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| Number | Title | Issue Date |
| 8087320 | Special path generating device A special path generating device includes a base, a first axis slide assembly, a second axis slide assembly, a working portion, a driving portion, a first cam and a second cam. This first axis slide assembly includes a first bar and a first slide. The second axis sl... | 01/03/2012 |
| 8069748 | XY linear slide mechanism An X-Y linear slide mechanism includes a first block member having opposing exterior and interior surfaces, a second block member having a planar interior surface, a pair of cylindrical rods secured together along their axial lengths. The interior surfaces of the fi... | 12/06/2011 |
| 8056434 | Advancing means for a multi-coordinate measurement table of a coordinate measuring device and method for controlling such an advancing means An advancing means for a multi-coordinate measurement table including a drive unit having a friction rod and a motor for each coordinate axis (x, y). The motor contacts one side of the friction rod with its motor shaft and at least one press roller contacts the othe... | 11/15/2011 |
| 8047095 | XY table actuator Provided is an XY table actuator that, while building-in a drive means for freely moving an object placed on a table within an XY-plane and positioning the object, can be significantly reduced in size and that helps to suppress an increase in table height. The actua... | 11/01/2011 |
| 8042425 | Multi-axis robot for high-speed applications A multi-axis robot for high-speed applications comprises a first and a second guide rail arranged substantially parallel to each other for defining a first axis of motion. A crossbar having a first end and a second end is moveably supported on the guide rails. A car... | 10/25/2011 |
| 7930952 | Toggle-type positioning platform and toggle-type machine tool A toggle-type positioning platform including a first platform, a motor, a screw rod, a second platform and a linkage is provided. The motor and the screw rod are disposed on the first platform; the motor is coupled to the screw rod and suitable for driving the screw... | 04/26/2011 |
| 7886629 | Machine tool and manipulator device adapted to be mounted on such machine A machine tool comprises a first travelling assembly (10) which carries in its turn a second travelling assembly (22). The first assembly (10) is adapted to position the second assembly (22) in a relatively wide space (S1) and ... | 02/15/2011 |
| 7543519 | Device for high-precision generation and measurement of forces and displacements A device for high precision generation and measurement of forces (both pressure and tension) and displacements along a single axis includes a shaft for transferring the forces along an axis X. At least two biased first leaf springs are attached to the shaft and clam... | 06/09/2009 |
| 7421924 | Apparatus for raising or tilting a micromechanical structure An active hinge apparatus is disclosed which can be used to raise a micromechanical structure (e.g. a plate or micromirror) on a substrate. The active hinge apparatus utilizes one or more of teeth protruding outward from an axle which also supports the micromechanic... | 09/09/2008 |
| 7393175 | Actuator system for nanoscale movement An actuator system for making a nanoscale movement of an object is provided. In the actuator system, a platform supports the object. A Z-axis actuator connects the platform to the object in a Z-axis direction, and moves the object in the Z-axis direction by Z-axis d... | 07/01/2008 |
| 7375346 | Positioning device and method of initializing a positioning device In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam gui... | 05/20/2008 |
| 7361910 | Movable stage apparatus A movable stage apparatus includes a reticle stage on which a reflecting reticle is to be mounted, in which when a space is divided by a plane including a reflection surface of the reticle, a guide surface to guide movement of the master reticle stage is arranged in... | 04/22/2008 |
| 7357049 | Machine for machining large parts Machine for machining large parts of the type that comprises a parallel kinematics machining device that moves freely in the X, Y and Z Cartesian axes, characterized in that the said device is mounted on a platform which moves in the Z axis and is in turn mounted on... | 04/15/2008 |
| 7352149 | Method for controlling the position of a movable object, a positioning system, and a lithographic apparatus A method of actuating a movable object in a first degree of freedom includes a) providing a first motor assembly including one or more motors of a first type and a second motor assembly including one or more motors of a second type, each of the first and second moto... | 04/01/2008 |
| 7343076 | Alignment apparatus for use in testing optical modules An exemplary optical module testing apparatus (100) includes a base (10) and a supporting element (20). The base has a testing hole (13) formed thereon. The supporting element has a plurality of supporting portions (23) formed ther... | 03/11/2008 |
| 7334304 | Machine tool In order to improve a machine tool for machining a workpiece by a relative movement between the workpiece and a tool, comprising a first receiving device for the workpiece or the tool, a compound slide system with a second receiving device for the tool or the workpi... | 02/26/2008 |
| 7330093 | Alignment apparatus, exposure apparatus, and device manufacturing method An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnet... | 02/12/2008 |
| 7320546 | Rolling guide apparatus A rolling guide apparatus is provided which is reduced in size and weight, and which includes a track rail of a flexible structure of course having a function of absorbing an impact load and capable of automatically adjusting an error between mounting surfaces of th... | 01/22/2008 |
| 7320265 | Article transfer system A system for controlling an axial movement of an article is presented. The system comprises a support stage assembly and a spring suspension arrangement mounted on the support stage assembly. The spring suspension arrangement comprises first and second assemblies ar... | 01/22/2008 |
| 7319815 | Stage apparatus and camera shake correction apparatus using the same A stage apparatus includes a stationary support base-plate; a Y-direction moving member supported on the stationary support base-plate to move in a Y-direction; and an X-direction moving member supported on the Y-direction moving member to move in an X-direction ort... | 01/15/2008 |
| 7319283 | Moving apparatus, exposure apparatus, and device manufacturing method A moving apparatus includes a first actuator having a movable element and a stator, and a second actuator for driving the stator. The second actuator drives the stator in a direction to suppress rotation of the stator which accompanies movement of the movable elemen... | 01/15/2008 |
| 7316075 | Coordinate measuring machine for metrological determination of a coordinate on a test object A coordinate measuring machine for the metrological determination of a measurement coordinate on a test object comprises a table for mounting the test object. A first and a second bearing support are arranged on the table. A first and a second carriage, each moveabl... | 01/08/2008 |
| 7316381 | Articulated bearing supports for laser resonators In a bearing support (10) for a laser resonator, adjacent support sections (11a, 11b) are directly and undetachably connected to each other by an articulated deflectable joint (12). An additional vertical safety on the beari... | 01/08/2008 |
| 7314360 | Stretch rod extending device and bottom mold lifting device for stretch blow molding machine Improvement of simplicity and durability of a stretch rod extending device and a bottom mold lifting device, equipped on a stretch blow molding machine, is achieved by applying a combination of a magnetic screw shaft and a magnetic nut member, which is able to conve... | 01/01/2008 |
| 7308756 | Apparatus used for manufacturing semiconductor device, method of manufacturing the semiconductor devices, and semiconductor device manufactured by the apparatus and method An apparatus for manufacturing semiconductor devices having a roughly rectangular parallelepiped box-shape includes an internal insertion space for semiconductor packages, first guide grooves and arranged along the longitudinal direction in both side surfaces facing... | 12/18/2007 |
| 7282874 | Alignment apparatus, exposure apparatus, and device manufacturing method An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage fo... | 10/16/2007 |
| 7282820 | Stage device and exposure apparatus An exposure apparatus which aligns a substrate by a stage device for driving a movable element, mounted with a substrate thereon, by using a plane motor. The stage device includes (i) a stator unit having a coil group, and (ii) the movable element, which moves on th... | 10/16/2007 |
| 7282821 | Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatus In a linear motor, each arrayed coil unit (160) of a stator yoke (151) is divided into an upper coil (161) and lower coil (162). A cooling pipe (153) is interposed between the upper coil (161) and the lower coil (162)... | 10/16/2007 |
| 7277176 | Emission filter X-Y array An imaging system for obtaining images of a specimen that includes a novel filtering system for filtering radiation emitted from the specimen. The imaging system includes a camera and a novel filter grid that is controllably movable relative to the camera in a manne... | 10/02/2007 |
| 7276866 | Moving control apparatus and moving control method A moving control apparatus comprising: a moving member provided movably at least in one direction; a driver having a movable element connected to the moving member and a stator to displace the movable element; a controller which energizes the driver to cause the mov... | 10/02/2007 |
| 7270319 | Multiple degree of freedom compliant mechanism A compliant mechanism is provided for accurate and precision alignment of mechanical component parts, surfaces or assemblies and the like, where low-cost, accurate, and repeatable alignment are desired. The compliant mechanism may be used in applications that requir... | 09/18/2007 |
| 7271879 | Decoupled planar positioning system A planar positioning system having a rigid base, and first and second linear actuator means mounted to the rigid base, the first and second linear actuator means being arranged orthogonal to one another. A rigid reference surface (2A, 2B) is mounted to... | 09/18/2007 |
| 7256891 | Sensor alignment apparatus for an analysis system An apparatus for analyzing a population of particles is set forth. The apparatus includes an emitter adapted to generate a beam of electromagnetic radiation, such as from a laser, and a particle chamber disposed in a path of the electromagnetic radiation beam. The a... | 08/14/2007 |
| 7249535 | Two-dimensional displacement apparatus A displacement apparatus for two-dimensional displacement of an object in relation to a fix-point includes a frame that is symmetrical in relation to a center of the frame and adapted to receive first and second actuators, each of which exerts a force along respecti... | 07/31/2007 |
| 7249420 | Slider device and measuring instrument A slider device includes a base (200), a running head (300) slidably provided on the base (200), a main guide mechanism (410) for guiding in a first direction in which the running head (300) runs, and sub-guide mechanism (450 | 07/31/2007 |
| 7243571 | Ultra-precision positioning system Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanis... | 07/17/2007 |
| 7240580 | Single degree of freedom axis positioner A single degree of freedom positioner resistant to axial and rotational motion on two axes, and to rotation around a third axis, but permitting axial movement along the third axis. The axes are orthogonally related. The positioner is characterized by support of a st... | 07/10/2007 |
| 7237449 | Drive mechanism and movable table unit provided with the same A drive mechanism is interposed between two members to make the members move relatively with respect to each other. At least one of the two members is guided to move linearly. The drive mechanism comprises: cam followers that are rotatably supported on one of the tw... | 07/03/2007 |
| 7239107 | Flexure stage In one embodiment, a flexure stage comprises a base, a stage, a positioning mechanism, and a control device. The base and stage have first and second portions that are spaced apart from each other. The positioning mechanism is coupled between the base and the stage.... | 07/03/2007 |
| 7236228 | Exposure apparatus An exposure apparatus includes a projection device for projecting a pattern drawn on a surface of a master, a stage apparatus which moves at least a substrate of the master and a substrate relative to the projection device, and an exposure device for repeatedly expo... | 06/26/2007 |
