiconductor spin coating method An improved method for coating a semiconductor wafer with a uniform layer of photoresist or other liquid film is provided. The liquid is first semi-uniformly deposited on the wafer by spraying or otherwise. Thereafter, the wafer is rotated about an axis p...	02/03/1987
4418093	Method for distributing material inside a tire casing The present invention relates to a method and apparatus for producing a liner of elastomeric material insitu in a pneumatic tire casing....	11/29/1983
4271209	Method and apparatus for coating the grooved bottoms of substrates Uniform and repeatable formation of a resistance element on a substrate is achieved by spinning the coated objects which are still in a wet state while rotating them about an orthogonal axis to subject the wet indicator formulation to centrifugal forces w...	06/02/1981
4222345	Vacuum coating apparatus with rotary motion assembly Coating apparatus having a vacuum chamber and a rotary motion assembly rotatably mounted in the vacuum chamber. Drive means is carried by the vacuum chamber for rotating the rotary motion assembly on an axis. At least one coating source is disposed within...	09/16/1980
4124411	Method of providing a layer of solid material on a substrate in which liquid from which the solid material can be formed, is spread over the substrate surface A method of providing a layer of solid material, in particular semiconductor material, in which drops of a liquid from which the solid material is deposited, is dropped and spread on a flat surface which is given a rotating movement and also another perio...	11/07/1978
4096295	Method for multiple coatings A plurality of articles such as sheets or lenses are simultaneously and uniformly coated by first placing them in vertical spaced relationship with respect to each other within a tank having a quantity of fluid coating material therein. The coating materi...	06/20/1978
4081976	Equipment for the treatment of textiles in the form of hanks or webs with liquid or pastes An equipment for treating textiles in the form of hanks or webs comprising at least one drive member coupled to the said hank or web, at least one applicator device which contains the liquid or paste to be applied to the hank or web, guide members which g...	04/04/1978
4062437	Conveyor equipment for surface treatment of workpieces An arrangement for surface treating workpieces has a pair of rotary conveyors each rotatable about a respective vertical rotation axis and provided with a plurality of angularly spaced holders each of which can grip a respective workpiece and advance it a...	12/13/1977
4004784	Machine for preparing orthopedic cast-making materials Machine for sequentially rotating and tilting a container having materials therein for wetting or impregnating a tape to be used for forming an orthopedic cast, the machine having a turntable rotatable about a horizontal axis, a platform on the turntable ...	01/25/1977
3986478	Vapor deposition apparatus including orbital substrate holder In a method of an apparatus for forming a conductive layer on a substrate wafer by evaporative, sputtering or other similar processes performed under a controlled environment, there are provided means for holding the wafer at the edge portions thereof wit...	10/19/1976
3983838	Planetary evaporator A planetary evaporator having at least one source of material for coating, by evaporation, workpieces such as semiconductor wafers. The apparatus includes a pallet mounted for rotation about its own axis, and substrate or workpiece holders mounted on the ...	10/05/1976

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Class 118/53 - Plural axes of rotation of work