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| Number | Title | Issue Date |
| 7404338 | Force sensor The resolution and the signal-to-noise ration of known force sensors as e.g. capacitive force sensors decrease when scaling them down. To solve this problem there is a solution presented by the usage of a nanostructure as e.g. a carbon nanotube, which is mechanicall... | 07/29/2008 |
| 7370530 | Package for MEMS devices A package for packaging one or more MEMS devices is disclosed. A package in accordance with an illustrative embodiment of the present invention can include a packaging structure having a base section, a top section, and an interior cavity adapted to contain a number... | 05/13/2008 |
| 7357025 | Micromachined apparatus with co-linear drive arrays A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plu... | 04/15/2008 |
| 7347094 | Coupling apparatus for inertial sensors A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at le... | 03/25/2008 |
| 7331228 | Acceleration sensor An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provid... | 02/19/2008 |
| 7322242 | Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile electrodes. The suspended structure is connected to a rotor-anchoring region... | 01/29/2008 |
| 7302848 | Force compensated comb drive A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the... | 12/04/2007 |
| 7287428 | Inertial sensor with a linear array of sensor elements An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair of sensor elements may be coupled so that the frames are allowed to mo... | 10/30/2007 |
| 7279761 | Post-release capacitance enhancement in micromachined devices and a method of performing the same A MEMS device which utilizes a capacitive sensor or actuator is enhancement by initially fabricating the capacitive assembly which comprises the sensor or actuator as two sets of interdigitated fingers in a noninterdigitated configuration. One of the two sets of fin... | 10/09/2007 |
| 7271586 | Single package design for 3-axis magnetic sensor A sensor package comprising an X-axis sensor circuit component, a Y-axis sensor circuit component, and a Z-axis sensor circuit component, each mounted to a top surface of a rigid substrate. To minimize the height of the package, a channel is cut out of the top surfa... | 09/18/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7258010 | MEMS device with thinned comb fingers Methods of fabricating thinned comb MEMS devices are disclosed. A comb drive device in accordance with an illustrative embodiment of the present invention can include a number of interdigitated comb fingers some of which have a reduced thickness along at least a por... | 08/21/2007 |
| 7250112 | Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame is provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions alon... | 07/31/2007 |
| 7241959 | Mechanical power breaker for a vehicle A mechanical power breaker for a vehicle has a casing, a power input, a master power output, and a breaker positioned in the casing and electrically connected between the power input and master power output. The breaker has a seat, a conductive connector, a moving e... | 07/10/2007 |
| 7225674 | Self-stabilizing, floating microelectromechanical device The present invention relates to MicroElectroMechanical Systems (MEMS), devices and applications thereof in which a proof mass is caused to levitate by electrostatic repulsion. Configurations of electrodes are described that result in self-stabilized floating of the... | 06/05/2007 |
| 7216539 | Micromachined apparatus with split vibratory masses Each of a number of resonator masses is split into two separate lobes or masses joined together by a short flexure. The short flexure allows the separate lobes or masses to rotate slightly as they resonate so as to substantially relieve longitudinal stresses in cert... | 05/15/2007 |
| 7204144 | Micromachined apparatus with drive/sensing fingers in coupling levers Resonator structures include a plurality of resonator masses interconnected by a plurality of levers so as to resonate in anti-phase with one another. The levers include a plurality of lever fingers interdigitated with corresponding fixed fingers affixed to an under... | 04/17/2007 |
| 7173420 | Magnetic detection device and method for manufacture A magnetic sensor assembly comprising magnetic detection elements is provided. In a magnetic sensor assembly 100 according to the present invention, a magnetic detection element 140 is fixed to a base member 110 and, by having the base member | 02/06/2007 |
| 7159442 | MEMS multi-directional shock sensor A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching arm assembly. The other arm of each latching arm assembly is carried ... | 01/09/2007 |
| 7151659 | Gapped-plate capacitor In a semiconductor device, a capacitor is provided which has a gap in at least one of its plates. The gap is small enough so that fringe capacitance between the sides of this gap and the opposing plate at least compensates, if not overcompensates, for the missing co... | 12/19/2006 |
| 7110024 | Digital camera system having motion deblurring means A camera system is disclosed having the ability to overcome the effects of motion blur. The camera system includes an image sensor; a velocity detection means such as a MEMS accelerometer for determining any motion of the image relative to an external environment; a... | 09/19/2006 |
| 7096732 | Semiconductor device with shielding A semiconductor device includes gaps formed in a semiconductor substrate to provide an inner portion movable in x and y directions. Drive electrodes vibrate the inner portion in the x direction, and detection electrodes detect movement in the y direction generated w... | 08/29/2006 |
| 7089792 | Micromachined apparatus utilizing box suspensions A micromachined gyroscope makes use of Coriolis acceleration to detect and measure rotation rate about a plane normal to the surface of a substrate. Specifically, various resonating structures are suspended within a frame. The resonating structures include phase and... | 08/15/2006 |
| 7082830 | Physical quantity sensor capable of outputting time-serial signal indicative of plural ranges of physical quantity A physical quantity sensor detecting physical quantity, such as acceleration or angular velocity, is provided and mounted on, for example, a vehicle. The sensor has a physical quantity transducer and the first to third circuits. The transducer senses physical quanti... | 08/01/2006 |
| 7068125 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 06/27/2006 |
| 7040166 | Multiple output inertial sensing device An inertial sensor includes a single linear accelerometer disposed upon a silicon wafer. The accelerometer is electrically connected to a plurality of signal conditioning circuits that generate an output signals in different ranges. Each signal conditioning circuit ... | 05/09/2006 |
| 7036372 | Z-axis angular rate sensor An oscillatory rate sensor is described for sensing rotation about the “z-axis”. It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkag... | 05/02/2006 |
| 7032451 | Micromachined sensor with quadrature suppression Quadrature suppression is provided by placing a resonator mass adjacent to a quadrature suppression electrode. The resonator mass is capable of moving substantially parallel to the quadrature suppression electrode and includes a notch formed adjacent to a portion of... | 04/25/2006 |
| 7019522 | Apparatus for measuring the magnetic field produced by an insertion device The invention provides an apparatus for measuring the magnetic field strength between the magnet arrays of an insertion device in an X-ray generating system comprising a magnetic field strength sensor that produces an output signal, three stages for positioning the ... | 03/28/2006 |
| 6939473 | Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z... | 09/06/2005 |
| 6688169 | Systems and methods for sensing an acoustic signal using microelectromechanical systems technology An acoustic system has an acoustic sensor and a processing circuit. The acoustic sensor includes a base, a microphone having a microphone diaphragm supported by the base, and a hot-wire anemometer having a set of hot-wire extending members supported by th... | 02/10/2004 |
| 6644117 | Electro-mechanical component and method for producing the same An electromechanical component consists of a polymeric body comprising a mechanically active part with a spring and a frame, and of a metal layer which encompasses the spring substantially completely so as to mechanically stabilize the same. The electrome... | 11/11/2003 |
| 6615465 | Method for producing an acceleration sensor A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two opposing main surfaces. The piezoelectric element is formed... | 09/09/2003 |
| 6569045 | Gear-change system including a sensor device for detecting the operation of a gear change for bicycles A sensor device for detecting for detecting the operating position of a gear-change system for bicycles comprises a shell positioned at any point along the flexible control cable of a bicycle derailleur, between the derailleur and the control device. The ... | 05/27/2003 |
| 6405594 | Silicon base plate with low parasitic electrical interference for sensors A microgyroscope has a baseplate made of the same material as the rest of the microgyroscope. The baseplate is a silicon baseplate having a heavily p-doped epilayer covered by a thick dielectric film and metal electrodes. The metal electrodes are isolated... | 06/18/2002 |
| 6147790 | Spring-ring micromechanical device An improved micromechanical device comprising a substrate (104), a rigid deflectable member (302, 314, 326) suspended over the substrate, and at least one spring (328) supported above the substrate and spaced apart from the rigid deflectable member. The s... | 11/14/2000 |
| 6048774 | Method of manufacturing dynamic amount semiconductor sensor In a method of manufacturing a dynamic amount sensor including a beam structure and a fixed electrode which are respectively supported by anchor parts of a substrate, opening portions are formed on a first semiconductor substrate where the anchor parts ar... | 04/11/2000 |
| 6041654 | Method and device in an aerial towed hit detector An aerial towed hit detector used together with a sleeve target can obtain an oscillatory movement in the roll angular direction because of the small aerodynamic stability of the target. For determining the path or the miss distance of a projectile passin... | 03/28/2000 |
| 6030850 | Method for manufacturing a sensor In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The elect... | 02/29/2000 |
| 5992233 | Micromachined Z-axis vibratory rate gyroscope A microfabricated gyroscope to measure rotation about an axis perpendicular to the surface of the substrate. The driving electrodes, X-axis sensing electrodes, and Y-axis sensing electrodes may all be fabricated from a signal structural layer. The gyrosco... | 11/30/1999 |
