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Class 702/95 - Coordinate positioning


Subclass of Class 702 - Data processing: measuring, calibrating, or testing
Definition: Subject matter comprising means for determining or correcting
No. of patents: 358
Last issue date: 04/10/2012


1                  
NumberTitleIssue Date
8155910Robotically controlled catheter and method of its calibration
A method of calibrating a robotic device, such as a cardiac catheter, includes oscillating the device on an actuation axis by applying an oscillation vector at an oscillation frequency. While oscillating, a location of the device is periodically measured to generate...
04/10/2012
8145446Portable coordinate measurement machine with integrated line laser scanner
A portable coordinate measurement machine for measuring the position of an object in a selected volume includes a positionable articulated arm having a plurality of jointed arm segments. The arm includes a measurement probe having an integrated line laser scanner mo...
03/27/2012
8140287Dimensional measurement probe
A probe for measuring the dimensions of objects on a coordinate positioning machine such as a machine tool has a workpiece-contacting stylus. This is suspended via a sensor mechanism, including strain gauges which provide an output when the stylus contacts a workpie...
03/20/2012
8121805Method and system for determining locations of moving objects with maximum length sequences
A location of an object is determined by arranging a sequence of bits on a substrate. The sequence of bits includes subsequence of bits, and each subsequence of bits is unique for each location along the substrate. When the object is at a particular location along t...
02/21/2012
8108172Defect review apparatus and method of reviewing defects
A review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a ...
01/31/2012
8065104Method for determining and correcting incorrect orientations and offsets of the sensors of an inertial measurement unit in a land vehicle
An inertial measurement unit (IMU) contains three linear acceleration sensors and three rotational speed sensors. For the sensors there are desired installation directions parallel to the co-ordinate axes of a Cartesian co-ordinate system which is fixed to the vehic...
11/22/2011
8036845Method of correcting coordinates, and defect review apparatus
The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to t...
10/11/2011
8010307In-line overlay measurement using charged particle beam system
A method and system for controlling an overlay shift on an integrated circuit is disclosed. The method and system comprises utilizing a scanning electron microscope (SEM) to measure the overlay shift between a first mask and a second mask of the circuit after a seco...
08/30/2011
7983868Fitting measured data points to tolerance zones having regard for the uncertainty of the measurements
Measurement data collected within a measurement frame of reference is fitted to geometric tolerance zones having regard for the uncertainties of the measurement. Geometric freedoms for fitting the measurement data are exploited to fit uncertainty zones associated wi...
07/19/2011
7974804Registration detection system
A registration detection system realizes both substrate-by-substrate correction and highly accurate correction of an exposure process. Therefore, the registration detection system includes: the first detection apparatus installed on a pathway to a collection in a tr...
07/05/2011
7930125System and method for positioning a coordinate system in relation to a workpiece on a measurement machine
A computer-implemented method for positioning a coordinate system in relation to a workpiece receives positioning elements including feature elements selected from the workpiece. A normal vector of a first axis, an origin, a normal vector of a second axis are determ...
04/19/2011
7920982Optical distortion calibration for electro-optical sensors
Optical distortion calibration for an Electro-Optical sensor in a chamber eliminates calibration of the mirror controller and allows for calibration while the target is in motion across the FOV thus providing a more efficient and accurate calibration. A target patte...
04/05/2011
7885777Probe calibration
A method of calibrating a probe is disclosed said probe being mounted on a machine and having a stylus with a workpiece contacting tip, comprising calculating calibration information for the probe for a first orientation of the probe, and rotating the calibration in...
02/08/2011
7881896Portable coordinate measurement machine with integrated line laser scanner
A portable coordinate measurement machine for measuring the position of an object in a selected volume comprises includes an a positionable articulated arm having a plurality of jointed arm segments. The arm includes a measurement probe having an integrated line las...
02/01/2011
7869970Probe straightness measuring method
A probe straightness measuring method includes: placing a measurement jig having a measurement reference surface with a known profile error on a stage surface of an XY stage so that the measurement reference surface is slanted in a moving direction of the XY stage; ...
01/11/2011
7869969Defect review apparatus and method of reviewing defects
A defect review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to opti...
01/11/2011
7856334Method for calibrating a laser-based spherical coordinate measurement system by a mechanical harmonic oscillator
A method is disclosed whereby a laser-based spherical coordinate measurement system is dynamically calibrated. A mechanical oscillator, such as, but not limited to, a Foucault pendulum is used to generate periodic motions which can be fitted to Fourier series models...
12/21/2010
7840367Multi-modality inspection system
An inspection artifact includes a central portion and multiple optical and coordinate measurement machine (CMM) alignment features arranged on the central portion. The optical and CMM alignment features are configured to align the coordinates for an optical or a CMM...
11/23/2010
7792654Dimensional measurement probe
A probe for measuring the dimensions of objects on a coordinate positioning machine such as a machine tool has a workpiece-contacting stylus 20. This is suspended via a sensor mechanism 30, including strain gauges 34 which provide an output when...
09/07/2010
7783445Method of path planning
A method for planning the trajectory of an apparatus, such as an articulating probe head, mounted on a coordinate positioning apparatus, such as a CMM. It is determined whether for a given trajectory, the angular velocity or acceleration of the apparatus about a rot...
08/24/2010
7769556Method for correcting measuring errors caused by the lens distortion of an objective
A method for correcting the measuring errors caused by the lens distortion of an objective in a coordinate measuring machine is disclosed. For a plurality of different types of structures, the lens distortion caused by an objective is determined in an image field of...
08/03/2010
7761252Method and apparatus for optical chassis measurement
Optical chassis measurement of motor vehicles is carried out by a measuring arrangement equipped with at least one measuring device, in which one or more image capturing devices associated with one another in terms of their position and location record the surface g...
07/20/2010
7752001Method of correcting coordinates, and defect review apparatus
The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to t...
07/06/2010
7734438Method for determining correction values for correcting positional measurement errors in a machine having at least one translational axis of movement
In a coordinate measuring machine or any other kind of machine having at least one translational movement axis, correction values are determined by moving the mobile head of the machine along a defined path of movement. First and second position data are recorded by...
06/08/2010
7715999Surface texture measuring instrument
A surface texture measuring instrument includes: a movement-estimating unit for estimating a movement condition of a drive mechanism based on a scanning vector command issued by a scanning vector commander to calculate an estimated operation state quantity; and a co...
05/11/2010
7702477Calibration method and calibration device for a surgical referencing unit
A calibration method and also a calibration device are proposed to enable a spatial position and/or orientation of a surgical referencing unit of a surgical navigation system fitted with at least one inertial sensor to be specified in relation to a spatial coordinat...
04/20/2010
7698083Control apparatus and method that compensates for disturbance signals of a sensor
A control apparatus configured to generate correction values for compensation of disturbance signals of a sensor includes a control loop having an input to receive input values. The control loop includes circuitry configured to receive the input values and configure...
04/13/2010
7680616Method for correcting an error of the imaging system of a coordinate measuring machine
A method for correcting an error of the imaging system of a coordinate measuring machine is disclosed. The position of at least two different edges of at least one structure on a substrate is measured. The substrate may be automatically rotated into another orientat...
03/16/2010
7672801Gridlock processing method
Targets are sensed by a first sensor in a first coordinate system and by a second sensor in a second coordinate system. Gridlock or congruence between the coordinate systems is achieved by sensing at least four targets with both sensors. Pseudomeasurements are gener...
03/02/2010
7668678Calibration of a Metrological apparatus
A metrological apparatus has a driver (33) that effects relative movement between a support (4) and a measurement probe (8) carriage (7) in a first direction (X) to cause the measurement probe (8) to traverse a measurement path alo...
02/23/2010
7660688Surface-profile measuring instrument
A surface-profile measuring instrument includes a movement-estimating unit that estimates a movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit to calculate an estimated movement state quantity...
02/09/2010
7650252Inclinometer measurement system and method providing correction for movement induced acceleration errors
A system and a method sense the inclination of a machine element, such as a platform, and eliminate tangential and radial acceleration errors. The platform defines orthogonal X and Y axes, and is rotatable about a Z axis. An inclinometer, mounted on the platform at ...
01/19/2010
7640129Information processing apparatus and information processing method
A calibration information calculation unit (540) calculates a plurality of candidates of first coordinate transformation information using a plurality of candidates of second coordinate transformation information, a sensor measured value, and the position and...
12/29/2009
7610162Method and machine for determining a space coordinate of a measurement point on a measurement object
A measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports. An actual difference value between the displacement positions of a first and a second support is determined. A static difference value representing...
10/27/2009
7519493Portable coordinate measurement machine with integrated line laser scanner
A portable coordinate measurement machine for measuring the position of an object in a selected volume comprises includes an a positionable articulated arm having a plurality of jointed arm segments. The arm includes a measurement probe having an integrated line las...
04/14/2009
7474978High dynamic range optical receiver
An optical receiver having a photodetector, amplifier, feedback loop, and output circuit is disclosed. The photodetector generates a current between first and second nodes in response to being illuminated with light. The amplifier has an input connected to the first...
01/06/2009
7437255Method and system for calibrating triaxial acceleration sensors
A method for calibrating a sensor includes providing a fixture that defines a first coordinate system, providing a chassis, and orienting a plurality of sensor elements to form a misaligned coordinate system, wherein the misaligned coordinate system axes are oriente...
10/14/2008
7433798Solid state orientation sensor with 360 degree measurement capability
A solid state inclinometer sensor system includes a digital network of devices. Each device of the network includes a solid state inclinometer attached to a mounting structure. The inclinometer includes gravity sensors and a processor. The gravity sensors are mounte...
10/07/2008
7426451Handheld surface coordinate measuring device
A surface coordinate measuring device (1) includes a computing unit (8) arranged in a handheld housing (9), a positioning device (2) for positioning the coordinate measuring device at a surface point (P) on a wall surface (3), a di...
09/16/2008
7400992Fitting multidimensional measurement data to tolerance zones having regard for the uncertainty of the measurements
Measurement data collected within a measurement frame of reference is fitted to geometric tolerance zones having regard for the uncertainties of the measurement. Geometric freedoms for fitting the measurement data are exploited to fit uncertainty zones associated wi...
07/15/2008
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