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Class 73/514.32 - Capacitive sensor


Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the sensing means comprises spaced
No. of patents: 681
Last issue date: 05/29/2012


1                      
NumberTitleIssue Date
8186220Accelerometer with over-travel stop structure
An accelerometer (50, 100, 120, 130) includes a substrate (58) and a proof mass (54) spaced apart from a surface (56) of the substrate (58). Compliant members (62) are coupled to the proof mass (54) and enable the pro...
05/29/2012
8186221Vertically integrated MEMS acceleration transducer
A transducer (20) includes sensors (28, 30) that are bonded to form a vertically integrated configuration. The sensor (28) includes a proof mass (32) movably coupled to and spaced apart from a surface (34) of a substrate (36...
05/29/2012
8181522Capacitive acceleration sensor having a movable mass and a spring element
An acceleration sensor having a mass which is movably supported outside its center of gravity, first electrodes on the mass and second electrodes located at a distance therefrom forming a capacitive sensor in order to determine a change in position of the mass as a ...
05/22/2012
8176782Capacitive sensor
A capacitive sensor includes a fixed electrode and a movable electrode that is movably supported by an anchor portion through a beam portion. The fixed electrode and the movable electrode are opposed to each other with a gap interposed therebetween, thereby constitu...
05/15/2012
8171794Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
A method and a switch arrangement for operating a micromechanical capacitive sensor having at least one and at most two fixed electrodes and one differential capacitor formed by a movable central electrode that can be deflected by an external force, wherein the defl...
05/08/2012
8171793Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
Systems and methods sense out-of-plane linear accelerations. In an exemplary embodiment, the out-of plane linear accelerometer is accelerated in an out-of-plane direction, wherein the acceleration generates a rotational torque to an unbalanced proof mass. A rebalanc...
05/08/2012
8146426Physical sensor
A physical sensor includes: a substrate having a silicon layer, an oxide film and a support layer; and a sensor portion having movable and fixed electrodes and a lower electrode. The movable electrode is supported by a beam on the support layer. The fixed electrode ...
04/03/2012
8146425MEMS sensor with movable z-axis sensing element
A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The refere...
04/03/2012
8141426Displacement measurement apparatus for microstructure and displcement measurement method thereof
A displacement measurement apparatus for a microstructure according to the present invention measures a displacement of the microstructure having a fixed portion electrode including a first electrode and a second electrode and a movable portion electrode located opp...
03/27/2012
8113053Capacitive accelerometer
Substantially hemispherical concave first and second surfaces of substantially equal radius and surface area face each other about a proof mass supported for movement between the surfaces. The surfaces and proof mass have electrically conductive portions allowing as...
02/14/2012
8113054Capacitive accelerometer
A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the c...
02/14/2012
8104346MEMS-based capacitive sensor
An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an out...
01/31/2012
8100012MEMS sensor with cap electrode
A MEMS sensor includes a substrate having a MEMS structure movably attached to the substrate, a cap attached to the substrate and encapsulating the MEMS structure, and an electrode formed on the cap that senses movement of the MEMS structure. ...
01/24/2012
8096182Capacitive sensor with stress relief that compensates for package stress
A microelectromechanical systems (MEMS) capacitive sensor (52) includes a movable element (56) pivotable about a rotational axis (68) offset between ends (80, 84) thereof. A static conductive layer (58) is spaced away from the mova...
01/17/2012
8079262Pendulous accelerometer with balanced gas damping
A pendulous capacitive accelerometer including a substrate having a substantially planar upper surface with an electrode section, and a sensing plate having a central anchor portion supported on the upper surface of the substrate to define a hinge axis. The sensing ...
12/20/2011
8056415Semiconductor device with reduced sensitivity to package stress
A microelectromechanical systems (MEMS) sensor (52) includes a substrate (62) a movable element (58) spaced apart from the substrate (62), suspension anchors (66, 68, 70, 72) formed on the substrate (62), and compliant membe...
11/15/2011
8047076Acceleration sensor and method of fabricating it
Provided is an acceleration sensor that has high detection sensitivity and that can enhance production efficiency. The acceleration sensor has: a ceramic substrate made of Al2O3; a ferroelectric layer formed in a predetermined area on the ceram...
11/01/2011
8047075Vertically integrated 3-axis MEMS accelerometer with electronics
A system and method in accordance with the present invention provides for a low cost, bulk micromachined accelerometer integrated with electronics. The accelerometer can also be integrated with rate sensors that operate in a vacuum environment. The quality factor of...
11/01/2011
8020443Transducer with decoupled sensing in mutually orthogonal directions
A microelectromechanical systems (MEMS) transducer (90) is adapted to sense acceleration in mutually orthogonal directions (92, 94, 96). The MEMS transducer (90) includes a proof mass (100) suspended above a substrate (98) by an an...
09/20/2011
7997137Bidirectional readout circuit for detecting direction and amplitude of capacitive MEMS accelerometers
There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive ME...
08/16/2011
7900515Acceleration sensor and fabrication method thereof
First and second semiconductor layers are attached to each other with an insulation layer sandwiched therebetween. An acceleration sensor device is formed in the first semiconductor layer. A control device for controlling the acceleration sensor device is formed on ...
03/08/2011
7886601Microelectromechanical sensor having multiple full-scale and sensitivity values
A microelectromechanical sensing structure is provided with a mobile element adapted to be displaced as a function of a quantity to be detected, and first fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element ...
02/15/2011
7882741Method for manufacturing micromechanical components
The present invention relates to a method for manufacturing an acceleration sensor. In the method, thin SOI-wafer structures are used, in which grooves are etched, the walls of which are oxidized. A thick layer of electrode material, covering all other material, is ...
02/08/2011
RE42083Acceleration sensor and process for the production thereof
A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on t...
02/01/2011
7870788Fabrication process and package design for use in a micro-machined seismometer or other device
An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrat...
01/18/2011
7866210Semiconductor mechanical sensor
A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in ...
01/11/2011
7849742Out-of-plane sensing device
An out-of-plane sensing device is provided. A proof mass is movable with respect to a substrate. A frame is positioned on the substrate and encloses the proof mass. At least one spring connects the proof mass to the frame so that the spring will exert a force on the...
12/14/2010
RE41856Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced
A movable mass forming a seismic mass is formed starting from an epitaxial layer and is covered by a weighting region of tungsten which has high density. To manufacture the mass, buried conductive regions are formed in the substrate. Then, at the same time, a sacrif...
10/26/2010
7814794Micromachined sensors
The present invention provides a micromachined sensor. The micromachined sensor includes a proof mass movable with respect to a substrate. The proof mass includes a first portion, a second portion separated from the first portion and a third portion connecting the f...
10/19/2010
7802476Free fall detector device and free fall detection method
A free-fall detector device includes an inertial sensor, a detection circuit associated to the inertial sensor, and a signal source for supplying a read signal to the inertial sensor. The device moreover includes: a storage element, selectively connectable to the de...
09/28/2010
7793544Microelectromechanical inertial sensor, in particular for free-fall detection applications
An inertial sensor provided with a detection structure sensitive to a first, a second and a third component of acceleration along respective directions of detection, and generating respective electrical quantities as a function of said components of acceleration. Th...
09/14/2010
7784344Integrated MEMS 3D multi-sensor
Apparatus, methods, and systems for sensing acceleration and magnetic fields in all three axes from a first capacitive bridge sensor having a first proof mass; and a second capacitive bridge sensor having a second proof mass located within the first proof mass. The ...
08/31/2010
7721604Micromechanical inertial sensor having reduced sensitivity to the influence of drifting surface charges, and method suited for operation thereof
A micromechanical inertial sensor having at least one seismic mass which may be deflected relative to a substrate, and at least one electrode surface which in terms of circuitry, together with at least portions of the seismic mass forms at least one capacitor having...
05/25/2010
7716983Capacitive acceleration sensor
The invention relates to measuring devices used in the measuring of acceleration and, more specifically, to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention contains a movable electrode (5) supported at an...
05/18/2010
7712366Multi-axis capacitive transducer and manufacturing method for producing it
A capacitive transducer a first part containing a first set of capacitor plates and a second part relatively movable in a plane to the first part. The second part contains a second set of capacitor plates. Both sets of capacitor plates are built on a substrate, wher...
05/11/2010
7690254Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
A microelectromechanical system (MEMS) includes a housing defining an enclosed cavity, stator tines extending from the housing into the cavity, a MEMS device located within the cavity, the MEMS device including a proof mass and rotor tines extending from the proof m...
04/06/2010
7690255Three-axis inertial sensor and method of forming
A three-axis inertial sensor and a process for its fabrication using an silicon-on-oxide (SOI) wafer as a starting material. The SOI wafer has a first conductive layer separated from a second conductive layer by an insulative buried oxide (BOX) layer. The SOI wafer ...
04/06/2010
7685877Semiconductor mechanical sensor
A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in ...
03/30/2010
7673514Acceleration sensor having single and multi-layer substrates
An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provid...
03/09/2010
7658109Inertial sensor and manufacturing method of the same
A weight of an inertial sensor if formed from a plurality of divided weights, and the divided weights are connected to each other by elastically deformable beams. A movable range and a mass of each of the divided weights and a rigidity of each of the beams are adjus...
02/09/2010
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