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Class 118/50 - WITH VACUUM OR FLUID PRESSURE CHAMBER


Subclass of Class 118 - Coating apparatus
Definition: Coating apparatus combined with a chamber or housing in
No. of patents: 638
Last issue date: 04/10/2012


1                      
NumberTitleIssue Date
8151727Perovskite-oxide film, piezoelectric device, and liquid discharge device
A film formed on a substrate different from the monocrystalline perovskite substrate contains a piezoelectric oxide expressed as A(BxC1-x)O3 other than Bi(FeySc1-y)O3 and Bi(Fe, Co)O3, wher...
04/10/2012
8104421Vacuum chamber on a frame basis for coating installations
The present invention relates to a vacuum chamber and to its production. According to the invention, the vacuum chamber comprises a frame into which insert plates are placed. The insert plates form together with the frame a closed space in which a vacuum can be crea...
01/31/2012
7984689Device for the continuous coating of a strip-like substrate
The invention relates to a device for the continuous coating of a strip-like substrate in a vacuum, especially for producing coating patterns on the substrate, with a printing roller and a backing roller, the substrate guided between the printing roller and the back...
07/26/2011
7966966Vacuum high pressure filling equipment
The present invention proposes a vacuum/high pressure filling apparatus which can improve the filling rate and shorten the impregnating time period in immersing a porous workpiece into a filling liquid. The vacuum/high pressure filling apparatus includes: an openabl...
06/28/2011
7900576Process and device for treating and consolidating stone blocks and slabs
A system (10) is disclosed for treating and consolidating with hardenable resins stone blocks (1) comprising at least one liquid- and gas-tight sheet (2) adapted to form a containing housing (3) of a block (1); at least one permeab...
03/08/2011
7681518Parylene coated components for artificial sphincters
A method of depositing a coating to a surface of an inflatable component by providing a vacuum chamber system having an inner chamber positioned within an outer chamber. At least one coating material is introduced into at least one of the inner and outer chambers to...
03/23/2010
7479189Coating plant with a charging lock and device therefor
The present invention relates to a coating plant, especially a vacuum coating plant, with a charging lock, especially a rectangular vacuum lock for a coating chamber, with a lock aperture (13) having a length of at least 1000 mm that comprises a shutter (6...
01/20/2009
7438763Coating apparatus and method having a slide bead coater and liquid drop applicator
A coating apparatus and coating method include a device for conveying an object to be coated; a coating device which is disposed in a vicinity of a conveyed surface of the object, and which discharges a coating liquid, and which forms a bridge of the liquid between ...
10/21/2008
7410542Variable environment, scale-able, roll to roll system and method for manufacturing thin film electronics on flexible substrates
A roll to roll, film forming system overcoming the shortcomings of current roll to roll processing is presented; The roll to roll enabled cartridge is loaded with a bolt of fresh flexible substrate. A skate couples with a cartridge, forms a seal with the cartridge's...
08/12/2008
7399708Method of treating a composite spin-on glass/anti-reflective material prior to cleaning
Methods are provided for cleaning a microelectronic device, and one method includes providing a substrate having a patterned SOG/anti-reflective material; performing a process to cure the patterned SOG/anti-reflective material; and performing a cleaning process to r...
07/15/2008
7393414Methods and systems for processing a microelectronic topography
Methods and systems are provided which are adapted to process a microelectronic topography, particularly in association with an electroless deposition process. In general, the methods may include loading the topography into a chamber, closing the chamber to form an ...
07/01/2008
7384484Substrate processing method, substrate processing apparatus and substrate processing system
After subjected to a developing process, a rinsing process and a replacing process in this order in a developing unit 10A, 10B, a substrate W wet with an anti-drying solution is wet-transported to a supercritical drying unit 20 by a primary tran...
06/10/2008
7384662Through structure of connecting line at gastight chamber, and ejection system incorporating same; method of manufacturing LCD device, organic EL device, electron emitting device, PDP device, electrophoresis display device, color filter, and organic EL; and method of forming spacer, metal wiring, lens, resist, and light diffuser
There is provided a through structure of connecting lines extending through a wall of a gastight chamber. The through structure of the connecting lines is capable of positively sealing between the wall and the connecting lines extending therethrough. The through str...
06/10/2008
7370659Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
Stepper and/or scanner machines including cleaning devices and methods for cleaning stepper and/or scanner machines are disclosed herein. In one embodiment, a stepper and/or scanner machine includes a housing, an illuminator, a lens, a workpiece support, a cleaning ...
05/13/2008
7367264Method and apparatus for treating sheets including a vacuum roller for retaining sheets in curved configuration
An apparatus and method for retaining individual sheets of substrate in a curved configuration during coating or printing is disclosed. ...
05/06/2008
7361225Liquid tank
The present invention provides a liquid tank which has a compact construction comprising a process bath, an agitation service bath, an agitation room, a liquid supply tunnel, and a liquid supply outlet. ...
04/22/2008
7361226Thermo-stable coating die design method and apparatus
A method of designing and the resulting thermally stable heated coating die apparatus, the die apparatus including a die having a die geometry and a heating system with heaters and temperature sensors. The method and resultant apparatus provides minimized temperatur...
04/22/2008
7357842Cluster tool architecture for processing a substrate
A cluster tool for processing a substrate includes a cassette and a processing module including a first processing chamber that is configured to perform a chill process on a substrate, a second processing chamber that is configured to perform a bake process on the s...
04/15/2008
7354618Oxygen plasma post-deposition treatment of magnetic recording media
A method of manufacturing magnetic recording media, comprising sequential steps of: (a) providing an apparatus for manufacturing the media; (b) supplying the apparatus with at least one substrate for the media;
04/08/2008
7347898Slide hopper and multilayer coating apparatus having the same
The present coating system (100) provides a multilayer coating apparatus for coating an object (112). The multilayer coating apparatus includes a slide hopper (116, 140). The slide hopper includes a main body (116, 140), the main body ess...
03/25/2008
7341633Apparatus for electroless deposition
Embodiments of the invention generally provide a fluid processing platform. The platform includes a mainframe having a substrate transfer robot, at least one substrate cleaning cell on the mainframe, and at least one processing enclosure. The processing enclosure in...
03/11/2008
7328785Low electrostatic discharge conveyor
A conveyor for transporting objects sensitive to electrostatic discharge. In one embodiment, the present invention relates to a roller conveyor with conductive rollers in electrical communication with an electrical ground. The rollers preferably have about 105 ...
02/12/2008
7326301Application device
A device for direct or indirect application of liquid or viscous coating medium by way of an application system onto a material web, especially a paper or cardboard web, including a weakening device for weakening the boundary layer of air that is carried along by th...
02/05/2008
7323054Apparatus for coating a monolith support
Apparatus for coating a support such as a monolithic catalyst support (5) comprises a dispenser (1) for dispensing a predetermined quantity of coating liquid, a containment (2) for the liquid and a source of vacuum (8, 9) which can be act...
01/29/2008
7309395System for forming composite polymer dielectric film
A system for depositing a composite polymer dielectric film on a substrate is disclosed, wherein the composite polymer dielectric film includes a low dielectric constant polymer layer disposed between a first silane-containing layer and a second silane-containing la...
12/18/2007
7300889Method for forming a coating film on a plate-like workpiece
A method for forming a coating film, comprises the steps of: applying a raw material of a low dielectric constant onto a surface of a plate-like material; reducing oxygen concentration in the atmosphere surrounding the plate-like material to be less than or equal to...
11/27/2007
7278831Apparatus and method for control, pumping and abatement for vacuum process chambers
The present invention is an apparatus and method for controlling pressure, pumping a vacuum and providing abatement for a plurality of vacuum processing chambers. The system may be used in semiconductor manufacture. Multiple vacuum processing chambers are exhausted ...
10/09/2007
7277141Optical bodies containing cholesteric liquid crystal material and methods of manufacture
An optical body includes a substrate and a cholesteric liquid crystal layer disposed on the substrate. The cholesteric liquid crystal layer has a non-uniform pitch along a thickness direction of the layer and comprises a crosslinked polymer material that substantial...
10/02/2007
7270136Apparatus for cleaning the edges of wafers
The invention concerns an apparatus for cleaning the edge of a wafer that may be relatively simply constructed with low cost, and prevent the wafer from being re-contaminated by the edge cleaning, thus resulting in increase of the yield rate of wafers. The apparatus...
09/18/2007
7266323Manifold for toner collection and contamination control in xerographic process developer housing
An airborne toner collection manifold for an electrostatographic printer for coupling in fluid flow communication with a vacuum source includes an inlet, a collection duct, a first exhaust duct and a second exhaust duct. The inlet defines a gap slot extending longit...
09/04/2007
7264741Coater having substrate cleaning device and coating deposition methods employing such coater
A coater having a substrate cleaning device is disclosed. Also disclosed are methods of processing substrates in a coater equipped with a substrate cleaning device. The substrate cleaning device comprises an ion gun (i.e., an ion source) that is positioned beneath a...
09/04/2007
7258746Coating apparatus for segments of cylindrical substrates
A coating apparatus includes a cylindrical holding chamber having open ends, an opening formed in an inner surface and an inner diameter; a specimen having a curved inner surface with a radius of curvature that is equal to one half the inner diameter of the cylindri...
08/21/2007
7252714Apparatus and method for thermally controlled processing of microelectronic workpieces
Apparatus and method for thermally controlled processing of microelectronic workpieces with liquids. An apparatus in accordance with and embodiment of the invention includes a process vessel configured to carry a processing liquid, such as an electroless processing ...
08/07/2007
7252854Method and apparatus for applying a gel
A rotatable vacuum chamber receives an optical connector having an output face on which an optical gel is applied substantially without entrapped air. Opposite the output face is placed a gel dispenser with its opened nozzle pointing towards the output face. Uncured...
08/07/2007
7249838Self threading wallpaper printer
A self threading printer is disclosed for producing rolls of wallpaper. It features a media loading area adapted to support a media cartridge in a position so that a media supply slot of the cartridge is closely adjacent to a pilot guide. The device's cabinet contai...
07/31/2007
7241339Method and apparatus for applying a gel
A rotatable vacuum chamber receives an optical connector having an output face on which an optical gel is applied substantially without entrapped air. Opposite the output face is placed a gel dispenser with its opened nozzle pointing towards the output face. Uncured...
07/10/2007
7238241Method of producing high aspect ratio domes by vapor deposition
An apparatus for the manufacture of chemical vapor deposited domes. The apparatus has a vapor deposition chamber with a plurality of sides, a base and a top where the base has a reactant port for receiving a flow of chemical reactants. A male mandrel is joined to on...
07/03/2007
7235141Lift-off method and chemical liquid tank
A lift-off procedure is provided which enables prevention of damage to a wiring pattern caused by contact of a metal being peeled off from a wafer with a wiring pattern at a time of lift-off procedure. A wafer having a surface on which a pattern is formed which cont...
06/26/2007
7226514Spin-rinse-dryer
An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least ...
06/05/2007
7223153Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces
An apparatus and method for polishing objects, such as semiconductor wafers, utilizes one or more polishing surfaces, multiple wafer carriers and at least one load-and-unload cup. The load-and-unload cup may be configured to move to and from the wafer carriers in a ...
05/29/2007
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