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Class 73/718 - Capacitive


Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the devices effect a variation in
No. of patents: 709
Last issue date: 01/31/2012


1                      
NumberTitleIssue Date
8104353Capacitive pressure sensor
A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crys...
01/31/2012
8104354Capacitive sensor and manufacturing method thereof
A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of spring members. The first and second electrodes are disposed on the subs...
01/31/2012
8033177MEMS pressure sensor and housing therefor
A pressure sensing system positions a microelectromechanical (MEMS) diaphragm of a MEMS pressure sensor die in a housing to indirectly sample pressure state of a fluid being measured. A second housing diaphragm is used to make direct contact with the fluid being mea...
10/11/2011
7992443Sensor element for capacitive differential-pressure sensing
A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. ...
08/09/2011
7954383Method and apparatus for pressure measurement using fill tube
A pressure sensor includes a fill tube which is arranged to couple to a process pressure. A sensor is coupled to the fill tube and is configured to measure pressure of fluid in the fill tube as a function of a change of a physical property of the fill tube. Circuitr...
06/07/2011
7934427Capacitative pressure sensor
A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly su...
05/03/2011
7926351Pressure sensor and data input apparatus
Grounded, circular movable electrode and divided electrodes, formed on a surface of a circular printed board, are opposed to each other via a double-face tape, functioning also as a spacer, with a slight gap interposed therebetween. As a pad is struck with a stick, ...
04/19/2011
7918135Pressure sensor including thermal selftest
A semiconductor device includes a diaphragm, a sensing element, and a circuit. The sensing element is configured to sense deflection of the diaphragm. The circuit is configured to heat the diaphragm to induce deflection of the diaphragm. ...
04/05/2011
7918134Thermal-based diagnostic system for process transmitter
A process transmitter for measuring a process variable in an industrial process comprises a sensor module, a heating device and transmitter circuitry. The sensor module has a sensor for sensing a process variable of an industrial process and generating a sensor sign...
04/05/2011
7886608Pressure sensor configurations for implantable medical electrical leads
An implantable pressure sensor, which may be incorporated within an implantable medical electrical lead, includes an insulative sidewall, which contains a gap capacitor and an integrated circuit. The insulative sidewall of the pressure sensor includes a pressure sen...
02/15/2011
7854170Capacitance sensing circuit for membrane pressure sensor
A capacitance sensing circuit for a membrane pressure sensor is provided. The sensing circuit has a controller, two switches in signal communication with the controller, a charge amplifier and a charge injector. The charge amplifier is connected to the switches via ...
12/21/2010
7841239Electrostatic capacitance diaphragm vacuum gauge and vacuum processing apparatus
In an electrostatic capacitance diaphragm vacuum gauge, a diaphragm and a detection electrode opposing the diaphragm are arranged in a vacuum. The electrostatic capacitance diaphragm vacuum gauge measures pressure by measuring the change degree of an electrostatic c...
11/30/2010
7823457Pressure gauge
A pressure gauge is composed of two separate components adapted to be assembled and disassembled by hand. The one component is a pressure-motion conversion element (3, 6) for receiving a pressure and effecting a movement of a movable portion (3c,
11/02/2010
7819014Capacitive gage pressure sensor with vacuum dielectric
A field device includes a capacitive gauge pressure sensor configured to measure a gage pressure of a process media. A sensor body of the pressure sensor includes first and second chambers. The second chamber is under vacuum and forms a vacuum dielectric for the pre...
10/26/2010
7802482Diaphragm attaching structure of electrostatic capacity type pressure gauge
The present invention provides a diaphragm attaching structure of an electrostatic capacity type pressure gauge which can achieve an improvement of a measuring precision by inhibiting a poor weld and a heat strain from being generated while restricting an increase o...
09/28/2010
7784352Apparatus for measuring pressure by using diaphragm and method of pressure measurement by using diaphragm
The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressu...
08/31/2010
7677107Wireless pressure sensor and method for fabricating wireless pressure sensor for integration with an implantable device
A method for fabricating a wireless pressure sensor includes providing a first substrate. A portion of the first substrate is controllably displaced to form a cavity. A conducting material is patterned on the first substrate to form a first capacitor plate and a fir...
03/16/2010
7673519Pressure sensor featuring offset cancellation and method of making
A pressure sensor includes a first set of electrodes, a second set of electrodes, and a common electrode. The first and second sets of electrodes overlie an insulative surface, wherein the first set of electrodes represent sense capacitor bottom electrodes and the s...
03/09/2010
7644621Capped and chambered pressure sensor
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines closed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the co...
01/12/2010
7624643Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
The present invention is directed at methods and apparatuses for facilitating the establishment of a reference pressure within a reference chamber of a pressure transducer. The transducer has a housing and a cover, the housing defining a reference chamber and an ape...
12/01/2009
7610811Method and system for sensing differential pressure with elastomer
A differential pressure sensor method and system includes a number of elastomer plates, which can be placed with certain distance and sealed in a small tube, wherein the tube can be connected to a number of detection areas. The surface of the elastomers can be cover...
11/03/2009
7591185Pressure sensor configurations for implantable medical electrical leads
An implantable pressure sensor, which may be incorporated within an implantable medical electrical lead, includes an insulative sidewall, which contains a gap capacitor and an integrated circuit. The insulative sidewall of the pressure sensor includes a pressure sen...
09/22/2009
7591184Industrial pressure sensor having enhanced dielectric fill fluid
A capacitive pressure sensor for an industrial process transmitters comprises a housing, a sensing diaphragm, an electrode and a fill fluid. The housing includes an interior cavity and a channel extending from an exterior of the housing to the cavity. The sensing di...
09/22/2009
7578195Capacitive sensor
The invention relates to a flexible, resilient capacitive sensor suitable for large-scale manufacturing. The sensor comprises a dielectric, an electrically conductive layer on the first side of the dielectric layer, an electrically conductive layer on a second side ...
08/25/2009
7536915Diaphragm vacuum measuring cell and method for the production of such measuring cell
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm (2) at a spacing a first housing plate (1) is disposed sealing in the margin region with a joining means (3), and that on th...
05/26/2009
7526961Method and apparatus for monitoring fluid pressure
A method and apparatus for monitoring the pressure of a fluid within a rigid vessel are disclosed. A preferred method comprises monitoring the capacitance of a capacitor comprising a deformable resilient solid dielectric separating first and second conductive elemen...
05/05/2009
7493821Micromachined acoustic transducer and method of operating the same
This invention relates generally to a micromachined acoustic transducer that has a scalable array of sealed cavities and perforated members forming capacitive cells that convert the electrical signal to acoustic signal or vice versa. It also relates to the method an...
02/24/2009
7487682Measuring cell as well as constructing methods for a measuring cell and measuring apparatus with a mount for such a measuring cell
The invention relates to a measuring cell, comprising a support and a sensor, whereby a measuring chamber is arranged between the support and the sensor and the sensor is arranged on the support by means of individual material deposits provided between the support a...
02/10/2009
7484416Process control transmitter with vibration sensor
A transmitter for use in an industrial process control system, includes a process coupling configured to couple to a process fluid. A sensor housing has a cavity formed therein which is in fluidic communication with the process fluid. A diaphragm in the cavity isola...
02/03/2009
7478559Capacitive pressure sensor with a cantilever member
A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm member and supported on a support structure, wherein the base member and...
01/20/2009
7469590Package structure of pressure sensor
A pressure-sensor package mainly includes a pressure sensor, a support substrate, and a resin layer. The pressure sensor includes a glass substrate having a fixed electrode, and a silicon substrate having a diaphragm that is disposed apart from the fixed electrode b...
12/30/2008
7458270Inflation and pressure gauge apparatus
A device for introducing air or other pressurized gas into a tire, sports ball or other pneumatic device. The device advantageously allows the user to check the pressure of the gas and to release excess the gas from the tire or other pneumatic device without removin...
12/02/2008
7451654Constant power dissipation in capacitance pressure transducers
A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector detects a shorting of the diaphragm onto one or more reference elect...
11/18/2008
7448276Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate
A diffusion bonded space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The disclosure includes an integrated fluid flow network architecture, which may include, in addition to a l...
11/11/2008
7448277Capacitive pressure sensor and method therefor
A capacitive pressure sensor and method for its fabrication. The sensor is fabricated from first and second wafers to have a mechanical capacitor comprising a fixed electrode and a moving electrode defined by a conductive plate. The sensor further has a diaphragm on...
11/11/2008
7430919Capacitive pressure sensor with reference chamber
A capacitive pressure sensor includes a substrate assembly having a conductive layer. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber is defined by the conductive membrane and the substrate assembly. A cap is arranged on...
10/07/2008
7415886Pressure sensor with deflectable diaphragm
A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a pressure applied to the cavity. An electrode on the diaphragm forms a...
08/26/2008
7401524Capacitive pressure sensor
In a capacitance type pressure sensor (1) including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance ...
07/22/2008
7401523Capacitive sensor and method of fabricating
A capacitive sensor and a method of making it with a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap; a plurality of conductor elements int...
07/22/2008
7395716Variable capacitance measuring device
A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may...
07/08/2008
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