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Class 73/514.33 - Resistive sensor


Subclass of Class 73 - Measuring and testing
Definition: Apparatus wherein the sensing means comprises an element
No. of patents: 238
Last issue date: 03/13/2012


1            
NumberTitleIssue Date
8132458Acceleration sensor resistant to excessive force breakage
An acceleration sensor having a high impact resistance to prevent breakage under excessive acceleration, but can stably exert a sensing performance. The acceleration sensor is formed of an SOI substrate of a three-layered structure including a silicon layer (active ...
03/13/2012
8024973Semiconductor acceleration sensor
A semiconductor acceleration sensor includes an acceleration sensor chip that includes a weight portion, a base portion provided around the weight portion with a gap therebetween, and beam portions flexibly connecting the weight portion and the base portion; and a s...
09/27/2011
8024972Electronic part, method for fabricating electronic part, acceleration sensor, and method for fabricating acceleration sensor
There is provided an electronic part that has a substrate, an insulating layer formed on the substrate and a pad formed on the insulating layer and is electrically connected with an external terminal and that further includes a cavity formed at least at either one o...
09/27/2011
8015875Sensor device and method for fabricating sensor device
The sensor device includes a dead-weight portion, a frame portion disposed so as to surround the dead-weight portion, a supporting portion provided at the frame portion via a first insulating layer, a mass portion provided at the dead-weight portion via a second ins...
09/13/2011
7987716Coupled pivoted acceleration sensors
A pivoted acceleration sensor has a substrate that is substantially parallel to first and second surfaces. A reference frame is provided. A first unbalanced seismic mass is suspended within the reference frame and is coupled with the reference frame through first an...
08/02/2011
7938005Acceleration sensor chip package
An acceleration sensor chip package includes an acceleration sensor chip; a sensor control chip; a re-wiring layer; an outer terminal; a sealing portion; and a substrate. The acceleration sensor chip includes a frame portion; a movable structure; a detection element...
05/10/2011
7905146Inertial sensor
An inertial sensor includes a stopper having a first locking member extending from a flame onto a proof-mass, a first recess formed at the proof-mass, including a bottom surface, a second locking member extending from the proof-mass onto the edge of the flame, a sec...
03/15/2011
7849743Acceleration sensing device
An acceleration sensing device includes a movable sensing member, a frame member and a supporting member. The supporting member is coupled between the movable sensing member and the frame member so as to support the movable sensing member. The acceleration sensing d...
12/14/2010
7845229Acceleration sensor
The acceleration sensor according to the present invention includes a circuit chip having a prescribed circuit built into a front surface thereof; a sensor chip bonded to the front surface of the circuit chip; and a resin package for sealing the circuit chip and the...
12/07/2010
7827865Semiconductor acceleration sensor
The present invention is to provide a semiconductor acceleration sensor capable of sensing accelerations in two directions parallel to the surface of a diaphragm and orthogonal to each other with respective proper sensitivities. A semiconductor acceleration sensor i...
11/09/2010
7765870Acceleration sensor and method of manufacturing the same
An acceleration sensor includes a semiconductor element built in a substrate, a wiring layer formed on the substrate, and a piezoresistor, formed on the substrate and made up of a part of the wiring layer, whose resistivity changes by the action of acceleration....
08/03/2010
7716984Acceleration sensor device having piezo-resistors measuring acceleration
An acceleration sensor device comprising: an acceleration sensor chip comprising a mass portion, a support frame and flexible arms having piezo-resistors on their top surfaces; and an upper regulation plate having an IC circuit, which is larger in area than the supp...
05/18/2010
7650787Acceleration sensor
An acceleration sensor has a semiconductor acceleration sensor chip and a case. The semiconductor acceleration sensor chip has a fixed portion, a plummet portion surrounding the fixed portion without contacting the fixed portion, and a beam portion connecting the fi...
01/26/2010
7640807Semiconductor Sensor
A semiconductor sensor of the present invention is capable of preventing a diaphragm portion of the sensor from being damaged if a weight collides against a semiconductor integrated circuit substrate of the sensor and is further capable of preventing the diaphragm p...
01/05/2010
7614301Acceleration sensor chip package and method of producing the same
An acceleration sensor chip package includes an acceleration sensor chip formed of a frame portion with an opening portion, a movable structure, a detection element, and an electrode pad. The movable structure has a beam portion and a movable portion supported on th...
11/10/2009
7540193Triaxial acceleration sensor module and method of manufacturing the same
A triaxial acceleration sensor module 100 includes: a hollow housing 30 provided with a partition plate 31 having a through-hole 32; a triaxial acceleration sensor 1 provided inside the housing 30; and a sensor driving IC
06/02/2009
7509859Acceleration sensor with redundant contact holes
An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and the mass or between the beam and the supporting member A dielectric fi...
03/31/2009
7509858Acceleration sensor manufacturable by simplified method
An acceleration sensor has a mass movably linked to a peripheral attachment section to which at least one stopper is attached to stop the motion of the mass in a certain direction. In the absence of acceleration, the mass rests at a distance from a first surface of ...
03/31/2009
7500395Acceleration sensor
The piezo-resistance type triaxial acceleration sensor includes a frame section, a mass section disposed in the frame section, beam elements which flexibly support the mass section, and piezo-resistors for X, Y and Z axes of the frame section, formed on the beam ele...
03/10/2009
7481113Semiconductor sensor with projection for preventing proof mass from sticking to cover plate
A disclosed semiconductor sensor includes a proof-mass, a frame disposed around the proof-mass and including at least a silicon layer, a beam for supporting the proof-mass, the beam being disposed at a first surface side of the frame between the proof-mass and the f...
01/27/2009
7481112Silicon inertial sensors formed using MEMS
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimension...
01/27/2009
7423511Load sensor
There is provided a load sensor that can make accurate measurement without being affected by unnecessary external force and moreover has a simple construction. The load sensor includes a strain generating element (3) which is formed integrally with an install...
09/09/2008
7406870Semiconductor sensor
A semiconductor sensor is disclosed that includes a proof mass, a frame that is arranged around the proof mass, a beam that is arranged at the surface side of the frame and is configured to support the proof mass, plural piezo-resistive elements arranged on the beam...
08/05/2008
7398684Semiconductor sensor having weight of material different than that of weight arranging part
A semiconductor sensor is disclosed that includes a substrate including at least a semiconductor layer. The substrate includes a weight arranging part in the vicinity of the center of the substrate, a flexible part around the weight arranging part, and supporting pa...
07/15/2008
7392703Z-axis thermal accelerometer
A thermal accelerometer device that allows up to three axes of acceleration sensing. The thermal accelerometer includes a substantially planar substrate, a cavity formed in the substrate, a heater element, and at least first and second temperature sensing elements. ...
07/01/2008
7389691Acceleration sensor
A acceleration sensor includes a supporting part, a beam part connected to the supporting part, a weight part connected to the beam part, and a protruding part formed beneath the beam part so that the protruding part supports the beam part. With such an arrangement,...
06/24/2008
7367232System and method for a three-axis MEMS accelerometer
A system and method for inputting motion measurement data into a computationally based device are provided. In a first version three-axis accelerometer determines components of an inertial force vector with respect to an orthogonal coordinate system. The acceleromet...
05/06/2008
7363814Multi-axial angular velocity sensor
An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a device for oscillating the oscillator in an X-axis direction, and a detect...
04/29/2008
7360455Force detector and acceleration detector and method of manufacturing the same
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is conne...
04/22/2008
7360426Acceleration sensor
An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at th...
04/22/2008
7360422Silicon inertial sensors formed using MEMS
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimension...
04/22/2008
7357026Acceleration sensor
An acceleration sensor includes a base portion shaped into the form of a frame, a weight portion located inside the base portion and disposed away from the base portion, a flexible beam portion disposed over an upper portion of the base portion and an upper portion ...
04/15/2008
7353706Weighted released-beam sensor
A released-beam sensor includes a semiconductor substrate having a layer formed thereon, and an aperture formed in the layer. A beam is mechanically coupled at a first end to the layer and suspended above the layer such that a second end forms a cantilever above the...
04/08/2008
7352271Probe and contour measuring instrument
A probe body (200) includes a middle closing portion (250) formed upright on a connector front portion (261A) and a female thread (261D) into which a male screw (110) is screwed. A sensor module (300) includes a slidable-con...
04/01/2008
7350424Acceleration sensor
A low-cost breakable inertial threshold sensor using mainly micro-machining silicon technology constructed on a silicon-wafer or on some other brittle material according to the MEMS process. The sensor comprises a first body portion, a second body portion, and detec...
04/01/2008
7342443Operational amplifier
An operational amplifier for canceling an offset and continuously generating an output signal. The operational amplifier includes a first operational amplification unit and a second operational amplification unit each having at least one electrical characteristic th...
03/11/2008
7337671Capacitive microaccelerometers and fabrication methods
Disclosed are moveable microstructures comprising in-plane capacitive microaccelerometers, with submicro-gravity resolution (17 pF/g). The microstructures are fabricated in thick (>100 μm) silicon-on-insulator (SOI) substr...
03/04/2008
7334476Acceleration sensor chip package
An acceleration sensor chip package includes an acceleration sensor chip; a sensor control chip; a re-wiring layer; an outer terminal; a sealing portion; and a substrate. The acceleration sensor chip includes a frame portion; a movable structure; a detection element...
02/26/2008
7331230Semiconductor-type three-axis acceleration sensor
There is provided a semiconductor-type three-axis acceleration sensor having a high shock resistance, a small difference between outputs of piezo resistors of X-axis, Y-axis and Z-axis, a small size, high sensitivity and a high output. A flexible arm is composed of ...
02/19/2008
7322241Acceleration sensor with redundant contact holes
An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and the mass or between the beam and the supporting member. A dielectric f...
01/29/2008
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