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Class 73/504.04 - Vibratory mass


Subclass of Class 73 - Measuring and testing
Definition: Subject matter wherein the inertial member is caused to
No. of patents: 234
Last issue date: 05/08/2012


1            
NumberTitleIssue Date
8171792Inertia sensor and inertia detector device
A detector device includes a drive circuit for outputting a drive pulse signal for displacing the variable block, a detection pulse signal applying unit by which the variable capacitance elements and the fixed capacitance element whose one end is connected in common...
05/08/2012
8151640MEMS on-chip inertial navigation system with error correction
An on-chip navigation system, optionally combined with GPS (Global Positioning System) and/or an imaging array, which incorporates MEMS (MicroElectroMechanical Systems) components is possible by the use of careful material selection and novel bonding techniques used...
04/10/2012
8113050Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same
A method of operating an anti-phase six degree-of-freedom tuning fork gyroscope system comprises the steps of driving a first three degree-of-freedom gyroscope subsystem, and driving a second three degree-of freedom gyroscope subsystem in an anti-phase mode with the...
02/14/2012
8082788MEMS load cell and strain sensor
A sensor includes at least one stationary pad with comb teeth, a hub, at least one actuator spoke coupled to a location on the hub, and at least one sensing spoke extending from the hub. The sensing spokes have comb teeth generally interdigitated with the comb teeth...
12/27/2011
8042394High sensitivity microelectromechanical sensor with rotary driving motion
A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an ...
10/25/2011
8037755Physical quantity sensor
A physical quantity sensor 1 comprises a driving circuit 4 that drives a sensor element based on a reference signal; the sensor element 3 that is driven by the driving circuit 4 to convert an externally applied physical quantity to an ele...
10/18/2011
8020440System and method for providing high-range capability with closed-loop inertial sensors
An inertial sensing system including an inertial sensor having a proof mass providing a deflection signal in response to application of an inertial force, wherein the proof mass has a physical deflection limit and a selected saturation limit set below the deflection...
09/20/2011
7980133Method and apparatus for a micromachined multisensor
In a micromachined devices having a movable shuttle driven in oscillation, measuring the electrical charge accumulated on opposing drive capacitors to determine the displacement of the movable shuttle. Alternately, in such a micromachined device, measuring the elect...
07/19/2011
7971483Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device
A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods are operable to determine linear acceleration and rotation. An exemplary embodiment applies a first linear acceleration rebalancing force via a first electrode pair to a first proof mass, ...
07/05/2011
7950281Sensor and method for sensing linear acceleration and angular velocity
A sensor has a suspended mechanical resonator being responsive to one of a linear acceleration and an angular velocity of the sensor such that a first area and a second area are subjected to opposite elongation movements and responsive to the other such that the fir...
05/31/2011
7900513Multi-axial angular velocity sensor
A flexible substrate having flexibility and a fixed substrate disposed to oppose it are supported at their peripheral portions by a sensor casing. An oscillator is fixed on the lower surface, and five lower electrode layers are formed on the upper surface, of the fl...
03/08/2011
7878060Motion sensor and method of manufacturing the same
A micromachine includes a movable section formed of a conductor and a support section formed of a conductor, wherein the movable section and the support section are separated from each other, an insulating layer is provided on the conductor, a conductive layer is pr...
02/01/2011
7765869Combined accelerometer and gyroscope system
An embodiment of the present invention relates to a combined accelerometer and gyroscope system. The combined accelerometer and gyroscope system includes a combined accelerometer and gyroscope for maintaining vibration of a mass body at a constant amplitude using an...
08/03/2010
7640803Micro-electromechanical system inertial sensor
A micro-machined MEMS resonator gyroscope and accelerometer is fabricated from an epilayer semiconductor wafer to incorporate a substantially planar, H-shaped resonator mass suspended from a support plate by two opposed elongated springs that couple to the relativel...
01/05/2010
7552636Electron/hole transport-based NEMS gyro and devices using the same
A nanomechanical (NEMS) gyroscope includes an integrated circuit substrate, a pair of spaced apart contact pads disposed on the substrate, and a movable nanoscale element forming at least a portion of a first electrically conductive path electrically coupling the co...
06/30/2009
7484410Gyro sensor and sensor apparatus using same
Disclosed is a gyro sensor, which comprises a primary base plate (1) and a support base plate (2) which are superimposed on one another. The primary base plate (1) is provided with a driven mass body (11) to be driven in such a manner as ...
02/03/2009
7461552Dual axis rate sensor
Angular rate sensor for detecting rotation about first and second mutually perpendicular axes which has first and second masses coupled together for torsional drive mode oscillation of equal amplitude and opposite phase about third axes which are perpendicular to th...
12/09/2008
7441458Systems for measuring physical quantities
It is provided a system for measuring a physical quantity based on a detection signal using a vibrator 1, a self-oscillating circuit 12A oscillating a driving vibration in the vibrator 1 and a detection circuit for outputting a detection signal ...
10/28/2008
7434464Methods and apparatus for a MEMS gyro sensor
A gyro sensor configured to sense an angular rate about a rotational axis includes a drive mass configured to undergo oscillatory linear motion within a plane, and a sense mass configured to undergo an oscillatory motion out of the plane as a function of the angular...
10/14/2008
7430908Excitation in micromechanical devices
A resonant structure for a micromechanical device includes a beam and at least one mass attached to the beam. The resonant structure is arranged to have a predominantly rotational excitation mode and an excitation plane in which motion of the excited resonant struct...
10/07/2008
7370531Detection circuits, detection method and systems of measuring physical quantities
A detection circuit 30 has a unit 30a for inputting a signal to be detected by synchronized wave detection, a unit 30b for inputting a standard signal for the signal to be detected and a unit 30c for inputting an offs...
05/13/2008
7363814Multi-axial angular velocity sensor
An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a device for oscillating the oscillator in an X-axis direction, and a detect...
04/29/2008
7363717System and method for using rotation sensors within a borehole
A system and method for using a survey tool within a borehole is provided. The survey tool includes a plurality of rotation sensors each having a sensing axis and a direction of least acceleration sensitivity. The sensing axes of the plurality of rotation sensors ar...
04/29/2008
7360422Silicon inertial sensors formed using MEMS
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimension...
04/22/2008
7360455Force detector and acceleration detector and method of manufacturing the same
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is conne...
04/22/2008
7357025Micromachined apparatus with co-linear drive arrays
A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plu...
04/15/2008
7350415Closed-loop comb drive sensor
A closed-loop, comb drive device that reduces certain “common mode” sensor errors. The device includes a comb structure, electronics, a substrate, and a position sensor. The comb structure includes two comb-drive sections, each having at least two subsections. T...
04/01/2008
7347094Coupling apparatus for inertial sensors
A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at le...
03/25/2008
7340954Method for measurement of rotation rates/accelerations using a rotation rate coriolis gyro, as well as a coriolis gyro which is suitable for this purpose
A Coriolis gyro includes a first and a second resonator, each in the form of a coupled system comprising first and second linear oscillators. The first resonator can be caused to oscillate in antiphase with respect to the second resonator along a common oscillation ...
03/11/2008
7337671Capacitive microaccelerometers and fabrication methods
Disclosed are moveable microstructures comprising in-plane capacitive microaccelerometers, with submicro-gravity resolution (17 pF/g). The microstructures are fabricated in thick (>100 μm) silicon-on-insulator (SOI) substr...
03/04/2008
7334491Sensor arrangement, in particular a micro-mechanical sensor arrangement
A sensor array, in particular a micromechanical sensor array, and methods for manufacturing the sensor array are provided, which sensor array includes a sensor section for supplying certain sensor signals, and a cover section provided on the sensor section to form a...
02/26/2008
7334475MEMS actuator having supporting substrate asserting physical influence on oscillating body
A micro-electro-mechanical system (MEMS) device includes an oscillating body and a beam connected to the oscillating body. The beam has a proximal end connected to the oscillating body, a distal end spaced from the oscillating body, and rotational comb teeth extendi...
02/26/2008
7331212Sensor module
A sensor module is provided having a compact housing containing a sensor. A low temperature co-fired ceramic substrate is located on the housing. The sensor and signal processing circuitry are located on the low temperature co-fired ceramic substrate. The sensor mod...
02/19/2008
7325451Oscillating micro-mechanical sensor of angular velocity
The present invention relates to measuring devices used in measuring angular velocity and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensors of angular velocity according to the present invention, at least one pair of ele...
02/05/2008
7318347Hemispherical resonator gyro control
Embodiments of the present system encompass: a hemispherical resonator gyro (HRG); digital control loop algorithms which operate in two, distinct modes, Force to Rebalance (FTR) and Whole Angle (WA); and a closed-loop slewing-voltage phase control that reduces quadr...
01/15/2008
7316161Rotation rate sensor
A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis e...
01/08/2008
7313958Rotational rate sensor
A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; ...
01/01/2008
7308827Integrated gyroscope and temperature sensor
A gyroscope and temperature sensor are formed on a single chip using SOI-MEMS technology. The temperature sensor has an array of resistors to accurately detect the temperature of the gyroscope in temperatures and conditions that can range from extreme heat to extrem...
12/18/2007
7305880Resonant micro-electro-mechanical system with analog driving
A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to the mass for maintaining the mass in oscillation at a resonance freque...
12/11/2007
7302848Force compensated comb drive
A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the...
12/04/2007
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