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| Number | Title | Issue Date |
| 7401972 | On chip dilution system An on-chip chemical compound dilution system for providing dilution of a chemical compound in a microfluidic application includes at least one sample well for providing a selected chemical compound to be diluted, a dilution well for providing a diluent for diluting ... | 07/22/2008 |
| 7361509 | Dynamic metered fluid volume determination method and related apparatus A method for dynamically determining the volume of a liquid dispensed by a metering system, the metering system including a metering pump, a pump motor, a sensor, and a conduit interconnecting the pump and a metering probe. The method includes the steps of aspiratin... | 04/22/2008 |
| 7349760 | System and method for sensing and controlling the concentration of a chemical agent in a solution A system for measuring and controlling the concentration of a chemical agent in a solution has a reaction cell for receiving a sample, a titrant dropper for releasing one or more drops of titrant into the sample, a first photosensor for sensing disruptions of light ... | 03/25/2008 |
| 7325440 | Hole inspection system for a pierced container A hole inspection system for a pierced container 1 for inspecting an outwardly opened hole 1a formed in a flexible container 1 for performing a proper inspection for the size of the hole 1a of the flexible pierced container 1 | 02/05/2008 |
| 7318336 | Methods for controlling one or more parameters of a flow cytometer type measurement system Various methods for controlling one or more parameters of a flow cytometer type measurement system are provided. One embodiment includes monitoring parameter(s) of the measurement system during measurements of sample microspheres. The method also includes altering t... | 01/15/2008 |
| 7294823 | System and method for detecting a position of a movable element A system and a method detect a position of a movable element within an interior of a compartment. The interior of the compartment has a light source, a light sensor, a base, a support and/or a movable element. The base is located between and/or is connected to the l... | 11/13/2007 |
| 7266467 | Method to calibrate hydraulic flow valves in situ A method for performing system characterization in situ for a system comprising a actuator controlled by a proportional controller. The system includes a quasi-linear region characterized by a slope of the system response and by a delay in the quasi-linear region of... | 09/04/2007 |
| 7254993 | Device for measuring time-resolved volumetric flow processes The invention relates to a device for measuring time-resolved volumetric throughflow processes, especially injection process in internal combustion engines, having a translational volume difference sensor having a piston disposed in a measuring compartment and a det... | 08/14/2007 |
| 7211144 | Pulsed nucleation deposition of tungsten layers A method of forming a tungsten nucleation layer using a sequential deposition process. The tungsten nucleation layer is formed by reacting pulses of a tungsten-containing precursor and a reducing gas in a process chamber to deposit tungsten on the substrate. Thereaf... | 05/01/2007 |
| 7201803 | Valve control system for atomic layer deposition chamber A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication wi... | 04/10/2007 |
| 7177725 | System for the monitor and control of rest rooms The present invention is directed to a rest room control system including one or more sensors configured to monitor or control a function associated with the rest room. The system also includes a controller operably coupled to the one or more sensors, and configured... | 02/13/2007 |
| 7171847 | Method and device for measuring the injection rate of an injection valve for liquids A method for measuring the injection rate of an injection valve for liquids, preferably for liquid fuel, in which the injection valve injects the liquid into a liquid-filled measurement volume, the measurement volume being closed off on all sides and a pressure sens... | 02/06/2007 |
| 7174263 | External volume insensitive flow verification A flow verifier for in-situ verification of a device under test (DUT), including an inlet connectable to a DUT, an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier, a vessel having a predetermined volume, diffusive media conn... | 02/06/2007 |
| 7162355 | Constituent parts assembling method for an actuating apparatus A constituent parts assembling method for an actuating apparatus includes a step of assigning ID classification to each of constituent parts with reference to characteristics difference of respective parts when these constituent parts give influence to output charac... | 01/09/2007 |
| 7155319 | Closed loop control on liquid delivery system ECP slim cell A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO) signal based on a setpoint and a deadband. The setpoint is a target ... | 12/26/2006 |
| 7114368 | Apparatus and method for verifying the volume of liquid dispensed by a liquid-dispensing mechanism An apparatus for improving the procedure for quantifying the volume of liquid dispensed by a liquid-dispensing mechanism of an analytical instrument. The apparatus of this invention comprises (a) at least one weigh cup; (b) at least one standard mass; (c) at least o... | 10/03/2006 |
| 7114669 | Methods of operating a liquid vaporizer The present invention is generally directed to a vaporizer with positive liquid shut-off. In one illustrative embodiment, the vaporizer is comprised of a body, a liquid inlet and a carrier gas inlet coupled to the body, a nozzle positioned within the body, the nozzl... | 10/03/2006 |
| 7101795 | Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer A method and system to form a refractory metal layer on a substrate features nucleating a substrate using sequential deposition techniques in which the substrate is serially exposed to first and second reactive gases followed by forming a layer, employing vapor depo... | 09/05/2006 |
| 7089789 | System for calibrating an integrated injection nozzle and injection pump A fuel injection system (18) is calibrated as an assembled system. The fuel injection system (18) includes a unit pump (10) a cam follower (24), a joined fuel injection line (14) and injection nozzle (16). The fuel injection... | 08/15/2006 |
| 7085616 | Atomic layer deposition apparatus A method and apparatus for atomic layer deposition (ALD) is described. The apparatus comprises a deposition chamber and a wafer support. The deposition chamber is divided into two or more deposition regions that are integrally connected one to another. The wafer sup... | 08/01/2006 |
| 7076330 | Fraud detection through flow rate analysis A fraud detection system within a fuel dispenser includes the ability to measure the amount of fuel dispensed through the fuel dispenser. The measurement is compared to a value independently created representing what the amount of fuel dispensed should approximate. ... | 07/11/2006 |
| 7062975 | Sensor with data storage medium A sensor assembly including a sensor and a data storage medium, on which the specific data of the sensor, such as type, measurement range, calibration date, serial number, manufacturer, etc. are stored. The data may be directly transmitted from the data storage medi... | 06/20/2006 |
| 7029928 | Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber A method of preventing the scrapping of semiconductor substrates due to improper deposition of thin films in a thin film vaporization system is disclosed. This is accomplished by providing a method of self-calibrating and testing the flow of liquid precursors in the... | 04/18/2006 |
| 7022948 | Chamber for uniform substrate heating Embodiments of the invention generally provide an apparatus and a method for providing a uniform thermal profile to a plurality of substrates during heat processing. In one embodiment, a cassette containing one or more heated substrate supports is moveably disposed ... | 04/04/2006 |
| 7017406 | Pump testing system A pump testing apparatus is disclosed for testing output characteristics of a fluid flow exiting a pump. The apparatus includes a flow testing structure for testing characteristics of the fluid flow, a first chamber having an interior for receiving a fluid flow exit... | 03/28/2006 |
| 7000450 | Method, computer program and device for measuring the injection quantity of injection nozzles, especially for motor vehicles In a method for measuring the injection quantity of injection systems, in particular for motor vehicles and in particular in production testing, an injection system injects a testing fluid into a measuring chamber. A detection device detects a movement of a piston, ... | 02/21/2006 |
| 6998014 | Apparatus and method for plasma assisted deposition Embodiments of the present invention relate to an apparatus and method of plasma assisted deposition by generation of a plasma adjacent a processing region. One embodiment of the apparatus comprises a substrate processing chamber including a top shower plate, a powe... | 02/14/2006 |
| 6997403 | Liquid vaporizer with positive liquid shut-off The present invention is generally directed to a vaporizer with positive liquid shut-off. In one illustrative embodiment, the vaporizer is comprised of a body, a liquid inlet and a carrier gas inlet coupled to the body, a nozzle positioned within the body, the nozzl... | 02/14/2006 |
| 6998579 | Chamber for uniform substrate heating In a first aspect, a first apparatus is provided for heating substrates. The first apparatus includes (1) a chamber having a bottom portion and a top portion; (2) a plurality of heated supports disposed within the chamber to support at least two substrates thereon; ... | 02/14/2006 |
| 6983636 | Apparatus and method for assessing the liquid flow performances through a small dispensing orifice A universal calibration apparatus and method to estimate the dispense output from a low volume, non-contact, liquid dispensing systems that may be applied for every hardware configuration (e.g., tube length, orifice diameter, tip design, etc), reagent solution prope... | 01/10/2006 |
| 6955072 | System and method for in-situ flow verification and calibration A system and method for in-situ verification and calibration of flow control devices includes a first network physical layer connecting the flow control devices to a flow verification device. A controller of the flow verification device is programmed to communicate ... | 10/18/2005 |
| 6951804 | Formation of a tantalum-nitride layer A method of forming a tantalum-nitride layer (204) for integrated circuit fabrication is disclosed. Alternating or co-reacting pulses of a tantalum containing precursor and a nitrogen containing precursor are provided to a chamber (100) to form layers ... | 10/04/2005 |
| 6943518 | Technique for calibrating a current control circuit A technique for calibrating a current control circuit includes a number of steps. One step includes setting a conduction time of a low-side switch, which is coupled between a low-side of the load and ground, to provide a desired load current to a load. Another step ... | 09/13/2005 |
| 6938455 | Grease supply confirming device and method A grease supply confirming device confirming the supply of a grease into a bearing, according to the present invention includes a detecting member an elastic supporting member and a movable body. The movable body such as a metal spherical body is movably provided in... | 09/06/2005 |
| 6936906 | Integration of barrier layer and seed layer The present invention generally relates to filling of a feature by depositing a barrier layer, depositing a seed layer over the barrier layer, and depositing a conductive layer over the seed layer. In one embodiment, the seed layer comprises a copper alloy seed laye... | 08/30/2005 |
| 6916398 | Gas delivery apparatus and method for atomic layer deposition One embodiment of the gas delivery assembly comprises a covering member having an expanding channel at a central portion of the covering member and having a bottom surface extending from the expanding channel to a peripheral portion of the covering member. One or mo... | 07/12/2005 |
| 6911391 | Integration of titanium and titanium nitride layers Embodiments of the present invention generally relate to an apparatus and method of integration of titanium and titanium nitride layers. One embodiment includes providing one or more cycles of a first set of compounds, providing one or more cycles of a second set of... | 06/28/2005 |
| 6860138 | Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber A method of preventing the scrapping of semiconductor substrates due to improper deposition of thin films in a thin film vaporization system is disclosed. This is accomplished by providing a method of self-calibrating and testing the flow of liquid precursors in the... | 03/01/2005 |
| 6859759 | Method and apparatus for monitoring catalyst requirements of a fluid catalytic cracking catalyst injection system A method and apparatus for monitoring catalyst requirements of a fluid catalytic cracking catalyst injection system is provided. In one embodiment, a method for monitoring catalyst requirements of a fluid catalytic cracking catalyst injection system includes the ste... | 02/22/2005 |
| 6826947 | Calibration process for the mobile spring of a solenoid valve Process for calibration of the mobile core spring of a solenoid valve comprising an electromagnet subassembly associated with a pneumatic switching subassembly with a valve plug, the valve plug being moved in the body of the pneumatic switching subassembly firstly b... | 12/07/2004 |
