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| Number | Title | Issue Date |
| 8175831 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers Various methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers are provided. One method for creating a dynamic sampling scheme for a process during which measurements are performed on ... | 05/08/2012 |
| 8117001 | Measurement system for correcting overlay measurement error A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a tech... | 02/14/2012 |
| 7996170 | System and method for sorting data A method and apparatus that enables a user to sort data from one or more sample lots, which may be obtained via a network, such as the Internet, into a composite parameter structure. The composite parameter structure is a function of one or more parameters correspon... | 08/09/2011 |
| 7983866 | Device testing system and test data obtaining method A device testing system includes a detecting module, a data determining module, an address processing module, and a data obtaining module. The detecting module detects if the device testing system has been successfully connected with a device to be tested. The data ... | 07/19/2011 |
| 7974802 | Photomask image inspection A method optimizes photomask inspection. After masks are manufactured, the method predicts the likelihood that the masks will be defect free based on defect criteria, etch area, etch mode, and etch tool type associated with the masks. The method skips an initial mas... | 07/05/2011 |
| 7957925 | Eddy current detection and compensation A distortion compensation method includes determining an undisturbed phase for at least one of a first position indication signal and a second position indication signal. The method includes determining an undisturbed ratio that relates the amplitude of the first po... | 06/07/2011 |
| 7930123 | Method, apparatus, and computer readable medium for evaluating a sampling inspection A method for evaluating a sampling inspection. The method includes determining a first and a second sampling plan, and obtaining a first and a second measured value of a production lot based on the first and the second sampling plans, respectively. The method also i... | 04/19/2011 |
| 7908105 | Measurement system for correcting overlay measurement error A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model, is disclosed. The measurement system and the measurement method ... | 03/15/2011 |
| 7899635 | Sampling inspection method A sampling inspection method is provided. The sampling inspection method is adapted for a multi-product production line including a plurality of tools. The sampling inspection method includes the steps of: providing a tool record, which records a sampling data of ea... | 03/01/2011 |
| 7869967 | Nonparametric method for determination of anomalous event states in complex systems exhibiting non-stationarity According to a feature of the present disclosure, a method is provided for the determination of anomalous events in complex systems, such as problems, inefficiencies, and failures, and a tool is provided for the detection of these events. Many complex systems are no... | 01/11/2011 |
| 7822567 | Method and apparatus for implementing scaled device tests A method includes defining a hierarchy of test routines in a test program for testing integrated circuit devices. A first device is tested at a first screening level in the hierarchy. The first device is tested at a second detailed level in the hierarchy responsive ... | 10/26/2010 |
| 7783441 | Eddy current detection and compensation A distortion compensation method includes determining an undisturbed phase for at least one of a first position indication signal and a second position indication signal. The method includes determining an undisturbed ratio that relates the amplitude of the first po... | 08/24/2010 |
| 7756658 | Systems and methods for detecting defects on a wafer and generating inspection results for the wafer Systems and methods for detecting defects on a wafer and generating inspection results for the wafer are provided. One method includes detecting defects on a wafer by comparing output generated by scanning of the wafer performed by an inspection system to one or mor... | 07/13/2010 |
| 7756656 | Measurement coordinate setting system and method A measurement coordinate setting system is disclosed, which includes a measuring apparatus which measures a dimension in each of a plurality of portions of a first product, a sampling approximation module which approximates a distribution of the dimensions of the pl... | 07/13/2010 |
| 7756657 | System for storing and presenting sensor and spectrum data for batch processes A system for monitoring and controlling a batch process. The system includes a control system that is operable to control the batch process and to receive measured process variables of the batch process. An analyzer analyzes a material sample from the batch process ... | 07/13/2010 |
| 7739065 | Inspection plan optimization based on layout attributes and process variance Methods for determining customized defect detection inspection plans are provided. One method includes fabricating a test chip and generating test chip data from the fabricated test chip. Then, defining systematic signatures from the generated test chip data and ide... | 06/15/2010 |
| 7702475 | Method for inspecting electrical characteristics of chips and a storage medium for storing a program of the method An inspecting method includes registering a pre-obtained relationship between contact time of probes with a target object having a predetermined temperature and tip positions of the probes which vary in accordance with the contact time. The method further includes i... | 04/20/2010 |
| 7640126 | Combine-information processing apparatus, method for processing combine-information, program, and recording medium An inspectional equation storage unit 103 for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuri... | 12/29/2009 |
| 7577537 | Providing a dynamic sampling plan for integrated metrology A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program whe... | 08/18/2009 |
| 7565254 | Method and apparatus for metrology sampling using combination sampling rules A method includes defining a plurality of simple sampling rules for selecting material for metrology. Each simple sampling rule has an associated penalty. At least one combination sampling rule relating a subset of at least two simple sampling rules is defined. The ... | 07/21/2009 |
| 7558687 | Method and apparatus for dynamic adjustment of a sensor sampling rate The present invention provides a method and apparatus for dynamic adjustment of a sensor sampling rate. The method includes providing a data collection plan indicative of at least one first sampling rate for at least one sensor associated with at least one processin... | 07/07/2009 |
| 7552020 | System and method for sorting data A method and apparatus that enables a user to sort data from one or more sample lots, which may be obtained via a network, such as the Internet, into a composite parameter structure. The composite parameter structure is a function of one or more parameters correspon... | 06/23/2009 |
| 7499818 | Flexible sampling plans and user interface for coordinate measuring machines A system for developing sampling plans includes a coordinate measuring machine (CMM) that inspects features of objects. The system includes an input module that is used to input inspection criteria to generate a sampling plan for said CMM and that is used to selecti... | 03/03/2009 |
| 7478000 | Method and system to develop a process improvement methodology A method to create an instance of a defect-based production and testing process analysis machine (DPTPAM) provides continual process improvement based on foundational questions and classified defect data. The method includes the following steps: obtaining domain spe... | 01/13/2009 |
| 7460968 | Method and apparatus for selecting wafers for sampling The present invention provides a method and apparatus for selecting wafers for sampling. The method includes determining a plurality of sampling rules associated with at least one of a plurality of wafers and selecting at least one wafer for sampling based on the pl... | 12/02/2008 |
| 7451051 | Method and system to develop a process improvement methodology A method to create an instance of a defect-based production and testing process analysis machine (DPTPAM) provides continual process improvement based on foundational questions and classified defect data. The method includes the following steps: obtaining domain spe... | 11/11/2008 |
| 7421358 | Method and system for measurement data evaluation in semiconductor processing by correlation-based data filtering By performing a contingency-based correlation test of measurement data, such as defect data, with respect to electrical test data after progressively filtering the measurement data, an enhanced analysis of process flow characteristics may be accomplished. Consequent... | 09/02/2008 |
| 7409306 | System and method for estimating reliability of components for testing and quality optimization A system and method for determining the early life reliability of an electronic component, including classifying the electronic component based on an initial determination of a number of fatal defects, and estimating a probability of latent defects present in the el... | 08/05/2008 |
| 7398172 | Method and system of providing a dynamic sampling plan for integrated metrology A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in respo... | 07/08/2008 |
| 7395131 | Method for processing data based on the data context A method for managing collected data in a semiconductor processing environment. The collected data can include: raw data collected during a process, trace file data received during a process, and process log file data received during a process. The raw data is synch... | 07/01/2008 |
| 7373213 | Management system and apparatus, method therefor, and device manufacturing method A management apparatus which manages a parameter for an industrial device acquires AGA measurement results obtained by operating the industrial device with an operation job parameter value and non-operation job parameter value. An inspection apparatus acquires an â€... | 05/13/2008 |
| 7366640 | Pharmaceutical waste identification system A pharmaceutical waste identification system presents pharmaceutical waste information and, in response to a client entering a pharmaceutical name, the system provides a pharmaceutical waste disposal recommendation. This recommendation can include a labeling recomme... | 04/29/2008 |
| 7363098 | Method to identify machines causing excursion in semiconductor manufacturing The present invention discloses a method that recognizes and uses the grouping patterns of process material by different machines at different process steps to identify potential problem machines causing the excursion in semiconductor manufacturing. The excursion co... | 04/22/2008 |
| 7359968 | Pseudo-random n-out-of-N packet sampling A method for sampling n-out-of-N packets in a network. Initially, the packet index corresponding to the N packets is pseudo-randomly shuffled. The shuffle function rearranges a set of numbers pseudo-randomly with a one-to-one mapping and no overlap. One way to perfo... | 04/15/2008 |
| 7359544 | Automatic supervised classifier setup tool for semiconductor defects Disclosed are methods and apparatus for efficiently setting up and maintaining a defect classification system. In general terms, the setup procedure optionally includes automatically grouping a set of provided defects and presenting a representative set from each de... | 04/15/2008 |
| 7355730 | Office machine that can be remote-maintenanced via a computer network and a management or/and support or/and report or/and information system comprising a plurality of office machines The invention relates to an office machine that comprises an electronic control unit and a data communication interface, wherein internal data of the office machine can be read via the data communication interface and internal data of the office machine can be input... | 04/08/2008 |
| 7356518 | Methods and systems for multi-participant interactive evolutionary computing Disclosed are methods, systems, and processor program products that include executing an optimization scheme to obtain a first solution set, presenting the first solution set to at least two users, receiving rankings of the first solution set from the at least two u... | 04/08/2008 |
| 7353078 | Semiconductor wafer processing apparatus and method for processing batch of wafers having variable number of wafer lots Disclosed is a semiconductor processing apparatus for processing batches of wafers with variable numbers of wafer lots. The apparatus includes an operator interface server adapted to receive batch information for a track-in operation, an equipment management server ... | 04/01/2008 |
| 7348187 | Method, device, computer-readable storage medium and computer program element for the monitoring of a manufacturing process of a plurality of physical objects In the case of the method, an analysis is performed by using values of at least one process parameter of the manufacturing process of the physical object and, as a result of the analysis, when they satisfy a prescribed selection criterion, physical objects are marke... | 03/25/2008 |
| 7349837 | Systems and methods for a programming environment for a simulation of a computer application The system includes a novel software application interactive representation modeling language, a software application (82) operative to use the modeling language to create, read and modify interactive representation models of the proposed applications, a memo... | 03/25/2008 |
