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| Number | Title | Issue Date |
| 8156807 | Piezo-resistive detection resonant device made using surface technologies This invention relates to a resonant device with detection in the piezo-resistive plane made using surface technologies on a bulk, which comprises a resonator connected to this bulk by at least one embedded portion, means of exciting this resonator and detection mea... | 04/17/2012 |
| 8136401 | Resonant-beam accelerometer with rotating articulated lever arm The invention relates to a micromachined accelerometer using a movable seismic mass suspended in relation to the substrate by elastic connections only allowing translation in its own plane along a sensitive axis (Oy). The mass acts on at least one elongate resonator... | 03/20/2012 |
| 8117917 | Vibrating beam accelerometer with improved performance in vibration environments An accelerometer that has a cross coupling coefficient due to pendulum droop of the proof mass that is approximately equal and opposite in sign to a cross coupling coefficient due to resonator nonlinearity. The accelerometer includes a proof mass, a housing having a... | 02/21/2012 |
| 8028580 | Inertial measurement unit with enhanced acceleration withstand capability The present invention relates to an inertial measurement unit with enhanced resistance to acceleration, and it is characterized in that it comprises at least five accelerometers (Acc1 to Acc5), the sensing axes of which are arranged at various position... | 10/04/2011 |
| 7802475 | Acceleration sensor An acceleration sensor having a vibrating body includes: a base fixed to a pedestal; an oscillating arm extended from the base in a beam-like shape, oscillating transversally in a planer direction at a predetermined resonant frequency. Here, the oscillating arm incl... | 09/28/2010 |
| 7698941 | Sensing unit and method of making same In a sensing unit according to the present invention, a spring portion having a support portion and a movable portion is conductive. A signal of a sensor portion provided on the movable portion of the spring portion is transmitted via the spring portion. Hence, the ... | 04/20/2010 |
| 7628070 | Inertial sensor with disturbing current reduced by reducing the width and the spacing of tracks in critical zones The inertial sensor comprises a piezoelectric plate having a vibrator member defined therein that carries excitation electrodes connected to an excitation circuit comprising conductor tracks carried by the piezoelectric plate, the excitation circuit including a dist... | 12/08/2009 |
| 7628071 | Sensing unit and method of making same In a sensing unit according to the present invention, a movable portion of a spring portion is supported floatably above a recessed portion formed in a substrate. Thus, the movable portion is capable of oscillating in any direction parallel to the substrate surface.... | 12/08/2009 |
| 7624637 | Beam accelerometer with limiting apparatus An accelerometer includes a cantilever mass with a thin beam element between the mass and the fixed end of the accelerometer. The end of the mass is tapered. A limiting member has an aperture that is tapered corresponding to the taper at the end of the mass and posi... | 12/01/2009 |
| 7587941 | Vibration piezoelectric acceleration sensor A vibration piezoelectric acceleration sensor including a pair of beam shaped members linearly and oppositely disposed on a frame, a support body supporting the beam shaped member, and a holding part holding the support body moveably in a linear direction, and anoth... | 09/15/2009 |
| 7578190 | Symmetrical differential capacitive sensor and method of making same A symmetrical differential capacitive sensor (60) includes a movable element (66) pivotable about a geometrically centered rotational axis (70). The element (66) includes sections (86, 88). Each of the sections (86, 88) has ... | 08/25/2009 |
| 7565840 | Acceleration sensor element and acceleration sensor An objective is to provide an acceleration sensor element that has a high detection sensitivity and that realizes an accurate measurement of acceleration; and an acceleration sensor including this acceleration sensor element to realize a smaller size and a thinner t... | 07/28/2009 |
| 7540191 | Angular rate sensor and method of manufacturing the same An angular rate sensor 100 comprises a first structure 110 which includes a fixed portion 111 having an opening 114, a displacing portion 112 placed in the opening 114, and a connecting portion 113 adapted to connect ... | 06/02/2009 |
| 7467553 | Capacitively coupled resonator drive An apparatus and method for a micro-machined device having a movable mass rotatably suspended from a frame by one or more hinges for rotation relative thereto frame. A DETF resonator is suspended between the frame and reaction mass, and a capacitor is provided betwe... | 12/23/2008 |
| 7451648 | Internal sensor with disturbing current reduced by compensation branches The inertial sensor comprises a piezoelectric plate having a vibrator member defined therein carrying excitation electrodes connected to an excitation circuit including conductor tracks carried by the piezoelectric plate the excitation circuit including a disturbing... | 11/18/2008 |
| 7448268 | Mechanical decoupling device for monolithic differential vibrating sensor A sensor comprises two identical vibrating members operating with a common working frequency and joined to each other by a mechanical decoupling device. The device comprises a frame and two connecting bridges each supporting one member. The frame comprises a success... | 11/11/2008 |
| 7394610 | Acceleration sensor and magnetic disk device using the same An acceleration sensor comprises a vibrating element 2 formed by arranging conductor films 26 and 29 on outer main surfaces of piezoelectric substrates 21 and 22 in a rectangular parallelepiped shape, and first supporting members | 07/01/2008 |
| 7372616 | Complex microdevices and apparatus and methods for fabricating such devices Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB™). ... | 05/13/2008 |
| 7364942 | Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor This invention discloses a process for forming durable anti-stiction surfaces on micromachined structures while they are still in wafer form (i.e., before they are separated into discrete devices for assembly into packages). This process involves the vapor depositio... | 04/29/2008 |
| 7360425 | Compensated composite structure A method for constructing a compensated composite structure, including a support tube coupled to a flexure plate and enclosing a capacitor plate, includes selecting a material for the support tube whereby the coefficient of expansion is larger than that of the mater... | 04/22/2008 |
| 7353706 | Weighted released-beam sensor A released-beam sensor includes a semiconductor substrate having a layer formed thereon, and an aperture formed in the layer. A beam is mechanically coupled at a first end to the layer and suspended above the layer such that a second end forms a cantilever above the... | 04/08/2008 |
| 7353707 | Acceleration sensor An acceleration sensor in which a difference in resonance characteristics between two resonators can be easily adjusted even when casing components are already attached to an acceleration-sensor element includes a bimorph acceleration-sensor element having first and... | 04/08/2008 |
| 7355264 | Integrated passive devices with high Q inductors The specification describes flip bonded dual substrate inductors wherein a portion of the inductor is constructed on a base IPD substrate, a mating portion of the inductor is constructed on a cover (second) substrate. The cover substrate is then flip bonded to the b... | 04/08/2008 |
| 7337670 | Physical quantity sensor having multiple through holes A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. ... | 03/04/2008 |
| 7334475 | MEMS actuator having supporting substrate asserting physical influence on oscillating body A micro-electro-mechanical system (MEMS) device includes an oscillating body and a beam connected to the oscillating body. The beam has a proximal end connected to the oscillating body, a distal end spaced from the oscillating body, and rotational comb teeth extendi... | 02/26/2008 |
| 7300854 | Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method A method of producing a semiconductor component, e.g., a multilayer semiconductor component, and a semiconductor component produced by this method, where the semiconductor component has, e.g., a mobile mass, i.e., an oscillator structure. A method easily and ... | 11/27/2007 |
| 7292000 | Angular velocity measuring device and leg-moving robot An angular velocity measuring device (1) includes a first sensor (2) (vibration gyro) and a second sensor (3) (gas rate gyro). The detection output of the first sensor (2) is inputted to a high pass filter (4). Output of the filter... | 11/06/2007 |
| 7284431 | Geophone An improved system for sensing ground motion is provided. The system generally comprises a shell and a case within the shell and connected by a suspension. The mass of the case is greater than the mass of the shell. An electrode within the shell detects relative mot... | 10/23/2007 |
| 7276834 | Electrostatically oscillated device An oscillator is oscillatable in a predetermined direction. First and second driving electrodes are secured to the base and apply an electrostatic force to the oscillator to make drive oscillation of the oscillator in the predetermined direction. At the time of the ... | 10/02/2007 |
| 7275434 | Micromechanical component In order to implement two different sensitivities simultaneously in one component, in particular in an acceleration sensor having a substrate, at least one spring device, and at least one seismic mass, it is proposed that the spring device be designed for an intrins... | 10/02/2007 |
| 7274118 | Solid state MEMS activity-activated battery device and method A system includes a thin-film battery and an activity-activated switch. In some embodiments, the system is placed on a substrate with an adhesive backing. In some embodiments, the substrate is flexible. Also formed on the substrate is an electrical circuit that incl... | 09/25/2007 |
| 7274002 | Heating element induction of time-varying thermal gradient in elongated beam to cause one or more elongated beam oscillations One or more heating elements comprise a heating element. One or more elongated beams comprise an elongated beam. The heating element is coupled with the elongated beam and induces a time-varying thermal gradient in the elongated beam to cause one or more oscillation... | 09/25/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7258028 | Load measuring transducer including elastic structure and gauge using induced voltage, and load measuring system using the same The present invention relates to a load measuring transducer including gauges and elastic structure and weighing system for measuring weight applied to a structure. The load measuring transducer of the present invention comprises a stationary gauge which is construc... | 08/21/2007 |
| 7249510 | Semiconductor acceleration sensor and manufacturing method thereof A semiconductor acceleration sensor in which a reduction in size can be achieved when electrodes are formed in a chip main body and acceleration can be measured with good sensitivity. The semiconductor acceleration sensor comprises a weight section, flexible section... | 07/31/2007 |
| 7247246 | Vertical integration of a MEMS structure with electronics in a hermetically sealed cavity A wafer-scale fabrication method for providing MEMS assemblies having a MEMS subassembly sandwiched between and bonded to a cap and a base is provided. The MEMS subassembly includes at least one MEMS device element flexibly connected to the MEMS assembly. The vertic... | 07/24/2007 |
| 7243544 | Passive and wireless acoustic wave accelerometer An acoustic wave acceleration sensor comprises an acoustic wave device including a plate that functions as a propagation medium and at least one interdigital transducer configured upon the plate. One or more antennas can be integrated with the acoustic wave device, ... | 07/17/2007 |
| 7243546 | Acceleration sensor chip An acceleration sensor chip has a frame portion having a frame body portion and protruding portions. The acceleration sensor chip also includes a mobile structure having a central weight portion supported movably by four beam portions. The mobile structure also has ... | 07/17/2007 |
| 7240533 | Method for reducing bias error in a vibrating structure gyroscope A method for reducing bias error in a Vibrating Structure Gyroscope having a vibrating structure, a primary drive for putting the vibrating structure into carrier mode resonance, a primary pick-off device for sensing carrier mode motion, a secondary pick-off for sen... | 07/10/2007 |
| 7228739 | Precision flexure plate A precision flexure plate includes a flat disk positioned between two capacitor plates and supported by S-shaped beams. Deflection of the disk due to gravitational loads and resulting capacitance change is used to measure the accelerations in the direction perpendic... | 06/12/2007 |
