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"Flight by machines heavier than air is unpractical and insignificant, if not utterly impossible."
Simon Newcomb, astronomer ; Said in 1902, less than two years before the first flight at Kitty Hawk
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| Number | Title | Issue Date |
| 7631559 | Acceleration sensor An acceleration sensor includes a base having an XY-substrate surface which is parallel to an XY plane, a beam portion having a frame shape which is arranged in a floating state above the XY-substrate surface of the base, a beam-supporting fixed portion which suppor... | 12/15/2009 |
| 7594438 | Inertial sensor having a flexing element supporting a movable mass A long-period weak-motion inertial sensor includes a frame having a frame mounting surface, a movable mass having a movable mass mounting surface, a transducer for sensing displacements of the movable mass with respect to the frame, and a monolithic flexure element ... | 09/29/2009 |
| 7574914 | Acceleration sensor An acceleration sensor includes a frame-shaped beam portion disposed above an XY substrate surface of a base in a floating state and a beam-portion supporting/fixing unit arranged to attach the beam portion to the base with support portions so as to be supported on ... | 08/18/2009 |
| 7464591 | Semiconductor acceleration sensor A semiconductor acceleration sensor having beam parts formed in substantially L-shape to surround a weight part, wherein formed to surround a square part, as seen in plan view and constituting the weight part, are two elongated L-shaped beam parts, at locations clos... | 12/16/2008 |
| RE40561 | Acceleration sensor and process for the production thereof A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on t... | 11/04/2008 |
| 7406868 | Compensating accelerometer with optical angle sensing A compensating accelerometer includes a housing, and a sensing element mounted in the housing. The sensing element includes a pendulum flexibly mounted on a base. The sensing element includes a coil mounted on a movable plate, a curtain having a slit, and a load mas... | 08/05/2008 |
| 7389691 | Acceleration sensor A acceleration sensor includes a supporting part, a beam part connected to the supporting part, a weight part connected to the beam part, and a protruding part formed beneath the beam part so that the protruding part supports the beam part. With such an arrangement,... | 06/24/2008 |
| RE40347 | Acceleration sensor and process for the production thereof A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on t... | 06/03/2008 |
| 7371601 | Piezoresistive sensing structure A technique for manufacturing a piezoresistive sensing structure includes a number of process steps. Initially, a piezoresistive element is implanted into a first side of an assembly that includes a semiconductor material. A passivation layer is then formed on the f... | 05/13/2008 |
| 7357026 | Acceleration sensor An acceleration sensor includes a base portion shaped into the form of a frame, a weight portion located inside the base portion and disposed away from the base portion, a flexible beam portion disposed over an upper portion of the base portion and an upper portion ... | 04/15/2008 |
| 7357025 | Micromachined apparatus with co-linear drive arrays A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plu... | 04/15/2008 |
| 7353706 | Weighted released-beam sensor A released-beam sensor includes a semiconductor substrate having a layer formed thereon, and an aperture formed in the layer. A beam is mechanically coupled at a first end to the layer and suspended above the layer such that a second end forms a cantilever above the... | 04/08/2008 |
| 7350424 | Acceleration sensor A low-cost breakable inertial threshold sensor using mainly micro-machining silicon technology constructed on a silicon-wafer or on some other brittle material according to the MEMS process. The sensor comprises a first body portion, a second body portion, and detec... | 04/01/2008 |
| 7347094 | Coupling apparatus for inertial sensors A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at le... | 03/25/2008 |
| 7337670 | Physical quantity sensor having multiple through holes A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. ... | 03/04/2008 |
| 7334476 | Acceleration sensor chip package An acceleration sensor chip package includes an acceleration sensor chip; a sensor control chip; a re-wiring layer; an outer terminal; a sealing portion; and a substrate. The acceleration sensor chip includes a frame portion; a movable structure; a detection element... | 02/26/2008 |
| 7331228 | Acceleration sensor An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provid... | 02/19/2008 |
| 7312553 | Micromechanical component and method for producing same A micromechanical component and a method for producing the component are provided. The micromechanical component includes a substrate and a micromechanical functional layer of a first material provided over the substrate. The functional layer has a first and second ... | 12/25/2007 |
| 7296471 | Acceleration sensor A structure with superior shock resistance is proposed for a parasol-type acceleration sensor. The acceleration sensor comprises a support portion the lower end of which is fixed to a substrate; a beam portion on which a detection element for applying changes to an ... | 11/20/2007 |
| 7288873 | Device for emission of high frequency signals A device for emission of high frequency signals is provided. The emission device is capable of emission of signals in the Gigahertz (GHz) and Terahertz (THz) range. The device may utilize, for example, a cantilever comprising a material that is capable of altering i... | 10/30/2007 |
| 7287428 | Inertial sensor with a linear array of sensor elements An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair of sensor elements may be coupled so that the frames are allowed to mo... | 10/30/2007 |
| 7274835 | Optical waveguide displacement sensor A substrate incorporates a mechanical cantilever resonator with passive integrated optics for motion detection. The resonator acts as a waveguide, and enables optical detection of deflection/displacement amplitude, including oscillations. In one embodiment, the cant... | 09/25/2007 |
| 7267007 | Acceleration sensing device An acceleration sensing device includes a movable sensing member, a frame member and a supporting member. The supporting member is coupled between the movable sensing member and the frame member so as to support the movable sensing member. The acceleration sensing d... | 09/11/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7258010 | MEMS device with thinned comb fingers Methods of fabricating thinned comb MEMS devices are disclosed. A comb drive device in accordance with an illustrative embodiment of the present invention can include a number of interdigitated comb fingers some of which have a reduced thickness along at least a por... | 08/21/2007 |
| 7252002 | Planar inertial sensor, in particular for portable devices having a stand-by function A planar inertial sensor includes a first region and a second region of semiconductor material. The second region is capacitively coupled, and mobile with respect to the first region. The second region extends in a plane and has second portions, which face respectiv... | 08/07/2007 |
| 7248128 | Reference oscillator frequency stabilization Method for stabilizing the frequency of a MEMS (Micro Electro Mechanical Systems) reference oscillator, and a MEMS reference oscillator, wherein the method comprises following steps: using two or more MEMS components, wherein each MEMS component is characterized by ... | 07/24/2007 |
| 7225675 | Capacitance type dynamic quantity sensor A capacitance type dynamic quantity sensor has a first substrate, a second substrate disposed over the first substrate, and first and second electrodes each disposed on a main surface of a respective one of the first and second substrates. Each of the first and seco... | 06/05/2007 |
| 7223624 | Micromechanical device with thinned cantilever structure and related methods In one aspect, a microelectromechanical device and method of producing the device includes an accelerometer with a thinned flexure structure. In another embodiment, the device and method of producing the device includes an accelerometer and a pressure sensor integra... | 05/29/2007 |
| 7216539 | Micromachined apparatus with split vibratory masses Each of a number of resonator masses is split into two separate lobes or masses joined together by a short flexure. The short flexure allows the separate lobes or masses to rotate slightly as they resonate so as to substantially relieve longitudinal stresses in cert... | 05/15/2007 |
| 7217968 | Recessed gate for an image sensor A novel image sensor cell structure and method of manufacture. The imaging sensor comprises a substrate, a gate comprising a dielectric layer and gate conductor formed on the dielectric layer, a collection well layer of a first conductivity type formed below a surfa... | 05/15/2007 |
| 7218193 | MEMS-based inertial switch In one embodiment, an inertial switch of the invention includes a MEMS device manufactured using a layered wafer. The MEMS device has a movable electrode supported on a substrate layer of the wafer and a stationary electrode attached to that substrate layer. The mov... | 05/15/2007 |
| 7210332 | Mechanical resonator A sensor and methods for making and using the same in which a mechanical resonator is employed, comprising a resonator portion for resonating in a fluid without the substantial generation of acoustic waves; and an electrical connection between the resonator portion ... | 05/01/2007 |
| 7204144 | Micromachined apparatus with drive/sensing fingers in coupling levers Resonator structures include a plurality of resonator masses interconnected by a plurality of levers so as to resonate in anti-phase with one another. The levers include a plurality of lever fingers interdigitated with corresponding fixed fingers affixed to an under... | 04/17/2007 |
| 7202761 | Temperature compensation for silicon MEMS resonator Thermally induced frequency variations in a micromechanical resonator are actively or passively mitigated by application of a compensating stiffness, or a compressive/tensile strain. Various composition materials may be selected according to their thermal expansion ... | 04/10/2007 |
| 7179674 | Bi-directional released-beam sensor An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The... | 02/20/2007 |
| 7178400 | Physical quantity sensor having multiple through holes A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. ... | 02/20/2007 |
| 7178398 | Coplanar proofmasses employable to sense acceleration along three axes An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third accel... | 02/20/2007 |
| 7162918 | Method and apparatus for downhole fluid characterization using flexural mechanical resonators The present invention provides a downhole method and apparatus using a flexural mechanical resonator, for example, a tuning fork to provide real-time direct measurements and estimates of the viscosity, density and dielectric constant of formation fluid or filtrate i... | 01/16/2007 |
| 7159442 | MEMS multi-directional shock sensor A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching arm assembly. The other arm of each latching arm assembly is carried ... | 01/09/2007 |
