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| Number | Title | Issue Date |
| 7253109 | Method of depositing a tantalum nitride/tantalum diffusion barrier layer system We have discovered a method of providing a thin, approximately from about 2 Å to about 100 Å thick TaN seed layer, which can be used to induce the formation of alpha tantalum when tantalum is deposited over the TaN seed layer. Further, the ... | 08/07/2007 |
| 7118346 | Compressor blade A compressor blade (26) comprises an aerofoil (36) and a root (38). The aerofoil (36) comprises a concave wall (40) extending from a leading edge (44) to a trailing edge (46) and a convex wall (42) extending fr... | 10/10/2006 |
| 7083861 | EL element An EL element comprising a light transmitting substrate, a light transmitting electrode formed on the substrate, a light emitting layer containing a positive ion absorber, a dielectric layer and a back electrode. Further, an EL element of the present invention conta... | 08/01/2006 |
| 7047637 | Method of manufacture of ceramic composite wiring structures for semiconductor devices Method of manufacture of a composite wiring structure for use with at least one semiconductor device, the structure having a first conductive member upon which the semiconductor device can be mounted for electrical connection thereto. A dielectric member, made of ce... | 05/23/2006 |
| 7026238 | Reliability barrier integration for Cu application Embodiments of the present invention provide a process sequence and related hardware for filling a patterned feature on a substrate with a metal, such as copper. The sequence comprises first forming a reliable barrier layer in the patterned feature to prevent diffus... | 04/11/2006 |
| 6942733 | Fluid sealing system for a crystal puller A fluid sealing system is provided for use in a crystal puller for growing a monocrystalline ingot. The crystal puller has a housing, a fluid flow path contained in the housing, and a fluid passage through a wall of the housing for passage of fluid. The fluid sealin... | 09/13/2005 |
| 6911124 | Method of depositing a TaN seed layer We have discovered a method of providing a thin approximately from about 20 Å to about 100 Å thick TaN seed layer, which can be used to induce the formation of alpha tantalum when tantalum is deposited over the TaN seed layer. Further, the ... | 06/28/2005 |
| 6896732 | Source material feeder apparatus for industrial crystal growth systems A raw material feeder apparatus for industrial crystal growth systems includes a hopper disposed within a vacuum chamber and adapted to hold a quantity of raw material therein. A slide is disposed adjacent to an opening of the hopper and configured to receive the ra... | 05/24/2005 |
| 6702892 | Production device for high-quality silicon single crystals An apparatus is provided which is to be used in producing single crystals for silicon wafers useful as semiconductor materials and which can stably produce large-diameter, long-length and high-quality single crystals from which wafers limited in the numbe... | 03/09/2004 |
| 6287382 | Electrode assembly for electrical resistance heater used in crystal growing apparatus An electrode assembly for use with an electrical resistance heater mounted in a housing of a crystal puller used for growing monocrystalline silicon ingots according to the Czochralski method comprises an electrode having a first end in electrical connect... | 09/11/2001 |
| 6138481 | Glassrod elongation heating furnance having double bellows In a heating furnace which holds at least one end of a glass rod with a holding portion and elongates the glass rod by softening the glass rod successively from the other end portion thereof with heating while applying a tensile force thereto, the heating... | 10/31/2000 |
| 5932007 | Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system A puller apparatus for a Czochralski crystal puller system is provided which includes a primary puller chuck and a secondary puller chuck. The primary puller chuck is attached to a seed crystal. The secondary puller chuck is shaped to enclose and retain a... | 08/03/1999 |
| 5846322 | Apparatus for drawing single crystals A crucible is mounted on a crucible support bolt (11, 34) in a vacuum chamber (33) resting on a base stand (32) and can be heated by the thermal radiation of a heating element. A drawing element (35) is provided above the melt, by means of which the cryst... | 12/08/1998 |
| 5290395 | Method of and apparatus for preparing single crystal A method and an apparatus for pulling a compound single crystal from a raw material molten solution is constructed to cause the solution to flow into a second crucible provided in a first crucible containing the raw material molten solution which is conti... | 03/01/1994 |
| 5254319 | Single crystal pulling apparatus Aa single crystal pulling apparatus installed on a frame body further includes a second frame body which is founded independently from the main chamber to rigidly support the winder assembly, and a hermetical and flexible tube which is provided between th... | 10/19/1993 |
| 5106593 | Apparatus for producing Czochralski-grown single crystals An apparatus for producing a single crystal grown by Czochralski method includes a winding drum disposed in a case for winding up and down a flexible pull wire, a power transmission mechanism for driving the winding drum, and a bearing unit for rotatably ... | 04/21/1992 |
| 4873062 | Apparatus for the growth of single crystals In an apparatus for the Czochralsky growth of compound single crystals wherein a single crystal growing portion is provided in a sealed vessel whose opening part is sealed by a B2 O3 melt and which contains therein an atmosphere of a... | 10/10/1989 |
| 4824519 | Method and apparatus for single crystal pulling downwardly from the lower surface of a floating melt An elemental or compound melt is floated on a denser encapsulent. The melt has two horizontal free surfaces (i.e., surfaces not in contact with a solid). A shaft including a seed crystal extends upwardly through the encapsulent to contact the lower free s... | 04/25/1989 |
| 4704257 | Apparatus for growing single crystals of dissociative compounds An apparatus for pulling single crystals of dissociative compounds, with a volatile component gas sealed in a growth chamber at a controlled pressure thereof, is disclosed, wherein the chamber is made of one or more materials selected from the group consi... | 11/03/1987 |
| 4678534 | Method for growing a single crystal A modified liquid encapsulated Czockralski method for growing a single crystal of compound semiconductor is disclosed. This method uses two vessels. An inner vessel is filled with an inactive gas, a gas of an element of group V and optionally an impurity ... | 07/07/1987 |
| 4596700 | Apparatus for producing single crystal An apparatus for producing a single crystal according to the CZ method, which comprises a closed container consisting of upper and lower halves and having a shaft for pulling up the single crystal, at least a part of which contacting with said vapor of th... | 06/24/1986 |
| 4569828 | Crystal pulling apparatus for making single crystals of compound semiconductors containing a volatile component In a high pressure vessel such as an electric furnace using an inert gas of an extremely high pressure as an atmosphere for preventing the evaporation of arsenic or phosphorus when pulling a single crystal of a compound semiconductor having a high melting... | 02/11/1986 |
| 4406731 | Apparatus for and method of sealing shafts in crystal-growing furnace systems An apparatus for and a method of sealing a rotating shaft in a crystal-growing furnace, wherein the crystal-growing furnace includes a chamber adapted to be maintained at a contaminant-free inert atmosphere, with an inert gas at a low pressure, a rotatabl... | 09/27/1983 |
| 4360499 | Bellows assembly for crystal ribbon puller There is disclosed apparatus for growing a ribbon of crystalline material which apparatus comprises a furnace adapted to contain a melt from which the ribbon is to be grown and crystal pulling means spaced from the furnace and including crystal seed holdi... | 11/23/1982 |
| 4335081 | Crystal growth furnace with trap doors An improved furnace is provided for growing crystalline bodies from a melt. The improved furnace is characterized by a door assembly which is remotely controlled and is arranged so as to selectively shut off or permit communication between an access port ... | 06/15/1982 |
| 4330362 | Device and process for pulling high-purity semiconductor rods from a melt In the crucible pulling of silicon according to the Czochralski technique, ilicon monoxide forms as a result of the silicon melt reacting with the quartz crucible containing the melt, and evaporates and deposits in the form of solid particles on the upper ... | 05/18/1982 |
| 4284605 | Linear drive shaft seal A linear drive-shaft sealing apparatus particularly useful in removing crystals from a melt solution of an evacuated chamber, which sealing apparatus comprises a first input drive shaft and a second output drive shaft, both shafts adapted for linear movem... | 08/18/1981 |
| 4097329 | Process for the production of monocrystalline silicon rods A process for the production of a monocrystalline silicon rod by withdrawal rom a silicon melt in a drawing chamber by means of a drawing spindle, comprises passing a stream of a protective gas, such as argon, into said chamber during the drawing operation... | 06/27/1978 |
| 4028058 | Device for making monocrystalline gallium arsenide Device for making monocrystalline gallium arsenide by drawing the crystal from a gallium arsenide-containing melt with adjustment of an arsenic vapor pressure while rotating and lifting the drawing means, said device comprising means for rotating the cruc... | 06/07/1977 |
