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| Number | Title | Issue Date |
| 7472596 | GRA MEMS accelerometer An accelerometer that lies generally in a plane, for detecting acceleration along an input axis. There is a substrate, a generally planar Servo Member (SM) flexibly coupled to the substrate such that it is capable of oscillatory motion about a servo axis that lies i... | 01/06/2009 |
| 7430908 | Excitation in micromechanical devices A resonant structure for a micromechanical device includes a beam and at least one mass attached to the beam. The resonant structure is arranged to have a predominantly rotational excitation mode and an excitation plane in which motion of the excited resonant struct... | 10/07/2008 |
| 7394610 | Acceleration sensor and magnetic disk device using the same An acceleration sensor comprises a vibrating element 2 formed by arranging conductor films 26 and 29 on outer main surfaces of piezoelectric substrates 21 and 22 in a rectangular parallelepiped shape, and first supporting members | 07/01/2008 |
| 7308827 | Integrated gyroscope and temperature sensor A gyroscope and temperature sensor are formed on a single chip using SOI-MEMS technology. The temperature sensor has an array of resistors to accurately detect the temperature of the gyroscope in temperatures and conditions that can range from extreme heat to extrem... | 12/18/2007 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 09/11/2007 |
| 7263454 | Method for monitoring a vibrating gyroscope The invention relates to a method for monitoring a vibrating gyroscope which represents a resonator and forms part of at least one control loop that excites the vibrating gyroscope with its natural frequency by supplying an excitation signal. An output signal can be... | 08/28/2007 |
| 7232700 | Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching t... | 06/19/2007 |
| 7231825 | Accelerometer based tilt sensor and method for using same A tilt sensor and a method for the use of the tilt sensor to calculate the degree of tilt, whereby the tilt sensor has at least three accelerometers mounted to a base, the accelerometers are positioned in a common plane, and wherein each is preferably at an equally ... | 06/19/2007 |
| 7202100 | Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching t... | 04/10/2007 |
| 7197930 | Gyro sensor The gyro sensor uses a clock signal as a timing signal or synchronous signal for reading various data stored in a built-in memory for its yaw rate sensing operation. The gyro sensor is configured to use, as such a clock signal, the self-excited oscillation signal be... | 04/03/2007 |
| 7194801 | Thin-film battery having ultra-thin electrolyte and associated method A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is suppl... | 03/27/2007 |
| 7168321 | Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer,... | 01/30/2007 |
| 7159441 | Cloverleaf microgyroscope with electrostatic alignment and tuning A micro-gyroscope (10) having closed loop output operation by a control voltage (Vty), that is demodulated by a drive axis (x-axis) signal Vthx of the sense electrodes (S1, S2), providing Coriolis torque rebalance to preven... | 01/09/2007 |
| 7159442 | MEMS multi-directional shock sensor A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching arm assembly. The other arm of each latching arm assembly is carried ... | 01/09/2007 |
| 7124633 | Vibrating beam accelerometer Accelerometer micromachined in a plane plate comprising a base, and at least one measurement cell including a moveable seismic mass connected to the base and capable of moving translationally along the sensitive y axis of the accelerometer under the effect of an acc... | 10/24/2006 |
| 7121141 | Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area An accelerometer includes a pair of conductive plates fixedly mounted on a substrate surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least one protective shield mounted on the substrate surface. The structure i... | 10/17/2006 |
| 7100444 | Isolated resonator gyroscope The present invention discloses a resonator gyroscope comprising a resonator including two bodies, each with a center of mass and transverse inertia symmetry about an axis that are substantially coincident and each supported by one or more elastic elements and where... | 09/05/2006 |
| 7071594 | MEMS scanner with dual magnetic and capacitive drive A MEMS scanning device includes more than one type of actuation. In one approach capacitive and magnetic drives combine to move a portion of the device along a common path. In one such structure, the capacitive drive comes from interleaved combs. In another approach... | 07/04/2006 |
| 7068125 | Temperature controlled MEMS resonator and method for controlling resonator frequency There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso... | 06/27/2006 |
| 7030537 | Movable MEMS-based noncontacting device A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrode... | 04/18/2006 |
| 7024949 | Load transducers employing a sensing device Force sensing transducers which employ inline sensing and an integral crossarm support for a sensing component. These transducers have a metal frame with at least one ring; a beamlike crossarm which lies within, spans, and is integral with a ring of the transducer f... | 04/11/2006 |
| 7015060 | Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, preparing a... | 03/21/2006 |
| 6971262 | System and method for rheological characterization of granular materials A system for characterizing rheological properties of granular material. A cylindrical measurement cup containing granular material is subject to a uniform vibration induced by a vibration exciter at a user-determined frequency. At the same time, a rotation or an os... | 12/06/2005 |
| 6964196 | Resonant pivoting surface with inertially coupled activation A system and method for providing resonant movement about a first axis. A functional surface supported by a first pair of torsional hinges is driven into resonant oscillations about the first axis by inertially coupling energy through the first pair of torsional hin... | 11/15/2005 |
| 6962613 | Low-temperature fabrication of thin-film energy-storage devices A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step, especially a cathode anneal of thin-film batteries. A film of an energy-storage device is fabricated by depositing a first material... | 11/08/2005 |
| 6907784 | Vibration type angular velocity sensor An angular velocity sensor has an adjustment circuit for adjusting the amplitude of a detection signal generated corresponding to a displacement of each of arm portions vibrating in the X-axis direction. The adjusted signal is input as a comparison reference signal ... | 06/21/2005 |
| 6907150 | Etching process for micromachining crystalline materials and devices fabricated thereby The present invention provides an optical microbench having intersecting structures etched into a substrate. In particular, microbenches in accordance with the present invention include structures having a planar surfaces formed along selected crystallographic plane... | 06/14/2005 |
| 6906436 | Solid state activity-activated battery device and method A system includes a thin-film battery and an activity-activated switch. The system is placed on a substrate with an adhesive backing. In some embodiments, the substrate is flexible. Also formed on the substrate is an electrical circuit that includes electronics. The... | 06/14/2005 |
| 6901800 | Differential in-plane tunneling current sensor A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof ... | 06/07/2005 |
| 6843126 | Triaxial angular rate and acceleration sensor A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of... | 01/18/2005 |
| 6634232 | Acceleration sensor with limited movability in the vertical direction The present invention relates to an acceleration sensor including an oscillating structure which is movably suspended on a substrate and deflectable in response to the action of an acceleration, a plane of oscillation of the oscillating structure being es... | 10/21/2003 |
| 6595055 | Micromechanical component comprising an oscillating body A micromechanical component comprises a frame layer and an oscillating body which, with the aid of a suspension means, is supported in an opening penetrating the frame layer, in such a way that the oscillating body is adapted to be pivoted about an axis o... | 07/22/2003 |
| 6584845 | Inertial sensor and method of use The inertial sensor of the present invention utilizes a proof mass suspended from spring structures forming a nearly degenerate resonant structure into which a perturbation is introduced, causing a split in frequency of the two modes so that the mode shap... | 07/01/2003 |
| 6560553 | Method of estimating an eccentric position of an acceleration sensor and acceleration generating apparatus with an eccentricity adjuster A method of estimating an eccentric position of an acceleration sensor for a double turntable-type acceleration generating apparatus includes the steps of mounting the acceleration sensor on an auxiliary rotating body; rotating the auxiliary rotating body... | 05/06/2003 |
| 6338274 | Tuned flexure accelerometer A tuned flexure accelerometer, comprising, a housing; a gimbal coupled to the housing for oscillation about a gimbal oscillation axis; and a reference mass coupled by one or more pivots to the gimbal to allow pivoting motion of the reference mass relative... | 01/15/2002 |
| 6130464 | Latching microaccelerometer A surface micromachined microaccelerometer includes a substrate which has a surface plane, and a cantilever formed on the substrate with a fixed end and a free end, the fixed end being anchored to the substrate. The cantilever includes a mass fixed along ... | 10/10/2000 |
| 6032531 | Micromachined acceleration and coriolis sensor A solid state silicon micromachined acceleration and Coriolis (MAC) sensor that measures linear and angular motion. The MAC sensor is a single device that performs the functions of a conventional accelerometer and a gyroscope simultaneously. The MAC senso... | 03/07/2000 |
| 5969249 | Resonant accelerometer with flexural lever leverage system An accelerometer comprises a proof mass, a first resonant tuning fork connected to the proof mass, a second resonant tuning fork connected to the proof mass, and a flexural lever leverage system supporting the proof mass above a substrate. The flexural le... | 10/19/1999 |
| 5962786 | Monolithic accelerometric transducer A monolithic accelerometric transducer comprises a fixed part, two mobile mass parts and a resonator having ends fastened to said mobile parts, a flexible frame around the two mobile parts, and two connecting members connecting the frame to the second mob... | 10/05/1999 |
| 5942686 | Ratiometric transducer and method Ratiometric transducer and method in which the outputsnal is linearly proportional to the supply voltage or level of excitation. A drive circuit applies a drive signal to an element which undergoes a change in accordance with a condition to be monitored (... | 08/24/1999 |