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| Number | Title | Issue Date |
| 8166795 | Out-of-range sensor recalibration A method for resetting a calibration of a sensor operating out-of-range in a hydraulic actuation system is provided. The hydraulic actuation system includes a pump, a reservoir, a plurality of work-ports, a plurality of sensors, and a valve system, and a controller ... | 05/01/2012 |
| 8061180 | Method of valve calibration A method of calibrating an electrically actuated hydraulic valve in a system that controls the flow of hydraulic fluid to a hydraulic cylinder connected to a machine element operates automatically. The system includes an ultrasonic sensor providing an indication of ... | 11/22/2011 |
| 8056390 | Partial stroke testing with pulsed control loop Partial Stroke Testing (PST) equipment and methodologies provide PST data for one or more valves by withholding or applying power to the one or more valves for periodic time periods that increase by an incremental amount until the one or more valves partially stroke... | 11/15/2011 |
| 7950267 | Liquid propane gas injector testing system and methods Methods and systems for determining an LPG fuel output characteristic of an LPG injector. The output characteristic of the LPG can be determined by calculating a total mass of LPG injected into a canister of known volume by the injector during a plurality of open/cl... | 05/31/2011 |
| 7950266 | Method and apparatus for fluid pressure testing A method and apparatus for testing the functionality of automatic air valves positioned at high points of a pipeline system are provided. The invention generally provides a testing flange and a process for performing various fluid pressure tests to determine whether... | 05/31/2011 |
| 7621170 | Method and system for function testing a valve In a method or system for function testing of a safety valve in engineering plant, it is tested whether the safety valve travels from a normal position to a predetermined final position in a certain operating situation of the plant. A bypass the valve bypasses the s... | 11/24/2009 |
| 7584643 | Method for testing the functionality of an actuator, especially of an actuator of a safety valve In a method for testing the functionality of an actuator in an actuating system, especially for the actuator of a valve (2) in a safety-oriented circuit in which the partial stroke test method is used, where the actuator is moved briefly by its drive element ... | 09/08/2009 |
| 7562554 | Method for calibrating independent metering valves A method for calibrating a valve having a valve element movable between a flow blocking position and a flow passing position includes pressurizing fluid directed to the valve, increasing a current directed to the valve for controlling a position of the valve element... | 07/21/2009 |
| 7509831 | Method for determining a pressure that corresponds to a flow rate through a check valve The present invention accommodates differences in cracking pressures between check valves by determining a pressure on the input of a check valve that corresponds to a predetermined flow rate at the output of the check valve. A container is incrementally pressurized... | 03/31/2009 |
| 7401494 | Valve test apparatus and methods for testing a solenoid valve or a venturi valve A valve test apparatus, a solenoid valve test method and a venturi valve test method are provided. The valve test apparatus may include a gas supply unit, a solenoid valve holding unit, a first measurement unit, a venturi valve holding unit, a second measurement uni... | 07/22/2008 |
| 7372056 | LPP EUV plasma source material target delivery system An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt... | 05/13/2008 |
| 7369597 | Laser output light pulse stretcher Providing a high peak power short pulse duration gas discharge laser output pulse comprises a pulse stretcher a laser output pulse optical delay initiating optic diverting a portion of the output laser pulse into an optical delay having an optical delay path and com... | 05/06/2008 |
| 7365349 | EUV light source collector lifetime improvements An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas... | 04/29/2008 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation.... | 04/08/2008 |
| 7349760 | System and method for sensing and controlling the concentration of a chemical agent in a solution A system for measuring and controlling the concentration of a chemical agent in a solution has a reaction cell for receiving a sample, a titrant dropper for releasing one or more drops of titrant into the sample, a first photosensor for sensing disruptions of light ... | 03/25/2008 |
| 7321607 | External optics and chamber support system A gas discharge laser and method of operating same is disclosed which may comprise a gas discharge laser chamber support structure comprising a first support arm attached to a mounting table; a gas discharge laser chamber slideably engaging the first support arm; an... | 01/22/2008 |
| 7317179 | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective el... | 01/08/2008 |
| 7317536 | Spectral bandwidth metrology for high repetition rate gas discharge lasers A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicati... | 01/08/2008 |
| 7313497 | Valve monitoring method and arrangement A method and apparatus or arrangement, for monitoring the operating characteristics of valves, principally to monitor for failure of a valve. The method including measuring a pressure differential across a valve 1 and comparing the measured differential with ... | 12/25/2007 |
| 7291853 | Discharge produced plasma EUV light source An DPP EUV source is disclosed which may comprise a debris mitigation apparatus employing a metal halogen gas producing a metal halide from debris exiting the plasma. The EUV source may have a debris shield that may comprise a plurality of curvilinear shield members... | 11/06/2007 |
| 7286945 | Apparatus and method for identifying possible defect indicators for a valve A method, apparatus, and computer program are provided for identifying possible indicators of a defective valve. The method, apparatus, and computer program decompose a signal having a plurality of process variable measurements into a plurality of resolution levels.... | 10/23/2007 |
| 7283894 | System and method for fluid regulation Systems and processes for fluid regulation may provide diagnostic information that is useful for evaluating the condition and/or needed repairs/maintenance for fluid regulation systems. In particular implementations, a system and process for fluid regulation may inc... | 10/16/2007 |
| 7277188 | Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the ... | 10/02/2007 |
| 7277464 | Method and apparatus for controlling the output of a gas discharge laser system The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine. ... | 10/02/2007 |
| 7230964 | Lithography laser with beam delivery and beam pointing control The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source with a beam delivery to a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam ... | 06/12/2007 |
| 7217941 | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an arrangement for generating a magnetic field to deflect ions into one ... | 05/15/2007 |
| 7218661 | Line selected Ftwo chamber laser system An injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or greater. Two separate discharge chambers are provided, one of which is a pa... | 05/15/2007 |
| 7210500 | Methods and apparatus for mechanically adjusting a null offset in a torque motor of a servovalve A servovalve assembly includes a motor having a flapper shaft. A flapper couples to a first end of the flapper shaft such that the flapper shaft orients the flapper between a first nozzle and a second nozzle of the servovalve assembly. An adjustment assembly adjusts... | 05/01/2007 |
| 7209507 | Method and apparatus for controlling the output of a gas discharge MOPA laser system A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a... | 04/24/2007 |
| 7204185 | Hydraulic system having a pressure compensator A hydraulic system having a source of pressurized fluid and a fluid actuator with a first chamber and a second chamber. The hydraulic system also has a first valve configured to selectively fluidly communicate the source with the first chamber and a second valve con... | 04/17/2007 |
| 7203216 | Timing control for two-chamber gas discharge laser system Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to... | 04/10/2007 |
| 7197950 | System for temperature-controlled testing of hydraulically actuated devices A temperature controlled hydraulic fluid supply circuit (12) includes a first hydraulic fluid reservoir (18), that has an initial hydraulic fluid (20), and a temperature controlled housing (45). A second hydraulic fluid reservoir (26 | 04/03/2007 |
| 7196342 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a... | 03/27/2007 |
| 7190707 | Gas discharge laser light source beam delivery unit A beam delivery unit and method of delivering a laser beam from a laser light source for excimer or molecular fluorine gas discharge laser systems in the DUV and smaller wavelengths is disclosed, which may comprise: a beam delivery enclosure defining an output laser... | 03/13/2007 |
| 7180083 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation system and method is disclosed which may comprise a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interac... | 02/20/2007 |
| 7167499 | Very high energy, high stability gas discharge laser surface treatment system A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in the substrate of a workpiece is disclosed which may comprise, a multichamber laser system comprising, a first laser unit comprising, a fi... | 01/23/2007 |
| 7154928 | Laser output beam wavefront splitter for bandwidth spectrum control Apparatus/method providing bandwidth control in narrow band short pulse duration gas discharge laser output light pulse beam producing systems, producing a beam comprising pulses at selected pulse repetition races, e.g., comprising a dispersive bandwidth selection o... | 12/26/2006 |
| 7146844 | Apparatus and method for testing hydraulic pressure relief valves An apparatus for testing hydraulic pressure relief valves has a fixture body with an internal cavity sized to receive the valve completely within the fixture body. A closure may be secured to the body to seal the valve within the cavity. The apparatus further includ... | 12/12/2006 |
| 7141806 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation method and apparatus for a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interaction with materials creat... | 11/28/2006 |
| 7139301 | Laser spectral engineering for lithographic process An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum neede... | 11/21/2006 |
