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| Number | Title | Issue Date |
| 7971480 | Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow control... | 07/05/2011 |
| 7752909 | Flow sensor with non-contact temperature detecting means A flow sensor may include a heater for heating a partial region of the outer wall surface of a pipe forming a flow path or for heating a particular region in the pipe; and a temperature detector for measuring the temperatures of regions, the regions being on the ups... | 07/13/2010 |
| 7685875 | Fluid flow rate sensor and method of operation A fluid flow rate sensor includes a detection circuit which generates a first signal corresponding to an output voltage of a bridge circuit, and a second signal corresponding to a fluid temperature. A control module can more accurately and quickly determine the flui... | 03/30/2010 |
| 7467547 | Fluid-measuring device and fluid-measuring method A fluid-measuring device intermittently drives a heater during a measurement period and receives outputs of the lateral side temperature sensors as lateral side temperature signals upon non-driving whenever the heater stops heating during a measuring period. Then, t... | 12/23/2008 |
| 7399280 | Passive and wireless in-vivo acoustic wave flow sensor A wireless surface wave flow sensor can be utilized for monitoring the flow of fluid. Such a surface wave flow sensor can be configured to include one or more interdigital transducers and a self-heating heater formed upon a piezoelectric substrate. The interdigital ... | 07/15/2008 |
| 7373815 | Thermal type flow measuring instrument with mold casing in metal insert A thermal type air flow measuring instrument has a molded part formed by integral molding with a metal plate. A slot or opening allowing only a resin to pass through the same is formed in the metal plate in an area subjected to higher stresses. A part of the connect... | 05/20/2008 |
| 7367237 | MEMS vascular sensor A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the subst... | 05/06/2008 |
| 7302844 | Measurement element for determining a flow rate The flow rate of a fluid flowing around a measuring element is measured using a guide for guiding an electromagnetic wave along the longitudinal extension thereof and at least one electric heating element that is placed adjacent to the guide. The guide can be heated... | 12/04/2007 |
| 7304799 | Tunable optical filter with heater on a CTE-matched transparent substrate An optical device including: a glass substrate; a crystalline silicon layer bonded to the glass substrate; and a thermally tunable thin-film optical filter fabricated on top of the crystalline silicon layer. ... | 12/04/2007 |
| 7286346 | Peripheral device and electronic device A peripheral device is detachably connected to a host device and includes: an electronic component that generates heat; an electrical connector for electrically connecting the electronic component to the host device; a heat transfer device having a first end thermal... | 10/23/2007 |
| 7281423 | Characteristics adjusting apparatus of physical quantity sensing device and a thermal type air flow measuring instrument, and associated adjusting method The output characteristics of the sensing device or the control quantity of the sensing element can be adjusted by extracting an adjusting terminal in addition to a power source terminal, a ground terminal, an output terminal and the like outside a housing containin... | 10/16/2007 |
| 7240730 | Use of fiber optics in deviated flows A system to determine the mixture of fluids in the deviated section of a wellbore comprising at least one distributed temperature sensor adapted to measure the temperature profile along at least two levels of a vertical axis of the deviated section. Each distributed... | 07/10/2007 |
| 7228614 | Method of manufacturing a gas flow meter A gas flowmeter capable of reducing a secular change comprises a silicon semiconductor substrate formed with a cavity and a heat element formed above the cavity of the semiconductor substrate by way of an insulating film. The heat element is a silicon (Si) semicondu... | 06/12/2007 |
| 7228724 | Apparatus and process for sensing target gas species in semiconductor processing systems A gas detector for detecting a fluoro gas species in a gaseous environment containing same, e.g., an effluent from a semiconductor processing tool that employs corrosive fluoro species such as HF, NF3, etc. for etch cleaning. The gas detector preferably e... | 06/12/2007 |
| 7201033 | Flowmeter in-situ calibration verification system A calibration system includes a tube or other conduit, a gas source, and a computational device. The tube has an end positioned relative to a flow sensor, and is in communication with the gas source. The tube and gas source introduce calibration gas into the tube at... | 04/10/2007 |
| 7201049 | Pulsed thermistor sensor A thermistor is pulsed with energy, and a time constant of decay of temperature is calculated based on measured resistance of the thermistor over a number of known intervals. The time constant is representative of the mass air flow. The ambient air temperature may b... | 04/10/2007 |
| 7191645 | Dynamic mixed gas flowmeter A compensated flowmeter having a probe adapted to project into flowing media within a conduit. The probe includes a thermal dispersion sensor, and a compensating gas properties sensor contained within a no-flow chamber of the probe. The thermal flow sensor has activ... | 03/20/2007 |
| 7181963 | Thermal flow sensor having streamlined packaging A thermal flow sensor has a first, second and third substrate, each having a first side and a second opposite side. The first substrate is connected to the second substrate such that the second side of the first substrate abuts the first side of the second substrate... | 02/27/2007 |
| 7169601 | Microfabricated reactor An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cyc... | 01/30/2007 |
| 7140261 | Acoustic wave flow sensor An acoustic wave flow sensor is disclosed, which includes a sensor substrate and an acoustic wave diaphragm etched upon the sensor substrate, wherein mechanical stress or strain is concentrated in the acoustic wave diaphragm. One or more interdigital transducers can... | 11/28/2006 |
| 7111495 | Sensor based on surface components with capacitative coupling of the high frequency connections In a sensor on the basis of surface wave components disposed in a housing with at least one surface wave component, a fluid channel and conductors for high frequency signals, the conductors are connected to coupling capacitors with capacitive coupling surface areas ... | 09/26/2006 |
| 7096729 | Disposable fluid flow sensor A disposable fluid flow sensor is disclosed herein, which generally includes a flow channel assembly comprising a flow channel tube in association with a disposable flow channel portion. A sensor die is located approximate to a thin interface or membrane formed from... | 08/29/2006 |
| 7084778 | Ammonia flow alarm and method therefor A sensor system for monitoring cryogenic gas flow through a tube/pipe has at least one sensor coupled to the tube/piping. An alarm circuit is coupled to the sensor for receiving measurement signals from the at least one sensor and for sending an alarm signal when th... | 08/01/2006 |
| 7036369 | Thermal flow sensor having recesses in a substrate A thermal flow sensor has a first, second and third substrate, each having a first side and a second opposite side. The first substrate is connected to the second substrate such that the second side of the first substrate abuts the first side of the second substrate... | 05/02/2006 |
| 7010972 | Thermal type flow measuring instrument with mold casing in metal insert The invention is intended to improve reliability of a thermal type air flow measuring instrument employing a molded part formed by integral molding together with a metal plate. A slot or opening allowing only a resin to pass through the same is formed in the metal p... | 03/14/2006 |
| 7006883 | Production system for composite product and production method for manufacturing of same To provide a product development and manufacturing system to be used in the increasingly competitive electronic equipment market, which enables the process from product planning to design, manufacturing, and sales of a product to be performed efficiently while incor... | 02/28/2006 |
| 6997256 | Use of fiber optics in deviated flows A system to determine the mixture of fluids in the deviated section of a wellbore comprising at least one distributed temperature sensor adapted to measure the temperature profile along at least two levels of a vertical axis of the deviated section. Each distributed... | 02/14/2006 |
| 6983653 | Flow sensor having thin film portion and method for manufacturing the same A flow sensor for detecting flow of fluid includes a thin film portion. The thin film portion has a heater and a detector for detecting temperature around the heater. The heater is made of semiconductor. This flow sensor has high sensor sensitivity with low energy c... | 01/10/2006 |
| 6962077 | System and method of measuring convection induced impedance gradients to determine liquid flow rates A method and system for measuring the flow rate of a liquid or gas within a flow channel utilizing a centrally located excitation source and a plurality of sensor means. Said excitation means is comprised of a heating element coupled with an alternating current gene... | 11/08/2005 |
| 6952962 | Mobile monolithic polymer elements for flow control in microfluidic devices A cast-in-place and lithographically shaped mobile, monolithic polymer element for fluid flow control in microfluidic devices and method of manufacture. Microfluid flow control devices, or microvalves that provide for control of fluid or ionic current flow can be ma... | 10/11/2005 |
| 6948362 | Flow measurement device An improved flow measurement device is provided in a flow path for direct measurement of flow. An internal heat source solves the problem of heat transfer in conventional mass flow meters. The heat transfer associated with the internal heater forms the basis of flow... | 09/27/2005 |
| 6869425 | Temperature compensation system for regulating flow through tubing in a pump A peristaltic pump is provided with a housing, a pump head in the housing, and a receiving path defined along a housing and pump head for receiving tubing. Two spaced-apart temperature sensors are provided. One temperature sensor is located adjacent the tubing in a ... | 03/22/2005 |
| 6820481 | Mass flow sensor having an improved membrane stability A mass flow sensor is described. To improve the membrane stability of the known mass flow sensor, in particular the reoxide layer which is present in the known mass flow sensor is replaced by a thicker PECVD silicon oxide layer. The thickness of the silicon oxide la... | 11/23/2004 |
| 6804622 | Method and apparatus for non-destructive thermal inspection A method of quantitative non-destructive thermal inspection of an article having at least one internal cavity comprises the steps of inputting physical properties of the article, measuring thermal characteristics of the article, and calculating heat transfer coeffic... | 10/12/2004 |
| 6681625 | Constant-temperature-difference bidirectional flow sensor A bidirectional flow sensor (800) for automated systems includes a heater (18) which is maintained at a constant temperature above the temperature of the fluid flowing past the heater. A pair of temperature sensors (26a,26b) is located to either side of t... | 01/27/2004 |
| 6628202 | Thermal dispersion mass flow rate and liquid level switch/transmitter A thermal dispersion switch/transmitter for determining flow rate and liquid level in a non-contacting apparatus. A special preparation of one or more small spots in the outside surface of the wall of the conduit, standpipe or container enables one or mor... | 09/30/2003 |
| 6571623 | Measuring instrument with rectangular flow channel and sensors for measuring the mass of a flowing medium A measuring instrument for measuring mass of a flowing medium in which a measuring body extends across the flowing medium and has a rectangular flow channel through which the medium flows. The flow channel has a constricted inlet, a central portion with p... | 06/03/2003 |
| 6503221 | Temperature compensation system for regulating flow through tubing in a pump A peristaltic pump is provided with a housing, a pump head in the housing, and a receiving path defined along a housing and pump head for receiving tubing. Two spaced-apart temperature sensors are provided. One temperature sensor is located adjacent the t... | 01/07/2003 |
| 6474155 | Constant-temperature-difference flow sensor An integrated sensor for automated systems includes a flow sensor, a temperature sensor, and a network interface. In a particular embodiment of the invention, the flow sensor includes a temperature sensor (26) which determines the temperature of the fluid... | 11/05/2002 |
| 6453739 | Time domain measurement and control system for a hot wire air flow sensor A time domain measurement and control system for a hot wire air flow sensor is disclosed in which the air flow sensor is of the type having a resistive heating element with an input end and an output end. The control system includes a fixed frequency vari... | 09/24/2002 |
