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| Number | Title | Issue Date |
| 8038772 | Filter cartridge for recuperating halogenated hydrocarbons A filter cartridge for recovering halogenated hydrocarbons (HKW), such as those occurring in inhalation anesthetics in the medical field, contains a first gas inlet; a container which contains a filter insert; wherein the container is connected over a connection wit... | 10/18/2011 |
| 7931737 | Systems and methods for restricting scale in gas scrubbers and related components Systems, methods and apparatus for restricting scale build-up in gas scrubbers and piping are disclosed. The scrubbers and/or pipes may have a coating disposed on internal surfaces thereof. The coating restricts formation of scale within the pipe, especially scale t... | 04/26/2011 |
| 7883568 | Separation of light gases from halogens A process is provided for separating one or more light gases from bromine or chlorine using one or more physical separations and contact with a chemical scrubber to recover additional halogen. In one aspect, the process comprises (a) providing a feed of halogen cont... | 02/08/2011 |
| 7862646 | Nanoporous articles and methods of making same An adsorbent having porosity expanded by contact with a first agent effecting such expansion and a pressurized second agent effecting transport of the first agent into the porosity, wherein the adsorbent subsequent to removal of the first and second agents retains e... | 01/04/2011 |
| 7842125 | Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of the zeolite 3 A, 4A or 5 A which is ion excha... | 11/30/2010 |
| 7637986 | Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent therefor. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of zeolite 3A, 4A or 5A which undergoes ion exchange... | 12/29/2009 |
| 7384618 | Purification of nitrogen trifluoride A process and system for adsorption purification of NF3 wherein a crude product containing NF3 and impurities such as CF4 is brought into contact with a polyacrylonitrile-based carbon molecular sieve so that at least a portion of one... | 06/10/2008 |
| 7368000 | Treatment of effluent gases A method is described for recovering a noble gas, such as xenon or krypton, from a first gas mixture comprising a plurality of components, one of which is the noble gas and the others are typically helium and/or nitrogen, argon, and relatively light fluorocarbons. T... | 05/06/2008 |
| 7364603 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream An apparatus and process for abating at least one acid or hydride gas component or by-product thereof, from an effluent stream deriving from a semiconductor manufacturing process, comprising, a first sorbent bed material having a high capacity sorbent affinity for t... | 04/29/2008 |
| 7361209 | Apparatus and process for preparing sorbents for mercury control at the point of use A system for treating a contaminated gas stream is provided that includes a comminution device 204 operable to effect size reduction of a plurality of sorbent particles and form a plurality of comminuted particles, a plurality of nozzles 224 distribute... | 04/22/2008 |
| 7326279 | Method for removing harmful substance in vent gas A method for removing harmful substances in a vent gas containing a halogen or halogen compound gas remaining in the pipeline of a cylinder cabinet, which comprises contacting the vent gas with a treating agent comprising an alkaline earth metal compound, an alkali ... | 02/05/2008 |
| 7306775 | Method for removing halogen series gas A method for removing a halogen series gas, which comprises contacting a gas containing a halogen series gas forming at least one kind selected from the group consisting of HF, HCl, HBr and HI by water with a granule containing from 60 to 99.9 mass % of a solid base... | 12/11/2007 |
| 7279076 | Apparatus and method for handling easily polymerizable substance, apparatus for extracting liquid from apparatus under reduced pressure, and process for producing easily polymerizable substance In an apparatus capable of distilling and refining an easily polymerizable substance, piping is performed so that when a strainer in action is switched to a backup strainer, the strainer can be switched after removing air in the backup strainer to replace air in the... | 10/09/2007 |
| 7258725 | Gas supplying method and system Gas supplying method and system in which effective component gas in exhaust gas can be separated and purified efficiently to be resupplied regardless of variation in the flow rate or composition of the exhaust gas and consumed gas can be replenished efficiently. In ... | 08/21/2007 |
| 7252768 | Method for eliminating metal halides that are present in a liquid or gaseous, organic or non-organic effluent The invention relates to a method for eliminating metal halides which are present in a liquid or gaseous, organic or non-organic effluent. According to the invention, the elimination is carried out by absorption of said metal halides on alumina agglomerates. The inv... | 08/07/2007 |
| 7132011 | Reactive gas filter In preferred embodiments, the invention provides a gas filter for a reactive gas used in semiconductor processing tools and processes that are sensitive to molecular contamination. The reactive gas filter of the invention have improved pressure drop and can supply a... | 11/07/2006 |
| 7029517 | Devices and methods for hydrogen storage and generation Disclosed herein is a method for the storage of hydrogen comprising contacting a hydrogen storage composition with a gaseous mixture comprising hydrogen; and irradiating the hydrogen storage composition with radio frequency radiation or microwave radiation in an amo... | 04/18/2006 |
| 7022160 | Method of purifying gaseous nitrogen trifluoride The present invention relates to a method of purifying gaseous nitrogen trifluoride from CF4 as impurity. The method comprises selective adsorption of nitrogen trifluoride by dehydrated erionite at a temperature of from −30 to 30° C., displaceme... | 04/04/2006 |
| 6991671 | Rectangular parallelepiped fluid storage and dispensing vessel A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scr... | 01/31/2006 |
| 6939394 | Gas storage and dispensing system with monolithic carbon adsorbent A fluid storage and dispensing apparatus, including a fluid storage and dispensing vessel having an interior volume, in which the interior volume contains a physical adsorbent sorptively retaining a fluid thereon and from which the fluid is desorbable for dispensing... | 09/06/2005 |
| 6921519 | Decomposition of fluorine containing compounds A process for the decomposition and removal of one or more fluorine containing compounds from a first gaseous mixture comprising the one or more fluorine containing compounds and water vapour, which process comprises the stages of: (i) contacting the first gaseous m... | 07/26/2005 |
| 6911065 | Method and system for supplying high purity fluid A fluid purifying apparatus that includes a manifold that includes a first branch and a second branch, a first check valve coupled to the first branch of the manifold, and a purifier unit that includes a first end and a second end, wherein the first end is coupled t... | 06/28/2005 |
| 6888040 | Method and apparatus for abatement of reaction products from a vacuum processing chamber An exemplary method and apparatus for abating reaction products from a vacuum processing chamber includes a reaction chamber in fluid communication with the vacuum processing chamber, a coil disposed about the reaction chamber, and a power source for supplying RF en... | 05/03/2005 |
| 6846472 | Process for treating gaseous emissions generated during production of carbon anodes in an aluminum plant A process for treating gaseous emissions generated during the production of carbon anodes in the aluminum industry. In this process, first gaseous emissions generated during green anode preparation are collected and preheated by direct contact with a stream of combu... | 01/25/2005 |
| 6805728 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream An apparatus and process for abating at least one acid or hydride gas component or by-product thereof, from an effluent stream deriving from a semiconductor manufacturing process, comprising, a first sorbent bed material having a high capacity sorbent affinity for t... | 10/19/2004 |
| 6767513 | Method of treating exhaust gases containing halogen based compound A method of treating exhaust gases containing halogen compound, the improvement in that the exhaust gases containing halogen compounds such as halogen gases and/or hydrogen halide gases (halogenated acid gases) are brought into contact with simple metals. The... | 07/27/2004 |
| 6706090 | Method for recovering and/or separating sulfur oxyfluorides from gas mixtures A method for the recovery or separation of sulfur oxyfluorides from gas mixtures, in which the gas mixture passes through at least one adsorption stage or membrane stage containing or consisting of zeolites with a modulus >10. The sulfur oxyfluorides fixed to the ad... | 03/16/2004 |
| 6702874 | Gas separation apparatus and gas separation method Using a distillation separator, a gas to be treated is separated into a plurality of gas groups having different boiling points. Then, the specific gases included in each of the plurality of gas groups separated at the first separator and having similar b... | 03/09/2004 |
| 6669760 | Separation of C2F6 from CF4 by adsorption on activated carbon This invention relates to an improvement in a process for removing C2 F6 as an impurity from a CF4 containing gas, preferably CF4 produced by the reaction of F2 with carbon. The improvement in the pro... | 12/30/2003 |
| 6632368 | Process for removing fluorides from fluids A new method for removing HF and related organic fluorides from fluid streams in which the fluoride species exist as impurities and, in particular, from hydrocarbon fluid streams containing no more than about 1.0% by weight total combined fluorides. The m... | 10/14/2003 |
| 6592653 | Fluid storage and delivery system utilizing low heels carbon sorbent medium A fluid storage and dispensing system including a vessel containing a low heel carbon sorbent having fluid adsorbed thereon, with the system arranged to effect desorption of the fluid from the sorbent for dispensing of fluid on demand. The low heel carbon... | 07/15/2003 |
| 6589494 | Process for eliminating halogen-containing compounds contained in a gas or liquid using an adsorbent composition based on at least one metallic element The present invention provides a process for eliminating halogen-containing compounds contained in a gas or a liquid, characterized in that the gas or liquid is brought into contact with a composition based on an alumina and/or a hydrated alumina and at l... | 07/08/2003 |
| 6544319 | Purification of hexafluoro-1,3-butadiene An HFBD purification process includes: (a) contacting a composition containing HFBD with an adsorbent to remove from the HFBD at least two impurities selected from the group consisting of water, an alcohol, hydrofluoric acid and a fluorinated olefin, wher... | 04/08/2003 |
| 6464757 | Filter for chemical oxygen generators The filter contains about 1-15% lithium hydroxide and about 85-99% hopcalite material, having a particle size of approximately 20 to 100 mesh, and can be used in combination with a chemical oxygen generator for removing chlorine gas and carbon monoxide.... | 10/15/2002 |
| 6454837 | Separation of gases containing SF6 Gas mixtures of SF6 and N2, which have been used, for example, as an insulating filler gas for underground cables, for insulating-gas window panes or as a filler gas for car tires and SF6 /air mixtures which have been used... | 09/24/2002 |
| 6406524 | Plant for removing fluor containing waste gases A decentralized cleaning plant for dry cleaning by removing fluorine containing waste gases from a reduction process in several electrolytic cells for aluminum, comprising: a storing place for aluminum oxide; a transportation system to distribute aluminum... | 06/18/2002 |
| 6325841 | Purifying agent and purification method for halogen-containing exhaust gas A cleaning agent and a cleaning process for efficiently removing noxious halogen-based gases such as fluorine, chlorine, boron trifluoride, boron trichloride and tungsten hexafluoride from exhaust gases from semiconductor fabrication processes. The cleani... | 12/04/2001 |
| 6296689 | Filter for chemical oxygen generators The filer contains about 1-15% lithium hydroxide and about 85-99% hopcalite material, having a particle size approximately 20 to 100 mesh, and can be used in combination with a chemical oxygen generator for removing chlorine gas and carbon monoxide.... | 10/02/2001 |
| 6277173 | System and method for discharging gas A system for discharging gas emitted from an apparatus or facility having a vacuum pump which sucks the gas emitted from the apparatus or facility while being supplied with a gas other than the sucked gas, the system comprising a unit for recovering at le... | 08/21/2001 |
| 6277342 | Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers A method for delivering a gas having a proton affinity of less than 866 kJ/mol is disclosed. A support including at least one polymer sufficiently acidic to protonate the gas is contacted with the gas to protonate the gas. The protonated gas condenses to ... | 08/21/2001 |
