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Class 73/724 - Capacitive


Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the deflection of the flexible wall
No. of patents: 645
Last issue date: 01/17/2012


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NumberTitleIssue Date
6122972Capacitive pressure sensor with moving or shape-changing dielectric
A pressure sensor system includes a first conductive surface electrically isolated from a second conductive surface. A dielectric material is interposed between the first conductive surface and the second conductive surface. The dielectric material is mov...
09/26/2000
6119523Method and apparatus for electronic compensation of erroneous readings caused by resonance in a capacitive pressure transducer
A method for electronic compensation of erroneous readings is based on the observation that a sensor serving as a transducer is caused to resonate. The erroneous reading caused by the resonance is measured and a compensation signal is feedback into the me...
09/19/2000
6119524Measuring indicator device
The invention relates to a measuring indicator device comprising a modular pressure transducer, a modular line socket connected to a device connector and a modular casing having a display. In order to improve the usefulness and provide simultaneous simple...
09/19/2000
6109113Silicon micromachined capacitive pressure sensor and method of manufacture
A capacitive pressure sensor that uses polysilicon as an electrostatic bonding medium and as a lead transfer to make an electrical connection to an electrode within a vacuum sealed chamber. The heavily doped P++ region of a silicon wafer defines a movable...
08/29/2000
6105436Capacitive pressure transducer with improved electrode support
The disclosed pressure transducer assembly includes a body, a diaphragm, an insulating member, a conductor, a compressed member, and a support member. The body defines an interior cavity. The diaphragm is mounted in the body and divides the interior cavit...
08/22/2000
6089097Elongated pressure sensor for a pressure transmitter
A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control lo...
07/18/2000
6082199Pressure sensor cavity etched with hot POCL3 gas
A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control lo...
07/04/2000
6069392Microbellows actuator
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A cha...
05/30/2000
6066882Semiconductor pressure detecting device
A semiconductor pressure detecting device which effectively reduces stress that occurs on a base member due to welding between cap and the base member or any external load. The semiconductor pressure detecting device includes a semiconductor sensor elemen...
05/23/2000
6058780Capacitive pressure sensor housing having a ceramic base
A capacitive pressure sensor capsule has a housing with a ceramic cover sealingly attached to a ceramic base that defines an interior chamber. The sensing medium enters the chamber through an inlet port. A glass sensor is attached to an integral pillar th...
05/09/2000
6058781Pressure sensor structure
A pressure sensor including a substrate having a diaphragm portion. A diaphragm-defining recess is recessed inwardly from one surface of the substrate to define the diaphragm portion between a bottom surface of the recess and an opposite surface of the su...
05/09/2000
6055846Method and apparatus for in situ calibration of gas flowmeters
The focus of this paper is to introduce a novel method for calibrating natural gas flowmeters. This new method can accommodate very large flow rates and it avoids common problems associated with current techniques for meter proving. In this method, the am...
05/02/2000
6055864Pressure sensor and method for its production
In the case of a pressure sensor (1) a measuring cell (4) is fixed together with a retaining body (9) in a housing (2) of the pressure sensor. For this purpose, the housing (2) has a constriction (15) encircling it on the outside. A contact base (11), whi...
05/02/2000
6038928Miniature gauge pressure sensor using silicon fusion bonding and back etching
A gauge or differential pressure sensor has a base portion having walls which define a cavity within the base portion and a diaphragm portion positioned over the cavity. The base portion comprises silicon; the diaphragm portion comprises silicon; the subs...
03/21/2000
6019002Pressure transducer having a tensioned diaphragm
A capacitive pressure transducer includes a conductive diaphragm positioned between pneumatically separated chambers. The diaphragm is fixed and sealingly coupled at its periphery to the peripheral rim of a concave body member. The diaphragm is supported ...
02/01/2000
6014800Method of making a pressure transducer having a tensioned diaphragm
A capacitive pressure transducer includes a conductive diaphragm positioned between pneumatically separated chambers. The diaphragm is fixed and sealingly coupled at its periphery to the peripheral rim of a concave body member. The diaphragm is supported ...
01/18/2000
6012335High sensitivity micro-machined pressure sensors and acoustic transducers
A method of making a pressure sensor or acoustic transducer having high sensitivity and reduced size. A thin sensing diaphragm is produced by growing a single crystal, highly doped silicon layer on a substrate using a chemical vapor deposition process. Th...
01/11/2000
6009757Voltage regulated pressure transducer apparatus
A capacitive transducer (10) has a housing (12) which receives a variable capacitor (14) in a fluid pressure receiving chamber (12e). A support (20) is received on an annular shoulder (12j) formed in the sidewall (12h) of the housing. The support has inne...
01/04/2000
6003219Method of making a pressure transmitter having pressure sensor having cohered surfaces
A pressure transmitter having a pressure sensor includes a first half cell and a second half cell. The first half cell includes a first recess formed therein filled with brittle material and having a first sensor surface formed thereon. The second half ce...
12/21/1999
5992240Pressure detecting apparatus for measuring pressure based on detected capacitance
A capacitance-based pressure detecting apparatus detects a pressure applied to a diaphragm based on a capacitance which varies depending on the change in portion of the diaphragm. The pressure detecting apparatus comprises a diaphragm which changes positi...
11/30/1999
5983727System generating a pressure profile across a pressure sensitive membrane
An improved fluid pressure sensor/sensor array is shown to provide high resolution, sensitivity which can be easily controlled based on anticipated or detected pressure range, and reliable pressure measurements with easy installation and low fabrication c...
11/16/1999
5974895Capacitively measuring sensor and readout circuit
A capacitance to be measured is connected together with three further capacitances to form a bridge circuit, in which each two of the capacitors are connected in series, and these two series circuits are connected in parallel to one another, and which rep...
11/02/1999
5965821Pressure sensor
A pressure sensor has a housing for receiving a fluid whose pressure is being sensed, and an electrode assembly and a diaphragm arranged to form a variable capacitor within the housing. In one embodiment, the electrode assembly includes a dielectric disk ...
10/12/1999
5962791Pirani+capacitive sensor
In order to cover a large measuring range extending from about 10-6 mbar to about 10 bar, a simple, compact and economically producible pressure sensor (3) arranged in a protective tube (1) has, on a support plate (5), a ceramic membrane (6) wh...
10/05/1999
5948169Apparatus for preventing particle deposition in a capacitance diaphragm gauge
Apparatus for reducing a material deposition in a housing is disclosed herein. The apparatus includes: a first pressure sensing device which senses a pressure in a reaction chamber, a pumping device for pumping the vapor from the reaction chamber to the p...
09/07/1999
5942692Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals
A capacitive pressure sensor includes a chamber coupled to a region whose pressure is to be determined. The sensor includes a conductive flexible diaphragm and a pair of electrodes, each defining a capacitance with the diaphragm. Variations in pressure in...
08/24/1999
5939639Pressure transducer housing with barometric pressure isolation
A circular membrane diaphragm is edge-mounted on a generally cylindrical housing structure that allows the diaphragm to deform when a differential pressure is applied across it. The housing structure also supports a circular electrode in an internal chamb...
08/17/1999
5936164All-silicon capacitive pressure sensor
An all-silicon monolithic capacitive absolute pressure-sensing device and method for making the same. The device employs a single-crystal silicon diaphragm that serves at a flexible capacitor plate of a variable capacitor. The diaphragm is bonded to a sin...
08/10/1999
5932808Pressure sensor module having dual insulating substrates on the pressure sensing and non-pressure sensing sides
The present invention provides a pressure sensor module which is capable of restraining application of a pressure of increased magnitude to a connector, reducing the number of parts therefor and compacting a structure thereof. A connector body (3a) is pro...
08/03/1999
5920015Pressure sensor with capacitor electrodes and shield layer parallel thereto
A capacitive sensor element for pressure sensors comprising a house part based on an electrically insulating material such as glass ceramic material and having on an interior surface a first capacitor plate. An opposing capacitor plate is attached to one ...
07/06/1999
5917264Electrostatic capacitance type transducer and method for producing the same
The present invention provides an electrostatic capacitance type transducer and a method for producing the same, with the ensured sufficient connecting strength and insulation between a movable electrode and a fixed electrode and smooth production. In the...
06/29/1999
5911162Capacitive pressure transducer with improved electrode support
The disclosed pressure transducer assembly includes metallic body, a diaphragm, a metallic plate, an insulator, and a conductor. The body defines an interior cavity. The diaphragm is mounted in the body and divides the interior cavity into a first chamber...
06/08/1999
5902933Pressure sensor and its application
A pressure sensor includes a detection unit 1 having capacities C1 and C2 varied by a predetermined external action, a reference detection 2 unvaried by the predetermined external action, a first oscillator 31 and 32 for generating a detection frequency s...
05/11/1999
5886266Tank insert for insertion in an opening in a fuel tank
A sensor chamber (7) is provided in a holder (5) of a tank insert (4), a pressure sensor (8) being inserted into said chamber. This pressure sensor (8) rests on a circumferential packing (9) of a shoulder (10) of the sensor chamber (7)....
03/23/1999
5883779Pressure sensor
Micromechanically producible capacitively operating pressure sensor, in which there is a diaphragm, formed by a diaphragm layer (5), on a silicon substrate (1) over a hollow (4) in an auxiliary layer (3), and in which there is, on the side of the diaphrag...
03/16/1999
5880371Pressure transducer apparatus and method for making
A fluid pressure responsive capacitive transducer (20) having a lowered manufacturing cost is shown in which a sheet (10) of cast or roll compacted tape material having a selected thickness is partitioned into a multitude of rectangular substrates portion...
03/09/1999
5877424Capacitive pressure measuring arrangement having protection against interference signals
This pressure measuring arrangement (10), which is both proof against the coupling-in of interference signals and satisfies the specifications relating to explosion protection, comprises a capacitive, ceramic pressure sensor (11) which has a substrate (12...
03/02/1999
5844769Exhaust pressure transducer
An exhaust pressure capacitive transducer includes an improved pressure sensing cavity configuration. The cavity is either in the form of a wide cylinder or a cone so that the housing structure does not underlie the deflecting portion of the diaphragm but...
12/01/1998
5836063Method for producing capacitive ceramic absolute pressure sensors sorted in zero-point long-term stability defect classes
In this method for producing capacitive alumina-ceramic absolute pressure sensors sorted in high-precision zero-point long-term stability defect classes referred to a measured-value span csp, the sensors are firstly produced conventionally: a s...
11/17/1998
5827972High pressure sensor apparatus with low cost compact packaging system
A fluid pressure sensor particularly useful for measuring pressure up to approximately 2000 psi has a hexport (12, 112, 212, 312) formed with a stop surface (26, 326) in a bottom wall (18) circumscribing a fluid pressure inlet (16). A pressure sensing mod...
10/27/1998
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