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| Number | Title | Issue Date |
| 8161820 | Pressure sensor A pressure sensor according to the present invention comprises: a differential pressure diaphragm; a static pressure diaphragm, which is provided to an outer perimeter part of the differential pressure diaphragm; a first static pressure gauge pair that is formed in ... | 04/24/2012 |
| 8100019 | Cartridge fluid transducer There is provided a fluid transducer. The transducer housing includes a nose section, a middle section, and a rear section, with the nose section defining a through bore. A sensor is disposed in the nose section and is in fluid communication with the through bore. A... | 01/24/2012 |
| 8096188 | Highly sensitive piezoresistive element A mechanical-to-electrical sensing structure is provided with first and second movable blocks. A first hinge is coupled to the first and second movable blocks and configured to resist loads other than flexing of the first hinge. At least a first gage link is separat... | 01/17/2012 |
| 8061213 | High temperature, high bandwidth pressure acquisition system A system for measuring a multiplicity of pressures as those experienced by a model in a wind tunnel is depicted. The system includes individual sensor devices which are connected to an Acquisition and Compensation electronics module. The individual sensor or transdu... | 11/22/2011 |
| 7921724 | Apparatus and method for eliminating varying pressure fluctuations in a pressure transducer A single pressure sensing capsule has a reference pressure ported to the rear side of a silicon sensing die. The front side of the silicon sensing die receives a main pressure at another port. The silicon sensing die contains a full Wheatstone bridge on one of the s... | 04/12/2011 |
| 7918137 | Method for temperature compensation of a piezoresistive gaged metal diaphragm There is described a temperature compensation scheme for a pressure sensitive metal diaphragm transducer. The transducer employs a Wheatstone bridge fabricated from p-type piezoresistors. The Wheatstone bridge is glassed directly onto the metal diaphragm. As the tem... | 04/05/2011 |
| 7918136 | Micromechanical sensor element A micromechanical sensor element (1) is provided, which has a sealed diaphragm (2) affixed in a frame (3), exhibits high sensitivity at high overload resistance and has a small size, and which allows a piezoresistive measured-value acquisition. ... | 04/05/2011 |
| 7895896 | Pressure sensor A pressure sensor includes a housing, a pressure input orifice opened on a pipe sleeve formed on the housing, a diaphragm that seals the pressure input orifice and has one face as a pressure receiving face, a force transmitting unit connected to a central area of th... | 03/01/2011 |
| 7866216 | Low differential pressure transducer A pressure transducer has an H-shaped cross-sectional header having a front and a back section. The front and back sections are of equal diameter and are circular. Each front and back section has a depression with an isolation diaphragm covering the depression. Each... | 01/11/2011 |
| 7866215 | Redundant self compensating leadless pressure sensor There is disclosed a redundant pressure sensing chip which includes first and second redundant devices. Each pressure sensing device produces an output proportional to applied pressure irrespective of vibration/acceleration of the device. Each device also provides a... | 01/11/2011 |
| 7856885 | Reinforced piezoresistive pressure sensor A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a multiple diaphragm piezoresistive pressure sensor for measuring the pressure of a liquid, comprising an inner deformable diaphragm formed on a silicon substrate, the inne... | 12/28/2010 |
| 7841240 | Header for a differential pressure transducer There is disclosed a header for a differential pressure transducer. The header has a cylindrical sensor housing section which has a front and a back surface. The front surface has a sensor accommodating recess. There is a plurality of terminal pins extending from th... | 11/30/2010 |
| 7819015 | Silicon carbide piezoresistive pressure transducer and method of fabrication A high temperature pressure transducer is fabricated from silicon carbide. A wafer of silicon carbide has reduced or active areas which act as deflecting diaphragms. Positioned on the reduced or active area is a silicon carbide sensor. The sensor is secured to the s... | 10/26/2010 |
| 7788981 | Pressure measurement device and system, and method for manufacturing and using the same The present invention discloses a pressure measurement device comprising: a substrate that includes at least one pressure sensing module and at least one fluid-conductive channel, wherein each channel has a first aperture and a second aperture. The substrate is flex... | 09/07/2010 |
| 7775117 | Combined wet-wet differential and gage transducer employing a common housing A combined wet-wet differential transducer and a gage pressure transducer located in the same housing, comprising a semiconductor chip which comprises a gage sensor chip on one section and a differential sensor chip on a second section. Lach sensor chip has a Wheats... | 08/17/2010 |
| 7743662 | Low differential pressure transducer A pressure transducer has an H-shaped header having a front and a back section. The front and back sections are of equal diameter and are circular. Each front and back section has a depression with a diaphragm covering the depression. Each diaphragm is of equal size... | 06/29/2010 |
| 7726196 | Piezoelectric pressure sensor containing pre-stressed measuring elements The invention relates to a piezoelectric pressure sensor comprising piezoelectric measuring elements located in a housing, which are pre-stressed between the housing base and a membrane provided at the pressured side of the housing. According to the invention the pi... | 06/01/2010 |
| 7681457 | Micromechanical pressure sensing device A micromechanical pressure sensing device includes a silicon support structure, which is configured to provide a plurality of silicon support beams. The device further includes one or more diaphragms attached to and supported by the support beams, and at least one p... | 03/23/2010 |
| 7647833 | Filled dielectric on metal pressure sensor A pressure sensing apparatus (1) includes an elastically deformable pressure-sensitive diaphragm assembly (13) having a pressure-sensitive metal or metal alloy diaphragm (14). A functional filled dielectric layer (25) is on the diaphragm ... | 01/19/2010 |
| 7584665 | Combustion transducer apparatus employing pressure restriction means A pressure restrictor for use with a pressure sensing element comprising a cylindrical member of a given diameter and length having a plurality of apertures directed from a first end to a second end is disclosed. A pressure restrictor housing holds and positions the... | 09/08/2009 |
| 7571650 | Piezo resistive pressure sensor Various embodiments and methods relating to a pressure sensor having a flexure supported piezo resistive sensing element are disclosed. ... | 08/11/2009 |
| 7526962 | High pressure delta P sensor A high pressure transducer has a metal housing with a main inlet high pressure port at one end and a reference pressure port at the other end. The ports communicate with a central hollow of the housing. Positioned in the hollow and communicating with the main inlet ... | 05/05/2009 |
| 7516668 | Silicon carbide piezoresistive pressure transducer and method of fabrication A high temperature pressure transducer is fabricated from silicon carbide. A wafer of silicon carbide has reduced or active areas which act as deflecting diaphragms. Positioned on the reduced or active area is a silicon carbide sensor. The sensor is secured to the s... | 04/14/2009 |
| 7503221 | Dual span absolute pressure sense die An absolute pressure sensor includes a sense die with a reference chamber on a top side thereof. The reference chamber comprises a precisely fabricated beam that limits the travel of a diaphragm. The beam can be positioned in a cap or cover member of the sense die, ... | 03/17/2009 |
| 7493822 | Small gauge pressure sensor using wafer bonding and electrochemical etch stopping A gauge pressure sensor apparatus and a method of forming the same. A constraint wafer can be partially etched to set the diaphragm size, followed by bonding to a top wafer. The thickness of the top wafer is either the desired diaphragm thickness or is thinned to th... | 02/24/2009 |
| 7440861 | Concept of compensating for piezo influences on integrated circuitry The inventive circuitry on a semiconductor chip includes a first functional element having a first electronic functional-element parameter that exhibits a dependence relating to the mechanical stress present in the semiconductor circuit chip in accordance with a fir... | 10/21/2008 |
| 7437260 | Concept of compensating for piezo influences on integrated circuitry A semiconductor chip includes a first functional element having a first electronic functional-element parameter exhibiting a dependence relating to the mechanical stress present in the semiconductor circuit chip, and being configured to provide a first output signal... | 10/14/2008 |
| 7430918 | Amplified flow through pressure sensor A MEMS based pressure sensor for flow measurements includes a pressure sense die located between a media seal and a conductive seal. Such a system includes a pressure sense die located between a media seal and a conductive seal. A sensing diaphragm is generally asso... | 10/07/2008 |
| 7389686 | Methods and systems for determining air data parameters An air data system is described that includes a cone-shaped probe, a plurality of pressure transducers, and a processing device. The cone-shaped probe includes a first pressure port formed in a substantial tip of the probe and extending therethrough, and a plurality... | 06/24/2008 |
| 7370536 | Pressure sensor device and pressure sensor cell thereof A pressure sensor device includes a pressure sensor cell that includes a sensor chip having a diaphragm with piezo-resistors, an amplifying circuit, and various adjusting circuits, and a base member to which the sensor chip is joined, with the diaphragm facing a thr... | 05/13/2008 |
| 7368313 | Method of making a differential pressure sensor In a method for manufacturing a micromechanical semiconductor component, e.g., a pressure sensor, a locally limited, buried, and at least partially oxidized porous layer is produced in a semiconductor substrate. A cavity is subsequently produced in the semiconductor... | 05/06/2008 |
| 7363811 | Measurement pickup A measurement pickup is provided offering a high measure of safety and having a measurement pickup housing, a sensor element arranged in the measurement pickup, at least one connection element closing the measurement pickup housing, and an excess-pressure protection... | 04/29/2008 |
| 7343808 | Line pressure compensated differential pressure transducer assembly A pressure transducer apparatus including: first and second pluralities of piezoresistors each coupled in Wheatstone bridge configurations, wherein the bridges are coupled together to provide a first output being indicative of a differential pressure; and, a third p... | 03/18/2008 |
| 7340960 | Miniature sensor A strain sensing apparatus including a deformable substrate is presented. The deformable substrate is configured to detect a strain of the body that can be coupled to the deformable substrate. Sometimes, the deformable substrate is a flexible substrate having an upp... | 03/11/2008 |
| 7331236 | Pressure sensor A sensor and insertion assembly 2 is used for intravascular measurement of pressure in a living body. The assembly includes, a sensor chip 6 having a substrate body 8 with a recess covered by a pressure sensitive film 10 thereby forming a... | 02/19/2008 |
| 7329932 | Microelectromechanical (MEM) viscosity sensor and method A MEM viscosity sensor comprises a substrate, with first and second support structures affixed to the substrate and spaced-apart. A compliant member is affixed to the support structures such that it is suspended above and can flex vertically with respect to the subs... | 02/12/2008 |
| 7318351 | Pressure sensor A pressure sensor is constructed of a plastic package. The plastic package incorporates in the same material a sensing diaphragm including tensile and compression regions. Deposited on the diaphragm are metal electrodes and a polymer film having piezoresistive prope... | 01/15/2008 |
| 7313970 | Diaphragm-type pressure sensing apparatus A diaphragm-type pressure sensing apparatus includes a pressure sensor having a diaphragm for converting pressure into an electrical signal, a circuit board for processing the electrical signal, and a housing in which the pressure sensor and the circuit board are se... | 01/01/2008 |
| 7311007 | Pressure sensor The invention provides a pressure sensor with a housing for a pressure sensing arrangement, e.g. a semi-conductor arrangement. The housing consists of a bottom part and an intermediate member with a through hole forming a sidewall of a cavity for the pressure sensin... | 12/25/2007 |
| 7296473 | Pressure sensor A pressure sensor includes: an airtight case equipped with first and second pressure input orifices provided respectively on opposing first and second wall surfaces; a cylindrical first bellows fixed on the first wall surface at one end and equipped with a shaft hol... | 11/20/2007 |
