"It is my heart-warmed and world-embracing Christmas hope and aspiration that all of us, the high, the low, the rich, the poor, the admired, the despised, the loved, the hated, the civilized, the savage (every man and brother of us all throughout the whole earth), may eventually be gathered together in a heaven of everlasting rest and peace and bliss, except the inventor of the telephone. "
Mark Twain ; Christmas greetings, 1890
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| Number | Title | Issue Date |
| 7878061 | Micromechanical system including a suspension and an electrode positioned movably A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is posit... | 02/01/2011 |
| 7870789 | Seismic sensor A seismic sensor includes a frame, a pendulum pivotably mounted to the frame, a mechanism for sensing angular position of the pendulum, and a monolithic flat spring oriented between the frame and the pendulum for balancing the pendulum at an equilibrium position. Th... | 01/18/2011 |
| 7730783 | Acceleration sensor An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate becaus... | 06/08/2010 |
| 7559238 | MEMS inertial shock bandpass filter An inertial shock bandpass filter for detecting a shock event between first and second acceleration levels. The inertial shock bandpass filter includes a primary inertial element and at least one secondary inertial element supported by respective spring arrangements... | 07/14/2009 |
| 7430909 | Tri-axis accelerometer In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of... | 10/07/2008 |
| 7418864 | Acceleration sensor and method for manufacturing the same An acceleration sensor includes: a semiconductor substrate including a support layer and a semiconductor layer, which are stacked in a first direction; a movable electrode and a fixed electrode; and a trench. The movable electrode separately faces the fixed electrod... | 09/02/2008 |
| 7406870 | Semiconductor sensor A semiconductor sensor is disclosed that includes a proof mass, a frame that is arranged around the proof mass, a beam that is arranged at the surface side of the frame and is configured to support the proof mass, plural piezo-resistive elements arranged on the beam... | 08/05/2008 |
| 7398684 | Semiconductor sensor having weight of material different than that of weight arranging part A semiconductor sensor is disclosed that includes a substrate including at least a semiconductor layer. The substrate includes a weight arranging part in the vicinity of the center of the substrate, a flexible part around the weight arranging part, and supporting pa... | 07/15/2008 |
| 7363814 | Multi-axial angular velocity sensor An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a device for oscillating the oscillator in an X-axis direction, and a detect... | 04/29/2008 |
| 7360455 | Force detector and acceleration detector and method of manufacturing the same An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is conne... | 04/22/2008 |
| 7357026 | Acceleration sensor An acceleration sensor includes a base portion shaped into the form of a frame, a weight portion located inside the base portion and disposed away from the base portion, a flexible beam portion disposed over an upper portion of the base portion and an upper portion ... | 04/15/2008 |
| 7355782 | Systems and methods of controlling micro-electromechanical devices An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provid... | 04/08/2008 |
| 7334476 | Acceleration sensor chip package An acceleration sensor chip package includes an acceleration sensor chip; a sensor control chip; a re-wiring layer; an outer terminal; a sealing portion; and a substrate. The acceleration sensor chip includes a frame portion; a movable structure; a detection element... | 02/26/2008 |
| 7334475 | MEMS actuator having supporting substrate asserting physical influence on oscillating body A micro-electro-mechanical system (MEMS) device includes an oscillating body and a beam connected to the oscillating body. The beam has a proximal end connected to the oscillating body, a distal end spaced from the oscillating body, and rotational comb teeth extendi... | 02/26/2008 |
| 7331228 | Acceleration sensor An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provid... | 02/19/2008 |
| 7322239 | Semiconductor device and manufacturing method thereof A semiconductor device includes a lead frame. The lead frame has a chip mounting section and a plurality of leads. The chip mounting section has a base section, an insulation film covering the base section, a plurality of inter-connect sections, and a chip mounting ... | 01/29/2008 |
| 7322242 | Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile electrodes. The suspended structure is connected to a rotor-anchoring region... | 01/29/2008 |
| 7318349 | Three-axis integrated MEMS accelerometer 3D accelerometer for measuring three components of inertial force (or acceleration) vector with respect to an orthogonal coordinate system, which has high sensitivity due to a big proof mass located within a cavity beneath the surface of the sensor die. The size of ... | 01/15/2008 |
| 7275435 | Capacitance type semiconductor dynamic quantity sensor A capacitance type semiconductor dynamic quantity sensor includes a beam-shaped movable electrode displaceable in a predetermined direction in response to application of a dynamic quantity to a support substrate, and beam-shaped fixed electrodes which are fixedly su... | 10/02/2007 |
| 7274118 | Solid state MEMS activity-activated battery device and method A system includes a thin-film battery and an activity-activated switch. In some embodiments, the system is placed on a substrate with an adhesive backing. In some embodiments, the substrate is flexible. Also formed on the substrate is an electrical circuit that incl... | 09/25/2007 |
| 7270003 | BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is f... | 09/18/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7267006 | Accelerometer The accelerometer has a base (2), an outer planar ring-like support frame (17) fixedly bonded to the base (2), and an inner planar ring-like support frame (18) flexibly suspended within the outer frame (17) by mounts (19) co... | 09/11/2007 |
| 7267007 | Acceleration sensing device An acceleration sensing device includes a movable sensing member, a frame member and a supporting member. The supporting member is coupled between the movable sensing member and the frame member so as to support the movable sensing member. The acceleration sensing d... | 09/11/2007 |
| 7265790 | System and method for setting an image capture device to an operational mode In an embodiment, a method sets an image capture device to one of a plurality of available operational modes for the image capture device. The method comprises determining an angle of pitch orientation of the image capture device, and setting the image capture devic... | 09/04/2007 |
| 7258011 | Multiple axis accelerometer A sensor for measuring acceleration in three mutually orthogonal axes, X, Y and Z is disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed... | 08/21/2007 |
| 7243545 | Physical quantity sensor having spring A physical quantity sensor detects physical quantity. The sensor includes a plurality of springs, which have different spring constants, respectively. The sensor has a wide detection range of the physical quantity without assembling multiple sensors. Therefore, the ... | 07/17/2007 |
| 7243546 | Acceleration sensor chip An acceleration sensor chip has a frame portion having a frame body portion and protruding portions. The acceleration sensor chip also includes a mobile structure having a central weight portion supported movably by four beam portions. The mobile structure also has ... | 07/17/2007 |
| 7234364 | Angular rate sensor having circuit board and package An angular rate sensor includes: a circuit board; a package including an angular rate sensor chip and a connection terminal; and a conductive member. The angular rate sensor chip is accommodated in the package. The package is disposed on the circuit board through th... | 06/26/2007 |
| 7231802 | Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing the apparatus A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a wor... | 06/19/2007 |
| 7228739 | Precision flexure plate A precision flexure plate includes a flat disk positioned between two capacitor plates and supported by S-shaped beams. Deflection of the disk due to gravitational loads and resulting capacitance change is used to measure the accelerations in the direction perpendic... | 06/12/2007 |
| 7221495 | Thin film precursor stack for MEMS manufacturing This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a ... | 05/22/2007 |
| 7219561 | Force-detecting device Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, four columnar force transm... | 05/22/2007 |
| 7210347 | Micromachined inertial sensor for measuring rotational movements The invention relates to gyroscopes having a vibrating structure that is micromachined in a silicon substrate. A novel vibrating structure is described, which has two moving masses 14 and 14′, connected by a vibration energy coupling structure (trans... | 05/01/2007 |
| 7211923 | Rotational motion based, electrostatic power source and methods thereof A power system includes a member with two or more sections and at least one pair of electrodes. Each of the two or more sections has a stored static charge. Each of the pair of electrodes is spaced from and on substantially opposing sides of the member from the othe... | 05/01/2007 |
| 7210348 | Semiconductor dynamic quantity sensor A semiconductor dynamic quantity sensor includes moving parts displaceable in a predetermined direction over a supporting substrate and a beam portion for connecting said supporting substrate and said moving parts. The beam portion includes beams arranged in paralle... | 05/01/2007 |
| 7210352 | MEMS teeter-totter apparatus with curved beam and method of manufacture A teeter-totter apparatus uses a curved beam to generate a differential output which may be indicative of an acceleration applied to the apparatus. The curved-beam teeter-totter apparatus can be combined with an x-axis and y-axis accelerometer, to produce a tri-axis... | 05/01/2007 |
| 7204162 | Capacitive strain gauge A strain gauge for sensing strain is provided and includes a support substrate, and first and second electrodes supported on the substrate. The first and second electrodes include first and second capacitive plates, respectively. The first capacitive plates are mova... | 04/17/2007 |
| 7194903 | Suspension mechanism for high performance accelerometers A suspension diaphragm (16) is configured to support a precision transducer (14) within a container (12). The suspension diaphragm (16) is buttressed by an underlying complaint preform (152) and an annular hybrid support (16... | 03/27/2007 |
| 7194889 | MEMS multi-directional shock sensor with multiple masses A multi-directional shock sensor including two masses arranged to move in directions, which are mutually perpendicular to one another. A moveable locking member prevents movement of a slider, which is used in the arming arrangement of a submunition. In response to a... | 03/27/2007 |