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| Number | Title | Issue Date |
| 5481475 | Method of semiconductor device representation for fast and inexpensive simulations of semiconductor device manufacturing processes A data structure is used in semiconductor process integration studies for manufacture of device structures, where one dimension of the data structure is used to represent each film layer in the device and one or two additional dimensions represent vertica... | 01/02/1996 |
| 5450568 | Program generation method for solving differential equations using mesh variables and staggered variables A program generating method for automatically generating a program used in a simulation of a physical phenomenon by using computers, wherein inputted information such as the shape of a domain where the physical phenomenon such as that in a fluid takes pla... | 09/12/1995 |
| 5446649 | Data-hiding and skew scan for unioning of shapes in electron beam lithography post-processing A process and system for developing control signals for an electron beam lithography tool uses Cartesian and modified Cartesian processing of data representing edges of a pattern to be formed. Non-Cartesian data is masked by the generation of least enclos... | 08/29/1995 |
| 5442569 | Method and apparatus for system characterization and analysis using finite element methods A method and apparatus for analyzing and producing systems based upon finite element modeling and partial differential equations is presented. The apparatus includes the capability for parallel processing and decomposition of a model into parts. The metho... | 08/15/1995 |
| 5438526 | Program generation method for particles simulation A generation method of particle simulation programs includes a translation and discretization process of equation of motion of particles for recognizing attributes of a space and particles based on information of the particle simulation to generate expres... | 08/01/1995 |
| 5428559 | Predictive control method and apparatus This invention relates to a predictive control method and apparatus for controlling a nonlinearly controlled object, such as a manipulator. The method and apparatus can control an object having unknown dynamic characteristics and can compensate for distur... | 06/27/1995 |
| 5416729 | Generalized solids modeling for three-dimensional topography simulation A topography simulator using a "Generalized Solid Modeling (GSM) method" to simulate isotropic or anisotropic deposition and etch process steps on a workpiece. A solids modeling system that utilizes a boundary representation model for representing materia... | 05/16/1995 |
| 5408638 | Method of generating partial differential equations for simulation, simulation method, and method of generating simulation programs Guidances are provided for database retrieval in a numerical simulation system. A user can execute numerical simulation without knowledge of mathematical and numerical techniques. A physical model is generated using information of a region shape, material... | 04/18/1995 |
| 5386374 | Method for simulating the surface contours of a layer material to be formed over a base structure An improved method for simulating the surface contours of a layer of material to be formed over a base structure using a string algorithm is described. The method of the string algorithm includes the steps of defining old surface points along the base str... | 01/31/1995 |
| 5379233 | Method and structure for improving patterning design for processing A method of interactive feedback in semiconductor processing is provided which compensates for lithographic proximity effects, reactive ion etch loading effects, electromigration and stress due to layering.... | 01/03/1995 |
| 5379225 | Method for efficient calculation of vertex movement for three-dimensional topography simulation A method for efficient calculation of the movement of a vertex in a three-dimensional topography simulator. The method is particularly well suited for calculating vertex movement for cases in which an etch/deposition rate depends on the angle between the ... | 01/03/1995 |
| 5377118 | Method for accurate calculation of vertex movement for three-dimensional topography simulation A method for accurately calculating the movement of a vertex in a three-dimensional (3-D) topography simulator. The method is particularly suited for calculating vertex movement for cases in which etch/deposition rate depends on the angle between the surf... | 12/27/1994 |
| 5315537 | Automated quadrilateral surface discretization method and apparatus usable to generate mesh in a finite element analysis system An automatic quadrilateral surface discretization method and apparatus is provided for automatically discretizing a geometric region without decomposing the region. The automated quadrilateral surface discretization method and apparatus automatically gene... | 05/24/1994 |
| 5307296 | Semiconductor workpiece topography prediction method A method of predicting the topography of a semiconductor workpiece after a plurality of manufacturing processes, such as etching and film deposition, are carried out on the workpiece includes establishing a desired topography for a semiconductor workpiece... | 04/26/1994 |
| 5301118 | Monte carlo simulation design methodology A two-stage Monte Carlo method of tolerancing components of an assembly is provided. Statistical measures of component features are not time invariant, but change over a production run. That is, the mean value of component feature measures and the standar... | 04/05/1994 |
| 5283746 | Manufacturing adjustment during article fabrication The use of neural networks has been employed to adjust processing during the fabrication of articles. For example, in the production of photolithographic masks by electron beam irradiation of a mask blank in a desired pattern, electrons scattered from the... | 02/01/1994 |
| 5282140 | Particle flux shadowing for three-dimensional topography simulation In a three-dimensional (3-D) topography simulator, a method for removing sources of particle flux because of neighboring topology, for a point on a workpiece undergoing a deposition or etch process step. The method is practiced in a Generalized Solids Mod... | 01/25/1994 |
| 5265040 | Method and device for displaying information on simulation result in a numerical simulation system In a numerical simulation system, a method for displaying information includes the steps of generating output data of values which are dependent on at least one of coefficients and constants of a discretization equation at each mesh point, based on positi... | 11/23/1993 |
| 5148379 | Method for automatically generating a simulation program for a physical phenomenon governed by a partial differential equation, with simplified input procedure and debug procedure The entry of a problem describing program is assisted by a database or a display screen. An error in numerical calculation of the input problem describing program is automatically checked. A simulation program which interrupts the execution of a process r... | 09/15/1992 |
| 5125038 | Face and edge trim method for an automatic mesh generation system A method is described for producing a mesh of finite elements that are entirely within a body to be analyzed, the body exhibiting edges and surfaces. The method comprises the steps of: producing an initial mesh of elements for the body, each element havin... | 06/23/1992 |
| 5103415 | Computer-simulation technique for numerical analysis of semiconductor devices A method of computing an internal potential distribution of a semiconductor device is disclosed which includes an electrically floating semiconductor layer as a floating potential region, thereby evaluating the breakdown voltage characteristic of the devi... | 04/07/1992 |
| 5070469 | Topography simulation method A topography simulation method for simulating a surface topography of a material object material while a surface of material object is being processed, as by etching or a deposition, includes the steps of dividing a region to be analyzed, in a surface inc... | 12/03/1991 |
| 5067101 | Topography simulation method A topography simulation method enables estimation of the three-dimensional shape of a surface of a workpiece where material removal by a predetermined process takes place. This simulation method includes the steps of dividing a region of the workpiece to ... | 11/19/1991 |
| 5029119 | Program generation method A program generation method for generating a program which performs numerical simulation on a computer for a physical phenomenon by entering, to the computer, shape information of a spatial region in which the physical phenomenon takes place, conditions o... | 07/02/1991 |
| 4989166 | Method for synthesizing analysis model and flow analysis system The present invention is applied to the design of a mold for a semiconductor or the like and provides a method for synthesizing analysis models, in which analysis programs corresponding to shapes and features of an object to be analyzed are registered in ... | 01/29/1991 |
| 4972334 | Automatic generation method of a simulation program for numerically solving a partial differential equation according to a boundary-fitted method A method is provided for automatically generating a simulation program which numerically solves a partial differential equation which governs a physical quantity in a non-rectangular real space domain. The real partial differential equation is solved acco... | 11/20/1990 |
| 4941114 | Triangular mesh generation method A triangular mesh generation apparatus has a feedback rate calculation unit and a triangular mesh generation unit. The feedback rate calculation unit obtains feedback rate ri for a given node i from the following relationship: ##EQU1## ... | 07/10/1990 |
| 4933889 | Method for fine decomposition in finite element mesh generation A method for fine decomposition in finite element mesh generation, in which a polygonal boundary of a domain is input into the system by an analyst and the domain is automatically divided into rough elements generally corresponding to Voronoi regions, tha... | 06/12/1990 |
| 4912664 | Method and apparatus for generating a mesh for finite element analysis The method of mesh generation comprises a two-step automatic process that requires no user input once a geometric representation of the object has been provided to the apparatus. In the method, the object geometry is first defined in terms of object (subd... | 03/27/1990 |
| 4866663 | Simulation system An interactive simulation system in which a complex system is simulated by means of a plurality of function modules, each defining a predetermined mathematical operation, are enabled to be processed by an executive program in an order defined by an operat... | 09/12/1989 |
| 4841479 | Method for preparing a simulation program A method for automatically generating by use of a computer a simulation program for simulating a phenomenon in a region by discretizing automatically data of a partial differential equation inputted when the partial differential equation and boundary cond... | 06/20/1989 |
| 4819161 | Method of automatic generation of a computer for numerical simulation of physical phenomenon The partial differential equations inputted with respect to an unknown quantity A are processed according to the finite element method in which simultaneous first-order equations equivalent to the partial differential equations are obtained, and then a ma... | 04/04/1989 |
| 4797842 | Method of generating finite elements using the symmetric axis transform A method, amenable to automation, for generating finite elements of a geometric model. The model is first subdivided into coarse subdomains and then the coarse subdomains are further subdivided. The coarse subdivision is performed using a symmetric axis t... | 01/10/1989 |
| 4677587 | Program simulation system including means for ensuring interactive enforcement of constraints An interactive simulation system for simulating an analog or a digital system defined by mathematical model representing the operation of the system. The mathematical model is represented by a network of function blocks specified by an operator, each func... | 06/30/1987 |
| 4493745 | Optical emission spectroscopy end point detection in plasma etching A method for etching a batch of semiconductor wafers to end point using optical emission spectroscopy is described. The method is applicable to any form of dry plasma etching which produces an emission species capable of being monitored. In a preferred em... | 01/15/1985 |
