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| Number | Title | Issue Date |
| 8181521 | Yaw rate sensor using surface acoustic wave A yaw rate sensor has two sets of exciting electrodes, perturbative weights and two sets of detecting electrodes on a surface of a piezoelectric substrate. The exciting electrodes excite first surface acoustic waves transmitted through the surface of the substrate i... | 05/22/2012 |
| 7900512 | Angular rate sensor An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotar... | 03/08/2011 |
| 7895892 | Apparatus and method for detecting a rotation A rotation sensor has a substrate with a first surface and a second surface. A shear-wave transparent mirror is arranged on the first surface of the substrate, and a shear-wave isolator is arranged above the shear-wave transparent mirror, the shear-wave transparent ... | 03/01/2011 |
| 7874209 | Capacitive bulk acoustic wave disk gyroscopes with self-calibration The apparatus in one embodiment may have capacitive bulk acoustic wave disk gyro operated in a closed loop mode. A self-calibration system may be operatively coupled to the capacitive bulk acoustic wave disk gyroscope. Self-calibration of gyro bias of the gyro may b... | 01/25/2011 |
| 7352047 | Systems and methods for integration of heterogeneous circuit devices A heterogeneous device comprises a substrate and a plurality of heterogeneous circuit devices defined in the substrate. In embodiments, a plurality of heterogeneous circuit devices are integrated by successively masking and ion implanting the substrate. The heteroge... | 04/01/2008 |
| 7334491 | Sensor arrangement, in particular a micro-mechanical sensor arrangement A sensor array, in particular a micromechanical sensor array, and methods for manufacturing the sensor array are provided, which sensor array includes a sensor section for supplying certain sensor signals, and a cover section provided on the sensor section to form a... | 02/26/2008 |
| 7159459 | Multiple microelectromechanical (MEM) devices formed on a single substrate and sealed at different pressures and method therefor Methods and apparatus are provided forming a plurality of semiconductor devices on a single substrate, and sealing two or more of the devices at different pressures. First and second semiconductor devices, each having a cavity formed therein, are formed on the same ... | 01/09/2007 |
| 7132936 | Angular rate sensor A sensor for measuring yaw rate or roll rate of an automotive vehicle comprises a freely rotating inertial disk and an angular rate sensor responsive to the rotation of the inertial disk relative to a housing. In one embodiment the inertial disk presents an alternat... | 11/07/2006 |
| 7062403 | Rotational speed sensor comprising a vibrating gyroscope and method for equalizing the rotational speed sensor The invention relates to a rotational speed sensor including a vibrating gyroscope which is part of a primary and a secondary control circuit. The control circuit, respectively, amplifies, demodulates, remodulates an output signal of the vibrating control circuit an... | 06/13/2006 |
| 6984332 | Method for making a micro-electro-mechanical gyroscope A gyroscope comprises a piezoelectric substrate having a surface. Disposed on the surface are a resonator transducer, a pair of reflectors, a structure such as a metallic dot, and a sensor transducer. The resonator transducer creates a first surface acoustic wave on... | 01/10/2006 |
| 6952871 | Method for manufacturing printed circuit boards It consists of making a first engraving over a first face of a panel of electro-conducting material to form some reliefs and depressions corresponding to future tracks and intermediate tracks; subjecting said first face to a black oxide treatment (40); applyi... | 10/11/2005 |
| 6933808 | Microelectromechanical apparatus and methods for surface acoustic wave switching Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and... | 08/23/2005 |
| 6546798 | Micro-electro-mechanical systems resonant optical gyroscope A gyroscope is based upon the integration of an optical resonant cavity and a photodiode to detect minute perturbations due to angular forces. A Fabry-Perot cavity is created from two parallel semitransparent mirrors used in conjunction with a monochromat... | 04/15/2003 |
| 6516665 | Micro-electro-mechanical gyroscope A gyroscope comprises a piezoelectric substrate having a surface. Disposed on the surface are a resonator transducer, a pair of reflectors, a structure such as a metallic dot, and a sensor transducer. The resonator transducer creates a first surface acous... | 02/11/2003 |
| 6237414 | Elastic surface wave gyroscope An elastic surface wave gyroscope includes two transducers attached on a piezoelectric substrate to generate elastic surface waves having different frequencies on the piezoelectric substrate, and two pair of reflectors for reflecting the different elastic... | 05/29/2001 |
| 6003370 | Elastic surface wave gyroscope An elastic surface wave gyroscope includes two transducers attached on a piezoelectric substrate to generate elastic surface waves having different frequencies on the piezoelectric substrate, and two pair of reflectors for reflecting the different elastic... | 12/21/1999 |
| 5533395 | Thin film rotation sensor A diaphragm is disposed over a cavity formed in a silicon base. A plurality of electrodes are radially disposed about the diaphragm overlying the cavity, and a signal applying circuit applies a signal to the plurality of electrodes so that portions of the... | 07/09/1996 |
| 5533394 | Ferroelectric thin film travelling wave rotation sensor A diaphragm is disposed over a cavity formed in a silicon base. A plurality of electrodes are radially disposed about the diaphragm overlying the cavity, and a signal applying circuit applies a signal to the plurality of electrodes so that portions of the... | 07/09/1996 |
| 5383362 | Control for vibratory gyroscope A control circuit for a resonating rotation sensor has a pair of closed loop controls for independently controlling component traveling waves of a resonant pattern in a ring shaped resonant member. Frequency and phase quantities of the independent traveli... | 01/24/1995 |
| 5097707 | Rotation sensor A vibrating gyro operating on the principle of vibration waves traveling along a curved elastic surface transverse to the surface and being subjected to coriolis forces on rotation of the surface such as to shift the phase of the signal. The surface is pr... | 03/24/1992 |
| 5058431 | Superconducting Josephson junction gyroscope apparatus A superconducting Josephson junction gyroscope for detecting rotational motion of a vehicle about an axis. A persistent current of Cooper-paired electrons travels around a thin-film superconducting ring and the phase change across a Josephson junction in ... | 10/22/1991 |
| 4874942 | Rotation, acceleration, and gravity sensors using quantum-mechanical matter-wave interferometry with neutral atoms and molecules The invention is a neutral atom (and/or molecule) matter-wave interferometer (and/or set of interferometers) that can be used as an inertial sensor with a sensitivity exceeding that of conventional mechanical sensors and multiple circuit optical interfero... | 10/17/1989 |
| 4699005 | Apparatus for measuring angular velocity An apparatus for measuring angular velocity is provided with a microwave oscillator, closed-loop waveguide and a microwave-detector. The microwave oscillator generates microwaves and the waveguide which may employ a magic tee as a part thereof separates t... | 10/13/1987 |
| 4516427 | Quartz rate sensor A rate measuring instrument uses acoustic energy transmitted through a crystalline media (41) to sense rate. Acoustic energy travels along a path (1-31) within the crystalline media and impinges upon an output transducer (45) at an established point after... | 05/14/1985 |
| 4384409 | Surface acoustic wave gyroscope A surface acoustic wave gyroscope which detects a change in the propagation velocity of a surface acoustic wave as a function of the rotational velocity of a medium on whose surface the acoustic wave is propogated, is disclosed. In a first embodiment usin... | 05/24/1983 |
| 4167120 | Surface acoustic wave bridge for rotation measurement A surface acoustic wave bridge for rotation measurement which uses acoustic waves propagated in opposite directions about the circumference of a rotor. The acoustic waves are generated by a transducer adjacent the rotor which is excited by an rf electric ... | 09/11/1979 |
| 4126047 | Surface acoustic wave rate sensor and position indicator Extremely sensitive velocity and position measurements are achieved with a surface acoustic wave (SAW) resonator device. A surface acoustic standing wave field is established on a movable SAW propagation surface by means of induced SAW pulses traveling on... | 11/21/1978 |
| 4061040 | Apparatus for measuring rotation rates with acoustic waves A measuring apparatus for determining the rotational velocity of a solid erical or cylindrical object by propagating an acoustic wave through the object. The inward face of the surface of the object is used to reflect the wave, thereby causing it to make... | 12/06/1977 |