Class 977/887 - Nanoimprint lithography (i.e., nanostamp)

Subclass of Class 977 - Nanotechnology
Definition: Subject matter wherein manufacturing of the nanostructure
No. of patents: 24
Last issue date: 10/14/2008

Number	Title	Issue Date
7434512	Printing in a medium A method for transferring a pattern from an elastic stamp to a substrate in the presence of a third medium is described. A proximity contact is achieved between the stamp and the substrate. A layer of the third medium between the stamp and the substrate is controlle...	10/14/2008
7410901	Submicron device fabrication A method for fabricating substrate material to include trenches and unreleased beams with submicron dimensions includes etching a first oxide layer on the substrate to define a first set of voids in the first oxide layer to expose the substrate. A second oxide layer...	08/12/2008
7407890	Patterning sub-lithographic features with variable widths A method of processing a substrate of a device comprises the as following steps. Form a cap layer over the substrate. Form a dummy layer over the cap layer, the cap layer having a top surface. Etch the dummy layer forming patterned dummy elements of variable widths ...	08/05/2008
7399422	System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed thereby A system and method form a nanodisk that can be used to form isolated data bits on a memory disk. The imprint stamp is formed from first and second overlapping patterns, where the patterns are selectively etched. The selective etching leaves either pits or posts on ...	07/15/2008
7387508	Compliant device for nano-scale manufacturing The present invention is directed to a compliant device comprising a support body, a floating body, and a plurality of flexure arms. Each of the plurality of flexure arms is connected between the support body and the floating body to transfer a load therebetween in ...	06/17/2008
7341441	Nanoprint equipment and method of making fine structure Provided is a nanoprint apparatus in which a substrate and a mold formed on its surface with fine concavities and convexities are heated and pressed with each other through the intermediary of a buffer member interposed therebetwen, including a mechanism for success...	03/11/2008
7335579	Nanometer-scale memory device utilizing self-aligned rectifying elements and method of making A memory device including a substrate, and multiple self-aligned nano-rectifying elements disposed over the substrate. Each nano-rectifying element has multiple first electrode lines, and multiple device structures disposed on the multiple first electrode lines form...	02/26/2008
7335520	Method and apparatus for fabricating flat panel display A fabricating method of a flat panel display includes the steps of spreading an etch-resist on a thin film formed on a substrate, a polarity of the etch-resist changed by irradiation with a first light; providing a soft mold having a projected surface and a groove a...	02/26/2008
7329568	Method of forming active device on substrate that includes embossing insulating resin layer with metal mold There are provided the steps of forming, on a substrate 10, a semiconductor layer 12 to be a base of a device, forming each of electrodes 14 to be a source electrode and a drain electrode on a surface of the semiconductor layer 12 provide...	02/12/2008
7320283	Nanoprinting method Patterns of nanometer and micrometer dimensions are printed on a substrate by first forming a solution or suspension of a liquid and a printing material and then applying a layer of the solution or suspension to the substrate. Then, without applying pressure, a stam...	01/22/2008
7303703	Nano-imprint system with mold deformation detector and method of monitoring the same A system for nano-imprint with mold deformation detector is disclosed for real-time monitoring of the deformation of the mold. An electrostatic plate capacitor is embedded in the mold, serving as the deformation detector. The capacitor includes two opposite metal fi...	12/04/2007
7229273	Imprint lithography template having a feature size under 250 nm The present invention includes a template comprising a plurality of protrusions and a plurality of recessions with a distance between a zenith of any of the plurality of protrusions and a nadir of any one of the plurality of recessions being less than 250 nm. ...	06/12/2007
7169251	Method of forming nanofluidic channels A method of forming nanofluidic enclosed channels includes providing a first substrate having a layer of a first material disposed thereon. A plurality of nanoscale slots is formed along a second substrate using nanolithography, etching, or other disclosed technique...	01/30/2007
7080596	Micro-casted silicon carbide nano-imprinting stamp A micro-casted silicon carbide nano-imprinting stamp and method of making a micro-casted silicon carbide nano-imprinting stamp are disclosed. A micro-casting technique is used to form a foundation layer and a plurality of nano-sized features connected with the found...	07/25/2006
7074380	Method for manufacturing carbon fibers and electron emitting device using the same To provide an ink for producing a catalyst capable of stably forming metal particles which act as catalysts suitable for growth of carbon fibers by applying them onto a substrate. A solution containing a metal organic compound containing any one metal of Pd, ...	07/11/2006
6696220	Template for room temperature, low pressure micro-and nano-imprint lithography Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material ...	02/24/2004
6672702	Method and apparatus for printing, cleaning, and calibrating A method and apparatus for delivering solvent free marking material to a receiver is provided. A printhead includes a discharge device having an inlet and an outlet with a portion of the discharge device defining a delivery path. An actuating mechanism is...	01/06/2004
6674121	Method and system for molecular charge storage field effect transistor A method and/or system and/or apparatus for a molecular-based FET device (an m-FET) uses charge storing molecules between a gate and channel of an FET-type transistor. Further embodiments describe fabrication methods for using combinations of standard pra...	01/06/2004
6672739	Laser beam homogenizer An apparatus, system, and method for illuminating a lithographic mask or an object in a microscope is presented, whereby the output of a laser beam homogenizer is imaged on to a field such as the object plane for lithographic application or on to the rear...	01/06/2004
6670981	Laser printing with rewritable media A laser printing system for imaging using plain paper, rewritable media, or both. The rewritable media employs a molecular colorant. The rewritable media is brought into contact with an electrical charge deposited on the surface of a photoconductor drum o...	12/30/2003
6666548	Method and apparatus for continuous marking A method and an apparatus for continuously delivering a solvent free marking material to a receiver includes a printhead with a discharge device is provided. The discharge device has an outlet and is in fluid communication with a pressurized reservoir of ...	12/23/2003
6647088	Production of a dense mist of micrometric droplets in particular for extreme UV lithography Process and device for the generation of a fog of micrometric and submicrometric droplets, which may find application to the generation of light in the extreme ultraviolet range, particularly for lithography. According to the process and device, a pressur...	11/11/2003
6638823	Ultra small size vertical MOSFET device and method for the manufacture thereof The present invention relates to an ultra small size vertical MOSFET device having a vertical channel and a source/drain structure and a method for the manufacture thereof by using a silicon on insulator (SOI) substrate. To begin with, a first silicon con...	10/28/2003
6617012	Styrene-acrylonitrile as a resist for making patterned media A system and method for forming servo patterns on magnetic medium is disclosed. A magnetic film coated with a layer of styrene-acrylonitrile is stamped with a nickel stamper reproducing the negative image of the stamper pattern on the styrene-acrylonitril...	09/09/2003

PatentStorm

Celebrity Inventors

PatentStorm News

Class 977/887 - Nanoimprint lithography (i.e., nanostamp)