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Class 73/514.15 - Spinning or vibrating accelerometer


Subclass of Class 73 - Measuring and testing
Definition: Subject comprising either (a) means for rotating the inertial
No. of patents: 64
Last issue date: 01/06/2009


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NumberTitleIssue Date
7472596GRA MEMS accelerometer
An accelerometer that lies generally in a plane, for detecting acceleration along an input axis. There is a substrate, a generally planar Servo Member (SM) flexibly coupled to the substrate such that it is capable of oscillatory motion about a servo axis that lies i...
01/06/2009
7430908Excitation in micromechanical devices
A resonant structure for a micromechanical device includes a beam and at least one mass attached to the beam. The resonant structure is arranged to have a predominantly rotational excitation mode and an excitation plane in which motion of the excited resonant struct...
10/07/2008
7394610Acceleration sensor and magnetic disk device using the same
An acceleration sensor comprises a vibrating element 2 formed by arranging conductor films 26 and 29 on outer main surfaces of piezoelectric substrates 21 and 22 in a rectangular parallelepiped shape, and first supporting members
07/01/2008
7308827Integrated gyroscope and temperature sensor
A gyroscope and temperature sensor are formed on a single chip using SOI-MEMS technology. The temperature sensor has an array of resistors to accurately detect the temperature of the gyroscope in temperatures and conditions that can range from extreme heat to extrem...
12/18/2007
7268646Temperature controlled MEMS resonator and method for controlling resonator frequency
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso...
09/11/2007
7263454Method for monitoring a vibrating gyroscope
The invention relates to a method for monitoring a vibrating gyroscope which represents a resonator and forms part of at least one control loop that excites the vibrating gyroscope with its natural frequency by supplying an excitation signal. An output signal can be...
08/28/2007
7232700Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense
The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching t...
06/19/2007
7231825Accelerometer based tilt sensor and method for using same
A tilt sensor and a method for the use of the tilt sensor to calculate the degree of tilt, whereby the tilt sensor has at least three accelerometers mounted to a base, the accelerometers are positioned in a common plane, and wherein each is preferably at an equally ...
06/19/2007
7202100Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope
The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching t...
04/10/2007
7197930Gyro sensor
The gyro sensor uses a clock signal as a timing signal or synchronous signal for reading various data stored in a built-in memory for its yaw rate sensing operation. The gyro sensor is configured to use, as such a clock signal, the self-excited oscillation signal be...
04/03/2007
7194801Thin-film battery having ultra-thin electrolyte and associated method
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is suppl...
03/27/2007
7168321Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith
The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer,...
01/30/2007
7159441Cloverleaf microgyroscope with electrostatic alignment and tuning
A micro-gyroscope (10) having closed loop output operation by a control voltage (Vty), that is demodulated by a drive axis (x-axis) signal Vthx of the sense electrodes (S1, S2), providing Coriolis torque rebalance to preven...
01/09/2007
7159442MEMS multi-directional shock sensor
A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching arm assembly. The other arm of each latching arm assembly is carried ...
01/09/2007
7124633Vibrating beam accelerometer
Accelerometer micromachined in a plane plate comprising a base, and at least one measurement cell including a moveable seismic mass connected to the base and capable of moving translationally along the sensitive y axis of the accelerometer under the effect of an acc...
10/24/2006
7121141Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area
An accelerometer includes a pair of conductive plates fixedly mounted on a substrate surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least one protective shield mounted on the substrate surface. The structure i...
10/17/2006
7100444Isolated resonator gyroscope
The present invention discloses a resonator gyroscope comprising a resonator including two bodies, each with a center of mass and transverse inertia symmetry about an axis that are substantially coincident and each supported by one or more elastic elements and where...
09/05/2006
7071594MEMS scanner with dual magnetic and capacitive drive
A MEMS scanning device includes more than one type of actuation. In one approach capacitive and magnetic drives combine to move a portion of the device along a common path. In one such structure, the capacitive drive comes from interleaved combs. In another approach...
07/04/2006
7068125Temperature controlled MEMS resonator and method for controlling resonator frequency
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso...
06/27/2006
7030537Movable MEMS-based noncontacting device
A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrode...
04/18/2006
7024949Load transducers employing a sensing device
Force sensing transducers which employ inline sensing and an integral crossarm support for a sensing component. These transducers have a metal frame with at least one ring; a beamlike crossarm which lies within, spans, and is integral with a ring of the transducer f...
04/11/2006
7015060Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects
The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, preparing a...
03/21/2006
6971262System and method for rheological characterization of granular materials
A system for characterizing rheological properties of granular material. A cylindrical measurement cup containing granular material is subject to a uniform vibration induced by a vibration exciter at a user-determined frequency. At the same time, a rotation or an os...
12/06/2005
6964196Resonant pivoting surface with inertially coupled activation
A system and method for providing resonant movement about a first axis. A functional surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hin...
11/15/2005
6962613Low-temperature fabrication of thin-film energy-storage devices
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step, especially a cathode anneal of thin-film batteries. A film of an energy-storage device is fabricated by depositing a first material...
11/08/2005
6907784Vibration type angular velocity sensor
An angular velocity sensor has an adjustment circuit for adjusting the amplitude of a detection signal generated corresponding to a displacement of each of arm portions vibrating in the X-axis direction. The adjusted signal is input as a comparison reference signal ...
06/21/2005
6907150Etching process for micromachining crystalline materials and devices fabricated thereby
The present invention provides an optical microbench having intersecting structures etched into a substrate. In particular, microbenches in accordance with the present invention include structures having a planar surfaces formed along selected crystallographic plane...
06/14/2005
6906436Solid state activity-activated battery device and method
A system includes a thin-film battery and an activity-activated switch. The system is placed on a substrate with an adhesive backing. In some embodiments, the substrate is flexible. Also formed on the substrate is an electrical circuit that includes electronics. The...
06/14/2005
6901800Differential in-plane tunneling current sensor
A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof ...
06/07/2005
6843126Triaxial angular rate and acceleration sensor
A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of...
01/18/2005
6634232Acceleration sensor with limited movability in the vertical direction
The present invention relates to an acceleration sensor including an oscillating structure which is movably suspended on a substrate and deflectable in response to the action of an acceleration, a plane of oscillation of the oscillating structure being es...
10/21/2003
6595055Micromechanical component comprising an oscillating body
A micromechanical component comprises a frame layer and an oscillating body which, with the aid of a suspension means, is supported in an opening penetrating the frame layer, in such a way that the oscillating body is adapted to be pivoted about an axis o...
07/22/2003
6584845Inertial sensor and method of use
The inertial sensor of the present invention utilizes a proof mass suspended from spring structures forming a nearly degenerate resonant structure into which a perturbation is introduced, causing a split in frequency of the two modes so that the mode shap...
07/01/2003
6560553Method of estimating an eccentric position of an acceleration sensor and acceleration generating apparatus with an eccentricity adjuster
A method of estimating an eccentric position of an acceleration sensor for a double turntable-type acceleration generating apparatus includes the steps of mounting the acceleration sensor on an auxiliary rotating body; rotating the auxiliary rotating body...
05/06/2003
6338274Tuned flexure accelerometer
A tuned flexure accelerometer, comprising, a housing; a gimbal coupled to the housing for oscillation about a gimbal oscillation axis; and a reference mass coupled by one or more pivots to the gimbal to allow pivoting motion of the reference mass relative...
01/15/2002
6130464Latching microaccelerometer
A surface micromachined microaccelerometer includes a substrate which has a surface plane, and a cantilever formed on the substrate with a fixed end and a free end, the fixed end being anchored to the substrate. The cantilever includes a mass fixed along ...
10/10/2000
6032531Micromachined acceleration and coriolis sensor
A solid state silicon micromachined acceleration and Coriolis (MAC) sensor that measures linear and angular motion. The MAC sensor is a single device that performs the functions of a conventional accelerometer and a gyroscope simultaneously. The MAC senso...
03/07/2000
5969249Resonant accelerometer with flexural lever leverage system
An accelerometer comprises a proof mass, a first resonant tuning fork connected to the proof mass, a second resonant tuning fork connected to the proof mass, and a flexural lever leverage system supporting the proof mass above a substrate. The flexural le...
10/19/1999
5962786Monolithic accelerometric transducer
A monolithic accelerometric transducer comprises a fixed part, two mobile mass parts and a resonator having ends fastened to said mobile parts, a flexible frame around the two mobile parts, and two connecting members connecting the frame to the second mob...
10/05/1999
5942686Ratiometric transducer and method
Ratiometric transducer and method in which the outputsnal is linearly proportional to the supply voltage or level of excitation. A drive circuit applies a drive signal to an element which undergoes a change in accordance with a condition to be monitored (...
08/24/1999
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