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"I watched his countenance closely, to see if he was not deranged ... and I was assured by other senators after he left the room that they had no confidence in it."
U.S. Senator Smith of Indiana ; After seeing Samuel Morse demonstrate the telegraph.
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| Number | Title | Issue Date |
| 7416150 | Overmolded inertia sensor mass for a seat belt retractor A seat belt retractor (10) has an actuator (14) for unlocking and locking the seat belt retractor (10) An inertial sensor (18) detects changes in vehicle acceleration and interacts with the actuator (14) to lock and unlock the seat... | 08/26/2008 |
| 7302848 | Force compensated comb drive A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the... | 12/04/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7243545 | Physical quantity sensor having spring A physical quantity sensor detects physical quantity. The sensor includes a plurality of springs, which have different spring constants, respectively. The sensor has a wide detection range of the physical quantity without assembling multiple sensors. Therefore, the ... | 07/17/2007 |
| 7211923 | Rotational motion based, electrostatic power source and methods thereof A power system includes a member with two or more sections and at least one pair of electrodes. Each of the two or more sections has a stored static charge. Each of the pair of electrodes is spaced from and on substantially opposing sides of the member from the othe... | 05/01/2007 |
| 7140258 | Magnetic-based force/torque sensor A force transducer element (20) comprises a body (22) of magnetisable material having at least one magnetised region (30) at an angle, say 45°, to the force-sensing direction (P—P). Preferably there are a plurality of parallel magnetised regi... | 11/28/2006 |
| 7068125 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 06/27/2006 |
| 7024934 | Vibrating beam accelerometer Microelectromechanical system (MEMS) integrated micro devices and acceleration sensor devices formed of first and second silicon wafers that are permanently joined together in a composite silicon wafer having an array of first complete stand-alone three-dimensional ... | 04/11/2006 |
| 7022543 | Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portio... | 04/04/2006 |
| 6912902 | Bending beam accelerometer with differential capacitive pickoff A low cost, pendulous, capacitive-sensing Micro Electro-Mechanical Systems (MEMS) accelerometer is provided. The accelerometer includes a pendulous proof mass, one or more securing pads, and one or more flexures coupled with the pendulous proof mass and the one or m... | 07/05/2005 |
| 6904803 | Compact inertial sensor The inertial sensor comprises at least one vibrating element having one end connected to a support element and an opposite end connected to a test mass which is hinged to the support element by at least two link elements and which includes a cavity in which the vibr... | 06/14/2005 |
| 6712274 | Permanent visual shock indicator A suspension mass is mounted for swinging movement relative to, and extends between, a pair of fixed posts spaced apart from each other on an annular support mounted in a portable electronic device. The mass is connected to the posts through a pair of breakable link... | 03/30/2004 |
| 6701779 | Perpendicular torsion micro-electromechanical switch A semiconductor torsional micro-electromechanical (MEM) switch is described having a conductive movable control electrode; an insulated semiconductor torsion beam attached to the movable control electrode, the insulated torsion beam and the movable contro... | 03/09/2004 |
| 6595055 | Micromechanical component comprising an oscillating body A micromechanical component comprises a frame layer and an oscillating body which, with the aid of a suspension means, is supported in an opening penetrating the frame layer, in such a way that the oscillating body is adapted to be pivoted about an axis o... | 07/22/2003 |
| 6518751 | Magnetoresistive rollover sensor A vehicle rollover sensor 10 is provided, including a movable member free 12 free to rotate about a single axis 14. The movable member 12 includes an inertial mass 18. A magnet 22 is mounted to the movable member 12. The vehicle rollover sensor 10 further... | 02/11/2003 |
| 6493952 | Measuring device subjected to gravitational forces and having a pendulous suspension A measuring device (6) subjected to gravitational forces and including at least one laterally oscillating, pendulously suspended, support structure (7) for supporting at least one of a measuring element, and optical element, and a suspension element for s... | 12/17/2002 |
| 6295870 | Triaxial angular rate and acceleration sensor A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at ... | 10/02/2001 |
| 6269696 | Temperature compensated oscillating accelerometer with force multiplier A temperature compensated oscillating accelerometer with force multiplier includes a support substrate; a tuning fork suspended above the substrate; a primary anchor device connected between the tuning fork and substrate; a proof mass having an input axis... | 08/07/2001 |
| 6257065 | Strain gauge vibration sensor A drive line vibration sensor includes a housing having a strain gage attached to the drive line component, and an actuator disposed within the housing. In operation, the actuator exerts a force upon the strain gage proportional to acceleration experience... | 07/10/2001 |
| 6247365 | Safety restraint A vehicle sensor for a retractor for a vehicle safety restraint has a sensor mass in the form of an upturned hollow cup, formed in a single piece by injection molding or die casting, resting on an upstanding post. It may be of metal or high-density plasti... | 06/19/2001 |
| 6230567 | Low thermal strain flexure support for a micromechanical device A low thermal strain flexure support for a micromechanical device includes a substrate; a micromechanical device having a rotational axis and a longitudinal axis; an anchor structure disposed on the substrate proximate the longitudinal axis of the microme... | 05/15/2001 |
| 6117701 | Method for manufacturing a rate-of-rotation sensor A rate-of-rotation sensor includes a three-layer system. The rate-of-rotation sensor and the conductor traces are patterned out of the third layer. The conductor traces are electrically insulated (isolated) by cutouts from other regions of the third layer... | 09/12/2000 |
| 6051866 | Microstructures and single mask, single-crystal process for fabrication thereof A single mask, low temperature reactive ion etching process for fabricating high aspect ratio, released single crystal microelectromechanical structures independently of crystal orientation.... | 04/18/2000 |
| 6005275 | Semiconductor acceleration sensor with cantilever A semiconductor device comprises a semiconductor acceleration sensor having a cantilever made of a semiconductor material, a supporter for supporting the cantilever, and diffused resistors disposed on the cantilever. An acceleration detecting device detec... | 12/21/1999 |
| 5996411 | Vibrating beam accelerometer and method for manufacturing the same An accelerometer formed from a semiconducting substrate and first and second active layers coupled to the opposite surfaces of the substrate. The substrate has a frame and a proof mass suspended from the frame by one or more flexures for rotation about an... | 12/07/1999 |
| 5885468 | Micromechanical component and production method The component has a movable section (2) over a substrate (1), in which spacers (3) preferably made of fluorocarbon are present on the top side of the substrate and prevent the movable section from adhering to the support.... | 03/23/1999 |
| 5801311 | Rotary drive accelerator A rotary shock testing system including a rotating table mounted to a bearing plate of a precision bearing assembly. The bearing plate to which the rotating table is attached preferably includes upper and lower surfaces supported against ported plates to ... | 09/01/1998 |
| 5793073 | Semiconductor thin film sensor device with (110) plane A semiconductor thin film sensor device including a semiconductor body formed of silicon having a (110) plane; a depression formed by an anisotropic etch applied to a first surface of the semiconductor body, wherein the first surface is substantially para... | 08/11/1998 |
| 5756897 | Acceleration sensor An acceleration sensor includes a vibrator provided as a detecting element in a cantilever structure for detecting acceleration. A U-shaped pendulum, for example, is disposed so as to surround the vibrator. The pendulum is supported on the supporting side... | 05/26/1998 |
| 5739431 | Miniature magnetometer-accelerometer A magnetometer is integrated with a miniature vibrating beam accelerometer fabricated out of silicon on a common substrate. Dual pendulum-DETF force sensing accelerometers have integrated conductor coils on the pendulums that circulate alternating current... | 04/14/1998 |
| 5644083 | Accelerometer and method of manufacture Accelerometer and method in which parts such as the seismic mass and force sensors are all fabricated of a single material such as crystalline quartz and bonded together in a manner which reduces the possibility of creep between them. Damping plates and s... | 07/01/1997 |
| 5644086 | Preloaded linear beam vibration sensor An miniaturized accelerometer having a narrow bandwidth and behaving as a switch sensitive only to low frequencies such as contained in earthquakes includes: a unbalanced see-saw beam assembly composed of beams 2 and masses 3 at opposite ends of the beams... | 07/01/1997 |
| 5626779 | Micromachine transducer with cantilevered movable portion The micromachine includes a movable portion, an unmovable portion surrounding the movable portion, a connecting portion for connecting the movable portion with the unmovable portion in a cantilever fashion, and a support member for connecting the movable ... | 05/06/1997 |
| 5572057 | Semiconductor acceleration sensor with movable electrode Adverse effects due to electrostatic force between a semiconductor substrate and a movable electrode are avoided with a new structure. A movable electrode of beam structure is disposed at a specified interval above a p-type silicon substrate. Fixed electr... | 11/05/1996 |
| 5495762 | Pendulum acceleration sensor A pendulum acceleration sensor includes a plate-like pendulum, at least a pair of detection sensors, and a holder unit. The pendulum swings about a shaft in a direction parallel to the side surfaces of the pendulum in accordance with an acceleration. The ... | 03/05/1996 |
| 5351540 | Grade angle and acceleration sensor A grade and acceleration sensor having a weight, a first sensor for measuring a first parameter of the weight due at least to the force of gravity to generate a first signal, a second sensor for measuring a second parameter of the weight due to both the f... | 10/04/1994 |
| 5341682 | Micromachined rate and acceleration sensor A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each ... | 08/30/1994 |
| 5331853 | Micromachined rate and acceleration sensor A sensor (10) is disclosed for measuring the acceleration and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each ha... | 07/26/1994 |
| 5331854 | Micromachined rate and acceleration sensor having vibrating beams Apparatus is disclosed for measuring the specific force and angular rotation rate of a moving body. A silicon substrate has first and second substantially planar and substantially parallel surfaces. An accelerometer is formed of the substrate and has a fo... | 07/26/1994 |
| 5289719 | Accelerometer with temperature compensation and matched force transducers Accelerometer having a frame, a proofmass, one or more force sensitive transducers, and a strut interconnecting the transducers with the proofmass and the frame so that forces are applied to the transducers in accordance with movement of the proofmass alo... | 03/01/1994 |
