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| Number | Title | Issue Date |
| 7380459 | Absolute pressure sensor An absolute pressure sensor is provided comprising a vibration sensing element such as a piezoelectric element disposed on a vibratable seal. The seal is disposed between two gas spring chambers which are maintained at substantially ambient pressure. The resonant vi... | 06/03/2008 |
| 7334481 | Pressure sensor with improved vibrating microassembly and optical detection system A pressure sensor made of a wafer with a pair of parallel silicon layers and a silicon oxide layer there between, comprises a vibrating microassembly formed as a silicon beam, which is arranged in a plane perpendicular to the silicon layers and fastened to a support... | 02/26/2008 |
| 7334484 | Line pressure measurement using differential pressure sensor A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the cavity deflects in response to the first and second process fluid pressur... | 02/26/2008 |
| 7308830 | Pressure sensor fault detection A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in the cavity and configured to form a first and a second capacitance wit... | 12/18/2007 |
| 7260996 | Pressure measuring apparatus and pressure sensor thereof The present invention relates to a pressure measuring apparatus, characterized in that: the pressure measuring apparatus comprises a pressure sensor having a first resistor for sensing an external stress and a second resistor acting as a reference, wherein the secon... | 08/28/2007 |
| 7262693 | Process field device with radio frequency communication A field device for use in an industrial process control or monitoring system includes terminals configured to connect to a two-wire process control loop. The loop carries data and provides power to the field device. RF circuitry in the field device is provided for r... | 08/28/2007 |
| 7258018 | High accuracy, high temperature, redundant media protected differential transducers A semiconductor chip for use in fabricating pressure transducers, including: a semiconductor wafer having a top and a bottom surface, a layer of an insulating material formed on the top surface, the bottom surface having at least two recesses of substantially equal ... | 08/21/2007 |
| 7258024 | Simplified fluid property measurement A process fluid measurement system provides a first measurement relative to process fluid flowing in a pipe. An additional measurement of process fluid flow velocity in the pipe is combined with the first measurement to provide a simplified indication of mass fluid ... | 08/21/2007 |
| 7240561 | Process adapter A pressure transducer for clean environments is disclosed. The pressure transducer includes a process coupler, a sensor module, a shield and electronics. The process coupler is configured to couple to a source of process media at a process inlet. The sensor module i... | 07/10/2007 |
| 7228743 | Light powered pressure gauge An extremely low power transducer for use with a meter is able to be powered by miniature solar cells to measure and display a physical quantity such as pressure, force, level or distance. The transducer provides a variable capacitance to an electronic circuit that ... | 06/12/2007 |
| 7223366 | MEMS membrane based sensor A micro-electro-mechanical system (MEMS) device is described having a membrane which can be induced to resonate and the frequency of its resonance can be monitored. Chemical moieties can be attached to the membrane, and these moieties can be selected such that they ... | 05/29/2007 |
| 7194909 | Pressure and vibration sensing apparatus A pressure and vibration sensing apparatus designed to sense pressure together with vibration through one apparatus. The pressure and vibration sensing apparatus includes a case adapted to be mounted in a machine generating vibration and having an inlet communicated... | 03/27/2007 |
| 7191658 | Pressure-detecting device and method of manufacturing the same One end of a rod-like pressure-conveying member is disposed in a sensing unit, and the other end extends into and through an insertion hole of an engine. A combustion pressure, to which the other end of the rod-like member is exposed, is conveyed to the sensing unit... | 03/20/2007 |
| 7155980 | Resonating transducer A resonating pressure transducer operable to measure an applied pressure by measuring changes in a resonant frequency is disclosed. The pressure transducer comprises a plurality of diaphragms formed in a wafer of semi-conducting material between two layers, wherein ... | 01/02/2007 |
| 7121147 | Force detection device Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, at least two columnar forc... | 10/17/2006 |
| 7104134 | Piezoelectric cantilever pressure sensor A piezoelectric cantilever pressure sensor has a substrate and a piezoelectric cantilever having a base portion attached to the substrate and a beam portion suspended over a cavity. The piezoelectric cantilever contains a piezoelectric layer sandwiched between two e... | 09/12/2006 |
| 7102272 | Piezoelectric component and method for manufacturing the same A SAW device includes a SAW element having an IDT and a conductive pad connected to the IDT provided on a piezoelectric substrate, and an external terminal. The SAW device also includes an insulating layer having an exciting portion protective opening defining a spa... | 09/05/2006 |
| 7048839 | System and method for generating high pressure hydrogen The invention provides a system and a method for generating high pressure hydrogen that is able to efficiently and safely generate hydrogen by only the electrolysis of water even when using electric power generated by a frequently varying natural energy, such as sun... | 05/23/2006 |
| 7032454 | Piezoelectric cantilever pressure sensor array A piezoelectric cantilever pressure sensor array is disclosed. The piezoelectric cantilever pressure sensor array contains a substrate, a readout circuit, and piezoelectric cantilever pressure sensors electrically connected to the readout circuit. Each piezoelectric... | 04/25/2006 |
| 7013733 | Silicon resonant type pressure sensor A silicon resonant type pressure sensor has a sensing diaphragm to which a measuring pressure is to be applied; and a vibrating beam which is embedded on the sensing diaphragm, and which is made of a semiconductor, wherein the vibrating beam further has a vibrating ... | 03/21/2006 |
| 7000477 | Optical pressure sensor A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is... | 02/21/2006 |
| 6975009 | Dual-wafer tunneling gyroscope and an assembly for making same A MEM tunneling gyroscope assembly includes (1) a beam structure, and a mating structure defined on a first substrate or wafer; and (2) at least one contact structure, and a mating structure defined on a second substrate or wafer, the mating structure on the second ... | 12/13/2005 |
| 6972447 | Semiconductor component having a first earlier structure differing from a second earlier structure A semiconductor component for a semiconductor substrate, in which a first section and a second section are provided, and in which the pore structure of the first section differs from the pore structure of the second section. ... | 12/06/2005 |
| 6966228 | Resonator-type microelectronic pressure sensor that withstands high pressures A microelectronic pressure sensor comprises a resonator (23) made on the basis of a crystalline material and secured to the inside of a package (24) made use of a cap (27) and a baseplate (26) for assembling one to the other. The cap (... | 11/22/2005 |
| 6938489 | Oscillatory type pressure sensor A high-sensitive and high accuracy vibrating type pressure sensor (1) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure rec... | 09/06/2005 |
| 6936471 | Instrument for high throughput measurement of material physical properties and method of using same An apparatus and method for screening combinatorial libraries of materials by measuring the response of individual library members to mechanical perturbations is described. The apparatus generally includes a sample holder for containing the library members, an array... | 08/30/2005 |
| 6910383 | Isolated micro pressure sensor and method for making the same A micro pressure sensor comprising a glass substrate or a bulk silicon wafer with a rampart protruding from the surface and a plurality of first contacting pads, a thin membrane having a plurality of piezo-resistors, circuit patterns, and a plurality of second conta... | 06/28/2005 |
| 6905970 | Method for making a thin film bulk acoustic-wave resonator A method for making a thin film bulk acoustic-wave resonator (FBAR). First, define the cavity area on a substrate. Secondly, partially etch the patterned cavity area as a presacrificial layer. Thirdly, modify the nature of the presacrificial layer as a sacrificial l... | 06/14/2005 |
| 6546804 | Method of making a pressure sensor comprising a resonant beam structure A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended by a diaphragm at one or more points by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detec... | 04/15/2003 |
| 6461301 | Resonance based pressure transducer system The invention relates to a resonance based pressure transducer system, insertable into a living body for the in vivo measurement of pressure. It comprises a pressure sensor (2) having a mechanical resonator (16), the resonance frequency of which is pressu... | 10/08/2002 |
| 6450032 | Vibrating beam force sensor having improved producibility A two-piece vibrating beam force sensor is created by utilizing one thickness of quartz for the outer mounting structure. This outer mounting structure in the case of a pressure sensor includes the mounting structure, the flexure beams and the lever arm a... | 09/17/2002 |
| 6182513 | Resonant sensor and method of making a pressure sensor comprising a resonant beam structure A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detec... | 02/06/2001 |
| 6092423 | Tunnel pick-off vibrating rate sensor A rate sensor has a tine cut from a silicon substrate and resiliently mounted by two integral flexure beams. An electrostatic actuator drives the tine to vibrate in its plane. The tine supports two tunnel pick-offs in the form of spikes projecting from th... | 07/25/2000 |
| 6085594 | High resolution and large dynamic range resonant pressure sensor based on Q-factor measurement A pressure sensor has a high degree of accuracy over a wide range of pressures. Using a pressure sensor relying upon resonant oscillations to determine pressure, a driving circuit drives such a pressure sensor at resonance and tracks resonant frequency an... | 07/11/2000 |
| 5679901 | Vortex sensing pressure transducer A vortex flowmeter employs a differential pressure transducer converting oscillation in a differential pressure to an alternating electrical signal, wherein the differential pressure transducer comprises a pair of pressure compartments (10 and 11) respect... | 10/21/1997 |
| 5528939 | Micromechanical pressure gauge having extended sensor range An improved gas pressure gauge is disclosed that extends the linear range of pressure dependent damping to higher pressures by placing a stationary member in very close proximity to the vibrating member. This range of linear dependent damping is also exte... | 06/25/1996 |
| 5477737 | Oscillatory pressure transducer A transducer converting an oscillation in fluid pressure into an alternating electrical signal comprises a transducer body including a first pressure compartment disposed intermediate a second and third pressure compartment, and separated by from the seco... | 12/26/1995 |
| 5473944 | Seam pressure sensor employing dielectically isolated resonant beams and related method of manufacture A pressure transducer comprising at least one diaphragm formed in a wafer of semiconducting material, the at least one diaphragm being spaced from a first surface of the wafer, a first layer of semiconducting material disposed over the at least one diaphr... | 12/12/1995 |
| 5457999 | Method and apparatus for measurement of forces and pressures using tensioned bellows A method and apparatus for measuring differences between forces, pressures, and combinations thereof. One or more force or pressure deformable members, preferably metal bellows, are internally connected by rigid linkage which is in turn connected to a com... | 10/17/1995 |
| 5450762 | Reactionless single beam vibrating force sensor A reactionless single beam vibrating force transducer utilizes counterbalances at opposite ends of the beam that rotate in directions opposite to the ends of the vibrating beam to reduce rotational and normal forces transmitted to the end supports for the... | 09/19/1995 |
