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Class 73/514.16 - Specific type of electric sensor or specific type of magnetic sensor


Subclass of Class 73 - Measuring and testing
Definition: Subject matter comprising a specified sensing means whose
No. of patents: 228
Last issue date: 11/08/2011


1            
NumberTitleIssue Date
8051713Two-dimensional adaptive accelerometer based on dielectrophoresis
Conventional accelerometers are based on test masses that are suspended in some kind of spring damper system. According to an exemplary embodiment of the present invention, a two-dimensional adaptive accelerometer based on dielectrophoresis is provided, which measur...
11/08/2011
8024971Convective accelerometer
A convective accelerometer capable of measuring linear or angular acceleration, velocity, or angle of inclination is provided. The accelerometer comprises sensing elements that are sensitive to convection located inside a sealed housing containing a liquid agent. Ap...
09/27/2011
7946174Decelerometer formed by levitating a substrate into equilibrium
Coulomb islands are charged to create Coulomb forces which are applied between a first and second substrate. The Coulomb islands are used to levitate the first substrate over the second substrate into an equilibrium position. A processing unit monitors the values of...
05/24/2011
7802474Fiber optic laser accelerometer
An accelerometer is provided for a fiber optic laser. Strain applied to the fiber optic laser results in an emission wavelength shift. The fiber optic laser is joined to a transducer and extends laterally across said transducer. Acceleration of the transducer in a p...
09/28/2010
7661313Acceleration strain transducer
An accelerometer is provided including a strain sensor with a substantially linear configuration. The strain sensor is mounted on a transducer such that the strain sensor extends laterally across the transducer. The transducer has a base and a plurality of flaps joi...
02/16/2010
7516660Convective accelerometer
A convective accelerometer capable of measuring linear or angular acceleration, velocity, or angle of inclination is provided. The accelerometer comprises sensing elements that are sensitive to convection located inside a sealed housing containing a liquid agent. Ap...
04/14/2009
7493815MEMS switch triggered by shock and/or acceleration
An acceleration-triggered or shock-triggered, smart, tunable MEMS switch that may function as both a classic accelerometer and an acceleration threshold detector. A parallel element MEMS device has a stationary and a movable element forming a capacitor. Varying acce...
02/24/2009
7434466Gyro sensor
The electrostatically-driven/capacitance-detection type gyro sensor has a sensing element including a movable part, the sensitivity of the sensing element and accordingly the sensitivity of a sensor output signal thereof being kept unchanged by controlling the ampli...
10/14/2008
7424826Single chip tri-axis accelerometer
Single chip 3-axis thermal accelerometer devices include a substrate, at least one cavity etched in the substrate, a fluid disposed in the cavity, a bridge structure suspended over an opening of the cavity, and a plurality of heater elements and temperature sensing ...
09/16/2008
7420364Small-sized attitude detection sensor and portable telephone using the small-sized attitude detection sensor
An attitude detection sensor includes three magnetic sensing parts that detect magnetic field strength in respective directions along three axes perpendicular to each other, and two tilt sensing parts that detect tilt angles around two axes perpendicular to each oth...
09/02/2008
7380454Load beam for surface acoustic wave accelerometer
Methods and systems for forming accelerometers include forming a load beam supported at one end having an input interdigital transducer (IDT) and an output IDT. The load-beam has a cross section varying in the longitudinal direction effective to cause the load beam ...
06/03/2008
7357026Acceleration sensor
An acceleration sensor includes a base portion shaped into the form of a frame, a weight portion located inside the base portion and disposed away from the base portion, a flexible beam portion disposed over an upper portion of the base portion and an upper portion ...
04/15/2008
7353705Oscillation type intertial force sensor
The oscillation type inertial force sensor includes an oscillator arranged to detect an inertial force, an oscillation circuit unit arranged to drive the oscillator, and a signal processing circuit unit arranged to generate a signal according to the magnitude of the...
04/08/2008
7353706Weighted released-beam sensor
A released-beam sensor includes a semiconductor substrate having a layer formed thereon, and an aperture formed in the layer. A beam is mechanically coupled at a first end to the layer and suspended above the layer such that a second end forms a cantilever above the...
04/08/2008
7337669Inertial sensor and combined sensor therewith
An inertial sensor is provided which includes a self-diagnosis circuit which applies an AC-bias signal voltage ahead of a synchronous demodulator, and thereby, supplies a diagnostic signal for detecting an abnormality in at least one of a detecting element and a det...
03/04/2008
7337670Physical quantity sensor having multiple through holes
A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. ...
03/04/2008
7339265Capacitance type semiconductor sensor
In a capacitance type semiconductor dynamic quantity sensor, a sensor chip and a circuit are connected to each other through adhesive film having an elasticity of 200 MPa or less to reduce the temperature characteristic. Four bonding wires for connecting the sensor ...
03/04/2008
7331414Protective structure for an electrical circuit device
A protective structure for an electrical circuit device attached to a vehicle includes a resin case, an electrical circuit, and a rigid body. The electrical circuit is contained in the resin case. The rigid body is contained in the resin case. The rigid body protrud...
02/19/2008
7331228Acceleration sensor
An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provid...
02/19/2008
7322242Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package
In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile electrodes. The suspended structure is connected to a rotor-anchoring region...
01/29/2008
7323649Jerking-initiated switch
A jerking-initiated switch includes two first shank members and two second shank members secured to first and second lateral sides of a base wall of an insulating frame to define a rolling path for rolling of an electrically conductive ball therealong. Two limb memb...
01/29/2008
7318349Three-axis integrated MEMS accelerometer
3D accelerometer for measuring three components of inertial force (or acceleration) vector with respect to an orthogonal coordinate system, which has high sensitivity due to a big proof mass located within a cavity beneath the surface of the sensor die. The size of ...
01/15/2008
7296469Magnetofluidic accelerometer with active suspension
A method of measuring acceleration includes suspending an inertial body using a magnetic fluid; generating a magnetic field within the magnetic fluid; modulating the magnetic field to counteract a change in position of the inertial body relative to sources of the ma...
11/20/2007
7294935Integrated circuits protected against reverse engineering and method for fabricating the same using an apparent metal contact line terminating on field oxide
Semiconducting devices, including integrated circuits, protected from reverse engineering comprising metal traces leading to field oxide. Metallization usually leads to the gate, source or drain areas of the circuit, but not to the insulating field oxide, thus misle...
11/13/2007
7287415Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring
Embodiments of the present invention are directed to a MEM viscosity sensor that is configured to be operated submerged in a liquid. The MEMS viscosity sensor comprises a MEMS variable capacitor comprising a plurality of capacitor plates capable of being submerged i...
10/30/2007
7279761Post-release capacitance enhancement in micromachined devices and a method of performing the same
A MEMS device which utilizes a capacitive sensor or actuator is enhancement by initially fabricating the capacitive assembly which comprises the sensor or actuator as two sets of interdigitated fingers in a noninterdigitated configuration. One of the two sets of fin...
10/09/2007
7276990Single-pole multi-throw switch having low parasitic reactance, and an antenna incorporating the same
A switch arrangement comprises a plurality of MEMS switches arranged on a substrate about, and close to, a central point, each MEMS switch being disposed on a common imaginary circle centered on the central point. Additionally, and each MEMS switch is preferably spa...
10/02/2007
7276834Electrostatically oscillated device
An oscillator is oscillatable in a predetermined direction. First and second driving electrodes are secured to the base and apply an electrostatic force to the oscillator to make drive oscillation of the oscillator in the predetermined direction. At the time of the ...
10/02/2007
7275432Acceleration sensor and method of manufacturing acceleration sensor
An acceleration sensor includes a semiconductor substrate, a sensing element formed on the semiconductor substrate, a bonding frame made of polysilicon which is formed on the semiconductor substrate and surrounds the sensing element, and a glass cap which is bonded ...
10/02/2007
7276409Method of forming a capacitor
A carbon containing masking layer is patterned to include a plurality of container openings therein having minimum feature dimensions of less than or equal to 0.20 micron. The container openings respectively have at least three peripheral corner areas which are each...
10/02/2007
7274079Sensor design and process
An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes...
09/25/2007
7267006Accelerometer
The accelerometer has a base (2), an outer planar ring-like support frame (17) fixedly bonded to the base (2), and an inner planar ring-like support frame (18) flexibly suspended within the outer frame (17) by mounts (19) co...
09/11/2007
7268646Temperature controlled MEMS resonator and method for controlling resonator frequency
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso...
09/11/2007
7262594Rotation angle detector
A rotation angle detector includes a rotator, a detecting rotator, a magnet, an anisotropic magnetoresistive element, an amplifier, and a controller. The controller connects an output terminal of the anisotropic magnetoresistive element to the ground so as to detect...
08/28/2007
7259551Position sensing for moveable mechanical systems and associated methods and apparatus
Position sensing of movable elements including but not limited to machine components is disclosed. Motion of a movable element can produce motion of a magnetic field, which can be detected by magnetic sensors. The motion and/or variations of a magnetic field and/or ...
08/21/2007
7258012Integrated monolithic tri-axial micromachined accelerometer
A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the...
08/21/2007
7253079Coplanar mounting member for a MEM sensor
A coplanar mounting member for a MEM sensor includes a first surface coplanar with a connection pad on the surface of a MEM sensor board containing the MEM sensor control circuit; a second surface inclined to the surface of the board for mounting a MEM sensor and an...
08/07/2007
7253699RF MEMS switch with integrated impedance matching structure
An impedance matching structure for a RF MEMS switch having at least one closeable RF contact in an RF line, the impedance matching structure comprising a protuberance in the RF line immediately adjacent the RF contact that forms one element of a capacitor, the othe...
08/07/2007
7249509Angular velocity detector
An angular velocity detector includes an angular velocity detecting element having a vibrating body arranged in a base substrate to be vibrated on a surface horizontal with respect to the base substrate. The angular velocity detecting element detects an angular velo...
07/31/2007
7245269Adaptive beam forming antenna system using a tunable impedance surface
A method of and apparatus for beam steering. A feed horn is arranged so that the feed horn illuminates a tunable impedance surface comprising a plurality of individually tunable resonator cells, each resonator element having a reactance tunable by a tuning element a...
07/17/2007
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