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| Number | Title | Issue Date |
| 6704186 | Capacity type pressure sensor and method of manufacturing the pressure sensor A capacitive pressure sensor includes a first substrate (1), a first flat electrode (1a) formed on the first substrate (1), a pressure-sensing frame (4) surrounding the first flat electrode (1a) provided on the first substrate (1), second substrates (2, 3... | 03/09/2004 |
| 6688181 | Membrane pressure sensor comprising silicon carbide and method for making same The invention concerns a pressure sensor (1), able to operate at high temperature and measure the pressure of a hostile medium, comprising: a sensing element (4) integrating a membrane (8) in monocrystalline silicon carbide, made by micro-machining a substrate... | 02/10/2004 |
| 6684711 | Three-phase excitation circuit for compensated capacitor industrial process control transmitters A capacitor industrial process control transmitter includes a three-phase excitation circuit to charge a sensing capacitor and a compensation capacitor of the transmitter and transfer charges to an integrator. The sensing capacitor is charged during the f... | 02/03/2004 |
| 6683780 | Capacitive displacement sensor A displacement responsive device e.g. a measurement probe (110) is disclosed. Displacement of a stylus (130) causes resilient movement of a carriage (134) supported by planar springs (112) and (114). This movement is detected by a capacitance sensor (160)... | 01/27/2004 |
| 6678164 | Pressure sensor and method for manufacturing the same In a pressure sensor, a sensor element is mounted on a side of a first surface of a first case, and a second case having a cylindrical hollow portion is bonded to the first case to cover a part of a second surface of the first case, opposite to the first ... | 01/13/2004 |
| 6675655 | Pressure transmitter with process coupling A process transmitter for measuring a process pressure includes a pressure sensor in a sensor housing. An isolation diaphragm which isolates fill fluid from process fluid is spaced apart from a process fluid seal. The spacing reduces deformation of the is... | 01/13/2004 |
| 6675656 | Pressure or force sensor structure and method for producing the same A force or pressure sensor structure has a membrane and a counter-structure, both being provided with electrodes for determining capacitors. There are at least two capacitors connected in series or in parallel for determining a desired pressure/capacitanc... | 01/13/2004 |
| 6662663 | Pressure sensor with two membranes forming a capacitor A pressure sensor may include a first membrane that flexes in response to pressure, a reference cavity covered by the first membrane where the reference cavity contains a vacuum and a second membrane, adjacent to the first membrane, the first and second m... | 12/16/2003 |
| 6658940 | Pressure sensor, and a method for mounting it A pressure sensor element for mounting in a connecting element comprises an isolator body with a laterally projecting membrane. The laterally projecting membrane covering an opening of a passage through which the pressure present at the surface of the mem... | 12/09/2003 |
| 6655217 | Transmitter A transmitter is provided whose operation is not impaired by ambient influences, having a measurement sensor (3), an electronic unit (11) arranged in a housing (1) on a printed circuit board (9), an operating element (15), which can be operated from outsi... | 12/02/2003 |
| 6651506 | Differential capacitive pressure sensor and fabricating method therefor A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so that the diaphragm displaces upward and downward in response ... | 11/25/2003 |
| 6651505 | Pressure detecting apparatus A pressure detecting apparatus includes: a housing (11) for forming fluid chambers (21A and 21B) into which external fluid pressures are imported respectively; a pressure-receiving member (31) slidably provided in the housing (11) for receiving the fluid ... | 11/25/2003 |
| 6647795 | Capacitive physical load sensor and detection system A capacitive physical load sensor includes a substrate, which has fixed electrodes, and a diaphragm, which has movable electrodes. The diaphragm is located across a gap from the substrate, and retaining parts for the diaphragm are formed around the diaphr... | 11/18/2003 |
| 6647794 | Absolute pressure sensor A barometric pressure sensor including a base layer, a sensor layer and a reference layer. The base layer has a passageway between a pressure inlet and a mounting face. The sensor layer is bonded by an insulating bond to the mounting face and includes a c... | 11/18/2003 |
| 6644125 | Pressure sensor The invention relates to a pressure sensor consisting of a chip (11) which is mounted on a support wall (10) and which is provided with a resistance unit consisting of strip conductors and being arranged at the lower side (13) of a substrate (12). Said lo... | 11/11/2003 |
| 6640643 | Capacitive pressure sensor with multiple capacitive portions On a substrate, first and second capacitive portions are formed to have movable diaphragms having different areas for pressure measurement and diagnostic, wherein a communication structure is provided between the cavity spaces of the first and second capa... | 11/04/2003 |
| 6640642 | Capacitance-type pressure sensor A pressure sensor of electric capacitance type which includes a plurality of pressure sensor units connected in parallel with one another and each formed on a substrate by an electrode, a cavity region and a diaphragm having an electrically conductive fil... | 11/04/2003 |
| 6640641 | Device for measuring a medium under pressure A device for capacitive measurement of a medium which at high pressure and optionally also at high temperature is bounded by a wall of a pressure housing or pressure resistance flow guide. The wall includes a cut out or through hole or a through going slo... | 11/04/2003 |
| 6631645 | Semiconductor pressure sensor utilizing capacitance change An S/N ratio of an output of a semiconductor pressure sensor is improved, the sensor being of an electrostatic capacitance type pressure sensor for generating an output based upon a ratio between capacitances of a pressure sensitive capacitance element an... | 10/14/2003 |
| 6629465 | Miniature gauge pressure sensor using silicon fusion bonding and back etching A gauge or differential pressure sensor has a base portion having walls which define a cavity within the base portion and a diaphragm portion positioned over the cavity. The base portion comprises silicon; the diaphragm portion comprises silicon; the subs... | 10/07/2003 |
| 6622564 | Pressure sensor with fluid passage and pressure receiving surface protruding therein A pressure sensor is provided, in which dead space is not formed under the diaphragm so that air or fluid will not be remained in the dead space. The pressure sensor having a passage for flowing fluid from one end to the other end thereof comprises a sens... | 09/23/2003 |
| 6619131 | Combination pressure sensor with capacitive and thermal elements A pressure sensor has a baseplate and a support plate with a membrane. Layers on the membrane and the support plate are connected to a circuit for capacitively measuring pressure to generate a first pressure signal. A thermal conductivity measuring elemen... | 09/16/2003 |
| 6615664 | Method of measuring pressure by means of a pressure gauge having a resonant element The invention relates to a method of measuring pressure in which an evacuated capsule (1) containing a resonant element (5) is placed in the fluid whose pressure is to be measured, a vibration characteristic of the element is measured, and the pressure is... | 09/09/2003 |
| 6615665 | Pressure measuring device A pressure measuring device with a housing (21, 53) and a pressure measuring cell is provided, the pressure measuring cell being protected from interference, in particular independently of its installation position in the housing (21, 53), and comprising:... | 09/09/2003 |
| 6606911 | Pressure sensors A pressure sensor is formed by sandwiching a pressure-sensitive dielectric membrane between and in contact with a pair of electrodes. As pressure is applied, the dielectric constant of the pressure-sensitive membrane changes while the distance of separati... | 08/19/2003 |
| 6604425 | Microelectromechanical correlation device and method A method and apparatus for comparing a force to a signal, or comparing two signals, through mechanical movement of capacitive plates in a transducer. The transducer plates are separated by d, which in one embodiment is preferably a linear function of a pr... | 08/12/2003 |
| 6604426 | Variable capacitance pressure sensor A pressure sensor having a first pole element and a second pole element spaced apart from each other and forming a capacitor. The first pole element includes a substantially flat portion around which the second pole element is bent forming a bent edge por... | 08/12/2003 |
| 6598483 | Capacitive vacuum sensor A capacitive vacuum sensor includes a non-conducting substrate, a plurality of fixed electrodes on the non-conducting substrate, and a diaphragm electrode formed by a plurality of elastic structures, each of the elastic structures being arranged to oppose... | 07/29/2003 |
| 6595064 | Capacitive pressure sensor A diaphragm 30 and basic body 20 of a pressure sensor 10 are interconnected via a joint F. A groove 26 is provided in the basic body 20 in order to reduce the stress concentration in the region of the joint F.... | 07/22/2003 |
| 6591687 | Capacitive vacuum measuring cell A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from th... | 07/15/2003 |
| 6591685 | Pressure sensor The present invention relates to a pressure sensor comprising a capacitor with a first capacitor pole element (1) and at least one additional capacitor pole element (3) arranged at a distance from one another. In accordance with the invention, at least on... | 07/15/2003 |
| 6586943 | Sensor signal processing apparatus A sensor signal processing apparatus includes a sensor section, power supply section, switching section, and CPU. The characteristics of the sensor section change in accordance with a change in physical quantity to be measured. The power supply section su... | 07/01/2003 |
| 6584852 | Electrical capacitance pressure sensor having electrode with fixed area and manufacturing method thereof An electrical capacitance pressure sensor has a lower electrode, a movable electrode, and an upper electrode. A first cavity portion is formed between the lower electrode and the movable electrode. A second cavity portion is formed between the upper elect... | 07/01/2003 |
| 6584851 | Fluid pressure sensor having a pressure port A pressure sensor has a joint (1) having a pressure port (13), a pressure detecting device (2) bonded to the joint (1) to convert fluid pressure to an electric signal and a housing (5) provided to an output side of the pressure detecting device (2), the p... | 07/01/2003 |
| 6578427 | Capacitive ceramic relative-pressure sensor This relative-pressure sensors has virtually no zero offset at relative humidities up to near the saturation limit. The sensor has a diaphragm (11) having a surface on which a electrode (13) is deposited and a substrate (12) having a bore (23) for guiding... | 06/17/2003 |
| 6568275 | Capacitive differential pressure sensor There is described a capacitive differential pressure sensor made using glass-silicon technology with a diaphragm plate of silicon, which is arranged between two carrier plates consisting of glass. The diaphragm plate has pressure-sensitively deflectable ... | 05/27/2003 |
| 6568274 | Capacitive based pressure sensor design A pressure transducer assembly includes a first body, a second body, a diaphragm, and an electrode. The diaphragm is mounted between the first and second bodies. The first body and the diaphragm form a first chamber. The second body and the diaphragm form... | 05/27/2003 |
| 6564643 | Capacitive pressure sensor A high-accuracy high-stability capacitor type pressure sensor which eliminates a parasitic capacitance between a reference capacitor and a semiconductor substrate. A capacitor type pressure sensor comprising, on a semiconductor substrate 10, an active cap... | 05/20/2003 |
| 6564642 | Stable differential pressure measuring system The present invention provides a stable differential pressure measurement system. Two micro-machined semiconductive capacitive sensors each has a diaphragm exposed on one side and having a sealed partially evacuated chamber within the sensor on the other ... | 05/20/2003 |
| 6553840 | Linear displacement sensor apparatus A linear displacement sensor (10) has a capacitive transducer (24) having a flexible diaphragm (24c) disposed in a housing (12) which also slidingly mounts a plunger (18) movable toward and away from the diaphragm. The plunger has a spring seating end sli... | 04/29/2003 |
