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| Number | Title | Issue Date |
| 8186213 | Thermal-type flowmeter The present invention provides a highly-sensitive thermal-type flow-rate sensor with enhanced reliability. Provided is a thermal-type flow-rate sensor including: a passage into which a measurement-target fluid is introduced; and a sensor element which is provided in... | 05/29/2012 |
| 8166814 | Flow sensor and manufacturing method therefor A flow sensor may be formed by bonding a sensor chip formed with a flow rate detecting part and a flow path-forming member that is provided on the sensor chip and is formed with a flow path for a fluid flowing in the flow rate detecting part to each other on the upp... | 05/01/2012 |
| 8161811 | Flow sensors having nanoscale coating for corrosion resistance A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensin... | 04/24/2012 |
| 8132455 | Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane A micromachined thermal mass flow sensor comprises a high mechanical strength polyimide film as a supporting layer of suspending membrane. The polyimide film provides superior thermal insulating properties to reduce the power consumption of device. Due to the tenden... | 03/13/2012 |
| 8069718 | Thermal flowmeter A simply configured thermal flowmeter can provide high measurement accuracy over a long period of time by suppressing the characteristics degradation due to adhering contaminants. On the surface of a diaphragm part, a heater resistor is formed. Temperature differenc... | 12/06/2011 |
| 8011240 | Flow sensor with thermocouples The flow sensor comprises a heater arranged between two sensing thermopiles. In addition, at least one monitoring thermocouple is provided for measuring the temperature of the heater. The signal from the monitoring thermocouple can be used to improve the accuracy of... | 09/06/2011 |
| 8006553 | Semiconductor sensor having heater on insulation film and manufacturing method of the same A sensor includes: a silicon substrate having a hollow portion, which is arranged on a backside of the substrate; an insulation film disposed on a front side of the substrate and covering the hollow portion; a heater disposed on the insulation film, made of a semico... | 08/30/2011 |
| 7992435 | Air flow meter In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place... | 08/09/2011 |
| 7980126 | Method for operating hot-film air-mass sensors A method is provided for operating a hot-film air-mass sensor, which can be used especially for measuring air mass flows in the intake tract of an internal combustion engine. The hot-film air-mass sensor has a sensor chip having a sensor frame and a sensor diaphragm... | 07/19/2011 |
| 7966877 | Heated hot-film air-mass sensor To determine air mass flows, especially for controlling internal combustion engines, a hot-film air-mass sensor is provided, which may be used especially for sensing air mass flows in the intake tract of an internal combustion engine. The hot-film air-mass sensor ha... | 06/28/2011 |
| 7963162 | 300° C flow sensor A measurement device, particularly an anemometric measurement device, is provided for mounting in an exhaust-gas pipe, particularly an exhaust-gas recirculation pipe. The device includes a ceramic carrier embedded in an injection-molded housing made of plastic, with... | 06/21/2011 |
| 7942053 | Air flow measuring instrument having dust particle diverting structure An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a | 05/17/2011 |
| 7905140 | Device with flow sensor for handling fluids A channel substrate containing at least one channel for a fluid is provided. A sensor substrate carrying a thermal flow sensor is arranged adjacent to the channel substrate. The flow sensor contains at least one temperature sensor and at least one heater, which are ... | 03/15/2011 |
| 7886594 | Thermal type fluid flow sensor with metal film resistor A thermal-type fluid flow sensor is provided to measure an air flow rate flowing through an air intake passage. The thermal-type fluid flow sensor includes a heating resistive element; a first temperature-measuring resistive element for detecting a temperature of th... | 02/15/2011 |
| 7878056 | Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same The current invention generally relates to Micro Electro Mechanical Systems (MEMS) thermal mass flow sensors for measuring the flow rate of a flowing fluid (gas/liquid) and the methods of manufacturing on single crystal silicon wafers. The said mass flow sensors hav... | 02/01/2011 |
| 7861586 | Hot-film air mass meter having frequency-modulated signal detection A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combu... | 01/04/2011 |
| 7823444 | Device and process for measuring the velocity of flow of a fluid using pulse signal generated based on feedback A device is provided for measuring the velocity of flow of a fluid in a respiration system and includes a first thermal sensor element (5) provided with a controllable heating element (50) and a second thermal sensor element (6). The thermal sen... | 11/02/2010 |
| 7823445 | System and method of assessing a property of a flowing fluid A fluid sensing system and method for sensing properties of a flowing fluid. The system and method entail a microfluidic device having a micromachined tube supported above a substrate, a tube passage within a freestanding portion of the tube, an inlet and outlet in ... | 11/02/2010 |
| 7797997 | Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor This invention discloses a mass flow sensor manufactured by applying the micro-electromechanical system (MEMS) process to provide a new and improved mass flow sensor that is a self-calibrated in a time-of-flight manner with configuration to measure the flow velocity... | 09/21/2010 |
| 7775104 | Thermal flowmeter in which relationship among length of heat resistor, heating temperature for the heat resistor, and power supplied to the heat resistor is prescribed To reduce power consumption by a thermal flowmeter while good flow-rate detection sensitivity is maintained, it is only necessary to reduce power consumption by a heat resistor under predetermined conditions. Specifically, provided that a width Wh of the heat resist... | 08/17/2010 |
| 7752910 | Micromachined mass flow sensor and methods of making the same A mass flow sensor is supported on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the ... | 07/13/2010 |
| 7739908 | Flow sensor element and its self-cleaning A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and these elements can form a multiple-part ceramic component. The tempera... | 06/22/2010 |
| 7721599 | Reduced resistance thermal flow measurement device Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a mate... | 05/25/2010 |
| 7703320 | Flow measuring device having resistors arranged in nesting arrangement According to a flow measuring device, first ranges formed by a first plurality of resistors form a single continuous value range on a flow direction coordinate axis. Thus, the first plurality of resistors is limited from being thermally insulated from one another in... | 04/27/2010 |
| 7673508 | Thermal type fluid flow sensor A thermal-type fluid flow sensor technology for measuring more precisely the temperature of the heater for an improved sensibility of detecting flow measurements. The thermal-type fluid flow sensor for measuring the air flow rate includes a heating resistive element... | 03/09/2010 |
| 7661304 | Heated Hsensor A method and a sensor for detecting a component, in particular H2, in a gaseous fluid containing multiple components. A measuring chamber, which accommodates a heatable measuring element, is implemented in a sensor. The measuring chamber is heated. ... | 02/16/2010 |
| 7650784 | Thermal type flow rate measuring apparatus A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit ... | 01/26/2010 |
| 7647825 | Thermal type flowmeter In the thermal type flowmeter for measuring the flow rate by a measuring element with an exothermic resistor and a temperature measuring resistor being shaped in the side of the surface of a substrate, a facing wall facing the surface of the measuring element is arr... | 01/19/2010 |
| 7644614 | Flow quantity measuring device In a flow quantity measuring device, each of upstream side and downstream side sensing resistors, which are placed on an upstream side and a downstream side, respectively, of a heating resistor, includes resistor elements, each of which forms a folded path. The fold... | 01/12/2010 |
| 7644613 | Flow detector device with self check A thermal flow sensor is equipped with a self-test unit that monitors the device and generates a fault signal in the presence of a malfunction. The self-test unit can e.g. monitor the integrity of a membrane carrying the heater and temperature sensors, or it can mon... | 01/12/2010 |
| 7640798 | Semiconductor device for detecting flow rate of fluid A semiconductor device includes: a semiconductor substrate; a flow sensor having a first heater for detecting a flow rate of fluid; and a humidity sensor for detecting a humidity of the fluid. The flow sensor and the humidity sensor are disposed on the semiconductor... | 01/05/2010 |
| 7624633 | Fluid flow sensor and fluid flow measurement device A thermal-type fluid flow sensor comprises a heating resistor formed on a thin film of a substrate, and plural thermal sensitive resistors configuring a bridge circuit. The thermal sensitive resistors are disposed on the thin film of the substrate so as to be locate... | 12/01/2009 |
| 7621180 | Flow sensor with metal film resistor There is a need for providing a flow sensor with metal film resistor that improves detection sensitivity using a metal film for a resistance heat detector and a resistance temperature detector. The flow sensor with metal film resistor is structured to form a resista... | 11/24/2009 |
| 7617723 | Thermal type flow rate measuring apparatus having decrease in coupling capacitance between wiring portions of detection element The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made... | 11/17/2009 |
| 7610803 | Robust MEMS flow die with integrated protective flow channel A MEMS flow sensor has a flow channel that avoids wire bond pads and ancillary circuit elements. A fluid can move from the bottom of the sensor substrate, though an inlet hole, over a sensing element on the top of the substrate, and then through an outlet hole. The ... | 11/03/2009 |
| 7603898 | MEMS structure for flow sensor A MEMS based flow sensor is disclosed which generally incorporate isolation between a sensing structure and the sensed media. An internal flow channel can be configured by attaching a backing structure with flow openings to the back of the sensing structure. The sen... | 10/20/2009 |
| 7574910 | Non-contact condensation detecting method and non-contact condensation detecting apparatus A disclosed detector element includes a substrate including a void, a heating unit including a heat generating electrode bridged across the void, and a temperature sensor including a temperature sensor electrode provided above the void. The heat generating electrode... | 08/18/2009 |
| 7555944 | Physical quantity sensor A highly accurate physical quantity sensor which can ensure reliability in strength and reduce resistance changes caused by stresses. Assuming, with respect to stress σ imposed on a substrate in a predetermined direction (e.g., direction in which maximum stress is ... | 07/07/2009 |
| 7536908 | Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements... | 05/26/2009 |
| 7533564 | Micro sample heating apparatus and method of making the same A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having a vertical sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation... | 05/19/2009 |
